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    SYSTEMS, DEVICES, AND METHODS TO REDUCE DIELECTRIC CHARGING IN MICRO-ELECTRO-MECHANICAL SYSTEMS DEVICES
    132.
    发明申请
    SYSTEMS, DEVICES, AND METHODS TO REDUCE DIELECTRIC CHARGING IN MICRO-ELECTRO-MECHANICAL SYSTEMS DEVICES 审中-公开
    用于减少微机电系统设备中的电介质充电的系统，装置和方法

    公开(公告)号：US20160099112A1

    公开(公告)日：2016-04-07

    申请号：US14875341

    申请日：2015-10-05

    Applicant: wiSpry, Inc. .

    Inventor： Dana DeReus ,  Arthur S. Morris, III ,  David Molinero-Giles

    IPC: H01G5/16

    CPC classification number: H01G5/16 ,  B81B3/0008 ,  B81B3/0051 ,  B81B2201/0221

    Abstract: The present subject matter relates to devices, systems, and methods for isolation of electrostatic actuators in MEMS devices to reduce or minimize dielectric charging. A tunable component can include a fixed actuator electrode positioned on a substrate, a movable actuator electrode carried on a movable component that is suspended over the substrate, one or more isolation bumps positioned between the fixed actuator electrode and the movable actuator electrode, and a fixed isolation landing that is isolated within a portion of the fixed actuator electrode that is at, near, and/or substantially aligned with each of the one or more isolation bumps. In this arrangement, the movable actuator electrode can be selectively movable toward the fixed actuator electrode, but the one or more isolation bumps can prevent contact between the fixed and movable actuator electrodes, and the fixed isolation landing can inhibit the development of an electric field in the isolation bump.

    Abstract translation: 本主题涉及用于隔离MEMS装置中的静电致动器的装置，系统和方法，以减少或最小化介电充电。 可调谐部件可以包括位于基板上的固定致动器电极，承载在可移动部件上的可移动致动器电极，悬挂在基板上，一个或多个隔离凸块，其位于固定致动器电极和可动致动器电极之间， 在固定的致动器电极的一个或多个隔离凸块附近和/或基本对齐的部分内被隔离的隔离着陆。 在这种布置中，可移动致动器电极可以选择性地朝向固定的致动器电极移动，但是一个或多个隔离凸块可以防止固定和可动致动器电极之间的接触，并且固定隔离着地可以抑制电场的发展 隔离凸块。

    MEMS device with multiple electrodes and fabricating method thereof
    134.
    发明授权
    MEMS device with multiple electrodes and fabricating method thereof 有权
    具有多个电极的MEMS器件及其制造方法

    公开(公告)号：US09249008B2

    公开(公告)日：2016-02-02

    申请号：US14094568

    申请日：2013-12-02

    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

    Inventor： Yu Wen Hsu ,  Chin Fu Kuo ,  Chao Ta Huang ,  Chun Kai Mao ,  Chin Hung Wang

    IPC: A61B19/00 ,  B81B3/00 ,  G01L9/00 ,  G01P15/08 ,  G01P15/125

    CPC classification number: B81B3/0086 ,  A61B2562/028 ,  B81B2201/0221 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0257 ,  B81B2201/0264 ,  G01L9/0073 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0837

    Abstract: A MEMS device with a first electrode, a second electrode and a third electrode is disclosed. These electrodes are disposed on a substrate in such a manner that (1) a pointing direction of the first electrode is in parallel with a normal direction of the substrate, (2) a pointing direction of the third electrode is perpendicular to the pointing direction of the first electrode, (3) the second electrode includes a sensing portion and a stationary portion, (4) the first electrode and the sensing portion are configured to define a sensing capacitor, and (5) the third electrode and the stationary portion are configured to define a reference capacitor. This arrangement facilitates the MEMS device such as a differential pressure sensor, differential barometer, differential microphone and decoupling capacitor to be miniaturized.

    Abstract translation: 公开了具有第一电极，第二电极和第三电极的MEMS器件。 这些电极以这样的方式设置在基板上：（1）第一电极的指向方向与基板的法线方向平行，（2）第三电极的指向方向垂直于 第一电极，（3）第二电极包括感测部分和静止部分，（4）第一电极和感测部分被配置为限定感测电容器，以及（5）第三电极和固定部分被配置 以定义参考电容器。 这种布置方便MEMS器件如差压传感器，差分气压计，差分麦克风和去耦电容器小型化。

    SENSOR HAVING PARTICLE BARRIER
    135.
    发明申请
    SENSOR HAVING PARTICLE BARRIER 审中-公开
    带传感器的传感器

    公开(公告)号：US20150355223A1

    公开(公告)日：2015-12-10

    申请号：US14763511

    申请日：2013-01-31

    Applicant: HEWLETT-PACKARD DEVELOPMENT COMPANY L.P.

    Inventor： Jennifer Wu ,  Rodney L. Alley ,  Robert G. Walmsley ,  Donald J. Milligan

    IPC: G01P15/125 ,  G01P15/08

    CPC classification number: G01P15/125 ,  B81B7/0029 ,  B81B2201/0221 ,  B81B2201/0235 ,  G01C19/5769 ,  G01P1/023 ,  G01P15/0802 ,  Y10T29/417

    Abstract: A sensor having a particle barrier is described. In an example, a sensor includes: first and second electrode sets respectively disposed upon a planar support surface and a proof mass that is compliantly displaceable along a first axis substantially parallel to the planar support surface; and a first barrier disposed on the planar support around the first electrode set having a height less than a gap between the planar support and the proof mass to mitigate particle migration into the first or second electrode set.

    Abstract translation: 描述具有颗粒屏障的传感器。 在一个示例中，传感器包括：分别设置在平面支撑表面上的第一和第二电极组以及沿着基本上平行于平面支撑表面的第一轴线顺应地移位的检测质量块; 以及围绕所述第一电极组设置在所述平面支撑件上的第一屏障，所述第一电极具有小于所述平面支撑件和所述检测质量块之间的间隙的高度，以减轻进入所述第一或第二电极组的颗粒迁移。

    INTEGRATED CAPACITIVELY-COUPLED BIAS CIRCUIT FOR RF MEMS SWITCHES
    136.
    发明申请
    INTEGRATED CAPACITIVELY-COUPLED BIAS CIRCUIT FOR RF MEMS SWITCHES 有权
    用于RF MEMS开关的集成电容耦合偏置电路

    公开(公告)号：US20150348714A1

    公开(公告)日：2015-12-03

    申请号：US14292598

    申请日：2014-05-30

    Applicant: Raytheon Company

    Inventor： Francis J. Morris

    IPC: H01G5/16 ,  H01H59/00

    CPC classification number: H01G5/16 ,  B81B2201/01 ,  B81B2201/0221 ,  H01G5/18 ,  H01H59/0009 ,  H01L28/40 ,  H01L29/66181 ,  H01L29/92

    Abstract: A switchable capacitor including a first electrode, a dielectric layer on the first electrode, a second electrode configured to be suspended in an undeflected position over the dielectric layer in a de-activated state, and to deflect toward the first electrode in an activated state in response to a voltage difference between the two electrodes, a gap between the second electrode and the dielectric layer in the activated state being less than a corresponding gap in the de-activated state, and a capacitor having a first and second end, coupled to one of the electrodes at the first end, and configured to reduce the voltage difference between the electrodes as the second electrode deflects toward the first electrode in the activated state, wherein the voltage difference between the electrodes corresponds to a bias voltage applied across the second end of the capacitor and an other one of the first and second electrodes.

    Abstract translation: 一种可切换电容器，包括第一电极，第一电极上的电介质层，第二电极，被配置为悬浮在处于去激活状态的电介质层上的未偏转位置，并且以激活状态朝向第一电极偏转 响应于两个电极之间的电压差，在激活状态下第二电极和电介质层之间的间隙小于去激活状态下的对应间隙，以及具有第一和第二端耦合到一个的电容器 并且被配置为当激活状态下第二电极朝着第一电极偏转时，减小电极之间的电压差，其中电极之间的电压差对应于跨过第二端施加的偏置电压 电容器和第一和第二电极中的另一个。

    MEMS DEVICE WITH A STRESS-ISOLATION STRUCTURE
    137.
    发明申请
    MEMS DEVICE WITH A STRESS-ISOLATION STRUCTURE 有权
    具有应力隔离结构的MEMS器件

    公开(公告)号：US20150284239A1

    公开(公告)日：2015-10-08

    申请号：US14172894

    申请日：2014-02-04

    Applicant: INVENSENSE, INC.

    Inventor： KIRT REED WILLIAMS ,  MATTHEW JULIAN THOMPSON ,  JOSEPH SEEGER

    IPC: B81B3/00 ,  G01P15/125 ,  B81C1/00 ,  G01N3/20

    CPC classification number: B81B3/0051 ,  B81B2201/0221 ,  B81B2201/0235 ,  B81B2201/0271 ,  B81C1/00666 ,  G01K1/00 ,  G01N3/20 ,  G01P15/125 ,  G01P2015/0828

    Abstract: A method and system for a MEMS device is disclosed. The MEMS device includes a free layer, with a first portion and a second portion. The MEMS device also includes a underlying substrate, the free layer movably positioned relative to the underlying substrate. The first portion and second portion of the free layer are coupled through at least one stem. A sense material is disposed over portions of the second portion of the free layer. Stress in the sense material and second portion of the free layer does not cause substantial deflection of the first portion.

    Abstract translation: 公开了一种用于MEMS器件的方法和系统。 MEMS器件包括具有第一部分和第二部分的自由层。 MEMS器件还包括下面的衬底，自由层相对于下面的衬底可移动地定位。 自由层的第一部分和第二部分通过至少一个杆连接。 感测材料设置在自由层的第二部分的部分上。 感应材料和自由层的第二部分的应力不会引起第一部分的实质的偏转。

    MEMS element and method of manufacturing the same
    139.
    发明授权
    MEMS element and method of manufacturing the same 有权
    MEMS元件及其制造方法

    公开(公告)号：US09045330B2

    公开(公告)日：2015-06-02

    申请号：US13802520

    申请日：2013-03-13

    Applicant: KABUSHIKI KAISHA TOSHIBA

    Inventor： Yuriko Kato ,  Hiroaki Yamazaki ,  Etsuji Ogawa ,  Takayuki Masunaga

    IPC: H01L29/84 ,  B81B3/00 ,  H01G5/18

    CPC classification number: B81B3/0086 ,  B81B2201/0221 ,  H01G5/18

    Abstract: According to one embodiment, a MEMS element comprises a first electrode fixed on a substrate, and a second electrode arranged above the first electrode, facing the first electrode, and vertically movable. The second electrode includes a second opening portion that penetrates from an upper surface to a lower surface of the second electrode. The first electrode includes a first opening portion at a position corresponding to at least a part of the second opening portion, the first opening portion penetrating from an upper surface to a lower surface of the first electrode.

    Abstract translation: 根据一个实施例，MEMS元件包括固定在基板上的第一电极和布置在第一电极之上的面向第一电极并且可垂直移动的第二电极。 第二电极包括从第二电极的上表面到下表面穿透的第二开口部分。 第一电极包括在对应于第二开口部分的至少一部分的位置处的第一开口部分，第一开口部分从第一电极的上表面穿透到下表面。

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