公开(公告)号：US4758086A

公开(公告)日：1988-07-19

申请号：US7350

申请日：1987-01-27

Applicant: Youji Sonobe ,  Seiichi Ishigaki ,  Tomoyuki Kikugawa

Inventor： Youji Sonobe ,  Seiichi Ishigaki ,  Tomoyuki Kikugawa

IPC: G01J1/02 ,  G01J1/42 ,  G01J3/12 ,  G01J3/18 ,  G01J3/28 ,  G01J3/30 ,  G01J3/36 ,  G01J3/447

CPC classification number: G01J3/447 ,  G01J1/4257 ,  G01J3/1256 ,  G01J3/18 ,  G01J3/36

Abstract: In an optical measuring apparatus, a laser beam is transferred to a diffraction grating so that the laser beam is spectrally separated into respective wavelength components. The wavelength components are sequentially guided into a polarizing optical element in which the respective wavelength component are separated into S and P polarized components, when the diffraction grating is rotated. The S and P polarized components of the respective wavelengths are detected by photodetectors and electrical signals from the photodetectors are supplied to a signal processing unit. In the signal processing unit, the electrical signals corresponding to the P and S components are corrected with a spectral efficiency characteristic of the grating, a percent loss characteristic of the polarizing element and photoelectro conversion characteristics of the photodetectors and the corrected signals are analyzed to obtain an absolute value of the laser energy for the respective wavelength.

Abstract translation: 在光学测量装置中，将激光束转移到衍射光栅，使得激光束被光谱分离成各个波长分量。 当衍射光栅旋转时，波长分量被顺序地引导到偏振光学元件中，其中各个波长分量被分离成S和P偏振分量。 各波长的S和P偏振分量由光检测器检测，并且来自光电检测器的电信号被提供给信号处理单元。 在信号处理单元中，用光栅的光谱效率特性校正与P和S分量相对应的电信号，分析偏振元件的百分比损耗特性和光电检测器的光电转换特性和校正信号，以获得 相应波长的激光能量的绝对值。

公开(公告)号：US4653869A

公开(公告)日：1987-03-31

申请号：US785643

申请日：1985-10-07

Applicant: Milton Gottlieb ,  Fredrick L. Schaff

Inventor： Milton Gottlieb ,  Fredrick L. Schaff

IPC: G01J3/12 ,  G02F1/11

CPC classification number: G01J3/1256 ,  G02F1/116 ,  G01J3/0224

Abstract: The invention is directed to an acousto-optic dispersive light analyzer (AODLF) which is an electronically adjustable spectroscopic device capable of instantaneously monitoring many wavelengths with a fixed drive frequency. The AODLF has about a one octave range, whose center is selected by changing the RF. The resolution of the AODLF in the infrared is several thousand, and it is electronically adjustable. The acousto-optic device according to this invention is particularly useful for the detection and analysis of short light pulses. An additional capability of the AODLF is its operation in a derivative mode for enhanced SNR of coherence detection in the presence of a high incoherent background by imposing a very small frequency modulation on the RF applied to the AODLF. Then by phase locking each of the detector element signals at first the fundamental and then the first harmonic of the FM, the first and second spectrum derivatives of each resolution element can be observed.

Abstract translation: 本发明涉及一种声光分散光分析仪（AODLF），它是一种电子可调式分光装置，能够以固定的驱动频率瞬时监测许多波长。 AODLF有一个八度范围，通过改变RF选择其中心。 AODLF在红外线的分辨率为几千，可电子调节。 根据本发明的声光装置对于短光脉冲的检测和分析特别有用。 AODLF的另外的能力是通过在施加到AODLF的RF上施加非常小的频率调制，在存在高非相干背景的情况下，以衍生模式操作增强的相干检测SNR。 然后通过将每个检测器元件信号相位锁定在FM的基波和第一谐波上，可以观察到每个分辨率元件的第一和第二频谱衍生。

公开(公告)号：US4001577A

公开(公告)日：1977-01-04

申请号：US637947

申请日：1975-12-05

Applicant: Andres Albanese ,  Calvin F. Quate

Inventor： Andres Albanese ,  Calvin F. Quate

IPC: G01J3/00 ,  G01J3/12 ,  G02F1/125 ,  H04B10/152 ,  G02F1/33 ,  G02F2/00 ,  H04B9/00

CPC classification number: G02F1/125 ,  G01J3/1256

Abstract: Method and apparatus for causing light to interact with surface acoustic waves so that the light is either scattered out of or coupled into an optical wave guide. In the case of scattering when the light is propagating in an optical wave guide and chirped surface acoustic waves interact with the light, the light is scattered out of the optical wave guide into a focused beam. The focused beam of light travels in a path parallel to the surface acoustic waves and at the same velocity as the acoustic waves. The focused beam can scan objects to obtain electrical signals corresponding to the optical image of the objects and also the beam can be focused on a plurality of photodetectors to multiplex the light. In the case of coupling when the light is incident on an optical wave guide and the frequency of the chirped surface acoustic waves is selectively varied, the light is selectively coupled into the optical wave guide in a corresponding manner. The selective coupling of the light permits the frequency spectrum and the angular distribution of the light to be analyzed.

公开(公告)号：US3914055A

公开(公告)日：1975-10-21

申请号：US47291074

申请日：1974-05-23

Applicant: LANSING RESEARCH CORP

Inventor： WOLGA GEORGE J ,  MCFARLANE ROSS A

IPC: G03B7/099 ,  G01J3/12 ,  G01J3/26 ,  G01J3/28 ,  G01J3/44 ,  G02F1/11 ,  G01B9/02

CPC classification number: G01J3/1256 ,  G01J3/26 ,  G02F1/113

Abstract: A spectroscopic apparatus for the measurement of the spectral characteristics of weak light sources, for example laser Raman scattering from liquids, is formed of a tunable acousto-optical filter followed by a Fabry-Perot Etalon. Circuits are provided for tuning the two devices to the same light frequency or wavelength. The acousto-optical filter eliminates most of the light other than that of a particular wavelength while the etalon eliminates still more of the light other than that of the wavelength to which the device is tuned. The optical throughput of the two devices is so high that a very much greater proportion of the light of the particular wavelength from any source can be passed through the combination than through other devices of similar resolving power. In a preferred form of the invention, there are used two etalons in series with a TOF. The etalons have substantially different free spectral ranges, and these spectral ranges are so selected that the lowest common multiple is several times the higher of the two free spectral ranges, and that the difference between the free spectral ranges is great enough so that when they coincide at one wavelength their wavelengths are substantially different at neighboring peaks.

Abstract translation: 用于测量弱光源（例如来自液体的激光拉曼散射）的光谱特性的分光装置由可调谐声光滤波器形成，后跟法布里 - 珀罗埃隆（Fabry-Perot Etalon）。 提供电路用于将两个器件调谐到相同的光频率或波长。 声光滤波器消除了特定波长以外的大部分光，而标准具消除了除了器件调谐波长以外的更多的光。 两个器件的光学吞吐量非常高，使得来自任何源的特定波长的光的非常大比例可以通过组合而不是通过具有相似分辨能力的其它器件。

公开(公告)号：US3308712A

公开(公告)日：1967-03-14

申请号：US32191663

申请日：1963-11-06

Applicant: IBM

Inventor： KAY RONALD H

IPC: G01J3/00 ,  G01J3/12 ,  G01J3/26

CPC classification number: G01J3/26 ,  G01J3/0213 ,  G01J3/0229 ,  G01J3/1256 ,  G01J2003/1234

公开(公告)号：US3011386A

公开(公告)日：1961-12-05

申请号：US52543255

申请日：1955-08-01

Applicant: SERVO CORP OF AMERICA

Inventor： ROSENTHAL ADOLPH H

IPC: G01J3/00 ,  G01J3/12 ,  G01J3/28

CPC classification number: G01J3/1256 ,  G01J3/0264 ,  G01J2003/2866

公开(公告)号：US20180231416A1

公开(公告)日：2018-08-16

申请号：US15320567

申请日：2015-06-19

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Burkhard ROSCHER ,  Stefan WILHELM ,  Gunter MOEHLER

IPC: G01J3/12 ,  G02B21/00 ,  G02F1/11 ,  G01J3/06

CPC classification number: G01J3/1256 ,  G01J3/06 ,  G02B21/002 ,  G02B21/16 ,  G02F1/113 ,  G02F1/116 ,  G02F2203/21

Abstract: A method and apparatus for actuating an acousto-optical component for manipulating light passing therethrough, in particular for manipulating the illumination and/or detection light in the beam path of a microscope, preferably a laser scanning microscope, where the illumination and/or detection wavelength is adjusted by means of at least one frequency generator connected to the acousto-optical component and controlling the manipulation, the frequency generator generates a signal which generates a spectral spread for the intensity distribution of the wavelength of the illumination and/or detection light for ensuring a temperature-independent manipulation. Actuation is effected by two or more actuation signals in such a way that two or more overlapping and/or superposing main lobes of the transfer function of the acousto-optical component or main maxima are generated.

公开(公告)号：US09933686B2

公开(公告)日：2018-04-03

申请号：US14916520

申请日：2014-09-03

Applicant: LEICA MICROSYSTEMS CMS GMBH

Inventor： Vishnu Vardhan Krishnamachari

IPC: G02F1/33 ,  G01J3/12 ,  G02B21/00 ,  G02B27/28 ,  G02F1/11

CPC classification number: G02F1/33 ,  G01J3/1256 ,  G02B21/0032 ,  G02B21/0064 ,  G02B21/0068 ,  G02B27/283 ,  G02F1/116

Abstract: The invention relates to an acousto-optic main beam splitter for a scanning microscope, which is embodied and intended to direct illuminating light having a preselected or preselectable illuminating light wavelength into an illumination beam path for illumination of a sample, and to direct detected light coming from a sample into a detection beam path. The acousto-optic main beam splitter is characterized in that a mechanical wave having an acoustic frequency associated with the illuminating light wavelength propagates, or multiple mechanical waves that have the same acoustic frequency associated with the illuminating light wavelength propagate, in the acousto-optic main beam splitter, both a portion of the detected light bundle having the illuminating light wavelength and a first linear polarization direction, and a portion of the detected light having the illuminating light wavelength and a second linear polarization direction perpendicular to the first linear polarization direction, being deflected out of the detected light bundle coming from a sample by interaction with the one mechanical wave or by interaction with the mechanical waves, and are thereby removed from the detected light bundle; and/or the acousto-optic main beam splitter being embodied to direct, by interaction with the one mechanical wave or by interaction with the mechanical waves, both the portion of illuminating light that has the preselected illuminating light wavelength and a first linear polarization direction, and the portion of illuminating light that has the preselected illuminating light wavelength and a second linear polarization direction that is different from, in particular perpendicular to, the first linear polarization direction, into an illumination beam path for illumination of a sample.

公开(公告)号：US20170010158A1

公开(公告)日：2017-01-12

申请号：US15265816

申请日：2016-09-14

Applicant: OFFICE COLOR SCIENCE CO., LTD.

Inventor： Masayuki Osumi

IPC: G01J3/28 ,  G01J3/42 ,  G01J3/52 ,  G01J3/12 ,  G01N21/25 ,  G01N21/27 ,  G01N21/57 ,  G01J3/02 ,  G01J3/46

CPC classification number: G01J3/2823 ,  G01J3/0208 ,  G01J3/0264 ,  G01J3/0297 ,  G01J3/12 ,  G01J3/1256 ,  G01J3/42 ,  G01J3/46 ,  G01J3/463 ,  G01J3/501 ,  G01J3/502 ,  G01J3/504 ,  G01J3/524 ,  G01J2003/1226 ,  G01J2003/2826 ,  G01N21/255 ,  G01N21/276 ,  G01N21/57 ,  G01N21/8422 ,  G01N2201/061

Abstract: A lighting device that emits illumination light from two or more angular directions onto a sample surface to be measured, an imaging optical lens, and a monochrome two-dimensional image sensor are provided. This configuration provides a method and an apparatus that take a two-dimensional image of the sample surface to be measured at each measurement wavelength and accurately measure multi-angle and spectral information on each of all pixels in the two-dimensional image in a short time. In particular, a multi-angle spectral imaging measurement method and apparatus that have improved accuracy and usefulness are provided.

Abstract translation: 提供了一种从两个或多个角度方向将照明光发射到待测样品表面上的照明装置，成像光学透镜和单色二维图像传感器。 该结构提供了一种在每个测量波长处拍摄要测量的样品表面的二维图像并且在短时间内精确地测量二维图像中的所有像素的多角度和光谱信息的方法和装置 。 特别地，提供了具有提高的精度和有用性的多角度光谱成像测量方法和装置。

公开(公告)号：US20160334652A1

公开(公告)日：2016-11-17

申请号：US15153569

申请日：2016-05-12

Applicant: Lasertec Corporation

Inventor： Jun Sakuma

IPC: G02F1/11 ,  G02B27/14 ,  G01J1/04 ,  H01S3/00 ,  G01N21/95 ,  G02F1/355 ,  G02F1/35

CPC classification number: G02F1/113 ,  G01J1/0407 ,  G01J3/1256 ,  G01N21/1702 ,  G01N21/636 ,  G01N21/9501 ,  G01N2201/06113 ,  G01N2201/068 ,  G02B27/141 ,  G02F1/116 ,  G02F1/3534 ,  G02F1/3551 ,  H01S3/005 ,  H01S3/0085 ,  H01S3/0092 ,  H01S3/1306 ,  H01S3/2391

Abstract: Provided are a light source apparatus and an inspection apparatus that can stably output a wavelength converted light beam. A light source apparatus includes a laser light source that generates a first fundamental light beam, at least one nonlinear optical crystal that generates a wavelength converted light beam using the fundamental light beam or a harmonic laser beam of the fundamental light beam as an incident light beam, a detector that detects the wavelength converted light beam, an acousto-optic modulator that is disposed in an optical path of the incident light beam in such a way that a zero-order light beam enters the nonlinear optical crystal, and a controller that controls an output intensity of the wavelength converted light beam according to a detection signal from the detector.

Abstract translation: 提供能够稳定地输出波长转换光束的光源装置和检查装置。 光源装置包括产生第一基本光束的激光光源，至少一个非线性光学晶体，其使用基本光束的基波束或基波束的谐波激光产生波长转换光束作为入射光束 ，检测波长转换光束的检测器，设置在入射光束的光路中的声光调制器，使得零级光束进入非线性光学晶体，以及控制器，其控制 根据来自检测器的检测信号，波长转换光束的输出强度。