公开(公告)号：EP2284524A2

公开(公告)日：2011-02-16

申请号：EP10171817.9

申请日：2010-08-04

Applicant: FEI Company

Inventor： Toth, Milos ,  Scheinfein, Michael ,  Narum, David ,  Silver, Eric

IPC: G01N23/20

CPC classification number: G01N23/20033 ,  H01J37/244 ,  H01J37/256 ,  H01J2237/2442

Abstract: An improved microcalorimeter-type energy dispersive x-ray spectrometer provides sufficient energy resolution and throughput for practical high spatial resolution x-ray mapping of a sample at low electron beam energies. When used with a dual beam system that provides the capability to etch a layer from the sample, the system can be used for three-dimensional x-ray mapping. A preferred system uses an x-ray optic having a wide-angle opening to increase the fraction of x-rays leaving the sample that impinge on the detector and multiple detectors to avoid pulse pile up.

Abstract translation: 改进的微量热仪型能量色散x射线谱仪为低电子束能量下样品的实际高空间分辨率x射线映射提供足够的能量分辨率和通量。 当与双光束系统一起使用时，该系统可提供从样品中蚀刻一层的能力，该系统可用于三维X射线测绘。 一个优选的系统使用具有广角开口的X射线光学器件来增加离开样品的X射线的射入检测器和多个检测器的部分，以避免脉冲堆积。

公开(公告)号：EP2284524A3

公开(公告)日：2011-06-01

申请号：EP10171817.9

申请日：2010-08-04

Applicant: FEI Company

Inventor： Toth, Milos ,  Scheinfein, Michael ,  Narum, David ,  Silver, Eric

IPC: G01N23/20 ,  G01N23/225 ,  H01J37/244 ,  H01J37/256

CPC classification number: G01N23/20033 ,  H01J37/244 ,  H01J37/256 ,  H01J2237/2442

Abstract: An improved microcalorimeter-type energy dispersive x-ray spectrometer provides sufficient energy resolution and throughput for practical high spatial resolution x-ray mapping of a sample at low electron beam energies. When used with a dual beam system that provides the capability to etch a layer from the sample, the system can be used for three-dimensional x-ray mapping. A preferred system uses an x-ray optic having a wide-angle opening to increase the fraction of x-rays leaving the sample that impinge on the detector and multiple detectors to avoid pulse pile up.

公开(公告)号：EP2570519A3

公开(公告)日：2015-12-23

申请号：EP12184772.7

申请日：2012-09-18

Applicant: FEI COMPANY

Inventor： Botman, Aurelien ,  Toth, Milos ,  Randolph, Steven ,  Narum, David

IPC: C25D5/02 ,  C25D5/04 ,  C25D17/00 ,  C25D5/00 ,  C25D17/12 ,  C25D21/04 ,  C25D21/12

CPC classification number: H01J37/20 ,  C25D5/003 ,  C25D5/02 ,  C25D5/026 ,  C25D5/04 ,  C25D17/005 ,  C25D17/10 ,  C25D17/12 ,  C25D21/04 ,  C25D21/12 ,  H01J37/18 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/182 ,  H01J2237/2003 ,  H01J2237/202 ,  H01J2237/2801

Abstract: A charge transfer mechanism is used to locally deposit or remove material for a small structure. A local electrochemical cell is created without having to immerse the entire work piece in a bath. The charge transfer mechanism can be used together with a charged particle beam or laser system to modify small structures, such as integrated circuits or micro-electromechanical system. The charge transfer process can be performed in air or, in some embodiments, in a vacuum chamber.

公开(公告)号：EP2284524B1

公开(公告)日：2014-01-15

申请号：EP10171817.9

申请日：2010-08-04

Applicant: FEI Company

Inventor： Toth, Milos ,  Scheinfein, Michael ,  Narum, David ,  Silver, Eric

IPC: G01N23/20 ,  G01N23/225 ,  H01J37/244 ,  H01J37/256

CPC classification number: G01N23/20033 ,  H01J37/244 ,  H01J37/256 ,  H01J2237/2442

公开(公告)号：EP2570519A2

公开(公告)日：2013-03-20

申请号：EP12184772.7

申请日：2012-09-18

Applicant: FEI COMPANY

Inventor： Botman, Aurelien ,  Toth, Milos ,  Randolph, Steven ,  Narum, David

IPC: C25D5/02 ,  C25D5/04 ,  C25D17/00 ,  C25D5/00

CPC classification number: H01J37/20 ,  C25D5/003 ,  C25D5/02 ,  C25D5/026 ,  C25D5/04 ,  C25D17/005 ,  C25D17/10 ,  C25D17/12 ,  C25D21/04 ,  C25D21/12 ,  H01J37/18 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/182 ,  H01J2237/2003 ,  H01J2237/202 ,  H01J2237/2801

Abstract: A charge transfer mechanism is used to locally deposit or remove material for a small structure. A local electrochemical cell is created without having to immerse the entire work piece in a bath. The charge transfer mechanism can be used together with a charged particle beam or laser system to modify small structures, such as integrated circuits or micro-electromechanical system. The charge transfer process can be performed in air or, in some embodiments, in a vacuum chamber.

Abstract translation: 电荷转移机制用于局部沉积或去除小结构的材料。 产生局部电化学电池，而不必将整个工件浸入浴中。 电荷转移机构可以与带电粒子束或激光系统一起使用以修改诸如集成电路或微机电系统的小结构。 电荷转移过程可以在空气中或在一些实施方案中在真空室中进行。