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公开(公告)号:JPH10182989A
公开(公告)日:1998-07-07
申请号:JP25249297
申请日:1997-09-17
Applicant: IBM
Inventor: BRUNSVOLD WILLIAM ROSS , FAHEY JAMES THOMAS , HEFFERON GEORGE JOSEPH , HUANG WU-SONG , JAGANNATHAN PREMLATHA , KATNANI AHMAD DAUOD , KHOJASTEH MAHMOUD , KWONG RANEE WAI-LING , KIM YAN LEE , SACHDEV HARBANS SINGH , SACHDEV KRISHNA GANDI , SOORIYAKUMARAN RATNAM , WOOD ROBERT LAVIN
IPC: C08L25/02 , C08L61/10 , C08L101/00 , G03F7/004 , G03F7/039 , H01L21/027
Abstract: PROBLEM TO BE SOLVED: To make a composition hardly receive a disadvantageous reaction with environmental contaminants, enhance the tolerance for variable or long delay between exposure and printing after the exposure or printing after the exposure and development, eliminate any deterioration in a profile, stabilize the solubility in solvents and impart storage life thereof in a solution for a long period at ambient temperature. SOLUTION: This microlithographic composition comprises a composition, containing a film-forming polymer substituted at the o-position with an acid unstable compound containing a ketal component in at least a part of a chemically bound recurring hydroxyl group and an acid-generating compound, capable of forming an acid by exposure to actinic radiations and chemically bound to the polymer and used as the microlithographic composition. The acid generated by the exposure initiates the cleavage of at least a part of the compound containing the ketal component and the exposed composition becomes selectively more soluble in an aqueous base as compared with an unexposed composition.
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公开(公告)号:DE3576798D1
公开(公告)日:1990-05-03
申请号:DE3576798
申请日:1985-01-24
Applicant: IBM
Inventor: SACHDEV KRISHNA GANDI , SACHDEV HARBANS SINGH , AVIRAM ARI , WIZNER MARK ALAN
Abstract: Chemical heat amplification is provided in thermal transfer printing, wherein some of the heat necessary for melting and transferring ink from a solid fusible layer in a ribbon to a re- ce i ving medium is provided by an exothermic reaction. This chemical reaction is due to an exothermic material that is located in the ink layer, or in another layer of the ink bearing ribbon. The exothermic reaction reduces the amount of the input power which must be applied either electrically or with electromagnetic waves. Examples of suitable exothermic materials are those which will provide heat within the operative temperature range of the ink, and include hydrazone derivatives which are substantially colorless, and have a molecular weight in the approximate range 150-650. The group consisting of substituted aryl sulfonyl hydrazones, mono hydrazones of acylic -diketones, aromatic disulfonyl and diacyl hydrazones, and mono hydrazones of cyclic -dicarbonyl heterocycles are usable exothermic materials.
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