公开(公告)号：US20100182589A1

公开(公告)日：2010-07-22

申请号：US12626963

申请日：2009-11-30

Applicant: Takenori HIROSE ,  Minoru Yoshida ,  Hideaki Sasazawa ,  Yasuhiro Yoshitake

Inventor： Takenori HIROSE ,  Minoru Yoshida ,  Hideaki Sasazawa ,  Yasuhiro Yoshitake

IPC: G01J3/08 ,  G01J3/00

CPC classification number: G01J3/02 ,  G01B2210/56 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01N21/95607

Abstract: In spectral detection for detecting the shape of repeating pattern structures uniformly formed on a surface of a test object, it is advantageous to use light having a wide wavelength range in a short wavelength region. However, it is not easy to realize a relatively simple optical system capable of spectral detection of light having a wide wavelength range in a short wavelength region, namely in ultraviolet region. The present invention provides an inspection apparatus for detecting pattern defects. The inspection apparatus includes a spectral detection optical system capable of spectral detection of light in a wavelength range from deep ultraviolet to near infrared. The spectral detection optical system includes a spatially partial mirror serving as a half mirror and a reflecting objective provided with an aperture stop for limiting the angle and direction of light to be applied to and reflected by a test object.

Abstract translation: 在用于检测在测试对象的表面上均匀形成的重复图案结构的形状的光谱检测中，有利的是在短波长范围内使用宽波长范围的光。 然而，实现能够在短波长区域即紫外线区域中具有宽波长范围的光的光谱检测的相对简单的光学系统是不容易的。 本发明提供一种用于检测图案缺陷的检查装置。 检查装置包括能够对从深紫外线到近红外线的波长范围内的光进行光谱检测的光谱检测光学系统。 光谱检测光学系统包括用作半反射镜的空间部分反射镜和设置有孔径光阑的反射物镜，该孔径光阑用于限制被施加到测试对象并由被测物体反射的光的角度和方向。

公开(公告)号：US20100165341A1

公开(公告)日：2010-07-01

申请号：US12642705

申请日：2009-12-18

Applicant: John Y. Babico ,  Chen Liang

Inventor： John Y. Babico ,  Chen Liang

IPC: G01N15/02 ,  G01J1/58

CPC classification number: G01J3/4406 ,  G01J3/02 ,  G01J3/0216 ,  G01J3/0229 ,  G01N15/1436 ,  G01N15/1459 ,  G01N21/53 ,  G01N21/645 ,  G01N21/6486 ,  G01N2015/0088 ,  G01N2015/1493 ,  G01N2021/6469

Abstract: A particle detection and classification system is disclosed. The system determines the size of measured particles by measuring light scattered by the particles. The system simultaneously determines whether measured particles are biological or non-biological by measuring fluorescent light from the particles. The system uses a parabolic reflector, and optionally, a spherical reflector to collect fluorescence light.

Abstract translation: 公开了一种粒子检测和分类系统。 该系统通过测量由颗粒散射的光来确定测量的颗粒的尺寸。 该系统通过测量来自颗粒的荧光来同时确定测量的颗粒是生物的还是非生物的。 该系统使用抛物面反射器，并且可选地使用球形反射器来收集荧光。

公开(公告)号：US20100118300A1

公开(公告)日：2010-05-13

申请号：US12612300

申请日：2009-11-04

Applicant: Tza-Huei Wang ,  Kelvin J. Liu

Inventor： Tza-Huei Wang ,  Kelvin J. Liu

IPC: G01J3/04

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/024 ,  G01J3/10 ,  G01J3/44

Abstract: A cylindrical illumination confocal spectroscopy system has a fluidic device having a fluid channel defined therein, an objective lens unit arranged proximate the fluidic device, an illumination system in optical communication with the objective lens unit to provide light to illuminate a sample through the objective lens unit, and a detection system in optical communication with the objective lens unit to receive at least a portion of light that passes through the objective lens unit from the sample. The illumination system includes a beam-shaping lens unit constructed and arranged to provide a substantially planar illumination beam that subtends across, and is longer than, a lateral dimension of the fluid channel, the substantially planar illumination beam having a diffraction limited thickness in a direction substantially orthogonal to the lateral dimension of the fluid channel. The substantially planar illumination beam incident upon the fluidic device has a width that is substantially longer than the lateral dimension of the fluid channel such that the substantially planar illumination beam has an illumination intensity that is uniform across the lateral dimension of the fluid channel to within ±10%. The detection system comprises an aperture stop defining a substantially rectangular aperture having a longitudinal dimension and a transverse dimension. The aperture stop is arranged so that the substantially rectangular aperture is confocal with an illuminated portion of the fluid channel such that the transverse dimension of the substantially rectangular aperture substantially subtends the lateral dimension of the fluid channel without extending substantially beyond the fluid channel and allows light to pass from only a uniform excitation region while occluding light from outside the uniform excitation region, and the lateral dimension of the substantially rectangular aperture substantially matches the diffraction limited thickness of the planar illumination beam.

公开(公告)号：US07706090B2

公开(公告)日：2010-04-27

申请号：US11330386

申请日：2006-01-12

Applicant: Jörg Steinert ,  Thomas Mehner ,  Volker Gerstner

Inventor： Jörg Steinert ,  Thomas Mehner ,  Volker Gerstner

IPC: G02B5/22

CPC classification number: G02B5/005 ,  G01J3/02 ,  G01J3/0229

Abstract: A diaphragm device with which individual wavelengths or ranges of wavelengths in the path of a beam of spectrally dispersed light can be suppressed. Such a diaphragm device comprises at least one array of diaphragms, wherein the individual diaphragms of the array are arranged in a definite relation to each other and may be coupled in the path of the beam and each diaphragm of the array in the coupled state is arranged in a given relation to an individual wavelength or a range of wavelengths.

Abstract translation: 可以抑制光谱分散光束的光路中的各波长或波长范围的光阑装置。 这种隔膜装置包括至少一个隔膜阵列，其中阵列的各个隔膜彼此以一定的关系布置，并且可以在梁的路径中耦合，并且联接状态的阵列的每个隔膜被布置 与波长或波长范围有关。

公开(公告)号：US07697134B1

公开(公告)日：2010-04-13

申请号：US11593386

申请日：2006-11-06

Applicant: Michael B. Sinclair ,  Kent B. Pfeifer ,  Jeb H. Flemming ,  Gary D. Jones ,  Chris P. Tigges

Inventor： Michael B. Sinclair ,  Kent B. Pfeifer ,  Jeb H. Flemming ,  Gary D. Jones ,  Chris P. Tigges

IPC: G01J3/04

CPC classification number: G01J3/457 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J2001/4242

Abstract: A correlation spectrometer can detect a large number of gaseous compounds, or chemical species, with a species-specific mask wheel. In this mode, the spectrometer is optimized for the direct measurement of individual target compounds. Additionally, the spectrometer can measure the transmission spectrum from a given sample of gas. In this mode, infrared light is passed through a gas sample and the infrared transmission signature of the gasses present is recorded and measured using Hadamard encoding techniques. The spectrometer can detect the transmission or emission spectra in any system where multiple species are present in a generally known volume.

Abstract translation: 相关光谱仪可以用物种特异性掩模轮检测大量气态化合物或化学物质。 在这种模式下，光谱仪被优化用于直接测量单个目标化合物。 另外，光谱仪可以测量给定的气体样品的透射光谱。 在这种模式下，红外光通过气体样品，并使用Hadamard编码技术记录和测量气体的红外透射特征。 光谱仪可以检测在通常已知体积中存在多种物质的任何系统中的透射或发射光谱。

公开(公告)号：US20100068714A1

公开(公告)日：2010-03-18

申请号：US12515412

申请日：2007-11-23

Applicant: Maarten M.J.W. Van Herpen ,  Antonius T.M. Van Gogh

Inventor： Maarten M.J.W. Van Herpen ,  Antonius T.M. Van Gogh

IPC: C12Q1/68 ,  C12M1/34

CPC classification number: G01J3/02 ,  G01J3/0229 ,  G01J3/0294 ,  G01J3/32 ,  G01J3/36 ,  G01N21/6428 ,  G01N2021/6441

Abstract: The invention relates to detection of target molecules in an assay, such as a bio-assay, and in particular to multi-variate detection of target molecules. A detector system is disclosed, the detection system comprising an optical guide element (16) for directing luminescence radiation (7) from an associated sample towards a multivariate element (8), the sample contains probe molecules that specifically binds to target molecules; a multivariate element (8) for spatially separating the luminescence radiation (7; 14; 15) to create a plurality of spectral patterns; and a detector (13) for detecting the intensity of a set of spectral patterns, so as to determine the presence of binding complexes between probe molecules and target molecules in the sample.

Abstract translation: 本发明涉及在分析中的靶分子的检测，例如生物测定，特别是靶分子的多变量检测。 公开了一种检测器系统，所述检测系统包括用于将相关样品的发光辐射（7）引向多变量元件（8）的光导元件（16），所述样品包含特异性结合靶分子的探针分子; 用于空间分离发光辐射（7; 14; 15）以产生多个光谱图案的多元素（8）; 以及用于检测一组光谱图案的强度的检测器（13），以便确定样品中探针分子和靶分子之间的结合复合物的存在。

公开(公告)号：US20090268203A1

公开(公告)日：2009-10-29

申请号：US11912342

申请日：2006-04-26

Applicant: Natallia Uzunbajakava ,  Aleksey Kolesnychenko ,  Antonius Theodorus Martinus Van Gogh ,  Gert 'T Hooft ,  Frank Jeroen Pieter Schuurmans

Inventor： Natallia Uzunbajakava ,  Aleksey Kolesnychenko ,  Antonius Theodorus Martinus Van Gogh ,  Gert 'T Hooft ,  Frank Jeroen Pieter Schuurmans

IPC: G01N21/31

CPC classification number: G01J3/32 ,  G01J3/02 ,  G01J3/0213 ,  G01J3/0229 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/28 ,  G01J2003/1282 ,  G01N21/274

Abstract: The invention relates to a multivariate calibration which can be used when the optical system used for that method does not comprise a multi-channel detector such as a CCD sensor or a line array of photodiodes. An optical system without a multi-channel detector doesn't allow to carry out preprocessing steps. Thus there is the need to carry out these preprocessing steps in another way. It is suggested to partially replace the preprocessing step by a measurement of the optical signal, whereby the measurement comprises transmitting or reflecting the optical signal by an optical element, thereby weighing the optical signal by a spectral weighing function. The advantage of the invention is to teach how such an optical system without a bulky and expensive CCD sensor can be used to carry out a multivariate calibration and preprocessing steps.

Abstract translation: 本发明涉及当用于该方法的光学系统不包括诸如CCD传感器或光电二极管的线阵列的多通道检测器时可以使用的多变量校准。 没有多通道检测器的光学系统不允许执行预处理步骤。 因此，需要以另一种方式执行这些预处理步骤。 建议通过光信号的测量部分地代替预处理步骤，由此测量包括通过光学元件发送或反射光信号，从而通过光谱称重功能称量光信号。 本发明的优点是教导如何不使用庞大且昂贵的CCD传感器的这种光学系统来执行多变量校准和预处理步骤。

公开(公告)号：US20090251686A1

公开(公告)日：2009-10-08

申请号：US12293708

申请日：2007-02-07

Applicant: Thierry Meynard ,  Yves Guern ,  François Carpentier

Inventor： Thierry Meynard ,  Yves Guern ,  François Carpentier

IPC: G01J3/28

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/2823

Abstract: Optical device comprising: a spatial filter means for eliminating, from the light rays emanating from an observed scene those coming from a direction or restricted range of directions in space, while letting through most of the light rays coming from said scene; means for varying the direction or the restricted range of directions in space in correspondence with which the spatial filter means eliminates said light rays; a spectral dispersion means for imparting to the light rays coming from said spatial filter means a deviation that is dependent on their wavelength; and an image detector for recording the light rays dispersed by said spectral dispersion means, each point on said image detector receiving light rays coming from said scene and having a different wavelength depending on the direction in space from which they come.

Abstract translation: 光学装置包括：空间滤波器装置，用于从出现在来自所述场景的大部分光线中消除来自观察场景的来自空间方向或受限制的方向范围的光线; 用于改变空间方向的方向或限制范围的装置，空间滤波器装置与之对应地消除所述光线; 用于赋予来自所述空间滤波器装置的光线取决于其波长的偏差的光谱色散装置; 以及图像检测器，用于记录由所述光谱色散装置分散的光线，所述图像检测器上的每个点接收来自所述场景的光线，并且具有取决于它们到达的空间方向的不同波长。

公开(公告)号：US20090236549A1

公开(公告)日：2009-09-24

申请号：US12052766

申请日：2008-03-21

Applicant: William I. Vogt

Inventor： William I. Vogt

IPC: G02B27/10 ,  G01J1/58

CPC classification number: G02B21/16 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/36 ,  G01J3/4406 ,  G02B21/002 ,  G02B2207/114

Abstract: Disclosed is an apparatus for division and rearrangement of light from a source object. The apparatus splits the light from the source object, or image of the source object, and recombines it in a parallel, fashion to increase the efficiency of multiphoton microscopy in general and harmonic or fluorescence emission microscopy in particular. The apparatus includes a beam splitter configured to split a light beam into at least two independent light paths to yield a first light path and a second light path; a first beam focuser configured to direct and focus the first light path onto a focal plane; and a second beam focuser configured to direct and focus the second light path onto the same or different focal plane to which the first light path is focused; and wherein the first and second light paths may be superimposed upon one another at a common focal plane or directed independently to different positions.

Abstract translation: 公开了一种用于从源物体分离和重排光的装置。 该装置分离来自源对象的光或源对象的图像，并且以平行的方式重新组合，以增加一般的多光子显微镜的效率，特别是谐波或荧光发射显微镜。 该装置包括分束器，其配置成将光束分成至少两个独立光路以产生第一光路和第二光路; 第一光束聚焦器，被配置为将第一光路引导和聚焦到焦平面上; 以及第二光束聚焦器，被配置为将所述第二光路引导和聚焦到所述第一光路被聚焦到的相同或不同的焦平面上; 并且其中所述第一和第二光路可以在公共焦平面上彼此重叠或独立于不同位置引导。

公开(公告)号：US07586603B2

公开(公告)日：2009-09-08

申请号：US12104471

申请日：2008-04-17

Applicant: Sandip Maity ,  Ayan Banerjee ,  Anis Zribi ,  Stacey Kennerly ,  Long Que ,  Glenn Claydon ,  Shankar Chandrasekaran ,  Shivappa Goravar

Inventor： Sandip Maity ,  Ayan Banerjee ,  Anis Zribi ,  Stacey Kennerly ,  Long Que ,  Glenn Claydon ,  Shankar Chandrasekaran ,  Shivappa Goravar

IPC: G01J3/44

CPC classification number: G01J3/44 ,  G01J1/44 ,  G01J3/02 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/0256 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/0286 ,  G01J3/0297 ,  G01J3/1895 ,  G01J3/4338 ,  G02B26/04 ,  H01L31/107

Abstract: A method of Raman detection for a portable, integrated spectrometer instrument includes directing Raman scattered photons by a sample to an avalanche photodiode (APD), the APD configured to generate an output signal responsive to the intensity of the Raman scattered photons incident thereon. The output signal of the APD is amplified and passed through a discriminator so as to reject at least one or more of amplifier noise and dark noise. A number of discrete output pulses within a set operational range of the discriminator is counted so as to determine a number of photons detected by the APD.

Abstract translation: 用于便携式，集成光谱仪器的拉曼检测方法包括将样品的拉曼散射光子引导到雪崩光电二极管（APD），APD被配置为响应入射在其上的拉曼散射光子的强度产生输出信号。 APD的输出信号被放大并通过鉴频器，以便抑制至少一个或多个放大器噪声和暗噪声。 对鉴别器的设定操作范围内的多个离散输出脉冲进行计数，以便确定APD检测到的光子数量。