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公开(公告)号：US20050219529A1
公开(公告)日：2005-10-06
申请号：US11089783
申请日：2005-03-25
Applicant: Nataliya Nabatova-Gabain , Seiichi Hirakawa , Yoko Wasai
Inventor： Nataliya Nabatova-Gabain , Seiichi Hirakawa , Yoko Wasai
CPC classification number: G01N21/211 , G01N2021/213
Abstract: A sample, in which a dielectric film having a dielectric constant equal to or larger than 50 (based on electrical measurement) is formed on a substrate, is measured by an ellipsometer while a model corresponding to the sample is formed based on effective medium approximation (EMA). A film corresponding to the dielectric film of the model includes void volume fraction between 60% and 90%. A calculated value based on the model is compared with a value measured by the ellipsometer and fitting is applied to decrease a difference between the compared values in order to specify the thickness and the optical constant of the sample.
Abstract translation: 在基板上形成介电常数等于或大于50（基于电测量）的电介质膜的样品通过椭偏仪测量，同时基于有效介质近似形成与样品相对应的模型（ EMA）。 对应于该模型的电介质膜的膜包括60％至90％之间的空隙体积分数。 将基于该模型的计算值与椭偏仪测量的值进行比较，并应用拟合来减小比较值之间的差异，以便指定样品的厚度和光学常数。
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公开(公告)号：US06947137B2
公开(公告)日：2005-09-20
申请号：US10733792
申请日：2003-12-11
Applicant: Robert W. Sharps
Inventor： Robert W. Sharps
IPC: G01J4/00 , G01J4/04 , G01N21/23 , G01N21/958 , G02F1/00
CPC classification number: G01N21/958 , G01J4/04 , G01N21/23
Abstract: A system and method are described herein for determining the quality of an optical material by measuring and analyzing birefringence (e.g., stress-induced birefringence, inherent birefringence) in the optical material (e.g., glass sheet). The method is a scanning technique in which a birefringence sensor is set to a first optical state and then moved in a direction at a constant velocity over a glass sheet while first power transmission measurements are made at a high data rate. At the end of this move, the birefringence sensor is set to a second optical state and then moved at the same velocity back over the glass sheet, while second power transmission measurements are made. This procedure is repeated the same number of times as there are optical states in the birefringence sensor. A computer then calculates birefringence values using profiles of the power transmission measurements so as to determine the quality of the glass sheet.
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93.发明申请公开(公告)号：US20050163365A1
公开(公告)日：2005-07-28
申请号：US11045703
申请日：2005-01-28
Applicant: Blair Barbour
Inventor： Blair Barbour
IPC: G01B11/24 , G01J3/28 , G01J3/36 , G01J3/447 , G01J4/04 , G01J9/00 , G06K7/00 , G06K9/00 , G06K9/36 , H01Q3/26
CPC classification number: G01B11/24 , G01J3/2823 , G01J3/36 , G01J3/447 , G01J4/04 , G01J9/00 , G01J2009/002
Abstract: An apparatus for information extraction from electromagnetic energy via multi-characteristic spatial geometry processing to determine three-dimensional aspects of an object from which the electromagnetic energy is proceeding. The apparatus receives the electromagnetic energy. The received electromagnetic energy has a plurality of spatial phase characteristics. The apparatus separates the plurality of spatial phase characteristics of the received electromagnetic energy. The apparatus r identifies spatially segregated portions of each spatial phase characteristic, with each spatially segregated portion of each spatial phase characteristic corresponding to a spatially segregated portion of each of the other spatial phase characteristics in a group. The apparatus quantifies each segregated portion to provide a spatial phase metric of each segregated portion for providing a data map of the spatial phase metric of each separated spatial phase characteristic. The apparatus processes the spatial phase metrics to determine surface contour information for each segregated portion of the data map.
Abstract translation: 一种用于通过多特征空间几何处理从电磁能量提取信息以确定电磁能量正在进行的物体的三维方面的装置。 该装置接收电磁能。 所接收的电磁能具有多个空间相位特性。 该装置分离接收的电磁能的多个空间相位特性。 装置r识别每个空间相位特征的空间分离的部分，每个空间相位特征的每个空间分离的部分对应于一组中的每个其他空间相位特征的空间上分离的部分。 该装置对每个隔离部分进行量化以提供每个分离部分的空间相位度量，以提供每个分离的空间相位特性的空间相位度量的数据图。 该装置处理空间相位度量以确定数据图的每个分离部分的表面轮廓信息。
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公开(公告)号：US20050157295A1
公开(公告)日：2005-07-21
申请号：US10927929
申请日：2004-08-27
Applicant: Won Chegal , Hyun Cho , Yong Cho , Yun Lee
Inventor： Won Chegal , Hyun Cho , Yong Cho , Yun Lee
CPC classification number: G01J3/447 , G01J4/04 , G01N21/211
Abstract: An ellipsometry system and method using spectral imaging are provided. The ellipsometry system includes a light source group for projecting a white light collimated to a multi-point region defined on the surface of a sample, a light analysis group for polarizing a reflected white light to analyze it, and a spectral imaging group for dispersing and imaging the polarized white light. The white light collimated to the multi-point region is input to the spectral imaging group and dispersed by a light dispersing means by wavelengths such that the dispersed lights are imaged on one axis of an imaging plane by the points forming the multi-point region and imaged on the other axis of the imaging plane by wavelengths, to obtain optical data having information about the physical property of the points and wavelengths. Accordingly, a large amount of data can be obtained by wavelengths and points to improve rapidity and reliability of measurement.
Abstract translation: 提供了使用光谱成像的椭偏仪系统和方法。 椭圆测量系统包括一个光源组，用于将准直的白光投射到在样品表面上限定的多点区域;光分析组，用于偏振反射白光进行分析;以及光谱成像组，用于分散和 成像偏振白光。 准直到多点区域的白光被输入到光谱成像组，并且通过波长使光散射装置分散，使得分散的光在形成多点区域的点上成像在成像平面的一个轴上， 通过波长在成像平面的另一轴上成像，以获得具有关于点和波长的物理性质的信息的光学数据。 因此，可以通过波长和点获得大量的数据，以提高测量的快速性和可靠性。
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95.发明授权公开(公告)号：US06868312B2
公开(公告)日：2005-03-15
申请号：US09921786
申请日：2001-08-06
Applicant: Bernard Drevillon , Thibaut Heitz , Jean-Christophe Rostaing
Inventor： Bernard Drevillon , Thibaut Heitz , Jean-Christophe Rostaing
CPC classification number: G01B11/0641 , G01N21/211 , G01N2021/213
Abstract: Method for real-time control of the fabrication of a thin-film structure comprising a substrate by ellipsometric measurement in which: variables directly linked to the ellipsometric ratio ρ=tanΨ exp(iΔ) are measured; and the said variables are compared with reference values. The comparison relates to the length of the path traveled at a time t in the plane of the variables with respect to an initial point at time t0, for each layer participating in the thin-film structure.
Abstract translation: 用于通过椭圆测量实现对包括基底的薄膜结构的制造进行实时控制的方法，其中测量直接连接到椭圆比r0 = tanPsi exp（iDelta）的变量; 并将所述变量与参考值进行比较。 该比较涉及对于参与薄膜结构的每一层，相对于时间t0的初始点在变量平面中的时间t行进的路径的长度。
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Patent Agency Ranking
公开(公告)号：US06862377B2
公开(公告)日：2005-03-01
申请号：US10271132
申请日：2002-10-15
Applicant: Bogdan Szafraniec , Douglas M. Baney
Inventor： Bogdan Szafraniec , Douglas M. Baney
CPC classification number: G01M11/333 , G01M11/336 , G02B6/272 , G02B6/278 , H04B10/07 , H04B10/2569
Abstract: Methods and systems allow an in situ determination of the magnitude of PMD in an optical network and provide an estimate of the PMD impairment in the transmitted signal even when PMD is time dependent.
Abstract translation: 方法和系统允许原位确定光网络中的PMD的大小，并且即使当PMD是时间依赖的时候也提供传输信号中的PMD损伤的估计。
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公开(公告)号：US20050041249A1
公开(公告)日：2005-02-24
申请号：US10644038
申请日：2003-08-20
Applicant: Michael Dobbs , Jeff Pruitt , Matthew Gypson , Benjamin Neff
Inventor： Michael Dobbs , Jeff Pruitt , Matthew Gypson , Benjamin Neff
CPC classification number: G01N21/21 , G01J3/447 , G01N2021/1757 , G01N2021/1793 , G01N2201/0691
Abstract: Remotely sensing a target may include generating a first beam of optical radiation that is modulated at a first frequency and polarized at a first polarization. A second beam of optical radiation that is modulated at a second frequency and polarized at a second polarization may also be generated. The first and second beams of optical radiation may be transmitted to the target. Radiation at the first polarization and radiation at the second polarization may be detected from the target using a phase sensitive technique and the first and second frequencies.
Abstract translation: 远程感测目标可以包括产生以第一频率被调制并以第一极化极化的第一光束。 也可以产生以第二频率被调制并以第二极化极化的第二光束。 第一和第二光辐射束可以传输到目标。 可以使用相敏技术和第一和第二频率从目标检测第一极化处的辐射和第二极化处的辐射。
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98.发明授权Surface inspection using the ratio of intensities of s- and p-polarized light components of a laser beam reflected a rough surface 失效使用激光束的s偏振光分量和p偏振光分量的强度比的表面检测反映了粗糙表面公开(公告)号：US6433877B2
公开(公告)日：2002-08-13
申请号：US81924501
申请日：2001-03-28
Applicant: ADVANTEST CORP
Inventor： WATANABE MASAO , OKUBO AKIKO
CPC classification number: G01N21/211 , G01B11/303 , G01N21/88 , G01N21/94 , G01N21/9501
Abstract: A surface inspection device irradiates a laser beam onto the surface of a sample, scans the surface two-dimensionally, and detects the intensities of the s-polarized light component and p-polarized light component of the reflected laser beam. RR (reflectance ratio), which is the ratio of the reflective intensities of the s- and p-polarized light components, is calculated for each position of the surface of the sample, and the two-dimensional distribution of RR on the surface of the sample is detected. The distribution width of this measured RR is compared with the natural width for a clean sample, and the surface of the sample is determined to be contaminated when, as the result of comparison, the RR distribution width diverges from the natural width. The absence or presence of contamination on the microscopically rough surface of a sample can therefore be quickly and easily determined based on the RR of the reflective intensities of the s- and p-polarized light components.
Abstract translation: 表面检查装置将激光束照射到样品的表面上，二维扫描该表面，并检测反射激光束的s偏振光分量和p偏振光分量的强度。 对样品表面的每个位置计算出s（p偏振光分量）和p偏振光分量的反射强度之比（RR）的RR（反射率比），并且在该表面上的RR的二维分布 检测样品。 将该测量的RR的分布宽度与清洁样品的自然宽度进行比较，并且当作为比较的结果，RR分布宽度与自然宽度分开时，样品的表面被确定为被污染。 因此，可以基于s偏振光分量和p偏振光分量的反射强度的RR快速容易地确定样品的微观粗糙表面上不存在或存在污染。
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99.发明授权
公开(公告)号：US6151116A
公开(公告)日：2000-11-21
申请号：US391049
申请日：1999-09-07
Applicant: Ichiro Hirosawa
Inventor： Ichiro Hirosawa
Abstract: Dependency of the polarization state of a reflected infrared ray generated when an infrared ray in a fixed polarization state is incident on a sample thin film on incidence orientation is measured while rotating the sample thin film in a plane parallel to a surface thereof. Next, an optical anisotropy of the sample thin film is determined based on the dependency of the polarization state on the incidence orientation. Then, the state of molecular orientation in the sample thin film is determined based on the optical anisotropy.
Abstract translation: 当在与其表面平行的平面中旋转样品薄膜时，测量当固定偏振态的红外线入射在入射方向上的样品薄膜时产生的反射红外线的偏振状态的依赖性。 接下来，基于偏振态对入射方向的依赖性来确定样品薄膜的光学各向异性。 然后，基于光学各向异性来确定样品薄膜中的分子取向状态。
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公开(公告)号：US6134011A
公开(公告)日：2000-10-17
申请号：US153646
申请日：1998-09-15
Applicant: David L. Klein , Gerard H. Vurens
Inventor： David L. Klein , Gerard H. Vurens
CPC classification number: G01J4/04 , G01N21/211
Abstract: An optical measurement system for evaluating the surface of a substrate or the thickness and optical characteristics of a thin film layer overlying the substrate includes an intensity stabilized light source configured to generate a stabilized light beam, a polarizing element for polarizing the light beam emanating from the light source, and a detection system for measuring the light reflected from the substrate The measurement system includes a polarizing beam-splitter for splitting the light reflected from the substrate into s-polarized light and p-polarized light. The measurement system further includes two optical sensors for separately measuring the amplitude of the s-polarized light and the intensity of the p-polarized light and a third detector for measuring either the phase difference between the s-polarized light and the p-polarized light or the reflection angle of the light reflected from the substrate. A control system analyzes the measured amplitude of the s-polarized light and the p-polarized and either the phase-difference or the reflection angle to determine changes in the topography of substrate or changes in the thickness or optical characteristics of the thin film layer.
Abstract translation: 用于评估衬底表面的光学测量系统或覆盖衬底的薄膜层的厚度和光学特性包括被配置为产生稳定光束的强度稳定的光源，用于偏振从 光源和用于测量从衬底反射的光的检测系统测量系统包括偏振分束器，用于将从衬底反射的光分解成s偏振光和p偏振光。 测量系统还包括用于分别测量s偏振光的振幅和p偏振光的强度的两个光学传感器和用于测量s偏振光和p偏振光之间的相位差的第三检测器 或从基板反射的光的反射角。 控制系统分析s偏振光和p偏振的测量幅度以及相位差或反射角，以确定衬底的形貌的变化或薄膜层的厚度或光学特性的变化。
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