公开(公告)号：EP2481828A1

公开(公告)日：2012-08-01

申请号：EP12152789.9

申请日：2012-01-27

Applicant: FEI Company

Inventor： Botman, Aurelien ,  Randolph, Steve ,  Toth, Milos

IPC: C23C16/10 ,  C23C16/14 ,  C23C16/48

CPC classification number: C23C16/0263 ,  C23C16/10 ,  C23C16/14 ,  C23C16/4488 ,  C23C16/48 ,  C23C16/486 ,  C23C16/52

Abstract: Material is deposited in a desired pattern by spontaneous deposition of precursor gas at regions of a surface that are prepared using a beam to provide conditions to support the initiation of the spontaneous reaction. One the reaction is initiated, it continues in the absence of the beam at the regions of the surface at which the reaction was initiated.

Abstract translation: 通过在使用光束制备的表面的区域处自发沉积前体气体以提供支持自发反应开始的条件，将材料沉积成所需的图案。 一个反应开始，它在反应开始的表面区域没有光束的情况下继续。

公开(公告)号：EP2570519A2

公开(公告)日：2013-03-20

申请号：EP12184772.7

申请日：2012-09-18

Applicant: FEI COMPANY

Inventor： Botman, Aurelien ,  Toth, Milos ,  Randolph, Steven ,  Narum, David

IPC: C25D5/02 ,  C25D5/04 ,  C25D17/00 ,  C25D5/00

CPC classification number: H01J37/20 ,  C25D5/003 ,  C25D5/02 ,  C25D5/026 ,  C25D5/04 ,  C25D17/005 ,  C25D17/10 ,  C25D17/12 ,  C25D21/04 ,  C25D21/12 ,  H01J37/18 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/182 ,  H01J2237/2003 ,  H01J2237/202 ,  H01J2237/2801

Abstract: A charge transfer mechanism is used to locally deposit or remove material for a small structure. A local electrochemical cell is created without having to immerse the entire work piece in a bath. The charge transfer mechanism can be used together with a charged particle beam or laser system to modify small structures, such as integrated circuits or micro-electromechanical system. The charge transfer process can be performed in air or, in some embodiments, in a vacuum chamber.

Abstract translation: 电荷转移机制用于局部沉积或去除小结构的材料。 产生局部电化学电池，而不必将整个工件浸入浴中。 电荷转移机构可以与带电粒子束或激光系统一起使用以修改诸如集成电路或微机电系统的小结构。 电荷转移过程可以在空气中或在一些实施方案中在真空室中进行。

公开(公告)号：EP2570519A3

公开(公告)日：2015-12-23

申请号：EP12184772.7

申请日：2012-09-18

Applicant: FEI COMPANY

Inventor： Botman, Aurelien ,  Toth, Milos ,  Randolph, Steven ,  Narum, David

IPC: C25D5/02 ,  C25D5/04 ,  C25D17/00 ,  C25D5/00 ,  C25D17/12 ,  C25D21/04 ,  C25D21/12

CPC classification number: H01J37/20 ,  C25D5/003 ,  C25D5/02 ,  C25D5/026 ,  C25D5/04 ,  C25D17/005 ,  C25D17/10 ,  C25D17/12 ,  C25D21/04 ,  C25D21/12 ,  H01J37/18 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/182 ,  H01J2237/2003 ,  H01J2237/202 ,  H01J2237/2801

Abstract: A charge transfer mechanism is used to locally deposit or remove material for a small structure. A local electrochemical cell is created without having to immerse the entire work piece in a bath. The charge transfer mechanism can be used together with a charged particle beam or laser system to modify small structures, such as integrated circuits or micro-electromechanical system. The charge transfer process can be performed in air or, in some embodiments, in a vacuum chamber.