Abstract:
A device that includes a single substrate layer, a plurality of interconnects over the single substrate layer, the plurality of interconnects configured to operate as at least one passive component, a first die coupled to the single substrate layer and the plurality of interconnects, and an encapsulation layer that at least partially encapsulates the first die and the plurality of interconnects configured to operate as at least one passive component. In some implementations, the single substrate layer, the first die and the encapsulation layer comprise an overall thickness of about 225 microns (μm) or less. In some implementations, the single substrate layer comprises a thickness of about 75 microns (μm) or less.
Abstract:
In an illustrative example, an apparatus (100) includes a passive-on-glass (POG) device (104) integrated within a glass substrate (102). The apparatus further includes a semiconductor die (106) integrated within the glass substrate.
Abstract:
A single-die multi-FBAR (film bulk acoustic resonator) device (200) includes multiple FBARs (202, 204, 206) having different resonant frequencies formed over a single substrate (220). The FBARs include piezoelectric layers (212, 214, 216) having different thicknesses but with upper electrodes (218) formed at a same height over the substrate, lower electrodes (210) at different heights over the substrate, and different sized air gaps (224, 226, 228) separating the lower electrodes from the substrate.