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    VIBRATORY SENSOR
    3.
    发明专利
    VIBRATORY SENSOR 未知

    公开(公告)号：MY145205A

    公开(公告)日：2012-01-13

    申请号：MYPI20072343

    申请日：2007-12-28

    Applicant: MIMOS BERHAD

    Inventor： TAMSIR AGUS SANTOSO ,  SULAIMAN SURAYA ,  ALIAS DZUZLINDAH MUHAMAD ,  MANUT AZRIF ,  ZAKARIA AZLAN

    IPC: H01L27/04

    Abstract: VIBRATORY SENSOR 5 A CAPACITOR COMPRISES A DIELECTRIC BASE LAYER (4A) DEFINED BY TOP, FIRST AND SIDE SURFACES; A PLURALITY OF FIRST DRIVEN ELECTRODE (I 5) HAVING TIPS AND EDGES DEPOSITED ON THE TOP SURFACE OF THE DIELECTRIC BASE LAYER (4A) THAT EACH ARE SPACED APART AT THE EDGES BY A PREDETENNINED GAP; A PLURALITY OF FIRST SENSING ELECTRODE (16) HAVING TIPS AND EDGES THAT EACH OF THE FIRST SENSING ELECTRODE (16) IS DEPOSITED AT EACH OF THE 10 PREDETEN-NINED GAP IN BETWEEN TWO FIRST DRIVEN ELECTRODES (15) WITH A PREDETERMINED DISTANCE IN BETWEEN THE FIRST SENSING (16) AND FIRST DRIVEN ELECTRODES (15); A PLURALITY PAIR OF PROTRUSION (20) EXTENDS UPWARD FROM THE TOP SURFACE OF THE DIELECTRIC BASE LAYER (4A) AT THE TIPS OF THE FIRST DRIVEN ELECTRODES (I 5) AND THE FIRST SENSING ELECTRODES (I 6); A SECOND DRIVEN ELECTRODE (IO) OR A SECOND SENSING ELECTRODE (II) ARE POSITIONED 1 5 OVERHEAD OF EACH FIRST DRIVEN ELECTRODE (15) AND FIRST SENSING ELECTRODE (16) RESPECTIVELY BY ANCHORING ONTO THE CORRESPONDING PAIR OF PROTRUSIONS (20) WITH A VOID LEFT BETWEEN EACH SECOND AND FIRST ELECTRODES.- WHEREBY THE SECOND DRIVEN (10) AND SECOND SENSING (I 1) ELECTRODES VIBRATE UP AND DOWN BY APPLYING A BIAS VOLTAGE ONTO THE FIRST DRIVEN (I 5) AND FIRST SENSING (I 6) ELECTRODES THUS ABLE TO MANIPULATE 20 PENETRATION DEPTH OF QUASI-STATIC ELECTRIC FIELD LINES PRODUCED FROM THE SECOND DRIVEN (I 0) AND SECOND SENSING ELECTRODES (I 1) INTO A MATERIAL UNDER TEST. (MOST ILLUSTRATED BY

    VIBRATORY SENSOR
    6.
    发明申请
    VIBRATORY SENSOR 审中-公开
    振动传感器

    公开(公告)号：WO2009084942A3

    公开(公告)日：2009-11-19

    申请号：PCT/MY2008000199

    申请日：2008-12-30

    Applicant: MIMOS BERHAD ,  TAMSIR AGUS SANTOSO ,  SULAIMAN SURAYA ,  MUHAMAD ALIAS DZUZLINDAH ,  MANUT AZRIF ,  ZAKARIA AZLAN

    Inventor： TAMSIR AGUS SANTOSO ,  SULAIMAN SURAYA ,  MUHAMAD ALIAS DZUZLINDAH ,  MANUT AZRIF ,  ZAKARIA AZLAN

    IPC: H01L27/04 ,  G01N27/12

    CPC classification number: G01N27/226

    Abstract: A capacitor comprises a dielectric base layer (4a) defined by top, first and side surfaces; a plurality of first driven electrode (15) having tips and edges deposited on the top surface of the dielectric base layer (4a) that each are spaced apart at the edges by a predetermined gap; a plurality of first sensing electrode (16) having tips and edges that each of the first sensing electrode (16) is deposited at each of the predetermined gap in between two first driven electrodes (15) with a predetermined distance in between the first sensing (16) and first driven electrodes (15); a plurality pair of protrusion (20) extends upward from the top surface of the dielectric base layer (4a) at the tips of the first driven electrodes (15) and the first sensing electrodes (16); a second driven electrode (10) or a second sensing electrode (11) are positioned overhead of each first driven electrode (15) and first sensing electrode (16) respectively by anchoring onto the corresponding pair of protrusions (20) with a void left between each second and first electrodes; whereby the second driven (10) and second sensing (11) electrodes vibrate up and down by applying a bias voltage onto the first driven (15) and first sensing (16) electrodes thus able to manipulate penetration depth of quasi-static electric field lines produced from the second driven (10) and second sensing electrodes (11) into a material under test.

    Abstract translation: 电容器包括由顶部，第一和侧表面限定的电介质基底层（4a） 多个第一驱动电极（15），其具有沉积在所述电介质基底层（4a）的顶表面上的尖端和边缘，所述顶部和边缘各自在所述边缘处间隔预定间隙; 具有尖端和边缘的多个第一感测电极（16），其中第一感测电极（16）中的每一个在每个预定间隙处在两个第一驱动电极（15）之间以预定距离沉积在第一感测（ 16）和第一驱动电极（15）; 在所述第一驱动电极（15）和所述第一感测电极（16）的前端，所述多个突起（20）从所述电介质基底层（4a）的上表面向上延伸。 第二驱动电极（10）或第二感测电极（11）分别通过锚定在对应的一对突起（20）上而分别位于每个第一从动电极（15）和第一感测电极（16）的顶部，空隙留在 每个第二和第一电极; 由此第二驱动（10）和第二感测（11）电极通过向第一驱动（15）和第一感测（16）电极施加偏置电压而上下振动，从而能够操纵准静态电场线的穿透深度 由第二驱动（10）和第二感测电极（11）产生成被测材料。

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