公开(公告)号：DE3779169D1

公开(公告)日：1992-06-25

申请号：DE3779169

申请日：1987-03-13

Applicant: IBM

Inventor： EGITTO FRANK DANIEL ,  EMMI FRANCIS ,  MLYNKO WALTER EUGENE ,  SUSKO ROBIN ANNE

IPC: B08B3/08 ,  H01L21/302 ,  H01L21/304 ,  H01L21/3065 ,  H05K3/00 ,  H05K3/08 ,  H05K3/26 ,  H05K3/42

Abstract: Contaminant is removed from holes by etching in a gaseous plasma by first removing contaminant from the vicinity of the edges of the hole. Next, a mask is provided in the vicinity of the edges to prevent etching by contacting with a gaseous plasma which is different from the gaseous plasma employed in the first etching step. The holes are then etched in a gaseous plasma to remove contaminant from the interior of the holes in the vicinity of the center of the holes, whereby the mask protects the edges from being etched.

公开(公告)号：CA1314197C

公开(公告)日：1993-03-09

申请号：CA530786

申请日：1987-02-27

Applicant: IBM

Inventor： EGITTO FRANK D ,  EMMI FRANCIS ,  MLYNKO WALTER E ,  SUSKO ROBIN A

IPC: B08B3/08 ,  H01L21/302 ,  H01L21/304 ,  H01L21/3065 ,  H05K3/00 ,  H05K3/08 ,  H05K3/26 ,  H05K3/42 ,  B23K10/00

Abstract: EN984-029 PROCESS FOR REMOVING CONTAMINANT Contaminant is removed from holes by etching in a gaseous plasma by first removing contaminant from the vicinity of the edges of the hole. Next, a mask is provided in the vicinity of the edges to prevent etching by contacting with a gaseous plasma which is different from the gaseous plasma employed in the first etching step. The holes are then etched in a gaseous plasma to remove contaminant from the interior of the holes in the vicinity of the center of the holes, whereby the mask protects the edges from being etched.

公开(公告)号：DE3379719D1

公开(公告)日：1989-06-01

申请号：DE3379719

申请日：1983-12-28

Applicant: IBM

Inventor： BERNIER WILLIAM EMMETT ,  EMMI FRANCIS ,  FEY EDMOND OTTO ,  GENDLER PAUL LEWIS ,  TWIEG ROBERT JAMES

IPC: B41M5/20

公开(公告)号：CA1212834A

公开(公告)日：1986-10-21

申请号：CA441868

申请日：1983-11-24

Applicant: IBM

Inventor： BERNIER WILLIAM E ,  EMMI FRANCIS ,  FEY EDMOND O ,  GENDLER PAUL L ,  TWIEG ROBERT J

IPC: B41M5/20

Abstract: ELECTROCHROMIC PRINTING An electrochromic printable medium which includes a substrate coated with certain organic compounds and with the reduced form of an oxidizing agent; and use thereof for electrochromic printing.