公开(公告)号：US12133050B2

公开(公告)日：2024-10-29

申请号：US15931965

申请日：2020-05-14

Applicant: Infineon Technologies AG

Inventor： Darragh Francis Corrigan

IPC: H04R23/00 ,  B81B3/00 ,  B81C1/00 ,  G01H9/00 ,  G01S3/80 ,  G02B5/18 ,  G02B27/42 ,  G06F3/042 ,  G10L15/22 ,  G10L25/78 ,  H01H1/00

CPC classification number: H04R23/008 ,  G01H9/008 ,  B81B3/0083 ,  B81B2201/0264 ,  B81B2201/047 ,  B81C1/00158 ,  G01H9/004 ,  G01S3/80 ,  G02B5/1814 ,  G02B27/42 ,  G02B27/4233 ,  G06F3/042 ,  G10L15/22 ,  G10L25/78 ,  H01H1/0036 ,  H04R2410/00

Abstract: A device for sensing a motion of a deflectable surface includes a deflectable element having a first side beam deflectable and includes a reflective surface at a second side of the deflectable element, proposing the first side. The device includes an optical emitter for emitting an optical signal towards the reflective surface and an optical receiver for receiving a reflected optical signal from the reflective surface and for providing a reception signal based on a reflective optical signal. The device includes a control unit in communication with the optical receiver for determining information related to the motion of the deflectable element based on the reception signal.

公开(公告)号：US20240101411A1

公开(公告)日：2024-03-28

申请号：US17952359

申请日：2022-09-26

Applicant: AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD.

Inventor： Taimoor Ali

IPC: B81B3/00 ,  H04R23/00

CPC classification number: B81B3/0021 ,  H04R23/008 ,  B81B2201/0257 ,  B81B2201/047 ,  B81B2203/0127 ,  B81B2203/0307 ,  B81B2203/0315 ,  B81B2203/0353 ,  B81B2203/053 ,  H04R2201/003

Abstract: An MEMS optical microphone, including: a shell including an inner cavity and a sound inlet that communicates the inner cavity with outside; a MEMS module including a diaphragm suspended in the inner cavity, a light flap is formed in the diaphragm, when an acoustic pressure is applied, an aperture is formed by opening of the light flap, and a size of the aperture increases or decreases with a magnitude of the acoustic pressure applied; an optoelectronic module including an electromagnetic radiation source and a sensor arranged on opposite sides of the diaphragm, and a light beam passes through the aperture to the sensor; and an integrated circuit module electrically connected with the optoelectronic module. Advantages of high sensitivity and flat frequency response are realized.

公开(公告)号：US11722120B1

公开(公告)日：2023-08-08

申请号：US17391126

申请日：2021-08-02

Applicant: National Technology & Engineering Solutions of Sandia, LLC

Inventor： Michael Wood ,  Alejandro J. Grine ,  Darwin K. Serkland ,  Alexander Ruyack

IPC: H03H9/24 ,  B81B3/00 ,  H03H9/02

CPC classification number: H03H9/2431 ,  B81B3/0027 ,  H03H9/02259 ,  B81B2201/0271 ,  B81B2201/047 ,  B81B2203/0307 ,  B81B2203/04

Abstract: A microelectromechanical systems (MEMS)-tunable optical ring resonator is described herein. The ring resonator includes a resonator ring and a tuner ring, along with one or more springs. The springs may be internal or external, i.e., either within or outside the areal footprint of the resonator ring and the tuner ring. The one or more springs are configured to displace the tuner ring from the resonator ring by a desired gap based upon a desired resonant wavelength of the resonator ring. Tuning is implemented by applying a voltage to the ring resonator, with motion of the tuner ring causing a corresponding change in the effective index of the resonator ring. As the ring resonator is essentially a capacitive device, it draws very little power once tuning is achieved.

公开(公告)号：US11681155B2

公开(公告)日：2023-06-20

申请号：US16985110

申请日：2020-08-04

Applicant: Teledyne Micralyne Inc.

Inventor： Glen Fitzpatrick ,  John Harley

IPC: G02B27/42 ,  G02B26/08 ,  G02B5/18

CPC classification number: G02B27/4233 ,  G02B5/1828 ,  G02B26/0841 ,  B81B2201/047

Abstract: A micro-electromechanical structure for modulating light beams includes multiple asymmetric deformable diffractive elements, each having an L-shaped cross section, split pedestal and flexible reflective member. The reflective member has an elongated shape, and a supported part and unsupported part. The split pedestal extends along the long dimension of the supported part of the reflective member and is anchored to a substrate which supports one or more electrodes or serves as an electrode. The diffractive element is movable between a non-energized position wherein the diffractive element acts to reflect a beam of light as a planar mirror, to an energized position wherein upon application of an electrostatic force, the diffractive element flexes independently about an axis parallel to the long dimension of each reflective member to vary a curvature of the reflective member to form a blazed grating.

公开(公告)号：US20180249258A1

公开(公告)日：2018-08-30

申请号：US15961416

申请日：2018-04-24

Applicant: Infineon Technologies AG

Inventor： Ulf Bartl ,  Alfons Dehe

IPC: H04R23/00 ,  G02B27/42 ,  B81C1/00 ,  G02B5/18 ,  H04R31/00

CPC classification number: H04R23/008 ,  B81B3/0083 ,  B81B2201/0264 ,  B81B2201/047 ,  B81C1/00158 ,  G02B5/1814 ,  G02B27/4233 ,  H04R7/18 ,  H04R23/00 ,  H04R31/003 ,  H04R2201/003 ,  H04R2207/021 ,  H04R2307/207

Abstract: According to an embodiment, an optical MEMS transducer includes a diffraction structure including alternating first reflective elements and openings arranged in a first plane, a reflection structure including second reflective elements and configured to deflect with respect to the diffraction structure, and an optical element configured to direct a first optical signal at the diffraction structure and the reflection structure and to receive a second optical signal from the diffraction structure and the reflection structure. The second reflective elements are arranged in the first plane when the reflection structure is at rest. Other embodiments include corresponding systems and apparatus, each configured to perform various embodiment methods.

公开(公告)号：US09969611B1

公开(公告)日：2018-05-15

申请号：US15829325

申请日：2017-12-01

Applicant: Eagle Technology, LLC

Inventor： Arlynn W. Smith ,  Dan Chilcott

IPC: H01J1/62 ,  B81B7/00 ,  H01J31/12 ,  H01J29/00 ,  H01J29/18

CPC classification number: B81B7/0064 ,  B81B7/0038 ,  B81B2201/047 ,  H01J29/003 ,  H01J29/18 ,  H01J31/12 ,  H01J2229/0046

Abstract: An improved microelectromechanical device includes an upper plate, a lower plate, and a spacing structure. The upper plate includes a first surface and an opposite second surface. The lower plate is spaced from the upper plate. The lower plate includes a third surface that faces the first surface of the upper plate and a fourth surface that is opposite of the third surface. The lower plate also includes a series of structures disposed with the third surface of the lower plate. The spacing structure is coupled to the upper and lower plate. The spacing structure includes a base portion that is sealed to the first surface of the upper plate and the third surface of the lower plate. The spacing structure further includes a protrusion that extends from the base portion between the upper and lower plates.

公开(公告)号：US20180123085A1

公开(公告)日：2018-05-03

申请号：US15848997

申请日：2017-12-20

Applicant: FUJIFILM Corporation

Inventor： Kenichi KAKISHITA ,  Satoshi KUNIYASU ,  Kyohisa UCHIUMI ,  Makoto KAMO ,  Tatsuya OBA

IPC: H01L51/52 ,  H01L51/50 ,  G02F1/017 ,  B82Y20/00

CPC classification number: H01L51/5253 ,  B32B3/02 ,  B81B2201/047 ,  B81C1/00206 ,  B82Y20/00 ,  G02B1/14 ,  G02B5/20 ,  G02F1/01708 ,  G02F2001/01791 ,  H01L33/50 ,  H01L51/502

Abstract: The present invention provides a functional film having an optical functional layer that exhibits an optical function and is capable of suppressing deterioration of the optical functional layer, and a method thereof. The functional film includes an optical functional layer, a resin layer which surrounds end surfaces of the optical functional layer, and gas barrier supports between which the optical functional layer and the resin layer are sandwiched, in which an oxygen permeability of the resin layer is 10 cc/(m2·day·atm) or less, and a difference between a thickness of the optical functional layer and the resin layer is within 30%; and a production method including forming a frame-shaped resin layer on a surface of a first gas barrier support, filling the inside of the frame with a polymerizable composition which becomes an optical functional layer, laminating a second gas barrier support on the resin layer, and curing the polymerizable composition.

公开(公告)号：US20170363822A1

公开(公告)日：2017-12-21

申请号：US15607133

申请日：2017-05-26

Applicant: Kaiam Corp.

Inventor： Bardia Pezeshki ,  Michael Sherback ,  Dinh Ton

IPC: G02B6/42 ,  G02B6/36 ,  B81B3/00 ,  G02B26/08 ,  G02B7/00

CPC classification number: G02B6/4219 ,  B81B3/0045 ,  B81B2201/04 ,  B81B2201/047 ,  B81B2203/0118 ,  G02B6/3656 ,  G02B6/366 ,  G02B6/4204 ,  G02B6/4244 ,  G02B6/4266 ,  G02B7/003 ,  G02B7/004 ,  G02B26/0808 ,  G02B26/0875

Abstract: A MEMS based alignment technology based on mounting an optical component on a released micromechanical lever configuration that uses multiple flexures rather than a single spring. The optical component may be a lens. The use of multiple flexures may reduce coupling between lens rotation and lens translation, and reduce effects of lever handle warping on lens position. The device can be optimized for various geometries.

公开(公告)号：US09815689B2

公开(公告)日：2017-11-14

申请号：US15150890

申请日：2016-05-10

Applicant: GlobalMEMS TAIWAN CORPORATION LIMITED

Inventor： Su-Jhen Lin ,  Ming-Ching Wu

IPC: B81B7/02 ,  G02B7/02 ,  G02B7/09 ,  G03B13/36 ,  G02B7/182 ,  B81B3/00 ,  G02B7/08 ,  H02K33/18 ,  G02B27/64

CPC classification number: B81B7/02 ,  B81B3/00 ,  B81B2201/047 ,  G02B7/02 ,  G02B7/08 ,  G02B7/182 ,  G02B27/646 ,  G03B13/36 ,  H02K33/18

Abstract: A micro-electromechanical system (MEMS) carrier formed by a typical surface micro-machining and bulk micro-machining process on a silicon substrate, having a frame, a movable carrier element, a conductive coil, two return springs and a pair of permanent magnets. The movable carrier element is formed within the frame and movable along a path, the conductive coil is formed on or embedded in the movable carrier element. The two return springs are formed between the movable carrier element and the frame thereby connecting the movable carrier element to the frame and providing a return force to the carrier element, and the pair of permanent magnets are formed a magnetic field for co-acting with the conductive coil for generating an electromagnetic Lorentz force to drive the movable carrier element to move against the return force of the two return springs.

公开(公告)号：US20170248628A1

公开(公告)日：2017-08-31

申请号：US15444162

申请日：2017-02-27

Applicant: mCube, Inc.

Inventor： Sanjay BHANDARI ,  Ken WANG ,  Ben LEE

IPC: G01P15/08 ,  B81B7/00

CPC classification number: G01P15/08 ,  B81B7/0074 ,  B81B7/0087 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2201/0292 ,  B81B2201/047 ,  B81B2207/012 ,  G01P15/0802 ,  H01L2224/32145 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/00014

Abstract: A method for operating an electronic device comprising a first and second MEMS device and a semiconductor substrate disposed upon a mounting substrate includes subjecting the first MEMS device and the second MEMS device to physical perturbations, wherein the physical perturbations comprise first physical perturbations associated with the first MEMS device and second physical perturbations associated with the second MEMS device, wherein the first physical perturbations and the second physical perturbations are substantially contemporaneous, determining in a plurality of CMOS circuitry formed within the one or more semiconductor substrates, first physical perturbation data from the first MEMS device in response to the first physical perturbations and second physical perturbation data from the second MEMS device in response to the second physical perturbations, determining output data in response to the first physical perturbation data and to the second physical perturbation data, and outputting the output data.