公开(公告)号：CN107039220A

公开(公告)日：2017-08-11

申请号：CN201710388114.1

申请日：2017-05-27

Applicant: 清华大学天津高端装备研究院

Inventor： 林峰 ,  郭超 ,  马旭龙

IPC: H01J3/22 ,  H01J3/32 ,  B22F3/105 ,  B33Y30/00

CPC classification number: Y02P10/295 ,  H01J3/22 ,  B22F3/1055 ,  B22F2003/1056 ,  B33Y30/00 ,  H01J3/32

Abstract: 本发明属于3D打印技术领域，公开了一种电子束光学系统，包括均设有供电子束通过的束通孔且束通孔依次连通设置的聚焦系统、正偏转系统、负偏转系统以及偏转系统，正偏转系统的束通孔与负偏转系统的束通孔交错设置，所述电子束经聚焦系统射入，并依次经正偏转系统、负偏转系统以及偏转系统射出。本发明还公开了一种具有电子束光学系统的增材制造装置。通过在聚焦系统与偏转系统之间设置正偏转系统和负偏转系统，该正偏转系统和负偏转系统的束通孔交错设置，使得电子束通过的通道不是笔直贯通的，而是弯折的，进而在产生金属蒸汽时，金属蒸汽通过弯折通道后的量大大减少，有效地保护了阴极。

公开(公告)号：US08723137B1

公开(公告)日：2014-05-13

申请号：US14051665

申请日：2013-10-11

Applicant: Ruey-Jen Hwu ,  Jishi Ren ,  Jehn-Huar Chern ,  Laurence P. Sadwick

Inventor： Ruey-Jen Hwu ,  Jishi Ren ,  Jehn-Huar Chern ,  Laurence P. Sadwick

IPC: H01J25/02 ,  H01J25/10 ,  H01J3/08

CPC classification number: H01J3/32 ,  H01F7/0278 ,  H01J3/24 ,  H01J23/087 ,  H01J23/10 ,  H01J25/34

Abstract: Various embodiments of a vacuum electronic device, a hybrid magnet for a vacuum electronic device and methods of making a hybrid magnet for a vacuum electronic device are disclosed herein. In one embodiment, a hybrid magnet for a vacuum electronic device includes a first magnet, a second magnet positioned in spaced-apart relation with the first magnet and defining a gap between the first magnet and the second magnet, and a non-magnetic spacer positioned in a portion of the gap between the first magnet and second magnet and connected to the first magnet and the second magnet.

Abstract translation: 这里公开了真空电子器件，真空电子器件的混合磁体和制造用于真空电子器件的混合磁体的方法的各种实施例。 在一个实施例中，一种用于真空电子设备的混合磁体包括第一磁体，与第一磁体间隔开定位并在第一磁体和第二磁体之间限定间隙的第二磁体，以及非磁性间隔件 在第一磁体和第二磁体之间的间隙的一部分中并连接到第一磁体和第二磁体。

公开(公告)号：US5483077A

公开(公告)日：1996-01-09

申请号：US383422

申请日：1995-02-03

Applicant: Hilton F. Glavish

Inventor： Hilton F. Glavish

IPC: C23C14/48 ,  G21K1/093 ,  H01F3/02 ,  H01F7/20 ,  H01J3/32 ,  H01J29/76 ,  H01J37/04 ,  H01J37/09 ,  H01J37/12 ,  H01J37/147 ,  H01J37/317 ,  H01L21/02 ,  H01L21/265 ,  H01L27/12

CPC classification number: H01J37/147 ,  G21K1/093 ,  H01F3/02 ,  H01F7/202 ,  H01J29/76 ,  H01J3/32 ,  H01J37/1475 ,  H01J37/3007 ,  H01J37/3171 ,  H01J2237/31701

Abstract: Deflection apparatus is shown for high perveance ion beams, operating at 20 Hz fundamental and substantially higher order harmonics, having a magnetic structure formed of laminations with thickness in range between 0.2 and 1 millimeter. Additionally, a compensator is shown with similar laminated structures with resonant excitation circuit, operating at 20 Hz or higher, in phase locked relationship with the frequency of the previously deflected beam. Furthermore, features are shown which have broader applicability to producing strong magnetic field in magnetic gap. Among the numerous important features shown are special laminated magnetic structures, including different sets of crosswise laminations in which the field in one lamination of one set is distributed into multiplicity of laminations of the other set of coil-form structures, field detection means and feedback control system, cooling plate attached in thermal contact with number of lamination layers. Surfaces on the entry and exit sides of the compensator magnetic structure have cooperatively selected shapes to increase the length of path exposed to the force field dependently with deflection angle to compensate for contribution to deflection angle caused by higher order components. The entry and exit surfaces of the magnetic scanner and compensator structures cooperating to produce desired beam profile and desired limit on angular deviation of ions within the beam. Also shown is an accelerator comprising a set of accelerator electrodes having slotted apertures, a suppressor electrode at the exit of the electrostatic accelerator, a post-accelerator analyzer magnet having means for adjusting the angle of incidence by laterally moving the post-accelerator analyzer magnet, and a magnet to eliminate aberration created by the post-accelerator analyzer magnet. In the case of use of a spinning substrate carrier for scanning in one dimension, the excitation wave form of the scanner relates changes in scan velocity in inverse dependence with changes in the radial distance of an implant point from the rotation axis. Also an oxygen implantation method is shown with 50 mA ion beam current, the ion beam energy above 100 KeV, and the angular velocity of a rotating carrier above 50 rpm.

公开(公告)号：US09550280B1

公开(公告)日：2017-01-24

申请号：US13431475

申请日：2012-03-27

Applicant: Robert Mishler ,  Robert Gainer ,  Laurens Nunnink

Inventor： Robert Mishler ,  Robert Gainer ,  Laurens Nunnink

IPC: B25B9/02 ,  B25B13/50 ,  H01J3/32 ,  G03B17/56

CPC classification number: B25B9/02 ,  B25B13/06 ,  B25B13/48 ,  B25B13/50 ,  B25B13/5008 ,  G03B17/56 ,  H01J3/32

Abstract: This invention provides a tool for tightening and loosening lenses with respect to camera bodies. The tool includes a body that defines a cavity that is slightly larger in diameter than the sidewalls of the lens adjacent the lens face. Within the cavity is a thin, high-friction, elastomeric material that resides between the edges of the lens when the cavity is pressurably engaged over the lens face. The material frictionally couples the tool body to the lens face and adjacent side walls, thereby allowing a predetermined level of torque to be applied to tighten or loosen the lens. The tool can be adapted for attachment to a handle, such as a torque wrench or can include a handle specifically adapted/contoured for grasping by a user's hand.

Abstract translation: 本发明提供了一种用于相对于照相机体收紧和松开透镜的工具。 该工具包括一个主体，该主体限定了一个直径略大于邻近透镜面的透镜侧壁的空腔。 在空腔内部是薄的，高摩擦的弹性体材料，当空腔被加压地接合在透镜面上时，它们位于透镜的边缘之间。 该材料将工具主体摩擦地连接到透镜面和相邻的侧壁上，从而允许施加预定水平的扭矩以拧紧或松开透镜。 工具可以适于附接到手柄，例如扭矩扳手，或者可以包括特别适于/轮廓以由用户抓住的手柄的手柄。

公开(公告)号：US5132544A

公开(公告)日：1992-07-21

申请号：US575498

申请日：1990-08-29

Applicant: Hilton F. Glavish

Inventor： Hilton F. Glavish

IPC: C23C14/48 ,  G21K1/093 ,  H01F3/02 ,  H01F7/20 ,  H01J3/32 ,  H01J29/76 ,  H01J37/147 ,  H01J37/317 ,  H01L21/265

CPC classification number: G21K1/093 ,  H01F3/02 ,  H01F7/202 ,  H01J29/76 ,  H01J3/32 ,  H01J37/147 ,  H01J37/1475 ,  H01J37/3171

Abstract: System for irradiating the surface of a substrate with atomic or molecular ions by rapid scanning of a beam in two dimensions over the surface of the substrate. A scanning system is shown for deflecting the beam in two dimensions relative to a reference axis and a magnetic ion beam transport system following the scanning system is arranged to receive the beam from the scanning system over the range of two dimensional deflections of the scanning system and constructed to impose magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected beam to a direction having a predetermined desired relationship with the axis in the two dimensions at the desired instantaneous two dimensional displacement of the beam from the axis, to produce the desired scan of the beam over the substrate. One scanning system includes sequential first and second time-variable-field magnetic scanners, the first scanner having a magnetic gap of volume smaller than that of the second scanner and constructed to scan the beam more rapidly than the second scanner. In another system, the scanners are superposed. The magnetic ion beam transport system presently preferred is a system producing a sequence of three or more quadrupole fields, implemented by a sequence of quadrupoles. Alternate structures are disclosed. The system is capable of depositing atomic or molecular ions with a desired angular and positional uniformity over a wide range of perveance including perveance above 0.02/M[amu].sup.1/2 (mA//keV.sup.3/2) with a constant, adjustable spot size and small beam spread.

公开(公告)号：EP0473097B1

公开(公告)日：1996-11-13

申请号：EP91114292.5

申请日：1991-08-26

Applicant: NISSIN ELECTRIC COMPANY, LIMITED

Inventor： Glavish, Hilton F.

IPC: H01J37/147 ,  H01J37/317

CPC classification number: G21K1/093 ,  H01F3/02 ,  H01F7/202 ,  H01J3/32 ,  H01J29/76 ,  H01J37/147 ,  H01J37/1475 ,  H01J37/3171

公开(公告)号：EP0473097A2

公开(公告)日：1992-03-04

申请号：EP91114292.5

申请日：1991-08-26

Applicant: NISSIN ELECTRIC COMPANY, LIMITED

Inventor： Glavish, Hilton F.

IPC: H01J37/147 ,  H01J37/317

CPC classification number: G21K1/093 ,  H01F3/02 ,  H01F7/202 ,  H01J3/32 ,  H01J29/76 ,  H01J37/147 ,  H01J37/1475 ,  H01J37/3171

Abstract: System for irradiating the surface of a substrate with atomic or molecular ions by rapid scanning of a beam in two dimensions over the surface of the substrate. A scanning system is shown for deflecting the beam in two dimensions relative to a reference axis and a magnetic ion beam transport system following the scanning system is arranged to receive the beam from the scanning system over the range of two dimensional deflections of the scanning system and constructed to impose magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected beam to a direction having a predetermined desired relationship with the axis in the two dimensions at the desired instantaneous two dimensional displacement of the beam from the axis, to produce the desired scan of the beam over the substrate. One scanning system includes sequential first and second time-variable-field magnetic scanners, the first scanner having a magnetic gap of volume smaller than that of the second scanner and constructed to scan the beam more rapidly than the second scanner. In another system, the scanners are superposed. The magnetic ion beam transport system presently preferred is a system producing a sequence of three or more quadrupole fields, implemented by a sequence of quadrupoles. Alternate structures are disclosed. The system is capable of depositing atomic or molecular ions with a desired angular and positional uniformity over a wide range of perveance including perveance above 0.02/M[amu] 1/2 (mA/keV 3/2 ) with a constant, adjustable spot size and small beam spread.

Abstract translation: 系统，用于在基板的表面上以二维通过光束的快速扫描照射原子或分子离子的基片的表面上。 一种扫描系统，示出了用于在相对于参考轴和磁性离子束传送系统继扫描系统两名维偏转光束被布置在扫描系统的二维偏转的范围以接收来自所述扫描系统的光束和 构造成施加磁场条件沿所选择的二维偏转光束重新定向到具有与所述轴的两个维度上在所希望的瞬时二维的光束的从所述轴线位移预定的期望关系的方向特性的光束路径， 以产生光束在基片的所需的扫描。 一个扫描系统包括连续的第一和第二时变场磁扫描器，具有体积比所述第二扫描仪的较小的磁隙中并构造成更快速地扫描光束比第二扫描器的第一扫描仪。 在另一个系统，扫描仪叠加。 磁性离子束传送系统目前优选的是生产三种或更多种四极场的序列，由四极的序列实现的系统。 备用结构游离缺失盘。 该系统能够以期望的角度和位置的均匀性在宽范围的导电系数，包括导流系数以上具有恒定的沉积原子或分子离子0.02 / M [AMU] <1/2>（毫安/千电子伏<3/2>）的 可调光点尺寸和小光束发散。

公开(公告)号：US5490438A

公开(公告)日：1996-02-13

申请号：US350857

申请日：1994-12-07

Applicant: Alan L. Zupo ,  Roger G. Brown

Inventor： Alan L. Zupo ,  Roger G. Brown

IPC: H01J3/32 ,  H01K3/32

CPC classification number: H01J3/32

Abstract: A tool for removing a broken incandescent light bulb has a handle with a head projecting therefrom and preferably a resilient gripping member which snugly enshrouds the head, to frictionally engage an inner wall of the base of a broken light bulb such that when the tool is rotated the base can be dislodged from a light bulb socket. In a preferred embodiment a collar with stiffening ribs surrounds the tool, positioned to protect the user's hand from falling shards of glass. In a further preferred embodiment an accessory tool having one or more heads of different sizes is adapted to fit within a hollow end of the handle.

Abstract translation: 用于去除破碎的白炽灯泡的工具具有从其突出的头部的手柄，并且优选地是弹性抓持构件，其紧密地围绕头部，以摩擦地接合破碎的灯泡的基部的内壁，使得当工具旋转时 基座可以从灯泡插座上移开。 在优选实施例中，具有加强肋的套环围绕该工具，定位成保护使用者的手不会掉落玻璃碎片。 在另一优选实施例中，具有一个或多个不同尺寸的头部的附件工具适于装配在手柄的中空端部内。

公开(公告)号：US5311028A

公开(公告)日：1994-05-10

申请号：US843391

申请日：1992-02-28

Applicant: Hilton F. Glavish

Inventor： Hilton F. Glavish

IPC: C23C14/48 ,  G21K1/093 ,  H01F3/02 ,  H01F7/20 ,  H01J3/32 ,  H01J29/76 ,  H01J37/04 ,  H01J37/09 ,  H01J37/12 ,  H01J37/147 ,  H01J37/317 ,  H01L21/02 ,  H01L21/265 ,  H01L27/12 ,  H01J37/302

CPC classification number: H01J37/147 ,  G21K1/093 ,  H01F3/02 ,  H01F7/202 ,  H01J29/76 ,  H01J3/32 ,  H01J37/1475 ,  H01J37/3007 ,  H01J37/3171 ,  H01J2237/31701

Abstract: Deflection apparatus is shown for high perveance ion beams, operating at 20 Hz fundamental and substantially higher order harmonics, having a magnetic structure formed of laminations with thickness in range between 0.2 and 1 millimeter. Additionally, a compensator is shown with similar laminated structures with resonant excitation circuit, operating at 20 Hz or higher, in phase locked relationship with the frequency of the previously deflected beam. Furthermore, features are shown which have broader applicability to producing strong magnetic field in magnetic gap. Among the numerous important features shown are special laminated magnetic structures, including different sets of crosswise laminations in which the field in one lamination of one set is distributed into multiplicity of laminations of the other set of coil-form structures, field detection means and feedback control system, cooling plate attached in thermal contact with number of lamination layers. Surfaces on the entry and exit sides of the compensator magnetic structure have cooperatively selected shapes to increase the length of path exposed to the force field dependently with deflection angle to compensate for contribution to deflection angle caused by higher order components. The entry and exit surfaces of the magnetic scanner and compensator structures cooperating to produce desired beam profile and desired limit on angular deviation of ions within the beam. Also shown is an accelerator comprising a set of accelerator electrodes having slotted apertures, a suppressor electrode at the exit of the electrostatic accelerator, a post-accelerator analyzer magnet having means for adjusting the angle of incidence by laterally moving the post-accelerator analyzer magnet, and a magnet to eliminate aberration created by the post-accelerator analyzer magnet. In the case of use of a spinning substrate carrier for scanning in one dimension, the excitation wave form of the scanner relates changes in scan velocity in inverse dependence with changes in the radial distance of an implant point from the rotation axis. Also an oxygen implantation method is shown with 50 mA ion beam current, the ion beam energy above 100 KeV, and the angular velocity of a rotating carrier above 50 rpm.

公开(公告)号：US4687936A

公开(公告)日：1987-08-18

申请号：US810398

申请日：1985-12-17

Applicant: Raymond D. McIntyre ,  Karl L. Brown

Inventor： Raymond D. McIntyre ,  Karl L. Brown

IPC: G21K1/093 ,  G21K5/10 ,  H01J3/32 ,  H01J33/00 ,  G01K1/08 ,  H01J3/14

CPC classification number: H01J3/32 ,  G21K1/093 ,  G21K5/10 ,  H01J33/00

Abstract: A system for scanning a beam of charged-particles across a target is described which compensates for energy dispersion in the beam. A time-varying magnet with circular pole pieces is used to sweep the beam left to right. Two wedge-shaped magnet dipoles, one on each side of the center line are used to bend the beam parallel to the center line and compensate for beam energy dispersion.

Abstract translation: 描述了用于扫描穿过靶的带电粒子束的系统，其补偿光束中的能量分散。 具有圆形极片的时变磁体用于从左到右扫掠光束。 使用两个楔形磁偶极子，中心线每侧一个，用于将光束平行于中心线弯曲并补偿光束能量散射。