公开(公告)号：WO2008051937A3

公开(公告)日：2008-05-02

申请号：PCT/US2007/082159

申请日：2007-10-22

Applicant: FEI COMPANY ,  BLACKWOOD, Jeff ,  STONE, Stacey

Inventor： BLACKWOOD, Jeff ,  STONE, Stacey

IPC: G01R31/305

Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (

公开(公告)号：WO2013082496A1

公开(公告)日：2013-06-06

申请号：PCT/US2012/067398

申请日：2012-11-30

Applicant: FEI COMPANY

Inventor： KEADY, Paul ,  PETERSON, Brennan ,  DAS, Guus ,  HENRY, Craig ,  DWORKIN, Larry ,  BLACKWOOD, Jeff ,  STONE, Stacey ,  SCHMIDT, Michael

IPC: G01N1/28 ,  H01J37/26

CPC classification number: H01J37/3056 ,  C23C14/5833 ,  G01N1/32 ,  H01J37/20 ,  H01J37/28 ,  H01J37/3005 ,  H01J2237/024 ,  H01J2237/20207 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A method for TEM sample preparation and analysis that can be used in a FIB-SEM system without re-welds, unloads, user handling of the lamella, or a motorized flip stage. The method allows a dual beam FIB-SEM system with a typical tilt stage to be used to extract a sample to from a substrate, mount the sample onto a TEM sample holder capable of tilting, thin the sample using FIB milling, and rotate the sample so that the sample face is perpendicular to an electron column for STEM imaging.

Abstract translation: 可用于FIB-SEM系统中的TEM样品制备和分析方法，无需重新焊接，卸载，用户处理薄片或电动翻转阶段。 该方法允许使用具有典型倾斜台的双光束FIB-SEM系统将样品从基底提取，将样品安装到能够倾斜的TEM样品保持器上，使用FIB研磨使样品变薄，并旋转样品 使得样品面垂直于用于STEM成像的电子柱。

公开(公告)号：WO2012103534A1

公开(公告)日：2012-08-02

申请号：PCT/US2012/023053

申请日：2012-01-28

Applicant: FEI COMPANY ,  BLACKWOOD, Jeff ,  BRAY, Matthew

Inventor： BLACKWOOD, Jeff ,  BRAY, Matthew

IPC: G01N1/28 ,  H01J37/20 ,  H01J37/26

CPC classification number: H01J37/3056 ,  G01N1/286 ,  G01N2001/2886 ,  H01J37/261 ,  H01J2237/31745

Abstract: An improved method of preparing ultra-thin TEM samples that combines backside thinning with an additional cleaning step to remove surface defects on the FIB-facing substrate surface. This additional step results in the creation of a cleaned, uniform hardmask that controls the ultimate results of the sample thinning, and allows for reliable and robust preparation of samples having thicknesses down to the 10nm range.

Abstract translation: 一种改进的制备超薄TEM样品的方法，其结合了背面变薄与额外的清洁步骤，以去除面向FIB的衬底表面上的表面缺陷。 该附加步骤导致创建清洁的均匀硬掩模，其控制样品稀化的最终结果，并且允许对厚度低至10nm范围的样品的可靠和鲁棒的制备。

公开(公告)号：WO2008049133A2

公开(公告)日：2008-04-24

申请号：PCT/US2007/082163

申请日：2007-10-22

Applicant: FEI COMPANY ,  BLACKWOOD, Jeff ,  STONE, Stacey ,  ARJAVAC, Jason

Inventor： BLACKWOOD, Jeff ,  STONE, Stacey ,  ARJAVAC, Jason

CPC classification number: G01N1/28 ,  G01N1/06 ,  G01N1/08 ,  G01N1/32 ,  G01N23/04 ,  H01J37/06 ,  H01J37/18 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/063 ,  H01J2237/182 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (

Abstract translation: 一种用于S / TEM样品制备和分析的改进方法和装置。 本发明的优选实施例提供用于TEM样品制备的改进方法，特别是对于小几何（<100nm厚）TEM薄片。 新颖的样品结构和铣削图案的新颖应用允许产生薄至50nm的S / TEM样品，而没有显着的弯曲或翘曲。 本发明的优选实施方案提供了部分或全部自动化TEM样品制备的方法，使TEM样品的创建和分析过程减少劳动密集度，并提高TEM分析的产量和再现性。

公开(公告)号：EP2104946A2

公开(公告)日：2009-09-30

申请号：EP07844522.8

申请日：2007-10-22

Applicant: FEI Company

Inventor： BLACKWOOD, Jeff ,  STONE, Stacey

IPC: H01J37/305

CPC classification number: G01N1/28 ,  G01N1/06 ,  G01N1/08 ,  G01N1/32 ,  G01N23/04 ,  H01J37/06 ,  H01J37/18 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/063 ,  H01J2237/182 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (

公开(公告)号：EP2786113B1

公开(公告)日：2017-03-01

申请号：EP12852813.0

申请日：2012-11-30

Applicant: FEI Company

Inventor： KEADY, Paul ,  PETERSON, Brennan ,  DAS, Guus ,  HENRY, Craig ,  DWORKIN, Larry ,  BLACKWOOD, Jeff ,  STONE, Stacey ,  SCHMIDT, Michael

IPC: G01N1/28 ,  G01N1/32 ,  H01J37/26

CPC classification number: H01J37/3056 ,  C23C14/5833 ,  G01N1/32 ,  H01J37/20 ,  H01J37/28 ,  H01J37/3005 ,  H01J2237/024 ,  H01J2237/20207 ,  H01J2237/31745 ,  H01J2237/31749

公开(公告)号：EP2104864B1

公开(公告)日：2015-03-04

申请号：EP07868539.3

申请日：2007-10-22

Applicant: FEI Company

Inventor： BLACKWOOD, Jeff ,  STONE, Stacey ,  ARJAVAC, Jason

IPC: G01R31/305 ,  G01N1/32 ,  G01N1/28 ,  H01J37/26 ,  H01J37/305 ,  G01N1/06 ,  G01N1/08 ,  G01N23/04

CPC classification number: G01N1/28 ,  G01N1/06 ,  G01N1/08 ,  G01N1/32 ,  G01N23/04 ,  H01J37/06 ,  H01J37/18 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/063 ,  H01J2237/182 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

公开(公告)号：EP2104946B1

公开(公告)日：2015-08-12

申请号：EP07844522.8

申请日：2007-10-22

Applicant: FEI Company

Inventor： BLACKWOOD, Jeff ,  STONE, Stacey

IPC: H01J37/305 ,  G01N1/32 ,  G06K9/46

CPC classification number: G01N1/28 ,  G01N1/06 ,  G01N1/08 ,  G01N1/32 ,  G01N23/04 ,  H01J37/06 ,  H01J37/18 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/063 ,  H01J2237/182 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

公开(公告)号：EP2104864A2

公开(公告)日：2009-09-30

申请号：EP07868539.3

申请日：2007-10-22

Applicant: FEI Company

Inventor： BLACKWOOD, Jeff ,  STONE, Stacey ,  ARJAVAC, Jason

IPC: G01R31/305

CPC classification number: G01N1/28 ,  G01N1/06 ,  G01N1/08 ,  G01N1/32 ,  G01N23/04 ,  H01J37/06 ,  H01J37/18 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/063 ,  H01J2237/182 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (

公开(公告)号：EP2668488B1

公开(公告)日：2016-09-21

申请号：EP12738768.6

申请日：2012-01-28

Applicant: FEI Company

Inventor： BLACKWOOD, Jeff ,  BRAY, Matthew ,  BUGGE, Cliff ,  SENOWITZ, Corey

IPC: G01N1/28 ,  H01J37/20 ,  H01J37/26 ,  H01J37/305

CPC classification number: H01J37/3056 ,  G01N1/286 ,  G01N2001/2886 ,  H01J37/261 ,  H01J2237/31745