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    CAPACITIVE AREA-CHANGED MEMS GYROSCOPE WITH ADJUSTABLE RESONANCE FREQUENCIES
    2.
    发明专利
    CAPACITIVE AREA-CHANGED MEMS GYROSCOPE WITH ADJUSTABLE RESONANCE FREQUENCIES 未知

    公开(公告)号：MY147014A

    公开(公告)日：2012-10-15

    申请号：MYPI20071872

    申请日：2007-10-31

    Applicant: MIMOS BERHAD

    Inventor： TAMSIR AGUS SANTOSO DR ,  MANUT AZRIF ,  SULAIMAN SURAYA

    IPC: G01C19/56 ,  G01C19/5656

    Abstract: THERE IS DISCLOSED A SURFACE MICROMACHINED (MEMS) GYROSCOPE DEVICE WHERE THE RESONANCE FREQUENCIES ARE CAPABLE OF BEING ADJUSTED AND TUNED FOR OBTAINING MAXIMUM RESPONSE GAIN FOR HIGHER SENSITIVITY. THE MEMS GYROSCOPE COMPRISES OF A SUBSTRATE (1), A PROOF-MASS (2), A CAPACITIVE AREA-CHANGED PLATE (3), A DRIVING MODE ELECTRODE (4) AND A SENSING MODE ELECTRODE (5). THE PROOF-MASS (2) IS STRUCTURED AS A CROSS-SHAPED BODY THAT INCLUDES THE SENSING MODE AND DRIVING MODE ELECTRODES (4, 5) WHERE THE PROOF-MASS IS ADAPTED TO OSCILLATE BACK AND FORTH LATERALLY IS OVER THE CAPACITIVE AREA-CHANGED PLATE (3) DEFINING AN AREA-CHANGED CAPACITIVE TYPE MEMS GYROSCOPE. THE DRIVING AND SENSING MODE ELECTRODES (4, 5) ARE SHAPED AS A SYMMETRICAL BRANCH-FINGER STRUCTURE. THE PROOF- MASS IS CONNECTED TO THE SUBSTRATE (1) THROUGH A SPRING (6) AND THE BRANCH-FINGER STRUCTURE IS PROVIDED HAVING TWO DIFFERENT GAP SIDE-BY-SIDE AND NARROW-WIDE NARROW GAP SERIES CONFIGURATION, WHEREBY THE SPRING IS CONFIGURED AS A CIRCULAR-SHAPED, RECTANGULAR-SHAPED OR VARIATIONS OF THE SAME. THE SPRING CONSTANT (KX, KY) IS CONTROLLABLE AND ADJUSTABLE THROUGH THE APPLICATION OF VOLTAGE ON THE BRANCH FINGER ACTING AS ACTUATOR AND PSEUDO SPRING THUS PROVIDING TUNED RESONANT FREQUENCY FOR HIGHER SENSITIVITY.

    VIBRATORY SENSOR
    5.
    发明专利
    VIBRATORY SENSOR 未知

    公开(公告)号：MY145205A

    公开(公告)日：2012-01-13

    申请号：MYPI20072343

    申请日：2007-12-28

    Applicant: MIMOS BERHAD

    Inventor： TAMSIR AGUS SANTOSO ,  SULAIMAN SURAYA ,  ALIAS DZUZLINDAH MUHAMAD ,  MANUT AZRIF ,  ZAKARIA AZLAN

    IPC: H01L27/04

    Abstract: VIBRATORY SENSOR 5 A CAPACITOR COMPRISES A DIELECTRIC BASE LAYER (4A) DEFINED BY TOP, FIRST AND SIDE SURFACES; A PLURALITY OF FIRST DRIVEN ELECTRODE (I 5) HAVING TIPS AND EDGES DEPOSITED ON THE TOP SURFACE OF THE DIELECTRIC BASE LAYER (4A) THAT EACH ARE SPACED APART AT THE EDGES BY A PREDETENNINED GAP; A PLURALITY OF FIRST SENSING ELECTRODE (16) HAVING TIPS AND EDGES THAT EACH OF THE FIRST SENSING ELECTRODE (16) IS DEPOSITED AT EACH OF THE 10 PREDETEN-NINED GAP IN BETWEEN TWO FIRST DRIVEN ELECTRODES (15) WITH A PREDETERMINED DISTANCE IN BETWEEN THE FIRST SENSING (16) AND FIRST DRIVEN ELECTRODES (15); A PLURALITY PAIR OF PROTRUSION (20) EXTENDS UPWARD FROM THE TOP SURFACE OF THE DIELECTRIC BASE LAYER (4A) AT THE TIPS OF THE FIRST DRIVEN ELECTRODES (I 5) AND THE FIRST SENSING ELECTRODES (I 6); A SECOND DRIVEN ELECTRODE (IO) OR A SECOND SENSING ELECTRODE (II) ARE POSITIONED 1 5 OVERHEAD OF EACH FIRST DRIVEN ELECTRODE (15) AND FIRST SENSING ELECTRODE (16) RESPECTIVELY BY ANCHORING ONTO THE CORRESPONDING PAIR OF PROTRUSIONS (20) WITH A VOID LEFT BETWEEN EACH SECOND AND FIRST ELECTRODES.- WHEREBY THE SECOND DRIVEN (10) AND SECOND SENSING (I 1) ELECTRODES VIBRATE UP AND DOWN BY APPLYING A BIAS VOLTAGE ONTO THE FIRST DRIVEN (I 5) AND FIRST SENSING (I 6) ELECTRODES THUS ABLE TO MANIPULATE 20 PENETRATION DEPTH OF QUASI-STATIC ELECTRIC FIELD LINES PRODUCED FROM THE SECOND DRIVEN (I 0) AND SECOND SENSING ELECTRODES (I 1) INTO A MATERIAL UNDER TEST. (MOST ILLUSTRATED BY

    VIBRATORY SENSOR
    6.
    发明申请
    VIBRATORY SENSOR 审中-公开
    振动传感器

    公开(公告)号：WO2009084942A3

    公开(公告)日：2009-11-19

    申请号：PCT/MY2008000199

    申请日：2008-12-30

    Applicant: MIMOS BERHAD ,  TAMSIR AGUS SANTOSO ,  SULAIMAN SURAYA ,  MUHAMAD ALIAS DZUZLINDAH ,  MANUT AZRIF ,  ZAKARIA AZLAN

    Inventor： TAMSIR AGUS SANTOSO ,  SULAIMAN SURAYA ,  MUHAMAD ALIAS DZUZLINDAH ,  MANUT AZRIF ,  ZAKARIA AZLAN

    IPC: H01L27/04 ,  G01N27/12

    CPC classification number: G01N27/226

    Abstract: A capacitor comprises a dielectric base layer (4a) defined by top, first and side surfaces; a plurality of first driven electrode (15) having tips and edges deposited on the top surface of the dielectric base layer (4a) that each are spaced apart at the edges by a predetermined gap; a plurality of first sensing electrode (16) having tips and edges that each of the first sensing electrode (16) is deposited at each of the predetermined gap in between two first driven electrodes (15) with a predetermined distance in between the first sensing (16) and first driven electrodes (15); a plurality pair of protrusion (20) extends upward from the top surface of the dielectric base layer (4a) at the tips of the first driven electrodes (15) and the first sensing electrodes (16); a second driven electrode (10) or a second sensing electrode (11) are positioned overhead of each first driven electrode (15) and first sensing electrode (16) respectively by anchoring onto the corresponding pair of protrusions (20) with a void left between each second and first electrodes; whereby the second driven (10) and second sensing (11) electrodes vibrate up and down by applying a bias voltage onto the first driven (15) and first sensing (16) electrodes thus able to manipulate penetration depth of quasi-static electric field lines produced from the second driven (10) and second sensing electrodes (11) into a material under test.

    Abstract translation: 电容器包括由顶部，第一和侧表面限定的电介质基底层（4a） 多个第一驱动电极（15），其具有沉积在所述电介质基底层（4a）的顶表面上的尖端和边缘，所述顶部和边缘各自在所述边缘处间隔预定间隙; 具有尖端和边缘的多个第一感测电极（16），其中第一感测电极（16）中的每一个在每个预定间隙处在两个第一驱动电极（15）之间以预定距离沉积在第一感测（ 16）和第一驱动电极（15）; 在所述第一驱动电极（15）和所述第一感测电极（16）的前端，所述多个突起（20）从所述电介质基底层（4a）的上表面向上延伸。 第二驱动电极（10）或第二感测电极（11）分别通过锚定在对应的一对突起（20）上而分别位于每个第一从动电极（15）和第一感测电极（16）的顶部，空隙留在 每个第二和第一电极; 由此第二驱动（10）和第二感测（11）电极通过向第一驱动（15）和第一感测（16）电极施加偏置电压而上下振动，从而能够操纵准静态电场线的穿透深度 由第二驱动（10）和第二感测电极（11）产生成被测材料。

    CAPACITIVE AREA-CHANGED MEMS GYROSCOPE WITH ADJUSTABLE RESONANCE FREQUENCIES
    7.
    发明申请
    CAPACITIVE AREA-CHANGED MEMS GYROSCOPE WITH ADJUSTABLE RESONANCE FREQUENCIES 审中-公开
    具有可调谐共振频率的电容区改变MEMS陀螺仪

    公开(公告)号：WO2009057990A3

    公开(公告)日：2009-08-06

    申请号：PCT/MY2008000124

    申请日：2008-10-22

    Applicant: MIMOS BERHAD ,  TAMSIR AGUS SANTOSO ,  MANUT AZRIF ,  SULAIMAN SURAYA

    Inventor： TAMSIR AGUS SANTOSO ,  MANUT AZRIF ,  SULAIMAN SURAYA

    IPC: B81B7/02 ,  G01C19/5656

    CPC classification number: G01C19/5656 ,  B81B3/0037 ,  B81B2201/0242

    Abstract: There is disclosed a surface micromachined (MEMS) gyroscope device where the resonance frequencies are capable of being adjusted and tuned for obtaining maximum response gain for higher sensitivity. The MEMS gyroscope comprises of a substrate (1), a proof-mass (2), a capacitive area-changed plate (3), a driving mode electrode (4) and a sensing mode electrode (5). The proof -mass (2) is structured as a cross-shaped body that includes the sensing mode and driving mode electrodes (4, 5) where the proof -mass is adapted to oscillate back and forth laterally over the capacitive area-changed plate (3) defining an area-changed capacitive type MEMS gyroscope. The driving and sensing mode electrodes (4,5) are shaped as a symmetrical branch-finger structure. The proofmass is connected to the substrate (1) through a spring (6) and the branch-finger structure is provided having two different gap side-by-side and narrow-wide narrow gap series configuration, whereby, the spring is configured as a circular-shaped, rectangular-shaped or variations of the same. The spring constant {KX, Ky) is controllable and adjustable through the application of voltage on the branch finger acting as actuator and pseudo spring thus providing tuned resonant frequency for higher sensitivity.

    Abstract translation: 公开了一种表面微加工（MEMS）陀螺仪装置，其中谐振频率能够被调整和调谐以获得更高灵敏度的最大响应增益。 MEMS陀螺仪包括基板（1），防爆质量块（2），电容区域变化板（3），驱动模式电极（4）和感测模式电极（5）。 证明 - 质量（2）被构造成十字形体，其包括感测模式和驱动模式电极（4,5），其中证明力适于在电容区域变化板上横向前后振荡（ 3）定义面积改变的电容型MEMS陀螺仪。 驱动感测模式电极（4,5）成形为对称的分支指状结构。 校样通过弹簧（6）与基板（1）连接，并且分支指结构具有两个不同的间隙并排和窄宽的窄间隙串联构造，由此弹簧被配置为 圆形，矩形或其变化。 通过施加作为致动器和假弹簧的分支上的电压，弹簧常数（KX，Ky）是可控的和可调节的，从而提供用于更高灵敏度的调谐谐振频率。

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