公开(公告)号：US20240362778A1

公开(公告)日：2024-10-31

申请号：US18766580

申请日：2024-07-08

Applicant: BORRIES PTE. LTD.

Inventor： Zhongwei Chen ,  Xiaoming Chen ,  Daniel Tang ,  Liang-Fu Fan

IPC: G06T7/00 ,  G01N35/00

CPC classification number: G06T7/0012 ,  G01N35/00029 ,  G06T2207/10061 ,  G06T2207/20081 ,  G06T2207/30

Abstract: A rapid and automatic virus imaging and analysis system includes (i) electron optical sub-systems (EOSs), each of which has a large field of view (FOV) and is capable of instant magnification switching for rapidly scanning a virus sample; (ii) sample management sub-systems (SMSs), each of which automatically loads virus samples into one of the EOSs for virus sample scanning and then unloads the virus samples from the EOS after the virus sample scanning is completed; (iii) virus detection and classification sub-systems (VDCSs), each of which automatically detects and classifies a virus based on images from the EOS virus sample scanning; and (iv) a cloud-based collaboration sub-system for analyzing the virus sample scanning images, storing images from the EOS virus sample scanning, and storing and analyzing machine data associated with the EOSs, the SMSs, and the VDCSs.

公开(公告)号：US11854762B1

公开(公告)日：2023-12-26

申请号：US18170526

申请日：2023-02-16

Applicant: BORRIES PTE. LTD.

Inventor： Wei Fang ,  Xiaoming Chen ,  Daniel Tang ,  Liang-Fu Fan ,  Zhongwei Chen

IPC: H01J37/20

CPC classification number: H01J37/20

Abstract: The present invention provides a MEMS sample holder comprising an observation section. The observation section includes a first layer, a second layer, and a sample compartment between the first layer and the second layer. The sample compartment is configured for filling a liquid sample and observing the liquid sample filled therewithin. The sample compartment has one, two or more windows through which an electron beam can pass. Each of the windows is formed on two cavities including a first cavity on the first layer and a second cavity on the second layer that is opposite to the first cavity across the sample compartment.

公开(公告)号：US20230170178A1

公开(公告)日：2023-06-01

申请号：US18158997

申请日：2023-01-24

Applicant: BORRIES PTE. LTD.

Inventor： Zhongwei Chen ,  Xiaoming Chen ,  Daniel Tang ,  Liang-Fu Fan

IPC: H01J37/22 ,  G01N23/2251 ,  H01J37/28 ,  H01J37/20 ,  G06T7/00

CPC classification number: H01J37/222 ,  G01N23/2251 ,  H01J37/28 ,  H01J37/20 ,  G06T7/0012 ,  H01J2237/2802 ,  H01J2237/2001 ,  H01J2237/204 ,  G06T2207/10061 ,  G06T2207/30024

Abstract: A rapid and automatic virus imaging and analysis system includes (i) electron optical sub-systems (EOSs), each of which has a large field of view (FOV) and is capable of instant magnification switching for rapidly scanning a virus sample; (ii) sample management sub-systems (SMSs), each of which automatically loads virus samples into one of the EOSs for virus sample scanning and then unloads the virus samples from the EOS after the virus sample scanning is completed; (iii) virus detection and classification sub-systems (VDCSs), each of which automatically detects and classifies a virus based on images from the EOS virus sample scanning; and (iv) a cloud-based collaboration sub-system for analyzing the virus sample scanning images, storing images from the EOS virus sample scanning, and storing and analyzing machine data associated with the EOSs, the SMSs, and the VDCSs.

公开(公告)号：US11854763B1

公开(公告)日：2023-12-26

申请号：US18046508

申请日：2022-10-14

Applicant: BORRIES PTE. LTD.

Inventor： Wei Fang ,  Xiaoming Chen ,  Daniel Tang ,  Liang-Fu Fan ,  Zhongwei Chen

IPC: H01J37/244 ,  G01N23/203

CPC classification number: H01J37/244 ,  G01N23/203 ,  G01N2223/053 ,  G01N2223/3302 ,  G01N2223/418 ,  G01N2223/646 ,  H01J2237/24475

Abstract: The present invention provides a backscattered electron (BSE) detector comprising two or more detection components that are electrically isolated from each other. Each of the detection components includes a single continuous top metal layer configured for directly receiving incident backscattered electrons and for backscattered electron to penetrate therethrough. The thickness of one of the top metal layers is different from the thickness of another one of the top metal layers. The BSE detector can be used in an apparatus of charged-particle beam for imaging a sample material. Signals from the detection components having top metal layers of different thicknesses can be inputted into different signal amplifier circuits to get different energy bands of BSE image.

公开(公告)号：US11664186B1

公开(公告)日：2023-05-30

申请号：US17817989

申请日：2022-08-07

Applicant: BORRIES PTE. LTD.

Inventor： Zhongwei Chen ,  Wei Fang ,  Xiaoming Chen ,  Daniel Tang ,  Liang-Fu Fan

IPC: H01J37/09 ,  H01J37/073 ,  H01J37/317 ,  H01J37/28 ,  H01J37/244

CPC classification number: H01J37/09 ,  H01J37/073 ,  H01J37/28 ,  H01J37/3174 ,  H01J37/244 ,  H01J2237/0455 ,  H01J2237/0473

Abstract: The present invention provides an apparatus of electron beam comprising an electron gun with a pinnacle limiting plate having at least one current-limiting aperture. The pinnacle limiting plate is located between a bottom (or lowest) anode and a top (or highest) condenser within the electron gun. A current (ampere) of the electron beam that has passed through the current-limiting aperture remains the same (unchanged) after the electron beam travels through the top condenser and an electron optical column and arrives at a sample space. Electron-electron interaction of the electron beam is thus reduced.

公开(公告)号：US11664189B2

公开(公告)日：2023-05-30

申请号：US17662655

申请日：2022-05-09

Applicant: BORRIES PTE. LTD.

Inventor： Zhongwei Chen ,  Xiaoming Chen ,  Daniel Tang ,  Liang-Fu Fan

IPC: H01J37/244 ,  H01J37/20 ,  H01J37/10 ,  H05H1/46 ,  B08B7/00 ,  H01J37/28 ,  H01J37/317

CPC classification number: H01J37/244 ,  B08B7/0035 ,  H01J37/10 ,  H01J37/20 ,  H01J37/28 ,  H05H1/4645 ,  H01J37/3174 ,  H01J2237/24475 ,  H05H2245/40

Abstract: The present invention provides an apparatus of charged-particle beam e.g. an electron microscope comprising a plasma generator for selectively cleaning BSE detector. In various embodiments, the plasma generator is located between a sample stage and a sample table having one or more openings or holes. The plasma generator generates plasma and distributes or dissipates the plasma through the openings of the sample table toward and onto surface of the BSE detector. Cleaning contaminants on the surface of the BSE detector frequently and selectively with in-situ generated plasma can prevent the detectors from performance deterioration such as losing resolution and contrast in imaging at high levels of magnification.

公开(公告)号：US20220262596A1

公开(公告)日：2022-08-18

申请号：US17662655

申请日：2022-05-09

Applicant: BORRIES PTE. LTD.

Inventor： Zhongwei Chen ,  Xiaoming Chen ,  Daniel Tang ,  Liang-Fu Fan

IPC: H01J37/244 ,  H01J37/20 ,  H01J37/10 ,  H05H1/46 ,  H01J37/28 ,  B08B7/00

Abstract: The present invention provides an apparatus of charged-particle beam e.g. an electron microscope comprising a plasma generator for selectively cleaning BSE detector. In various embodiments, the plasma generator is located between a sample stage and a sample table having one or more openings or holes. The plasma generator generates plasma and distributes or dissipates the plasma through the openings of the sample table toward and onto surface of the BSE detector. Cleaning contaminants on the surface of the BSE detector frequently and selectively with in-situ generated plasma can prevent the detectors from performance deterioration such as losing resolution and contrast in imaging at high levels of magnification.