公开(公告)号：US20050068526A1

公开(公告)日：2005-03-31

申请号：US10857354

申请日：2004-05-27

Applicant: Ivan Avrutsky

Inventor： Ivan Avrutsky

IPC: G01J3/18 ,  G01J3/28

CPC classification number: G01J3/18 ,  G01J3/0205 ,  G01J3/0259 ,  G01J3/0294 ,  G01J3/2823

Abstract: A miniaturized diffractive imaging spectrometer (DIS) has a footprint less than 2×1 mm2, is about 2.5 mm tall (excluding an image detector, which in some embodiments may be a CCD matrix), and covers the entire visible spectral range from 400 nm to 700 nm with resolution of approximately from 2 nm to 4 nm across the field. The DIS is able to function with multiple input waveguide channels, and is flexible in its various possible configurations, as it can be designed to achieve better resolution or higher number of channels or wider spectral range or smaller size.

Abstract translation: 小型化衍射成像光谱仪（DIS）具有小于2×1mm 2的占地面积，高约2.5mm（不包括图像检测器，在某些实施例中可以是CCD矩阵），并覆盖从400的整个可见光谱范围 nm至700nm，分辨率在整个场中大约为2nm至4nm。 DIS能够与多个输入波导通道一起使用，并且具有灵活的各种可能的配置，因为它可以设计成实现更好的分辨率或更高数量的通道或更宽的光谱范围或更小的尺寸。

公开(公告)号：US20040218179A1

公开(公告)日：2004-11-04

申请号：US10857223

申请日：2004-05-28

Inventor： Adam E. Norton ,  Abdurrahman Sezginer ,  Fred E. Stanke

IPC: G01J004/00

CPC classification number: G01B11/02 ,  G01J3/02 ,  G01J3/0294 ,  G01N21/211 ,  G01N21/25 ,  G01N21/474 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/213

Abstract: An optical measurement system for evaluating a sample has a motor-driven rotating mechanism coupled to an azimuthally rotatable measurement head, allowing the optics to rotate with respect to the sample. A polarimetric scatterometer, having optics directing a polarized illumination beam at non-normal incidence onto a periodic structure on a sample, can measure optical properties of the periodic structure. An E-O modulator in the illumination path can modulate the polarization. The head optics collect light reflected from the periodic structure and feed that light to a spectrometer for measurement. A beamsplitter in the collection path can ensure both S and P polarization from the sample are separately measured. The measurement head can be mounted for rotation of the plane of incidence to different azimuthal directions relative to the periodic structures. The instrument can be integrated within a wafer process tool in which wafers may be provided at arbitrary orientation.

Abstract translation: 用于评估样品的光学测量系统具有耦合到方位角可旋转测量头的电动机旋转机构，允许光学器件相对于样品旋转。 具有将非正常入射的偏振照明光束引导到样品上的周期性结构上的光学偏振散射仪可以测量周期性结构的光学性质。 照明路径中的E-O调制器可以调制偏振。 头部光学器件收集从周期性结构反射的光并将光馈送到光谱仪进行测量。 收集路径中的分束器可以确保来自样品的S和P极化分别测量。 测量头可以安装成相对于周期性结构使入射平面旋转到不同的方位角方向。 仪器可以集成在晶片工艺工具中，其中可以以任意取向提供晶片。

公开(公告)号：US06690468B1

公开(公告)日：2004-02-10

申请号：US09614339

申请日：2000-07-12

Applicant: Karl Benzel ,  Thomas Fuhrmann ,  Andreas Conzelmann ,  Eberhard Loecklin

Inventor： Karl Benzel ,  Thomas Fuhrmann ,  Andreas Conzelmann ,  Eberhard Loecklin

IPC: G01J312

CPC classification number: G01J3/12 ,  G01J3/0224 ,  G01J3/0294

Abstract: An optical spectrum analyzer of novel design, in which several different spectra can be measured and analyzed simultaneously. A measuring signal is used as a reference signal for calibrating the optical spectrum analyzer. The light rays are admitted via a coupling device with several coupling apertures arranged in a line; and via a separate decoupling device comprising respective decoupling apertures arranged in a line, the light rays are decoupled. Height offset is realized by a 90° deviation prism. The arrangement makes possible simultaneous analysis of several optical lines with little retroreflection as well as uninterrupted calibration of the measuring process.

Abstract translation: 一种新颖设计的光谱分析仪，其中可以同时测量和分析几种不同的光谱。 测量信号用作校准光谱分析仪的参考信号。 光线通过耦合装置进入，多个耦合孔布置成一条线; 并且经由单独的去耦装置，其包括排列成一行的各自的去耦孔，光线被解耦。 高度偏移由90°偏差棱镜实现。 该布置使得可以同时分析几个具有很小逆向反射的光线以及测量过程的不间断校准。

公开(公告)号：US20030156287A1

公开(公告)日：2003-08-21

申请号：US10275119

申请日：2003-02-27

Inventor： Lun Kai Cheng

IPC: G01J003/28 ,  G01J003/02 ,  G01J004/00

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0264 ,  G01J3/0294 ,  G01J3/14 ,  G01J3/2803 ,  G01J9/00 ,  G01J2003/2866

Abstract: An optical wavelength analyser including: an entrance slit (4) for receiving a light beam (3) including signals with various wavelengths and passings the beam at least partly; a diffractor (6, 7, 9) for receiving the passed beam and diffracting the signals dependent on their wavelength; a detector (8) including adjacent detector elements (32, 33, 35, 36, 38, 39) for receiving the diffracted signals and generating their output signals; a processor (21) for determining the wavelengths from the output signals, in which the received light beam has a spatially uniform intensity; the diffractor diffracts each signal on a different detector element subset, consisting of at least a first element (32, 33, 35, 36, 38, 39) for receiving at least a first signal with a first signal level; the processor determines each signal's wavelength dependent on the first signal level and a calibration value.

Abstract translation: 一种光波长分析仪，包括：用于接收光束（3）的入射狭缝（4），其包括具有各种波长的信号并且至少部分地传递所述光束; 用于接收经过的光束并根据其波长衍射信号的衍射器（6,7,9）; 包括用于接收衍射信号并产生其输出信号的相邻检测器元件（32,33,35,36,38,39）的检测器（8）; 用于根据所述输出信号确定所述波长的处理器（21），其中所接收的光束具有空间上均匀的强度; 所述衍射器将不同的检测器元件子集上的每个信号衍射，所述检测器元件子集由至少第一元件（32,33,35,36,38,39）组成，用于至少接收具有第一信号电平的第一信号; 处理器根据第一信号电平和校准值确定每个信号的波长。

公开(公告)号：US06441892B2

公开(公告)日：2002-08-27

申请号：US09813325

申请日：2001-03-19

Applicant: Ming Xiao

Inventor： Ming Xiao

IPC: G01N2164

CPC classification number: G01J3/26 ,  G01J3/02 ,  G01J3/0294 ,  G01J3/4406 ,  G01N21/6456 ,  G01N2021/6417 ,  G01N2021/6423

Abstract: Spectrofluorometer employing a pair of linear variable spectral filters to produce a three dimensional data output is disclosed. A collimated white light source is used that first passes through a first linear variable spectral filter, then through a sample where fluorescence occurs, then the resultant light passes through a second linear variable spectral light filter that is oriented at ninety degrees from the first filter. The light is then detected by a CCD sensor for conversion into data. This arrangement provides a very simple, rugged and compact instrument that can be used almost anywhere, such as at the scene of a contamination accident.

Abstract translation: 公开了使用一对线性可变光谱滤波器产生三维数据输出的分光荧光计。 使用准直的白光源，其首先通过第一线性可变光谱滤光器，然后通过荧光发生的样品，然后所得光通过从第一滤光器定向成90度的第二线性可变光谱滤光器。 然后由CCD传感器检测光转换成数据。 这种安排提供了一种非常简单，坚固耐用的紧凑型仪器，可以在几乎任何地方使用，例如在污染事故现场。

公开(公告)号：US20020060792A1

公开(公告)日：2002-05-23

申请号：US09907874

申请日：2001-07-13

Applicant: ADC Inc.

Inventor： Per Eld Ibsen ,  Bjarke Rose ,  Michael Rasmussen

IPC: G01J003/18

CPC classification number: G02B6/12007 ,  G01J3/02 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/0294 ,  G01J3/18 ,  G01J3/2803

Abstract: An apparatus monitors spectral information of an optical transmission system. The apparatus comprises a monolithic spectrometer and at least one transmission signal detector for producing output signals of separated transmission signal components and optical noise.

Abstract translation: 一种装置监视光传输系统的光谱信息。 该装置包括单片光谱仪和至少一个传输信号检测器，用于产生分离的传输信号分量和光噪声的输出信号。

公开(公告)号：US6122051A

公开(公告)日：2000-09-19

申请号：US090712

申请日：1998-06-04

Applicant: David A. Ansley ,  Lacy G. Cook

Inventor： David A. Ansley ,  Lacy G. Cook

IPC: G01J3/04 ,  G01J3/28 ,  G01J3/14

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0294 ,  G01J3/04 ,  G01J3/2823

Abstract: A multi-slit spectrometer is combined with a two-dimensional detector array to enable simultaneous spectral analysis of several objects, improving the signal-to-noise ratio of multispectral imagery. The multi-slit spectrometer includes a multi-slit structure defining a plurality of parallel thin slits, and a first lens for directing object light onto the multi-slit structure. A second lens collimates and directs light which has passed through the slits of the multi-slit structure onto a light dispersing element such as a dispersing prism or a diffraction grating. A third lens focuses light which has passed through the light dispersing element onto the two-dimensional detector array at an image plane. A two dimensional detector array of detector elements is placed at the image plane. The slits are separated by a separation distance equal to an integral multiple of the detector width dimension, where the multiple is equal to (N times the number of slits) plus or minus one, where N is an integer. In an airborne sensor, a mirror which rotates at an angular velocity related to the velocity of the airborne platform directs object light onto the first lens, freezing the image from one or more objects onto the multi-slit structure for an integration time.

Abstract translation: 多狭缝光谱仪与二维检测器阵列相结合，可同时对多个物体进行光谱分析，从而提高多光谱图像的信噪比。 多狭缝光谱仪包括限定多个平行薄狭缝的多狭缝结构和用于将物体光引导到多狭缝结构上的第一透镜。 第二透镜将通过多狭缝结构的狭缝的光准直并引导到诸如分散棱镜或衍射光栅的光分散元件上。 第三透镜将已经通过光分散元件的光聚焦在图像平面上的二维检测器阵列上。 检测器元件的二维检测器阵列放置在图像平面处。 狭缝被分开等于检测器宽度尺寸的整数倍的间隔距离，其中倍数等于（N倍的狭缝数）加或减1，其中N是整数。 在机载传感器中，以与空中平台的速度相关的角速度旋转的反射镜将物体光引导到第一透镜上，将图像从一个或多个物体冷冻到多狭缝结构上用于积分时间。

公开(公告)号：US5963320A

公开(公告)日：1999-10-05

申请号：US93713

申请日：1998-06-08

Applicant: Neil H. Brooks ,  Sergey N. Tugarinov ,  Nicolae N. Naumenko ,  Torkil H. Jensen ,  Daniel Finkenthal

Inventor： Neil H. Brooks ,  Sergey N. Tugarinov ,  Nicolae N. Naumenko ,  Torkil H. Jensen ,  Daniel Finkenthal

IPC: G01J3/06 ,  G01J3/20 ,  G01J3/28 ,  G01J3/457 ,  G01J3/18

CPC classification number: G01J3/06 ,  G01J3/20 ,  G01J3/457 ,  G01J2003/2866 ,  G01J3/0202 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0294

Abstract: A grating spectrometer employing digital control of an oscillating component (a mirror) and phase-locked digital recording of the intensity profile within the narrow spectral domain defined by an oscillation frequency. Flexible choice of oscillation frequency permits measurement in a quiet region of the noise spectrum. Reference waveforms acquired with the same insturment can be stored and later used to deconvolute a more complex spectrum. The use of multiple detector/slit combinations along a Rowland circle makes the spectrometer sensitive to specific atomic elements.

Abstract translation: 光栅光谱仪采用振荡分量（反射镜）的数字控制和由振荡频率限定的窄谱域内的强度分布的锁相数字记录。 振荡频率的灵活选择允许在噪声谱的安静区域进行测量。 可以存储使用相同装置获得的参考波形，并且稍后用于对更复杂的频谱进行解卷积。 沿Rowland圆圈使用多个探测器/狭缝组合使得光谱仪对特定的原子元素敏感。

公开(公告)号：US5880834A

公开(公告)日：1999-03-09

申请号：US047083

申请日：1998-03-24

Applicant: Michael P. Chrisp

Inventor： Michael P. Chrisp

IPC: G01J3/02 ,  G01J3/18 ,  G01J3/20 ,  G01J3/28 ,  G03F7/20

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0256 ,  G01J3/0294 ,  G01J3/18 ,  G01J3/20 ,  G01J3/2803 ,  G01J3/2823 ,  G03F7/70233

Abstract: A 1:1 Offner mirror system for imaging off-axis objects is modified by replacing a concave spherical primary mirror that is concentric with a convex secondary mirror with two concave spherical mirrors M1 and M2 of the same or different radii positioned with their respective distances d1 and d2 from a concentric convex spherical diffraction grating having its grooves parallel to the entrance slit of the spectrometer which replaces the convex secondary mirror. By adjusting their distances d1 and d2 and their respective angles of reflection .alpha. and .beta., defined as the respective angles between their incident and reflected rays, all aberrations are corrected without the need to increase the spectrometer size for a given entrance slit size to reduce astigmatism, thus allowing the imaging spectrometer volume to be less for a given application than would be possible with conventional imaging spectrometers and still give excellent spatial and spectral imaging of the slit image spectra over the focal plane.

Abstract translation: 1：1用于成像离轴物体成像的偏光镜系统通过用相对于不同半径的两个凹球面镜M1和M2以相应的距离d1 并且具有平行于光谱仪的入口狭缝的凹槽的同心凸球形衍射光栅的d2，其代替凸的次级反射镜。 通过调整它们的距离d1和d2以及它们各自的反射角α和β，被定义为它们入射和反射光线之间的相应角度，所有像差被校正，而不需要增加给定入射狭缝尺寸的光谱仪尺寸以减少散光 ，从而允许成像光谱仪体积对于给定的应用而言比常规成像光谱仪可能少，并且仍然在焦平面上给出狭缝图像光谱的优异的空间和光谱成像。

公开(公告)号：US5424826A

公开(公告)日：1995-06-13

申请号：US99308

申请日：1993-07-30

Applicant: Terrance R. Kinney

Inventor： Terrance R. Kinney

IPC: G01J3/28 ,  G01J3/36 ,  G01J3/18

CPC classification number: G01J3/2803 ,  G01J3/36 ,  G01J3/0208 ,  G01J3/0256 ,  G01J3/0294

Abstract: A wideband optical micro-spectrometer system for detecting the intensity of light as a function of wavelength. The device employs multiple optical micro-spectrometers generating adjacent spectra mounted onto a single photodetector array and digital processing techniques to generate a continuous wide spectrum from the narrower spectrums generated by the optical micro-spectrometers. Optical micro-spectrometers generating non-adjacent spectra could also be employed to produce spectral data for predetermined non-adjacent spectral ranges. System reliability is improved and maintenance reduced with the use of pre-aligned optical micro-spectrometers. Thereby, a device is created which has the spectral range of larger spectrometers having a much reduced physical size, increased system reliability and reduced maintenance requirements.

Abstract translation: 用于检测作为波长的函数的光的强度的宽带光学微分光谱仪系统。 该设备采用多个光学微光谱仪，产生安装在单个光电检测器阵列上的相邻光谱，并使用数字处理技术从光学微光谱仪产生的较窄光谱产生连续的宽谱。 产生非相邻光谱的光学微分光谱仪也可用于产生预定的非相邻光谱范围的光谱数据。 通过使用预对准的光学微量光谱仪，可以提高系统的可靠性并降低维护成本。 因此，创建了具有较大光谱仪的光谱范围具有大大减小的物理尺寸，增加的系统可靠性和减少维护要求的装置。