Abstract:
실시예는장치를포함하며, 이장치는, 기판; 고정층, 자유층, 및고정및 자유층들사이의유전체층을포함하는, 기판상의자기터널접합(MTJ); 및제1 합성반 강자성(SAF) 층, 제2 SAF 층, 및제1 및제2 SAF 층들사이에비자기금속을포함하는중간층을포함하며; 제1 SAF 층은호이슬러합금을포함한다. 다른실시예들이본 명세서에설명된다.
Abstract:
A method of patterning a metal (141, 341, 841) on a vertical sidewall (132, 332, 832) of an excavated feature (130, 330, 830) includes placing a material (350) in the excavated feature such that a portion (435) of the metal is exposed in the excavated feature above the material, etching the exposed portion of the metal away from the vertical sidewall using a first wet etch chemistry, and removing the material from the excavated feature by etching it away using a second wet etch chemistry. The described method may be used to produce a MIM capacitor (800) suitable for an eDRAM device.
Abstract:
An embodiment includes depositing a material onto a substrate where the material includes a different lattice constant than the substrate (e.g., III-V or IV epitaxial (EPI) material on a Si substrate). An embodiment includes an EPI layer formed within a trench having walls that narrow as the trench extends upwards. An embodiment includes an EPI layer formed within a trench using multiple growth temperatures. A defect barrier, formed in the EPI layer when the temperature changes, contains defects within the trench and below the defect barrier. The EPI layer above the defect barrier and within the trench is relatively defect free. An embodiment includes an EPI layer annealed within a trench to induce defect annihilation. An embodiment includes an EPI superlattice formed within a trench and covered with a relatively defect free EPI layer (that is still included in the trench). Other embodiments are described herein.
Abstract:
Bei einem Ausführungsbeispiel kann ein Graben in einer dielektrischen Oberfläche gebildet sein, und der Graben kann mit einem Liner ausgekleidet sein. Der Graben kann mit einem Metall gefüllt sein, und das Metall kann unter einer Öffnung des Grabens ausgespart sein. Der Liner kann in ein Dielektrikum umgewandelt werden, und eine Hartmaske kann in den Graben abgeschieden werden.
Abstract:
Semiconductor structures having integrated quadruple-wall capacitors for eDRAM and methods to form the same are described. For example, an embedded quadruple-wall capacitor includes a trench disposed in a first dielectric layer disposed above a substrate. The trench has a bottom and sidewalls. A quadruple arrangement of metal plates is disposed at the bottom of the trench, spaced apart from the sidewalls. A second dielectric layer is disposed on and conformal with the sidewalls of the trench and the quadruple arrangement of metal plates. A top metal plate layer is disposed on and conformal with the second dielectric layer.
Abstract:
An integrated circuit includes a semiconducting substrate (110), electrically conductive layers (120) over the semiconducting substrate, and a capacitor (130) at least partially embedded within the semiconducting substrate such that the capacitor is entirely underneath the electrically conductive layers. A storage node voltage is on an outside layer (132) of the capacitor. In the same or another embodiment, the integrated circuit may act as a 1T-1C embedded memory cell including the semiconducting substrate, an electrically insulating stack (160) over the semiconducting substrate, a transistor (140) including a source/drain region (142) within the semiconducting substrate and a gate region (141) above the semiconducting substrate, a trench (111) extending through the electrically insulating layers and into the semiconducting substrate, a first electrically insulating layer (131) located within the trench, and the capacitor located within the trench interior to the first electrically insulating layer.
Abstract:
Es werden senkrechte Spin-Transfer-Torque-Speicherbauelemente (STTM-Bauelemente) mit versetzten Zellen und Verfahren zum Herstellen senkrechter STTM-Bauelemente mit versetzten Zellen beschrieben. Beispielsweise enthält ein Spin Torque Transfer-Speicherarray (STTM-Array) eine erste Lastleitung, die über einem Substrat angeordnet ist und nur ein erstes STTM-Bauelement besitzt. Das STTM-Array enthält auch eine zweite Lastleitung, die über dem Substrat bei der ersten Lastleitung angeordnet ist und nur ein zweites STTM-Bauelement besitzt, wobei das zweite STTM-Bauelement nicht koplanar zum ersten STTM-Bauelement ist.