公开(公告)号：EP2706556B1

公开(公告)日：2017-05-31

申请号：EP13183272.7

申请日：2013-09-06

Applicant: FEI Company

Inventor： Straw, Marcus ,  Emerson, Mark

IPC: H01J37/22 ,  H01J37/304 ,  H01J37/305

CPC classification number: H01J37/3045 ,  G21K5/00 ,  G21K5/08 ,  H01J37/226 ,  H01J37/228 ,  H01J37/3056 ,  H01J2237/1501 ,  H01J2237/28

Abstract: A method and apparatus for aligning a laser beam (216) coincident with a charged particle beam (350). The invention described provides a method for aligning the laser beam through the center of an objective lens (214) and ultimately targeting the eucentric point of a multi-beam system (300). The apparatus takes advantage of components of the laser beam alignment system being positioned within and outside of the vacuum chamber (360) of the charged particle system.

Abstract translation: 一种用于对齐与带电粒子束（350）一致的激光束（216）的方法和装置。 所描述的本发明提供了一种通过物镜（214）的中心对齐激光束并且最终瞄准多光束系统（300）的中心点的方法。 该设备利用激光束对准系统的部件位于带电粒子系统的真空室（360）内部和外部。

公开(公告)号：EP2644308B1

公开(公告)日：2016-06-29

申请号：EP13161507.2

申请日：2013-03-28

Applicant: FEI COMPANY

Inventor： Straw, Marcus

IPC: B23K26/00 ,  B23K26/12 ,  B23K26/36 ,  B23K26/03

CPC classification number: B23K26/1224 ,  B23K26/0078 ,  B23K26/03 ,  B23K26/361

公开(公告)号：EP2191927B1

公开(公告)日：2014-01-08

申请号：EP09176974.5

申请日：2009-11-25

Applicant: FEI COMPANY

Inventor： Straw, Marcus ,  Toth, Milos ,  Utlaut, Mark ,  Randolph, Steven ,  Lysaght, Michael

IPC: B23K26/18 ,  B23K26/36 ,  B23K26/06 ,  G03F7/004 ,  G03F7/20

CPC classification number: G21G5/00 ,  B23K26/0624 ,  B23K26/0661 ,  B23K26/18 ,  B23K2201/40 ,  B23K2201/42 ,  G03F7/70383 ,  H01J37/228 ,  H01J2237/31749

公开(公告)号：EP2975630A1

公开(公告)日：2016-01-20

申请号：EP15174497.6

申请日：2015-06-30

Applicant: FEI Company

Inventor： Parker, N. William ,  Straw, Marcus ,  Filevich, Jorge

IPC: H01J37/12 ,  H01J37/244 ,  H01J37/26

CPC classification number: H01J37/12 ,  H01J37/244 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/12 ,  H01J2237/24415 ,  H01J2237/2445 ,  H01J2237/2602

Abstract: A transmissive electrostatic lens in a charged particle beam column for detecting X-rays and light is provided. The final lens may include focusing elements (102) that are transmissive for X-rays for EDS imaging and analysis or elements that are transmissive for light for cathodoluminescent (CL) imaging and analysis. The final lens may be constructed and arranged to include elements that are transmissive for both X-rays and light for combined EDS and CL imaging and analysis. A detector (116, 118) is arranged to detect such radiation emanating from the sample and transmitted through the lens.

Abstract translation: 提供了用于检测X射线和光的带电粒子束列中的透射型静电透镜。 最终透镜可以包括对于用于EDS成像和分析的X射线透射的聚焦元件（102）或对于用于阴极发光（CL）成像和分析的光透射的元件。 最终的透镜可以被构造和布置成包括用于X射线和光的透射的元件用于组合的EDS和CL成像和分析。 检测器（116,118）被布置成检测从样品发射并透过透镜的这种辐射。

公开(公告)号：EP2450934A3

公开(公告)日：2013-01-23

申请号：EP11187990.4

申请日：2011-11-07

Applicant: FEI Company

Inventor： Toth, Milos ,  Emerson, Mark ,  Straw, Marcus

IPC: H01J37/18 ,  H01J37/20 ,  H01J37/244 ,  H01J37/305

CPC classification number: H01J37/20 ,  H01J37/18 ,  H01J37/244 ,  H01J2237/024 ,  H01J2237/2001 ,  H01J2237/2003 ,  H01J2237/2445

Abstract: An environmental cell for a charged particle beam system allows relative motion between the cell mounted on an X-Y stage and the optical axis of the focusing column, thereby eliminating the need for a sub-stage within the cell. A flexible cell configuration, such as a retractable lid, permits a variety of processes, including beam-induced and thermally-induced processes. Photon yield spectroscopy performed in a charged particle beam system and using gas cascade amplification of the photoelectrons allows analysis of material in the cell and monitoring of processing in the cell. Luminescence analysis can be also performed using a retractable mirror.

Abstract translation: 用于带电粒子束系统的环境单元允许安装在X-Y平台上的单元和聚焦柱的光轴之间的相对运动，从而消除了对单元内的子级的需要。 灵活的电池配置，例如可伸缩的盖子，可实现多种工艺，包括光束诱导和热诱导工艺。 在带电粒子束系统中进行的光子产率光谱学以及使用光电子的气体级联放大允许分析电池中的材料并监测电池中的处理。 发光分析也可以使用可伸缩镜子进行。

公开(公告)号：EP2450934A2

公开(公告)日：2012-05-09

申请号：EP11187990.4

申请日：2011-11-07

Applicant: FEI Company

Inventor： Toth, Milos ,  Emerson, Mark ,  Straw, Marcus

IPC: H01J37/18 ,  H01J37/20 ,  H01J37/244 ,  H01J37/305

CPC classification number: H01J37/20 ,  H01J37/18 ,  H01J37/244 ,  H01J2237/024 ,  H01J2237/2001 ,  H01J2237/2003 ,  H01J2237/2445

Abstract: An environmental cell for a charged particle beam system allows relative motion between the cell mounted on an X-Y stage and the optical axis of the focusing column, thereby eliminating the need for a sub-stage within the cell. A flexible cell configuration, such as a retractable lid, permits a variety of processes, including beam-induced and thermally-induced processes. Photon yield spectroscopy performed in a charged particle beam system and using gas cascade amplification of the photoelectrons allows analysis of material in the cell and monitoring of processing in the cell. Luminescence analysis can be also performed using a retractable mirror.

Abstract translation: 用于带电粒子束系统的环境单元允许安装在X-Y平台上的单元和聚焦柱的光轴之间的相对运动，从而消除对单元内的子级的需要。 柔性电池配置，例如可伸缩盖，允许多种工艺，包括光束诱导和热诱导工艺。 在带电粒子束系统中进行的光子产率光谱和使用光电子的气体级联放大，可以分析细胞中的物质并监测细胞中的处理。 也可以使用可伸缩镜进行发光分析。

公开(公告)号：EP2283960A1

公开(公告)日：2011-02-16

申请号：EP10171819.5

申请日：2010-08-04

Applicant: FEI Company

Inventor： Straw, Marcus ,  Toth, Milos

IPC: B23K26/12 ,  B23K26/16 ,  B23K26/36 ,  B23K26/06

CPC classification number: B29C35/08 ,  B23K26/0624 ,  B23K26/12 ,  B23K26/126 ,  B23K26/127 ,  B23K26/16 ,  B23K26/36 ,  B41M5/24

Abstract: An improved method for laser processing that prevents material redeposition during laser ablation but allows material to be removed at a high rate. In a preferred embodiment, laser ablation is performed in a chamber (140, 501) filled with high pressure precursor (etchant) gas so that sample particles ejected during laser ablation will react with the precursor gas in the gas atmosphere of the sample chamber. When the ejected particles (108) collide with precursor gas particles (202), the precursor is dissociated, forming a reactive component that binds the ablated material. In turn, the reaction between the reactive dissociation by-product and the ablated material forms a new, volatile compound (204) that can be pumped away in a gaseous state rather than redepositing onto the sample (104).

公开(公告)号：EP3113207A1

公开(公告)日：2017-01-04

申请号：EP15174195.6

申请日：2015-06-29

Applicant: FEI Company

Inventor： Parker, N. William ,  Straw, Marcus ,  Filevich, Jorge ,  Botman, Aurélien ,  Utlaut, Mark ,  Randolph, Steven ,  Chandler, Clive

IPC: H01J37/22

CPC classification number: H01J37/228 ,  H01J2237/31744

Abstract: A method and apparatus for directing light or gas or both to a specimen positioned within about 2 mm from the lower end of a charged particle beam column. The charged particle beam column assembly includes a platform defining a specimen holding position and has a set of electrostatic lenses each including a set of electrodes. The assembly includes a final electrostatic lens that includes a final electrode that is closest to the specimen holding position. This final electrode defines at least one internal passageway having a terminus that is proximal to and directed toward the specimen holding position.

Abstract translation: 一种用于将光或气体或两者引导到位于距带电粒子束柱的下端约2mm内的样本的方法和装置。 带电粒子束列组件包括限定样品保持位置的平台，并具有一组静电透镜，每组包括一组电极。 组件包括最终静电透镜，其包括最靠近样品保持位置的最终电极。 该最终电极限定至少一个内部通道，其具有靠近并指向试样保持位置的终端。

公开(公告)号：EP2700470B1

公开(公告)日：2016-12-28

申请号：EP13193643.7

申请日：2010-08-04

Applicant: FEI COMPANY

Inventor： Toth, Milos ,  Straw, Marcus

IPC: B23K26/12 ,  B23K26/16 ,  B23K26/36 ,  B23K26/06

CPC classification number: B29C35/08 ,  B23K26/0624 ,  B23K26/12 ,  B23K26/126 ,  B23K26/127 ,  B23K26/16 ,  B23K26/36 ,  B41M5/24

公开(公告)号：EP3037862A1

公开(公告)日：2016-06-29

申请号：EP15199728.5

申请日：2015-12-14

Applicant: FEI Company

Inventor： Randolph, Steven ,  Miyasaki, James ,  Straw, Marcus

IPC: G02B21/36 ,  G01N21/64 ,  H01J37/26

CPC classification number: H01J37/222 ,  G01N21/6428 ,  G01N21/6456 ,  G01N21/6458 ,  G01N21/6486 ,  G01N2021/6439 ,  G02B21/0032 ,  G02B21/0076 ,  G02B21/008 ,  G02B21/16 ,  G02B21/365 ,  H01J37/26 ,  H01J2237/221 ,  H01J2237/24578 ,  H01J2237/2611

Abstract: A method is provided for preparing a sample for correlative optical and electron imaging and correcting aberrations in the imaging process due to sample deformation. Dye-coated fiducial markers are distributed throughout the sample volume. The fiducial markers are preferably in the form of polystyrene nanospheres that are functionalized on their surface and subsequently treated with a fluorescent dye. The dye does not penetrate the sphere but only binds to the surface. By limiting the dye to the surface of the nanospheres, the shape of the spheres can be determined in iPALM and in charged particle images aiding in tracking of physical changes that may occur to the sample volume.

Abstract translation: 提供了一种用于制备由于样品变形而在成像过程中进行相关光学和电子成像和校正像差的样品的方法。 染料涂层的基准标记物分布在整个样品体积中。 基准标记物优选为聚苯乙烯纳米球的形式，其在其表面上官能化并随后用荧光染料处理。 染料不会穿透球体，而只能粘结在表面上。 通过将染料限制在纳米球的表面，可以在iPALM和带电粒子图像中确定球体的形状，帮助跟踪样品体积可能发生的物理变化。