公开(公告)号：US20030041623A1

公开(公告)日：2003-03-06

申请号：US09913632

申请日：2001-08-16

Inventor： Waltraud Werdecker ,  Johann Leist

IPC: C03B019/09 ,  C03B020/00

CPC classification number: C03C3/06 ,  C03B19/09 ,  C03B19/095 ,  C03B2201/04 ,  C03C2201/02 ,  C03C2201/23 ,  C03C2201/80 ,  C30B15/10 ,  C30B35/002 ,  Y10S65/04 ,  Y10T428/131

Abstract: In order to provide a quartz glass crucible distinguished by high purity, high opacity and/or low transmissibility in the IR spectrum, it is proposed on the basis of a known quartz glass crucible of opaque quartz glass with a crucible body symmetrical in relation to a rotational axis, an outer zone (3) of opaque quartz glass transitioning radially toward the inside into an inner zone (2) of transparent quartz glass and with a density of at least 2.15 g/cm3, that according to the invention, the crucible body (1) be made of a synthetic SiO2 granulate with a specific BET surface ranging from 0.5 m2/g to 40 m2/g, a tamped volume of at least 0.8 g/cm3 and produced from at least partially porous agglomerates of SiO2 primary particles. A process for producing a quartz glass crucible of this kind is distinguished according to the invention in that for the production of the crucible a SiO2 granulate is used which was formed from at least partially porous agglomerates of synthetically manufactured SiO2 primary particles and that it has a specific BET surface ranging from 0.5 m2/g to 40 m2/g and a tamped volume of at least 0.8 g/cm3, the heating effected in such a way that a vitrification front advances from the inside outward while an inner zone (4) of transparent quartz glass is being formed.

Abstract translation: 为了提供在IR光谱中具有高纯度，高不透明性和/或低透射率的石英玻璃坩埚，提出了在已知的不透明石英玻璃的石英玻璃坩埚的基础上，坩埚体相对于 旋转轴线，不透明石英玻璃的外部区域（3），径向朝向内部转变成透明石英玻璃的内部区域（2），密度为至少2.15g / cm 3，根据本发明，坩埚体 （1）由具有0.5m 2 / g至40m 2 / g的比BET表面的合成SiO 2颗粒制成，捣实体积至少为0.8g / cm 3并由SiO 2一次颗粒的至少部分多孔的附聚物制成。 根据本发明，制造这种石英玻璃坩埚的方法的不同之处在于，对于坩埚的制造，使用由至少部分多孔的合成SiO 2原生颗粒的聚集体形成的SiO 2颗粒，并且其具有 比表面积为0.5m2 / g〜40m2 / g，捣实体积为0.8g / cm 3以上，使玻璃化前沿从内侧向前方前进，同时将内部区域（4） 正在形成透明的石英玻璃。

公开(公告)号：US20020157419A1

公开(公告)日：2002-10-31

申请号：US10137098

申请日：2002-05-01

Inventor： Rahul Ganguli ,  Enrico C.J. Westenberg

IPC: C03B008/02

CPC classification number: C03C3/06 ,  C03B19/12 ,  C03C2201/02 ,  C03C2201/32 ,  C03C2201/3476 ,  C03C2201/36 ,  C03C2201/40 ,  C03C2201/42 ,  C03C2203/22 ,  C03C2203/26 ,  C03C2203/34

Abstract: An improved sol-gel process is disclosed for producing a synthetic silica glass article, in which a sol is formed having a silica loading as high as 34 to 40%. This high loading is achieved by introducing an aqueous colloidal silica suspension into a silicon alkoxide solution and slowly stirring the mixture together, during which time the mixture hydrolyzes and the colloidal suspension is broken down by chemical reaction. This produces a hydrolyzed sol incorporating a suspension of very fine aggregates of colloidal particles, having particle sizes less than about 10 microns. The need for a stabilizing agent and/or continuous ultra-sonicating or violently stirring the sol is eliminated.

Abstract translation: 公开了一种改进的溶胶 - 凝胶法，用于生产合成石英玻璃制品，其中形成具有高达34至40％的二氧化硅载量的溶胶。 通过将水性胶体二氧化硅悬浮液引入硅烷醇溶液中并缓慢搅拌混合物来实现该高负载，在此期间混合物水解，并且胶体悬浮液通过化学反应分解。 这产生了一种水合溶胶，其结合了非常细的胶体颗粒聚集体的悬浮液，其具有小于约10微米的粒度。 消除了对稳定剂和/或连续超声波或剧烈搅拌溶胶的需要。

公开(公告)号：US06380110B1

公开(公告)日：2002-04-30

申请号：US09484113

申请日：2000-01-14

Applicant: Waltraud Werdecker ,  Heinz Fabian ,  Udo Gertig ,  Johann Leist ,  Rolf Göbel

Inventor： Waltraud Werdecker ,  Heinz Fabian ,  Udo Gertig ,  Johann Leist ,  Rolf Göbel

IPC: C03B2000

CPC classification number: C03C1/026 ,  C03B19/1065 ,  C03C3/06 ,  C03C2201/02 ,  C03C2201/24 ,  C03C2201/26 ,  C03C2201/32 ,  C03C2201/80 ,  C03C2203/10 ,  C03C2203/54

Abstract: In a known process for the production of opaque quartz glass a blank is formed from synthetic SiO2 granulate and is heated at a vitrification temperature to form a body of opaque quartz glass. In order to provide on this basis a process for the production of pure opaque quartz glass with a homogenous pore distribution, high density, high viscosity and a low tendency to devitrify, it is proposed according to the invention that the SiO2 granulate to be used is a SiO2 granulate (21; 31) composed of at least partially porous agglomerates of SiO2 primary particles, with a specific BET surface ranging from 1.5 m2/g to 40 m2/g and an apparent density of at least 0.8 g/cm3. A SiO2 granulate (21; 31) suitable for the implementation of the process is distinguished in that it is formed from at least partially porous agglomerates of SiO2 primary particles and in that it has a specific BET surface ranging from 1.5 m2/g to 40 m2/g and an apparent density of at least 0.6 g/cm3.

Abstract translation: 在制造不透明石英玻璃的已知方法中，由合成SiO 2颗粒形成坯料，并在玻璃化温度下加热以形成不透明石英玻璃体。 为了在此基础上提供具有均匀孔分布，高密度，高粘度和低失透倾向的纯不透明石英玻璃的制备方法，根据本发明提出使用的SiO 2颗粒是 SiO 2颗粒（21; 31），其由SiO 2一次颗粒的至少部分多孔的附聚物组成，BET比表面积为1.5m 2 / g至40m 2 / g，表观密度为至少0.8g / cm 3。 适用于实施该方法的SiO 2颗粒（21; 31）的特征在于其由SiO 2一次颗粒的至少部分多孔的附聚物形成，并且其具有范围为1.5m 2 / g至40m 2的比BET表面积 / g，表观密度为0.6g / cm 3以上。

公开(公告)号：US06309991B1

公开(公告)日：2001-10-30

申请号：US09254114

申请日：1999-02-25

Applicant: Nicholas F. Borrelli ,  Thomas P. Seward, III ,  Charlene Smith

Inventor： Nicholas F. Borrelli ,  Thomas P. Seward, III ,  Charlene Smith

IPC: C03C306

CPC classification number: G03F7/70958 ,  C03B19/06 ,  C03B19/066 ,  C03B19/1065 ,  C03B19/1453 ,  C03B20/00 ,  C03B2207/32 ,  C03C1/006 ,  C03C3/06 ,  C03C23/0025 ,  C03C2201/02 ,  C03C2203/50 ,  G03F7/70058 ,  G03F7/70216

Abstract: Fused silica stepper lens for photolithographic application are disclosed which are resistant to laser-induced damage, specifically, compaction or densification which can lead to an increase in the optical path length of the lens. The figure compares the phase front distortions of a standard fused silica with the phase front distortions observed in two inventive stepper lens fused silica.

Abstract translation: 公开了用于光刻应用的熔融二氧化硅步进透镜，其耐受激光诱发的损伤，特别是压实或致密化，这可导致透镜的光程长度的增加。 该图将标准熔融石英的相位前变形与在两个创新的步进透镜熔融二氧化硅中观察到的相位前变形进行比较。

公开(公告)号：US6131409A

公开(公告)日：2000-10-17

申请号：US952495

申请日：1997-11-26

Applicant: Yoshio Katsuro ,  Takanobu Katsuki ,  Akihiro Takazawa ,  Hanako Kato ,  Akira Utsunomiya

Inventor： Yoshio Katsuro ,  Takanobu Katsuki ,  Akihiro Takazawa ,  Hanako Kato ,  Akira Utsunomiya

IPC: C01B33/18 ,  C03B8/02 ,  C03B19/01 ,  C03B19/09 ,  C03B19/10 ,  C03C3/06 ,  C03B8/00

CPC classification number: C03B19/095 ,  C01B33/18 ,  C03B19/01 ,  C03B19/09 ,  C03B19/1065 ,  C03C3/06 ,  C01P2006/80 ,  C03B2201/03 ,  C03C2201/02 ,  C03C2203/26 ,  Y10S65/08

Abstract: A method for producing a high purity synthetic quartz powder, characterized by using a tetramethoxysilane having a trimethoxymethylsilane content of at most 0.3 wt %, and converting it to a synthetic quartz by a sol-gel method.

Abstract translation: PCT No.PCT / JP96 / 01362 Sec。 371日期：1997年11月26日 102（e）1997年11月26日PCT PCT 1996年5月23日PCT公布。 WO96 / 37434 PCT公开号 日期：1996年11月28日制造高纯度合成石英粉末的方法，其特征在于，使用三甲氧基甲基硅烷含量为0.3重量％以下的四甲氧基硅烷，并通过溶胶 - 凝胶法将其转化为合成石英。

公开(公告)号：US5896222A

公开(公告)日：1999-04-20

申请号：US985552

申请日：1997-12-05

Applicant: Cynthia K. Rosplock ,  Daniel R. Sempolinski

Inventor： Cynthia K. Rosplock ,  Daniel R. Sempolinski

IPC: G02B1/04 ,  C03B19/14 ,  C03C3/06 ,  C03C4/00 ,  G02B13/14 ,  C03B19/09

CPC classification number: C03B19/1415 ,  C03C3/06 ,  C03C4/0085 ,  C03B2201/21 ,  C03B2207/32 ,  C03C2201/02 ,  C03C2201/21 ,  C03C2203/40 ,  Y10S501/905

Abstract: A method of producing a fused silica glass by thermally converting a polymethylsiloxane precursor, the lens transmitting ultraviolet radiation at wavelengths below 300 nm. without undergoing a marked absorption transition, the lens so produced, and a microlithography system employing a lens of such glass.

Abstract translation: 通过热转化聚甲基硅氧烷前体制备熔融石英玻璃的方法，该透镜透射波长在300nm以下的紫外线。 没有经历显着的吸收转变，如此生产的透镜，以及采用这种玻璃的透镜的微光刻系统。

公开(公告)号：US5876473A

公开(公告)日：1999-03-02

申请号：US727552

申请日：1996-10-25

Applicant: Kyoichi Inaki ,  Tohru Segawa ,  Nobumasa Yoshida ,  Mamoru Endo

Inventor： Kyoichi Inaki ,  Tohru Segawa ,  Nobumasa Yoshida ,  Mamoru Endo

IPC: C03B20/00 ,  C03B32/02 ,  C03C3/06 ,  C03C14/00 ,  C03B5/00 ,  C03C10/14

CPC classification number: C03C14/004 ,  C03B20/00 ,  C03B32/02 ,  C03C3/06 ,  C03C2201/02 ,  C03C2201/80 ,  C03C2214/20 ,  C03C2214/30

Abstract: Cristobalite-containing silica glass is provided wherein .alpha.-cristobalite in the shape of a small sphere or a small, round-edged or sharp-edged, three-dimensional region is dispersed in the silica glass matrix. The diameter of each .alpha.-cristobalite sphere or region is, in the range of 0.1 um to 1000 um, and the content of the .alpha.-cristobalite is at least 10 wt. %. The cristobalite-containing silica glass is produced by heating a mixture of two kinds or more of crystalline silicon dioxide powder with melting points different from each other by 20.degree. C. or more. The mixture contains silicon dioxide having the highest melting point in the range of 10 wt. % to 80 Wt. % and is heated at temperatures ranging from the lowest melting point to a temperature lower than the highest melting point.

Abstract translation: PCT No.PCT / EP96 / 00794 Sec。 371日期1996年10月25日第 102（e）日期1996年10月25日PCT 1996年2月27日PCT公布。 公开号WO96 / 26908 日本1996年9月6日提供了含方石英的二氧化硅玻璃，其中将小球形或小圆形边缘或锐边三维区域形成的α-方英石分散在石英玻璃基质中。 每个α-方解石球体或区域的直径在0.1μm至1000μm的范围内，并且α-方英石的含量为至少10wt。 ％。 通过将两种以上的结晶二氧化硅粉末的熔点彼此不同的混合物加热20℃以上来制造含方石英的石英玻璃。 该混合物含有熔点最高在10wt。％范围内的二氧化硅。 至80 Wt。 并且在从最低熔点到低于最高熔点的温度的温度下加热。

公开(公告)号：US5772714A

公开(公告)日：1998-06-30

申请号：US682962

申请日：1996-07-18

Applicant: Tatsuhiro Sato ,  Akira Fujinoki ,  Kyoichi Inaki ,  Nobumasa Yoshida ,  Tohru Yokota

Inventor： Tatsuhiro Sato ,  Akira Fujinoki ,  Kyoichi Inaki ,  Nobumasa Yoshida ,  Tohru Yokota

IPC: C03B5/02 ,  C03B5/08 ,  C03B19/09 ,  C03B20/00 ,  C03C3/06

CPC classification number: C03B5/08 ,  C03B19/09 ,  C03B20/00 ,  C03B5/021 ,  C03C3/06 ,  C03C2201/02 ,  C03C2201/80 ,  Y10S501/904 ,  Y10S501/905 ,  Y10T428/249969

Abstract: A process for producing opaque silica glass in which a quartz raw material grain having a particle size of 10 to 350 .mu.m is filled into a heat resistant mold, the quartz raw material grain is heated in a non-oxidizing atmosphere from a room temperature up to a temperature lower by 50.degree. to 150.degree. C. than a temperature at which the above raw material grain is melted at a temperature-increase speed not exceeding 50.degree. C./minute, then, slowly heated up to a temperature higher by 10.degree. to 80.degree. C. than the temperature at which the quartz raw material grain is melted at the speed of 10.degree. C./minute or less, and the heated quartz raw material grain is further maintained at the temperature higher by 10.degree. to 80.degree. C. than the temperature at which the quartz raw material grain is melted, followed by cooling down to the room temperature. Especially, in the case of producing a large scale opaque silica glass block, a quartz raw material grain filled into a heat-resistant mold is heated by a belt-like heating source located perpendicularly to a trunk of a filling layer of the quartz raw material grain so as to form a moving heating zone in the filling layer and the heating zone is successively moved either upwardly starting at the lower end portion of the filling layer or downwardly starting at the upper end portion thereof in a non-oxidizing atomosphere.

Abstract translation: 将具有10〜350μm粒径的石英原料颗粒填充到耐热性模具中的不透明石英玻璃的制造方法，将石英原料颗粒从室温下在非氧化性气氛中加热 比上述原料颗粒以不超过50℃/分钟的升温速度熔化的温度低于50℃至150℃的温度，然后缓慢加热至高于10℃的温度 相对于石英原料粒子以10℃/分钟以下的速度熔融的温度为80℃以下，加热的石英原料粒子进一步保持在10〜80℃ 比石英原料晶粒熔化的温度高，然后冷却至室温。 特别是，在生产大型不透明石英玻璃块的情况下，填充在耐热性模具中的石英原料颗粒通过垂直于石英原料填充层的树干的带状加热源加热 从而在填充层中形成移动的加热区域，并且加热区域从填充层的下端部开始向上移动，或者从非氧化性空气的上端向下移动。

公开(公告)号：US5264197A

公开(公告)日：1993-11-23

申请号：US811326

申请日：1991-12-20

Applicant: Shiho Wang ,  Satyabrata Raychaudhuri ,  Arnab Sarkar

Inventor： Shiho Wang ,  Satyabrata Raychaudhuri ,  Arnab Sarkar

IPC: C01B33/152 ,  C01B33/158 ,  C03B8/02 ,  C03B19/12 ,  C03C1/00 ,  C03C3/06 ,  B01J13/00

CPC classification number: C03B19/12 ,  C01B33/1585 ,  C03C1/006 ,  C03C3/06 ,  C03C2201/02 ,  C03C2203/26

Abstract: An improved sol-gel process for fabricating large, crack-free gel monoliths (e.g., of silica) is described in which a specially-tailored gel microstructure is provided by adjusting the relative concentrations of an alcohol diluent (e.g., ethanol) and/or one or more catalysts (e.g., HCl and HF). Controlled variations in the gel's average pore radius, bulk density, rupture modulus, and elastic modulus over a wide range can be tailored in this fashion. This enables the process to be optimized for the particular application involved.

Abstract translation: 描述了用于制造大的无裂纹凝胶整料（例如，二氧化硅）的改进的溶胶 - 凝胶方法，其中通过调节醇稀释剂（例如乙醇）和/或 一种或多种催化剂（例如HCl和HF）。 可以以这种方式调整凝胶的平均孔半径，体积密度，断裂模量和宽范围内的弹性模量的控制变化。 这使得针对所涉及的特定应用来优化该过程。

公开(公告)号：US5063179A

公开(公告)日：1991-11-05

申请号：US490005

申请日：1990-03-02

Applicant: Jameel Menashi ,  Kenneth C. Koehlert

Inventor： Jameel Menashi ,  Kenneth C. Koehlert

IPC: C01B33/12 ,  C03C1/00 ,  C03C3/06 ,  C04B35/14

CPC classification number: C01B33/12 ,  C03C1/006 ,  C03C3/06 ,  C04B35/14 ,  C03C2201/02

Abstract: A process for making non-porous, dense, silica partices having a diameter of about 3 to 1000 microns, a nitrogen B.E.T. surface area less than about 1 m.sup.2 /g, a total impurity content of less than about 50 ppm and a metal impurity content content of less than about 15 ppm from an aqueous dispersion of fumed silica. The particles are converted into porous particles and sintered in an atmosphere having a water partial pressure of from about 0.2 to about 0.8 atmosphere for temperatures below about 1200.degree. C.

Abstract translation: 一种制造直径为约3至1000微米的无孔密实二氧化硅颗粒的方法，一种氮B.E.T. 表面积小于约1m 2 / g，总杂质含量小于约50ppm，金属杂质含量小于约15ppm。 将颗粒转化成多孔颗粒并在具有约0.2至约0.8气氛的水分压的气氛中在低于约1200℃的温度下烧结。