公开(公告)号：EP2270837B1

公开(公告)日：2015-08-12

申请号：EP10167436.4

申请日：2010-06-28

Applicant: FEI COMPANY

Inventor： Schwind, Gregory ,  Orloff, Jonathan

IPC: H01J37/05 ,  H01J37/147 ,  H01J37/305

CPC classification number: H01J37/3056 ,  H01J37/05 ,  H01J37/147 ,  H01J2237/053 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/3174 ,  H01J2237/31745 ,  H01J2237/31749

公开(公告)号：EP2270837A2

公开(公告)日：2011-01-05

申请号：EP10167436.4

申请日：2010-06-28

Applicant: FEI COMPANY

Inventor： Schwind, Gregory ,  Orloff, Jonathan

IPC: H01J37/305 ,  H01J37/05 ,  H01J37/147

CPC classification number: H01J37/3056 ,  H01J37/05 ,  H01J37/147 ,  H01J2237/053 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/3174 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: Applicants have found that the asymmetrical energy distribution of ions from an ion source allow chromatic aberration to be reduced by filtering ions in the low energy beam tail without significantly reducing processing time. A preferred embodiment includes within an ion beam column a filter that removes the low energy ions from the beam.

Abstract translation: 申请人已经发现，离子源的离子的​​不对称能量分布允许通过在低能量束尾部中过滤离子而不显着减少处理时间来降低色差。 一个优选实施例在离子束柱内包括从光束中去除低能量离子的滤波器。

公开(公告)号：EP2672501A1

公开(公告)日：2013-12-11

申请号：EP12171907.4

申请日：2012-06-14

Applicant: FEI COMPANY

Inventor： Maazouz, Mostafa ,  Orloff, Jonathan

IPC: H01J37/12 ,  H01J37/28 ,  H01J37/30

CPC classification number: H01J37/153 ,  H01J37/04 ,  H01J37/12 ,  H01J37/21 ,  H01J2237/047 ,  H01J2237/04924 ,  H01J2237/12 ,  H01J2237/121 ,  H01J2237/31749

Abstract: A charged particle column having improved performance at multiple beam energies. The column employs a four-element objective lens to enable improved beam focusing performance at both high and low beam energies at a target, with differing focus voltage configurations for different beam energies. By changing the voltages applied to the four electrodes of the objective lens, different focusing conditions may be rapidly configured, enabling rapid toggling between optimized imaging and optimized processing of a target.

Abstract translation: 一种带电粒子柱具有改善的在多个束能量的性能。 该柱采用四元件物镜使光束改进在高和低束能量聚焦性能在一个目标，具有不同聚焦电压配置为不同的射束能量。 通过改变电压施加到所述物镜的四个电极，聚焦在不同的条件可以迅速配置，可实现目标的优化的成像和优化处理之间的快速切换。

公开(公告)号：EP2270837A3

公开(公告)日：2011-04-06

申请号：EP10167436.4

申请日：2010-06-28

Applicant: FEI COMPANY

Inventor： Schwind, Gregory ,  Orloff, Jonathan

IPC: H01J37/05 ,  H01J37/147 ,  H01J37/305

CPC classification number: H01J37/3056 ,  H01J37/05 ,  H01J37/147 ,  H01J2237/053 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/3174 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: Applicants have found that the asymmetrical energy distribution of ions from an ion source allow chromatic aberration to be reduced by filtering ions in the low energy beam tail without significantly reducing processing time. A preferred embodiment includes within an ion beam column a filter that removes the low energy ions from the beam.