公开(公告)号：US08296091B2

公开(公告)日：2012-10-23

申请号：US13109577

申请日：2011-05-17

Applicant: Paul Janis Timans

Inventor： Paul Janis Timans

IPC: G01J5/02

CPC classification number: G01J5/0896 ,  G01J5/0003 ,  G01J5/0007 ,  G01J5/0285 ,  G01J5/06 ,  G01J5/08 ,  G01J5/0803 ,  G01J5/0821 ,  G01J5/0831 ,  G01J5/0846 ,  G01J5/089 ,  G01J5/522 ,  G01J5/58 ,  G01J2005/0048 ,  G01J2005/065 ,  H01L21/324 ,  H01L21/67115 ,  H01L21/67248

Abstract: A method and system for calibrating temperature measurement devices, such as pyrometers, in thermal processing chambers are disclosed. According to the present invention, the system includes a calibrating light source that emits light energy onto a substrate contained in the thermal processing chamber. A light detector then detects the amount of light that is being transmitted through the substrate. The amount of detected light energy is then used to calibrate a temperature measurement device that is used in the system.

Abstract translation: 公开了一种在热处理室中校准温度测量装置，例如高温计的方法和系统。 根据本发明，该系统包括将光能发射到包含在热处理室中的基板上的校准光源。 然后光检测器检测正在透过基板的光量。 然后使用检测到的光能量来校准在系统中使用的温度测量装置。

公开(公告)号：US20120211648A1

公开(公告)日：2012-08-23

申请号：US13371414

申请日：2012-02-11

Applicant: DERON L. LINSACUM ,  Nils A. Lavik ,  Greg Kwan

Inventor： DERON L. LINSACUM ,  Nils A. Lavik ,  Greg Kwan

IPC: G01D18/00

CPC classification number: H04N5/33 ,  G01J5/522 ,  G01J2005/0048 ,  G01J2005/0077 ,  G01J2005/106 ,  G01J2005/202 ,  G01N2201/1211 ,  G01N2201/12707 ,  G01N2201/12715 ,  G01N2201/12746 ,  G01N2201/12753 ,  H04N5/361 ,  H04N5/3651 ,  H04N5/3655

Abstract: On-board non-uniformity correction calibration methods for a microbolometer focal plane array in a thermal camera are disclosed. The methods include performing first calculations in the processor unit of the thermal camera to generate and apply a set of coarse correction bias voltages to the detector elements. The method also includes performing calculations in the external computer based on image data collected by the thermal camera with the coarse correction bias voltages applied to the detector elements to generate a set of fine correction bias voltages. The method also includes downloading the fine correction bias voltages to the thermal camera and applying the fine correction voltages to the detector elements to establish a fine calibration of the microbolometer focal plane array.

Abstract translation: 公开了一种用于热照相机中的微测光计焦平面阵列的车载非均匀性校正校准方法。 这些方法包括在热像仪的处理器单元中执行第一次计算，以生成并将一组粗校正偏置电压应用于检测器元件。 该方法还包括基于由热摄像机收集的图像数据在外部计算机中执行计算，其中施加到检测器元件的粗略校正偏置电压以产生一组精细校正偏置电压。 该方法还包括将精细校正偏置电压下载到热摄像机并将精细校正电压施加到检测器元件以建立微测光计焦平面阵列的精细校准。

公开(公告)号：US08101905B2

公开(公告)日：2012-01-24

申请号：US12203915

申请日：2008-09-04

Applicant: Eldon Rogers

Inventor： Eldon Rogers

IPC: G01D18/00 ,  G01J5/02

CPC classification number: G01J5/0022 ,  G01J5/02 ,  G01J5/025 ,  G01J5/0275 ,  G01J5/0295 ,  G01J5/04 ,  G01J5/047 ,  G01J5/08 ,  G01J5/0846 ,  G01J5/0859 ,  G01J5/10 ,  G01J5/522 ,  G01J2005/0048 ,  G01J2005/0077 ,  G01J2005/0081

Abstract: A calibration system for an infrared imaging system includes an infrared sensor having a sensor model for imaging a target having a target spectral signature. The infrared imaging system includes an atmospheric model having atmospheric spectral values. The calibration system comprises a blackbody calibration source having a calibration source spectral signature and a computer for receiving the sensor model, the target spectral signature, the calibration source spectral signature and the atmospheric spectral values. The computer predicts a target spectral signature propagation at the infrared sensor and matches the target spectral signature propagation with the calibration source spectral signature propagation to determine a blackbody calibration source temperature for radiometric calibration of the infrared sensor.

Abstract translation: 用于红外成像系统的校准系统包括具有用于对具有目标光谱特征的目标进行成像的传感器模型的红外传感器。 红外成像系统包括具有大气光谱值的大气模型。 校准系统包括具有校准源光谱特征的黑体校准源和用于接收传感器模型，目标光谱特征，校准源光谱特征和大气光谱值的计算机。 计算机预测红外传感器处的目标光谱特征传播，并将目标光谱特征传播与校准源光谱特征传播相匹配，以确定用于红外传感器的辐射校准的黑体校准源温度。

公开(公告)号：US08007168B2

公开(公告)日：2011-08-30

申请号：US12310863

申请日：2007-09-20

Applicant: Michael Bittner ,  Kathrin Hoeppner

Inventor： Michael Bittner ,  Kathrin Hoeppner

IPC: G01J5/00

CPC classification number: G01J5/0014 ,  G01J5/007 ,  G01J5/58 ,  G01J2005/0048

Abstract: In order to derive the temperature in the mesopause region from hydroxyl (OH*) airglow, in which intensities of three lines of OH* emission and a basic position are measured during the night using ground-based IR spectrometers, a noisy OH* spectrum is smoothed by filtering out white noise superimposed on the measured OH* intensities, by means of a spectral analysis method in the form of a harmonic analysis and by means of adaptation using the Voigt function which is carried out in the form of a combination of a Lorentz distribution and a Doppler distribution. A decision is made on the quality of the adaptation of the smoothed spectrum obtained to the original spectrum using statistical characteristic variables and by selecting one of the two methods, harmonic analysis function or Voigt function, and the temperature is thus accurately determined.

Abstract translation: 为了从羟基（OH *）气泡中导出中间区域的温度，其中使用地面红外光谱仪在夜间测量三行OH *发射和基本位置的强度，噪声OH *光谱是 通过滤波叠加在测量的OH *强度上的白噪声，通过谐波分析形式的光谱分析方法和通过使用Voigt函数的适应进行平滑，该Voigt函数以洛伦兹组合的形式进行 分布和多普勒分布。 使用统计特征变量，通过选择谐波分析函数或Voigt函数中的两种方法，对获得的原始频谱的平滑频谱的适应质量进行判定，从而精确地确定温度。

公开(公告)号：US20110176577A1

公开(公告)日：2011-07-21

申请号：US12633714

申请日：2009-12-08

Applicant: Sumith V. Bandara ,  Sarath D. Gunapala ,  John K. Liu ,  Robert C. Stirbl ,  Daniel W. Wilson ,  David Z. Ting

Inventor： Sumith V. Bandara ,  Sarath D. Gunapala ,  John K. Liu ,  Robert C. Stirbl ,  Daniel W. Wilson ,  David Z. Ting

IPC: G01J5/00

CPC classification number: G01J5/60 ,  G01J3/36 ,  G01J5/08 ,  G01J5/0803 ,  G01J2005/0048 ,  G01J2005/0077

Abstract: A multi-waveband temperature sensor array, in which each superpixel (e.g., 2×2 pixel cell) operates at a distinct thermal infrared (IR) waveband (e.g. four wavebands) is disclosed. Using an example high spatial resolution, four-band thermal IR band photodetector array, accurate temperature measurements on the surface of an object can be made without prior knowledge of the object emissivity. The multiband photodetector may employ intersubband transition in III-V semiconductor-based quantum layered structures where each photodetector stack absorbs photons within the specified wavelength band while allowing the transmission of photons in other spectral bands, thus efficiently permitting multiband detection. This produces multiple, spectrally resolved images of a scene that are recorded simultaneously in a single snapshot of the FPA. From the multispectral images and calibration information about the system, computational algorithms are used to produce the surface temperature map of a target.

Abstract translation: 公开了一种多波段温度传感器阵列，其中每个超像素（例如，2×2像素单元）在不同的热红外（IR）波段（例如四个波段）下操作。 使用示例性高空间分辨率，四波段热IR波段光电探测器阵列，可以在物体表面上准确地进行温度测量，而无需事先了解物体发射率。 多频带光电探测器可以在基于III-V半导体的量子分层结构中使用跨带间跃迁，其中每个光电探测器叠层吸收特定波长带内的光子，同时允许其他光谱带中的光子传输，从而有效地允许多频带检测。 这产生了在FPA的单个快照中同时记录的场景的多个光谱解析图像。 从多光谱图像和关于系统的校准信息，使用计算算法来产生目标的表面温度图。

公开(公告)号：US20100183045A1

公开(公告)日：2010-07-22

申请号：US12452809

申请日：2008-07-22

Applicant: Ken Nakahara ,  Masashi Kawasaki ,  Akira Ohtomo ,  Atsushi Tsukazaki

Inventor： Ken Nakahara ,  Masashi Kawasaki ,  Akira Ohtomo ,  Atsushi Tsukazaki

IPC: G01J5/00

CPC classification number: G01J5/08 ,  C23C14/08 ,  C23C14/086 ,  C23C14/541 ,  G01J5/0003 ,  G01J5/0007 ,  G01J5/0875 ,  G01J2005/0048 ,  G01J2005/0081 ,  H01L21/0242 ,  H01L21/02458 ,  H01L21/02554

Abstract: A substrate temperature measuring apparatus includes: a heating source that heat a substrate; a transmission window that transmits therethrough an infrared ray in a range of a wavelength at which the infrared ray cannot transmit through the substrate; and a temperature-measuring instrument having a sensitivity range including the range of the wavelength, and measuring a substrate temperature of the substrate by analyzing an infrared ray radiated from the substrate heated by the heating source and having transmitted through the transmission window.

Abstract translation: 基板温度测量装置包括：加热基板的加热源; 透射窗，其透过红外线不能透过基板的波长范围内的红外线; 以及温度测量仪器，其具有包括波长范围的灵敏度范围，并且通过分析从由所述加热源加热并已透射通过透射窗的衬底辐射的红外线来测量衬底的衬底温度。

公开(公告)号：US20090256077A1

公开(公告)日：2009-10-15

申请号：US12081370

申请日：2008-04-15

Applicant: Kevin C. Brady ,  Michael Seskin ,  Anthony J. Grichnik

Inventor： Kevin C. Brady ,  Michael Seskin ,  Anthony J. Grichnik

IPC: G02F1/01

CPC classification number: G01K1/024 ,  G01J5/0003 ,  G01J5/0022 ,  G01J5/0088 ,  G01J2005/0048 ,  G01J2005/0077 ,  G01J2005/068 ,  G01K1/026

Abstract: A method of correlating thermal sensors data with temperature sensor data is disclosed. The method may include generating one or more temperature sensor data points and receiving the one or more temperature sensor data points at a remote location. The method may also include generating one or more thermal sensor data points or images and receiving the one or more thermal sensor data points or images at the remote location. Additionally, the method may include correlating the one or more thermal sensor data points or images based on the one or more temperature sensor data points and generating a notification when a temperature of one or more correlated thermal sensor data points or images fails to maintain a determined relationship with a preset limit in one or more locations other than the location of one or more temperature sensor data point.

Abstract translation: 公开了一种将热传感器数据与温度传感器数据相关联的方法。 该方法可以包括产生一个或多个温度传感器数据点并在远程位置接收一个或多个温度传感器数据点。 该方法还可以包括生成一个或多个热传感器数据点或图像并且在远程位置处接收一个或多个热传感器数据点或图像。 另外，该方法可以包括基于一个或多个温度传感器数据点来关联一个或多个热传感器数据点或图像，并且当一个或多个相关热传感器数据点或图像的温度不能维持确定时，产生通知 与除一个或多个温度传感器数据点的位置之外的一个或多个位置中的预设限制的关系。

公开(公告)号：US20090134330A1

公开(公告)日：2009-05-28

申请号：US12277479

申请日：2008-11-25

Applicant: Juergen HUPPERTZ

Inventor： Juergen HUPPERTZ

IPC: G01J5/00 ,  G01R29/00

CPC classification number: G01J5/24 ,  G01D3/032 ,  G01J2005/0048

Abstract: In an evaluation device for determining a measurement value at a component, power is supplied to the component during readout of the measurement value. A controller serves to determine the power supplied to the component during the readout. The measurement value determined by the reader is corrected by a compensator while using the power determined by the controller, so as to obtain a corrected measurement value freed from any effects caused by the power supplied.

Abstract translation: 在用于确定部件的测量值的评估装置中，在读出测量值期间向部件供电。 控制器用于确定在读出期间提供给部件的功率。 在使用由控制器确定的功率的情况下，通过补偿器来校正由读取器确定的测量值，以便获得校正的测量值，从而免除由所提供的功率引起的任何影响。

公开(公告)号：US20090084959A1

公开(公告)日：2009-04-02

申请号：US12240981

申请日：2008-09-29

Applicant: Janice A. Hudgings ,  Joseph Summers

Inventor： Janice A. Hudgings ,  Joseph Summers

IPC: G01N21/17

CPC classification number: G01J5/0003 ,  G01J5/08 ,  G01J5/0809 ,  G01J5/0831 ,  G01J5/084 ,  G01J5/0896 ,  G01J2005/0048 ,  G01N21/1717 ,  G01N21/55

Abstract: An embodiment of a method of performing thermoreflectance measurements with an imaging system comprises: reflecting radiation from a number of points in a sample in response to an illuminating radiation while a temperature modulation is applied to the sample; acquiring digital images of the reflected radiation after the reflected radiation passes through an aperture; and deriving a map of relative reflectivity of the sample based on the digital images. At least a portion of the illuminating radiation passes through at least a portion of the sample and is reflected at a change refractive index interface.

Abstract translation: 使用成像系统执行热反射测量的方法的实施例包括：当对样品施加温度调制时，响应于照射辐射反射来自样品中的多个点的辐射; 在反射的辐射通过孔径之后获取反射的辐射的数字图像; 并且基于数字图像得到样本的相对反射率的图。 照射辐射的至少一部分通过样品的至少一部分并在变化的折射率界面反射。

公开(公告)号：US07507019B2

公开(公告)日：2009-03-24

申请号：US11419360

申请日：2006-05-19

Applicant: Jeffrey E. Price

Inventor： Jeffrey E. Price

IPC: G01K15/00 ,  G01J5/00

CPC classification number: G01J5/16 ,  G01J5/522 ,  G01J2005/0048 ,  G01K15/00

Abstract: A method for calibrating a thermometer is disclosed. The thermometer comprises a primary temperature sensor for determining the temperature of a target. The thermometer also comprises a reference temperature sensor positioned proximate to the primary temperature sensor and being responsive to an extraneous temperature affecting the primary temperature sensor. One calibration method calibrates the reference temperature sensor. This calibration can utilize a non-electrically conductive liquid bath for temperature control. Another calibration method calibrates the reference temperature sensor and the primary temperature sensor.

Abstract translation: 公开了一种用于校准温度计的方法。 温度计包括用于确定目标温度的一次温度传感器。 温度计还包括靠近主温度传感器定位的参考温度传感器，并响应影响初级温度传感器的外部温度。 一种校准方法校准参考温度传感器。 该校准可以利用非导电液体浴来进行温度控制。 另一种校准方法校准参考温度传感器和一次温度传感器。