Three-photon light sheet imaging
    92.
    发明授权

    公开(公告)号:US11762180B2

    公开(公告)日:2023-09-19

    申请号:US16622542

    申请日:2018-06-15

    Inventor: Kishan Dholakia

    Abstract: A light sheet imaging system, such as a light sheet microscope, comprises an illumination arrangement for generating a light sheet for three-photon excitation of a fluorescent sample, and a fluorescence collection arrangement for collecting fluorescence generated in the sample as a result of three-photon excitation by the light sheet. The light sheet may be a non-diffractive, propagation-invariant light sheet. The light sheet may be formed from and/or comprise a Bessel beam. A method of light sheet imaging comprises using a light sheet for three-photon excitation of a fluorescent sample, and collecting fluorescence generated in the sample as a result of three-photon excitation of the sample by the light sheet. Such a method may be used for light sheet microscopy.

    ELLIPSOMETER AND APPARATUS FOR INSPECTING SEMICONDUCTOR DEVICE INCLUDING THE ELLIPSOMETER

    公开(公告)号:US20230152213A1

    公开(公告)日:2023-05-18

    申请号:US17967228

    申请日:2022-10-17

    Inventor: Yasuhiro HIDAKA

    Abstract: An ellipsometer capable of improving a throughput calculating ellipsometry coefficients (ψ, Δ) even when performing measurement with a combination of a light source having a wide wavelength band and a spectrometer, and an apparatus for inspecting a semiconductor device is e hid g the ellipsometer may be provided. The ellipsometer includes a polarizing optical element unit for separating reflected light into two polarization components having polarization directions that are orthogonal to each other in a radial direction with respect to an optical axis of an optical system of the reflected light, an analyzer unit for transmitting components of a direction different from the polarization directions of the two polarization components to make the two polarization components interfere with each other, and to form an interference fringe in a form of a concentric circle, an image detector for detecting the interference fringe, and processing circuitry for calculating ellipsometry coefficients from the interference fringe.

    CLOSE-COUPLED ANALYSER
    98.
    发明申请

    公开(公告)号:US20180202926A1

    公开(公告)日:2018-07-19

    申请号:US15581153

    申请日:2017-04-28

    Abstract: A laser detection system comprises a sample chamber configured to receive and contain a volume of sample gas, one or more lasers within at least one laser housing, wherein each laser is configured to produce a respective laser beam for excitation of one or more different materials in the sample gas and the one or more lasers are outside the sample chamber, a detector apparatus for detecting light output from the sample chamber, a first optical interface to the sample chamber having at least one window that is at least partially transparent to the laser beams from the one or more lasers, wherein the at least one laser housing is positioned in a close-coupling arrangement relative to the at least one window of the first optical interface such that, in use, the laser beams are substantially unmodified by passage between the laser housing and the at least one window.

    Measuring device and non-transitory computer readable medium

    公开(公告)号:US09989461B2

    公开(公告)日:2018-06-05

    申请号:US15200286

    申请日:2016-07-01

    Inventor: Hiroyuki Hotta

    Abstract: A measuring device includes a light-emitting unit that radiates light onto an object, a first lens that changes a divergence degree of the light, a diaphragm having an aperture that reduces a diameter of the light, a second lens that converges and radiates the light onto the object, a light-receiving unit that receives at least part of the light that has been reflected by the object and that has passed through the second lens, a measuring unit that measures the object by using results related to the light-receiving unit, a reflector whose angle with respect to the light is adjustable, and a correction unit that varies a light-receiving position on the light-receiving unit by varying the reflector's angle and corrects a light amount of the light-emitting unit and a sensitivity of the light-receiving unit by using results obtained at each light-receiving position.

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