公开(公告)号：AT477517T

公开(公告)日：2010-08-15

申请号：AT02786917

申请日：2002-12-05

Applicant: IBM

Inventor： HUANG WU-SONG ,  LI WENJIE ,  MOREAU WAYNE ,  MEDEIROS DAVID ,  PETRILLO KAREN ,  LANG ROTBERT N ,  ANGELOPOULOS MARIE

IPC: G03F7/004 ,  G03F7/039 ,  G03F7/30

公开(公告)号：AT416399T

公开(公告)日：2008-12-15

申请号：AT06793243

申请日：2006-09-05

Applicant: IBM

Inventor： KOBURGER III ,  HOLMES STEVEN ,  HORAK DAVID ,  KIMMEL KURT ,  PETRILLO KAREN ,  ROBINSON CHRISTOPHER

IPC: G03F7/20

Abstract: An article including a microelectronic substrate is provided as an article usable during the processing of the microelectronic substrate. Such article includes a microelectronic substrate having a front surface, a rear surface opposite the front surface and a peripheral edge at boundaries of the front and rear surfaces. The front surface is a major surface of the article. A removable annular edge extension element having a front surface, a rear surface and an inner edge extending between the front and rear surfaces has the inner edge joined to the peripheral edge of the microelectronic substrate. In such way, a continuous surface is formed which includes the front surface of the edge extension element extending laterally from the peripheral edge of the microelectronic substrate and the front surface of the microelectronic substrate, the continuous surface being substantially co-planar and flat where the peripheral edge is joined to the inner edge.

公开(公告)号：DE602006004074D1

公开(公告)日：2009-01-15

申请号：DE602006004074

申请日：2006-09-05

Applicant: IBM

Inventor： KOBURGER CHARLES III ,  HOLMES STEVEN ,  HORAK DAVID ,  KIMMEL KURT ,  PETRILLO KAREN ,  ROBINSON CHRISTOPHER

IPC: G03F7/20

Abstract: An article including a microelectronic substrate is provided as an article usable during the processing of the microelectronic substrate. Such article includes a microelectronic substrate having a front surface, a rear surface opposite the front surface and a peripheral edge at boundaries of the front and rear surfaces. The front surface is a major surface of the article. A removable annular edge extension element having a front surface, a rear surface and an inner edge extending between the front and rear surfaces has the inner edge joined to the peripheral edge of the microelectronic substrate. In such way, a continuous surface is formed which includes the front surface of the edge extension element extending laterally from the peripheral edge of the microelectronic substrate and the front surface of the microelectronic substrate, the continuous surface being substantially co-planar and flat where the peripheral edge is joined to the inner edge.