公开(公告)号：EP2706556A2

公开(公告)日：2014-03-12

申请号：EP13183272.7

申请日：2013-09-06

Applicant: FEI COMPANY

Inventor： Straw, Marcus ,  Emerson, Mark

IPC: H01J37/22 ,  H01J37/304 ,  H01J37/305

CPC classification number: H01J37/3045 ,  G21K5/00 ,  G21K5/08 ,  H01J37/226 ,  H01J37/228 ,  H01J37/3056 ,  H01J2237/1501 ,  H01J2237/28

Abstract: A method and apparatus for aligning a laser beam (216) coincident with a charged particle beam (350). The invention described provides a method for aligning the laser beam through the center of an objective lens (214) and ultimately targeting the eucentric point of a multi-beam system (300). The apparatus takes advantage of components of the laser beam alignment system being positioned within and outside of the vacuum chamber (360) of the charged particle system.

公开(公告)号：EP2706556B1

公开(公告)日：2017-05-31

申请号：EP13183272.7

申请日：2013-09-06

Applicant: FEI Company

Inventor： Straw, Marcus ,  Emerson, Mark

IPC: H01J37/22 ,  H01J37/304 ,  H01J37/305

CPC classification number: H01J37/3045 ,  G21K5/00 ,  G21K5/08 ,  H01J37/226 ,  H01J37/228 ,  H01J37/3056 ,  H01J2237/1501 ,  H01J2237/28

Abstract: A method and apparatus for aligning a laser beam (216) coincident with a charged particle beam (350). The invention described provides a method for aligning the laser beam through the center of an objective lens (214) and ultimately targeting the eucentric point of a multi-beam system (300). The apparatus takes advantage of components of the laser beam alignment system being positioned within and outside of the vacuum chamber (360) of the charged particle system.

Abstract translation: 一种用于对齐与带电粒子束（350）一致的激光束（216）的方法和装置。 所描述的本发明提供了一种通过物镜（214）的中心对齐激光束并且最终瞄准多光束系统（300）的中心点的方法。 该设备利用激光束对准系统的部件位于带电粒子系统的真空室（360）内部和外部。

公开(公告)号：EP2450934A3

公开(公告)日：2013-01-23

申请号：EP11187990.4

申请日：2011-11-07

Applicant: FEI Company

Inventor： Toth, Milos ,  Emerson, Mark ,  Straw, Marcus

IPC: H01J37/18 ,  H01J37/20 ,  H01J37/244 ,  H01J37/305

CPC classification number: H01J37/20 ,  H01J37/18 ,  H01J37/244 ,  H01J2237/024 ,  H01J2237/2001 ,  H01J2237/2003 ,  H01J2237/2445

Abstract: An environmental cell for a charged particle beam system allows relative motion between the cell mounted on an X-Y stage and the optical axis of the focusing column, thereby eliminating the need for a sub-stage within the cell. A flexible cell configuration, such as a retractable lid, permits a variety of processes, including beam-induced and thermally-induced processes. Photon yield spectroscopy performed in a charged particle beam system and using gas cascade amplification of the photoelectrons allows analysis of material in the cell and monitoring of processing in the cell. Luminescence analysis can be also performed using a retractable mirror.

Abstract translation: 用于带电粒子束系统的环境单元允许安装在X-Y平台上的单元和聚焦柱的光轴之间的相对运动，从而消除了对单元内的子级的需要。 灵活的电池配置，例如可伸缩的盖子，可实现多种工艺，包括光束诱导和热诱导工艺。 在带电粒子束系统中进行的光子产率光谱学以及使用光电子的气体级联放大允许分析电池中的材料并监测电池中的处理。 发光分析也可以使用可伸缩镜子进行。

公开(公告)号：EP2450934A2

公开(公告)日：2012-05-09

申请号：EP11187990.4

申请日：2011-11-07

Applicant: FEI Company

Inventor： Toth, Milos ,  Emerson, Mark ,  Straw, Marcus

IPC: H01J37/18 ,  H01J37/20 ,  H01J37/244 ,  H01J37/305

CPC classification number: H01J37/20 ,  H01J37/18 ,  H01J37/244 ,  H01J2237/024 ,  H01J2237/2001 ,  H01J2237/2003 ,  H01J2237/2445

Abstract: An environmental cell for a charged particle beam system allows relative motion between the cell mounted on an X-Y stage and the optical axis of the focusing column, thereby eliminating the need for a sub-stage within the cell. A flexible cell configuration, such as a retractable lid, permits a variety of processes, including beam-induced and thermally-induced processes. Photon yield spectroscopy performed in a charged particle beam system and using gas cascade amplification of the photoelectrons allows analysis of material in the cell and monitoring of processing in the cell. Luminescence analysis can be also performed using a retractable mirror.

Abstract translation: 用于带电粒子束系统的环境单元允许安装在X-Y平台上的单元和聚焦柱的光轴之间的相对运动，从而消除对单元内的子级的需要。 柔性电池配置，例如可伸缩盖，允许多种工艺，包括光束诱导和热诱导工艺。 在带电粒子束系统中进行的光子产率光谱和使用光电子的气体级联放大，可以分析细胞中的物质并监测细胞中的处理。 也可以使用可伸缩镜进行发光分析。

公开(公告)号：EP2450934B1

公开(公告)日：2016-04-20

申请号：EP11187990.4

申请日：2011-11-07

Applicant: FEI Company

Inventor： Toth, Milos ,  Emerson, Mark ,  Straw, Marcus

IPC: H01J37/18 ,  H01J37/20 ,  H01J37/244 ,  H01J37/305

CPC classification number: H01J37/20 ,  H01J37/18 ,  H01J37/244 ,  H01J2237/024 ,  H01J2237/2001 ,  H01J2237/2003 ,  H01J2237/2445

Abstract: An environmental cell for a charged particle beam system allows relative motion between the cell mounted on an X-Y stage and the optical axis of the focusing column, thereby eliminating the need for a sub-stage within the cell. A flexible cell configuration, such as a retractable lid, permits a variety of processes, including beam-induced and thermally-induced processes. Photon yield spectroscopy performed in a charged particle beam system and using gas cascade amplification of the photoelectrons allows analysis of material in the cell and monitoring of processing in the cell. Luminescence analysis can be also performed using a retractable mirror.

公开(公告)号：EP2706556A3

公开(公告)日：2016-03-09

申请号：EP13183272.7

申请日：2013-09-06

Applicant: FEI COMPANY

Inventor： Straw, Marcus ,  Emerson, Mark

IPC: H01J37/22 ,  H01J37/304 ,  H01J37/305

CPC classification number: H01J37/3045 ,  G21K5/00 ,  G21K5/08 ,  H01J37/226 ,  H01J37/228 ,  H01J37/3056 ,  H01J2237/1501 ,  H01J2237/28

Abstract: A method and apparatus for aligning a laser beam (216) coincident with a charged particle beam (350). The invention described provides a method for aligning the laser beam through the center of an objective lens (214) and ultimately targeting the eucentric point of a multi-beam system (300). The apparatus takes advantage of components of the laser beam alignment system being positioned within and outside of the vacuum chamber (360) of the charged particle system.

Abstract translation: 一种用于对准的激光束（216）用带电粒子束（350）重合的方法和装置。 描述的本发明提供了用于通过物镜（214）和最终目标的多波束系统（300）的共心点的中心对准的激光束的方法。 该装置利用了激光束对准系统的部件内，并且带电粒子系统的真空腔室（360）之外的被定位。