4.
    发明专利
    未知

    公开(公告)号:FR2890982B1

    公开(公告)日:2008-05-02

    申请号:FR0509642

    申请日:2005-09-21

    Abstract: The formation of a layer of dielectric material on a carrier material (31) comprises: (A) circulating, in contact with the carrier material, a gas mixture (16) containing a precursor of a metal then an oxidizing gas (17) in conditions to form a first dielectric layer (32a); (B) circulating, in contact with the first dielectric layer, a gas mixture containing the precursor in second more intensely oxidizing conditions than that of the first operation. Independent claims are also included for: (1) a layer made up of at least one dielectric material obtained by this method; (2) an integrated circuit incorporating a condenser including this dielectric layer.

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