METHOD FOR MAKING A HIGH PERFORMANCE BIPOLAR TRANSISTOR IN AN INTEGRATED CIRCUIT

    公开(公告)号:DE3380583D1

    公开(公告)日:1989-10-19

    申请号:DE3380583

    申请日:1983-02-23

    Applicant: IBM

    Abstract: A process is described which permits the fabrication of very narrow base width bipolar transistors. The ability to selectively vary the transistor characteristics provides a degree of freedom for design of integrated circuits. The biplar transistor is processed up to the point of emitter formation using conventional techniques. But, prior to the emitter formation, a portion of the base area (22) wherein the emitter region (34) is planned to be formed is dry etched using reactive ion etching. The existing silicon nitride/silicon dioxide layers (24, 26) with the emitter opening (30) therein are used as the etching mask for this reactive ion etching procedure. Once the etching is completed to the desired depth, the normal processing is resumed to form the emitter and rest of the metallization. Since the intrinsic base under the emitter (34) is etched, and the normal emitter is formed afterwards, the etching reduces the base width by an amount approximately equal to the etched depth. The transistor characteristics depend strongly upon the base width so the etching is controlled to very tight dimensions.

    DYNAMIC SEMICONDUCTOR MEMORY CELL

    公开(公告)号:DE3277998D1

    公开(公告)日:1988-02-18

    申请号:DE3277998

    申请日:1982-06-29

    Applicant: IBM

    Abstract: A single device dynamic semiconductor memory is formed having a P-type conductivity injector region (72) with high-low-high junctions of N-type conductivity disposed below the injector region. Those junctions trap injected minority charges which are detected by sensing the current flow from a source region (68) to a drain regions (51) which are located on opposite sides of the injector region (72). The source (68) and injector region (72) utilize ohmic contact while the low barrier Schottky contact (80) is made to the drain region (51). In order to provide separation between the depletion region of the Schottky contact (80) and the injector region (72), a heavily doped N (22) region is provided.

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