公开(公告)号：CA3003070A1

公开(公告)日：2017-05-11

申请号：CA3003070

申请日：2016-10-25

Applicant: ASML NETHERLANDS BV

Inventor： OOSTERHOFF SICCO ,  JANSSEN PAUL ,  VERBRUGGE BEATRIJS LOUISE MARIE-JOSEPH KATRIEN

IPC: G03F7/20 ,  B82Y40/00 ,  G03F1/62 ,  G21K1/06

Abstract: A method for manufacturing a membrane assembly (80) for EUV lithography, the method comprising: providing a stack (40) comprising a membrane layer (45) between a supporting substrate (41) and an attachment substrate (51), wherein the supporting substrate comprises an inner region and a first border region; processing the stack, including selectively removing the inner region of the supporting substrate, to form a membrane assembly comprising: a membrane (45) formed from at least the membrane layer; and a support (81) holding the membrane, the support formed at least partially from the first border region of the supporting substrate. The attachment substrate can be bonded to the rest of the stack.

公开(公告)号：CA2997135A1

公开(公告)日：2017-03-09

申请号：CA2997135

申请日：2016-08-26

Applicant: ASML NETHERLANDS BV

Inventor： HOUWELING ZOMER SILVESTER ,  CASIMIRI ERIC WILLEM FELIX ,  DRUZHININA TAMARA ,  JANSSEN PAUL ,  KUIJKEN MICHAEL ALFRED JOSEPHUS ,  LEENDERS MARTINUS HENDRIKUS ANTONIUS ,  OOSTERHOFF SICCO ,  PETER MARIA ,  VAN DER ZANDE WILLEM JOAN ,  VAN ZWOL PIETER-JAN ,  VERBRUGGE BEATRIJS LOUISE MARIE-JOSEPH KATRIEN ,  VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS ,  VLES DAVID FERDINAND ,  VOORTHUIJZEN WILLEM-PIETER

IPC: G03F1/62

Abstract: A method for manufacturing a membrane assembly for EUV lithography, the method comprising: providing a stack comprising a planar substrate and at least one membrane layer, wherein the planar substrate comprises an inner region and a border region around the inner region; positioning the stack on a support such that the inner region of the planar substrate is exposed; and selectively removing the inner region of the planar substrate using a non-liquid etchant, such that the membrane assembly comprises: a membrane formed from the at least one membrane layer; and a border holding the membrane, the border formed from the border region of the planar substrate.