公开(公告)号：DE69713996D1

公开(公告)日：2002-08-22

申请号：DE69713996

申请日：1997-12-10

Applicant: HAMAMATSU PHOTONICS KK

Inventor： SUZUKI HIDEKI ,  KONDO MINORU ,  ITO MASUO ,  ISHIHARA YOSHITOSHI

IPC: G02B6/06 ,  G02B6/08 ,  H01J29/18 ,  H01J29/38 ,  H01J29/89 ,  H01J31/50

Abstract: In an image intensifier comprising an entrance faceplate, made of a material transparent to light, having a photoelectric surface, formed on a surface opposite to a light entrance surface, for photoelectrically converting incident light into an electron; and an optical fiber block (4), constituted by a plurality of optical fibers bundled together, having a phosphor face (46) at an end face (44) of each optical fiber on the light entrance side, for emitting light in response to the electron incident thereon; the photoelectric surface of the entrance faceplate and the phosphor face of the optical fiber block opposing each other, while a vacuum atmosphere being formed therebetween; the optical fiber block is provided with a pit in which an end face (44) of a core portion (42) of each optical fiber is recessed from an end face of a cladding portion (43) thereof, the bottom of the pit is filled with a phosphor, the surface of this phosphor is provided with a metal back layer, the cladding portion projects from the surface of the phosphor toward the entrance surface by a predetermined height, and the projecting surface of the cladding portion is provided with a metal film (47).

公开(公告)号：DE69713996T2

公开(公告)日：2003-01-23

申请号：DE69713996

申请日：1997-12-10

Applicant: HAMAMATSU PHOTONICS KK

Inventor： SUZUKI HIDEKI ,  KONDO MINORU ,  ITO MASUO ,  ISHIHARA YOSHITOSHI

IPC: G02B6/06 ,  G02B6/08 ,  H01J29/18 ,  H01J29/38 ,  H01J29/89 ,  H01J31/50

Abstract: In an image intensifier comprising an entrance faceplate, made of a material transparent to light, having a photoelectric surface, formed on a surface opposite to a light entrance surface, for photoelectrically converting incident light into an electron; and an optical fiber block (4), constituted by a plurality of optical fibers bundled together, having a phosphor face (46) at an end face (44) of each optical fiber on the light entrance side, for emitting light in response to the electron incident thereon; the photoelectric surface of the entrance faceplate and the phosphor face of the optical fiber block opposing each other, while a vacuum atmosphere being formed therebetween; the optical fiber block is provided with a pit in which an end face (44) of a core portion (42) of each optical fiber is recessed from an end face of a cladding portion (43) thereof, the bottom of the pit is filled with a phosphor, the surface of this phosphor is provided with a metal back layer, the cladding portion projects from the surface of the phosphor toward the entrance surface by a predetermined height, and the projecting surface of the cladding portion is provided with a metal film (47).

公开(公告)号：DE112020006659T5

公开(公告)日：2022-11-24

申请号：DE112020006659

申请日：2020-04-07

Applicant: HAMAMATSU PHOTONICS KK

Inventor： NAITO YASUHIDE ,  HIRAO TSUYOSHI ,  KONDO MINORU

IPC: H01J49/02 ,  G01N27/64 ,  H01J49/16 ,  H01J49/40

Abstract: Eine Abbildungseinheit umfasst eine MCP, einen fluoreszierenden Körper und einen Bildwandler. Die MCP ist in einer Flugbahn einer ionisierten Probe vorgesehen, die eine Komponente einer ionisierten Probe ist, und emittiert Elektronen in Übereinstimmung mit der ionisierten Probe. Der fluoreszierende Körper ist stromabwärts von der MCP angeordnet und emittiert Fluoreszenzlicht in Übereinstimmung mit den von der MCP emittierten Elektronen. Der Bildwandler ist stromabwärts des fluoreszierenden Körpers angeordnet und verfügt über einen Verschlussmechanismus, der so konfiguriert ist, dass er in der Lage ist, einen offenen Zustand, in dem das fluoreszierende Licht abgebildet wird, indem er das fluoreszierende Licht aus dem fluoreszierenden Körper durchlässt, und einen geschlossenen Zustand, in dem das fluoreszierende Licht nicht abgebildet wird, indem er das fluoreszierende Licht aus dem fluoreszierenden Körper blockiert, umzuschalten. Die Nachleuchtzeit des Leuchtstoffkörpers beträgt 12 ns oder weniger.

公开(公告)号：DE112020006653T5

公开(公告)日：2022-11-24

申请号：DE112020006653

申请日：2020-04-07

Applicant: HAMAMATSU PHOTONICS KK

Inventor： NAITO YASUHIDE ,  HIRAO TSUYOSHI ,  KONDO MINORU

IPC: H01J49/16 ,  G01N27/64 ,  H01J49/14 ,  H01J49/40

Abstract: Ein Massenspektrometer umfasst einen Probentisch, eine Bestrahlungsvorrichtung, eine MCP, einen fluoreszierenden Körper, einen Bildwandler und eine Steuereinheit. Die Bestrahlungsvorrichtung bestrahlt eine Probe mit einem Energiestrahl, um eine Vielzahl von Komponenten der Probe zu ionisieren, während die Positionsinformation der Vielzahl von Komponenten erhalten bleibt. Die MCP emittiert Elektronen in Übereinstimmung mit einer ionisierten Probe. Der fluoreszierende Körper emittiert Fluoreszenzlicht in Übereinstimmung mit den Elektronen. Der Bildwandler verfügt über einen Verschlussmechanismus, der so konfiguriert ist, dass er zwischen einem offenen und einem geschlossenen Zustand umschalten kann. Die Steuereinheit steuert den Öffnungs- und Schließvorgang des Verschlussmechanismus. Die Steuereinheit ermöglicht es dem Bildwandler, das Fluoreszenzlicht entsprechend jeder der mehreren Komponenten abzubilden, indem das Öffnen und Schließen des Verschlussmechanismus zu einem Zeitpunkt für jede der Komponenten durchgeführt wird.

公开(公告)号：EP1365260A4

公开(公告)日：2013-01-23

申请号：EP02710405

申请日：2002-01-30

Applicant: HAMAMATSU PHOTONICS KK

Inventor： KONDO MINORU ,  NAGAI TOSHIMITSU ,  KIBUNE ATSUSHI

IPC: G01T1/20 ,  H01J29/38 ,  H01J37/244 ,  H01J43/04 ,  H01J43/24 ,  H01J49/00 ,  H01J49/02

CPC classification number: H01J49/025 ,  H01J29/385 ,  H01J37/244 ,  H01J43/04 ,  H01J2237/28

公开(公告)号：EP1736524A4

公开(公告)日：2010-09-29

申请号：EP05728391

申请日：2005-04-07

Applicant: HAMAMATSU PHOTONICS KK

Inventor： UCHIYAMA SHOICHI ,  TAKAGI YASUFUMI ,  NIIGAKI MINORU ,  KONDO MINORU ,  MIZUNO ITARU

IPC: C09K11/62 ,  G01N23/225 ,  G01N27/62 ,  G01T1/20 ,  G01T1/29 ,  H01J37/244 ,  H01J49/06 ,  H01J49/10

CPC classification number: H01J37/244 ,  H01J49/025 ,  H01J2237/2443 ,  H01L33/502

公开(公告)号：JPH10172458A

公开(公告)日：1998-06-26

申请号：JP34670896

申请日：1996-12-10

Applicant: HAMAMATSU PHOTONICS KK

Inventor： SUZUKI HIDEKI ,  KONDO MINORU ,  ITO MASUYASU ,  ISHIHARA YOSHITOSHI

IPC: G02B6/06 ,  G02B6/08 ,  H01J29/18 ,  H01J29/38 ,  H01J29/89 ,  H01J31/50

Abstract: PROBLEM TO BE SOLVED: To provide an image intensifier in which output resolution can be improved even to strong spot light. SOLUTION: In an optical fiber plate 4 to be used in an image intensifier, an incidental surface of a core part 42 is engraved to a clad part 43 to form a recess 44, and phosphor 45 is filled in a bottom of the recess 44. A metal back layer 46 is formed on the surface of the phosphor 45. The clad part 43 is protruded in a incidental surface direction from the surface of the phosphor 45. A metal film 47 is formed on the surface of a protruded part of the clad part 43. Electrons reflected by the metal back layer 46 and the metal film 47 are thus shielded by a protruded wall surface of the clad part 43, thereby they get into the metal back layer 46 again to reduce collision quantity to the phosphor 45 to restrict halo phenomenon.

公开(公告)号：JP2005298603A

公开(公告)日：2005-10-27

申请号：JP2004114596

申请日：2004-04-08

Applicant: Hamamatsu Photonics Kk ,  浜松ホトニクス株式会社

Inventor： UCHIYAMA SHOICHI ,  TAKAGI YASUFUMI ,  ARAGAKI MINORU ,  KONDO MINORU ,  MIZUNO ITARU

IPC: G01N23/225 ,  C09K11/62 ,  G01N27/62 ,  G01T1/20 ,  G01T1/29 ,  H01J37/244 ,  H01J49/06 ,  H01J49/10

CPC classification number: H01J37/244 ,  H01J49/025 ,  H01J2237/2443 ,  H01L33/502

Abstract: PROBLEM TO BE SOLVED: To provide a luminous body with high speed of response and luminescence intensity, and to provide an electron beam detector, scanning electron microscope and mass spectroscope using the same.
SOLUTION: This invention relates to the luminous body 10 comprising a nitride semiconductor layer 14 formed on a face 12a of a substrate 12 which emits fluorescence by incident electron and at least a part of the fluorescence penetrates through the substrate 12 and emits the fluorescence from the other face of the substrate. The speed of response of the fluorescence is in the order of ≤μ sec. The luminescence intensity of the fluorescence is comparable to that of a conventional P47 luminous body. In other words, the luminous body 10 has sufficient speed of response and luminescence intensity for application to the scanning electron microscope and mass spectroscope. The luminous body 10 is not only excellent in high speed of response and luminescence intensity but also in residual ratio of fluorescence because a cap layer 16 contributes to the improvement of residual ratio of the fluorescence in the nitride semiconductor layer 14.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供具有高响应速度和发光强度的发光体，并提供使用该发光体的电子束检测器，扫描电子显微镜和质谱仪。 解决方案：本发明涉及发光体10，其包括形成在基板12的表面12a上的氮化物半导体层14，该基板12通过入射电子发射荧光，并且至少一部分荧光穿透基板12并发射 来自基板的另一面的荧光。 荧光的响应速度为≤μ秒。 荧光的发光强度与常规P47发光体的发光强度相当。 换句话说，发光体10具有足够的响应速度和发光强度，适用于扫描电子显微镜和质谱仪。 发光体10不仅具有优异的响应速度和发光强度，而且还具有荧光的残留率优异，因为盖层16有助于提高氮化物半导体层14中的荧光残留率。版权所有： （C）2006，JPO＆NCIPI

公开(公告)号：JP2004131567A

公开(公告)日：2004-04-30

申请号：JP2002296560

申请日：2002-10-09

Applicant: Hamamatsu Photonics Kk ,  浜松ホトニクス株式会社

Inventor： TAKAGI YASUFUMI ,  ARAGAKI MINORU ,  UCHIYAMA SHOICHI ,  KONDO MINORU ,  MIZUNO ITARU

IPC: G01T1/20 ,  B82Y15/00 ,  B82Y20/00 ,  B82Y35/00 ,  C09K11/62 ,  G01T1/24 ,  G01T1/29 ,  H01J37/00 ,  H01J37/244 ,  H01J37/28 ,  H01J43/28 ,  H01J49/02 ,  H01J49/06

CPC classification number: H01J49/025 ,  H01J37/244 ,  H01J2237/2445

Abstract: PROBLEM TO BE SOLVED: To provide an illuminator having a high speed of response and a high emission intensity, and to provide an electron beam detector, a scanning electron microscope and a mass spectrometer which use the same.
SOLUTION: When a nitride semi-conductor layer 14 formed on one side 12a of a substrate 12 is subjected to the incidence of electrons to emit fluorescent light in the illuminant 10, the fluorescent light outgoes from the other side of the substrate 12. The emission of the fluorescent light is caused by the incidence of the electrons into the quantum well structure of the nitride semi-conductor layer 14 and by the rebinding of the produced electrons to the positive hole pairs, and the speed of response is an order of μsec or higher. The emission intensity of the fluorescent light is obtained in the same extent as that of conventional P47 fluorescent substance. Namely, the illuminant 10 has a speed of response and an emission intensity enough for application to scanning electron microscopes and mass spectrometers.
COPYRIGHT: (C)2004,JPO

公开(公告)号：JP2003083809A

公开(公告)日：2003-03-19

申请号：JP2001274002

申请日：2001-09-10

Applicant: Hamamatsu Photonics Kk ,  浜松ホトニクス株式会社

Inventor： MIZUNO ITARU ,  KONDO MINORU ,  ONODA ATSUSHI ,  MIZUTANI KYOZO

IPC: G01J1/02 ,  G01J1/58 ,  G02B6/06 ,  G02F2/02 ,  H01L27/146

CPC classification number: G01J1/58 ,  G02F2/02 ,  H01L27/14669

Abstract: PROBLEM TO BE SOLVED: To provide an inexpensive infrared visible conversion member and an infrared detection device having sufficiently high visible light generation intensity and resolution when converting an infrared ray into visible light. SOLUTION: This infrared visible conversion member 2a arranged on the light receiving surface of a photodetector 1 having sensitivity to visible light is characterized by adjusting a phosphor layer 3 including an up-conversion phosphor for converting the infrared ray into visible light so as to have the film thickness of 5-120 μm. Hereby, the visible light generation intensity and the resolution can be compatible with each other at a high level, and an image by visible light converted from the infrared ray is detected by the photodetector 1 with high sensitivity and high resolution, to thereby enable to realize an excellent infrared detection element.

Abstract translation: 要解决的问题：提供一种廉价的红外可见转换构件和红外线检测装置，其在将红外线转换成可见光时具有足够高的可见光发生强度和分辨率。 解决方案：设置在对可见光敏感的光电探测器1的光接收表面上的该红外可见转换构件2a的特征在于调节包括​​用于将红外线转换成可见光的上转换荧光体的荧光体层3，以便具有 膜厚5-120微米。 由此，可见光发生强度和分辨率可以高水平地彼此兼容，并且由红外线可见光转换的图像由光电检测器1以高灵敏度和高分辨率检测，从而能够实现 优良的红外线检测元件。