公开(公告)号：MY147014A

公开(公告)日：2012-10-15

申请号：MYPI20071872

申请日：2007-10-31

Applicant: MIMOS BERHAD

Inventor： TAMSIR AGUS SANTOSO DR ,  MANUT AZRIF ,  SULAIMAN SURAYA

IPC: G01C19/56 ,  G01C19/5656

Abstract: THERE IS DISCLOSED A SURFACE MICROMACHINED (MEMS) GYROSCOPE DEVICE WHERE THE RESONANCE FREQUENCIES ARE CAPABLE OF BEING ADJUSTED AND TUNED FOR OBTAINING MAXIMUM RESPONSE GAIN FOR HIGHER SENSITIVITY. THE MEMS GYROSCOPE COMPRISES OF A SUBSTRATE (1), A PROOF-MASS (2), A CAPACITIVE AREA-CHANGED PLATE (3), A DRIVING MODE ELECTRODE (4) AND A SENSING MODE ELECTRODE (5). THE PROOF-MASS (2) IS STRUCTURED AS A CROSS-SHAPED BODY THAT INCLUDES THE SENSING MODE AND DRIVING MODE ELECTRODES (4, 5) WHERE THE PROOF-MASS IS ADAPTED TO OSCILLATE BACK AND FORTH LATERALLY IS OVER THE CAPACITIVE AREA-CHANGED PLATE (3) DEFINING AN AREA-CHANGED CAPACITIVE TYPE MEMS GYROSCOPE. THE DRIVING AND SENSING MODE ELECTRODES (4, 5) ARE SHAPED AS A SYMMETRICAL BRANCH-FINGER STRUCTURE. THE PROOF- MASS IS CONNECTED TO THE SUBSTRATE (1) THROUGH A SPRING (6) AND THE BRANCH-FINGER STRUCTURE IS PROVIDED HAVING TWO DIFFERENT GAP SIDE-BY-SIDE AND NARROW-WIDE NARROW GAP SERIES CONFIGURATION, WHEREBY THE SPRING IS CONFIGURED AS A CIRCULAR-SHAPED, RECTANGULAR-SHAPED OR VARIATIONS OF THE SAME. THE SPRING CONSTANT (KX, KY) IS CONTROLLABLE AND ADJUSTABLE THROUGH THE APPLICATION OF VOLTAGE ON THE BRANCH FINGER ACTING AS ACTUATOR AND PSEUDO SPRING THUS PROVIDING TUNED RESONANT FREQUENCY FOR HIGHER SENSITIVITY.

公开(公告)号：MY147700A

公开(公告)日：2013-01-15

申请号：MYPI20083507

申请日：2008-09-10

Applicant: MIMOS BERHAD

Inventor： SULAIMAN SURAYA ,  TAMSIR AGUS SANTOSO DR ,  MANUT AZRIF ,  ALIAS DZUZLINDAH MUHAMAD ,  ZAIN AZLINA MOHD

IPC: G01N27/22

Abstract: THE PRESENT INVENTION RELATES TO CAPACITIVE SENSORS FOR MEASURING HUMIDITY AND MOISTURE AND TO AN IMPROVED PROCESS FOR MAKING THE SAME. THE FABRICATION PROCESS FOR A CAPACITIVE SENSOR HAVING A MULTI-LAYER ELECTRODES FOR MEASURING HUMIDITY AND MOISTURE COMPRISING DISPOSING THE MULTI-LAYER INTERDIGITATED ELECTRODES (2, 9) IN A MULTI-LAYER POLYIMIDES (5, 6, 7); PROVIDING A PLURALITY OF TRENCHES (12) ON THE SURFACE OF THE ELECTRODE BY LIFT OFF PROCESS; AND COVERING THE SENSOR WITH PHOTOSENSITIVE NEGATIVE POLYIMIDE.

公开(公告)号：MY147144A

公开(公告)日：2012-11-14

申请号：MYPI20082366

申请日：2008-06-27

Applicant: MIMOS BERHAD

Inventor： TAMSIR AGUS SANTOSO DR ,  ALIAS DZUZLINDAH MUHAMAD ,  SULAIMAN SURAYA ,  MANUT AZRIF ,  ZAKARIA AZLAN ,  SYONO MOHD ISMAHADI ,  RANI ROZINA ABDUL

IPC: H01L29/772

Abstract: AN IMPROVED FIELD-EFFECT TRANSISTOR FOR MEASURING BIOCHEMICAL PROPERTIES IN AQUEOUS FORM BY DETECTING THE DIELECTRIC OF THE OBJECTS.