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公开(公告)号：US09947526B2
公开(公告)日：2018-04-17
申请号：US15308802
申请日：2016-01-29
Applicant: SHIKOH TECH LLC
Inventor： Tsutae Shinoda , Hitoshi Hirakawa , Kenji Awamoto , Bingang Guo , Takefumi Hidaka , Junichiro Takahashi
CPC classification number: H01J65/00 , H01J11/18 , H01J61/06 , H01J61/305 , H01J61/42 , H01J63/08 , H05B41/24
Abstract: A gas discharge device includes a thin glass tube filled with a discharge gas; a pair of first and second long electrodes extending toward either side along a longitudinal direction with a discharge gap interposed therebetween are provided outside of a back side flat surface of a thin glass tube; and a ultraviolet phosphor layer formed on an inner surface at the back side flat surface, the thin glass tube filled with a discharge gas having a front side flat surface and the back side flat surface facing each other on a transverse section, wherein, starting with trigger discharge that is initially generated in the discharge gap as a result of a voltage increase when a voltage with a sine waveform or an inclined waveform is applied between both electrodes, the discharge gradually extends so as to move in the longitudinal direction of the electrodes. Ultraviolet light having high luminous efficiency and emission intensity is obtained from a front side surface of the thin glass tube by driving the device with a sine-wave AC voltage.
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142.发明授权公开(公告)号：US09924585B2
公开(公告)日：2018-03-20
申请号：US15103721
申请日：2014-11-14
Applicant: ASML Netherlands B.V.
Inventor： Martijn Petrus Christianus Van Heumen
CPC classification number: H05G2/008 , G01N21/9501 , G01N21/956 , G03F7/70191 , H01J61/35 , H01J61/54 , H01J61/545 , H01J65/00 , H01J65/04
Abstract: A radiation source apparatus comprising: a container (400) for being pressurized with a gaseous medium in which plasma which emits plasma emitted radiation is generated following excitation of the gaseous medium by a driving radiation (50), wherein said container is operable (66, 67) substantially to remove radiation with a wavelength of 10-400 nm from said plasma emitted radiation before said plasma emitted radiation exits said container as output radiation. In an embodiment the container comprises: an inlet radiation transmitting element (64) operable to transmit said driving radiation from outside said container to inside said container, and an outlet radiation transmitting element (65) operable to transmit at least some of said plasma emitted radiation from inside said container to outside said container as output radiation; wherein at least one of said inlet and outlet radiation transmitting elements comprises a plane parallel plate.
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公开(公告)号：US09887076B2
公开(公告)日：2018-02-06
申请号：US15207136
申请日：2016-07-11
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Anatoly Shchemelinin , Matthew Derstine , Kenneth P. Gross , David W. Shortt , Wei Zhao , Anant Chimmalgi , Jincheng Wang
CPC classification number: H01J65/042 , H01J61/28 , H01J61/523 , H01J65/00 , H05H1/24
Abstract: A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a bulb-less gas containment structure, and a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb-less gas containment structure. Further, the plasma is generated within a concave region of the collector element, where the collector element includes an opening through the collector element for propagating a portion of a plume of the plasma from a first region of the bulb-less gas containment structure to a second region of the bulb-less gas containment structure, wherein the first region of the bulb-less gas containment structure and the second region of the bulb-less gas containment structure are at least partially separated by a surface of the collector element.
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公开(公告)号：US20170186596A1
公开(公告)日：2017-06-29
申请号：US15308802
申请日：2016-01-29
Applicant: SHIKOH TECH LLC
Inventor： Tsutae SHINODA , Hitoshi HIRAKAWA , Kenji AWAMOTO , Bingang GUO , Takefumi HIDAKA , Junichiro TAKAHASHI
CPC classification number: H01J65/00 , H01J11/18 , H01J61/06 , H01J61/305 , H01J61/42 , H01J63/08 , H05B41/24
Abstract: The object of this invention is to provide a gas discharge device which has a simple configuration, inexpensive, and has excellent luminous efficiency, for an ultraviolet or visible light source.The invention provides a gas discharge device in which first and second long electrodes extending toward either side along a longitudinal direction with a discharge gap interposed therebetween are provided outside of a back side flat surface of a thin glass tube, the thin glass tube filled with a discharge gas having a front side flat surface and the back side flat surface facing each other on a transverse section, wherein, starting with trigger discharge that is initially generated in the discharge gap as a result of a voltage increase when a voltage with a sine waveform or an inclined waveform is applied between both electrodes, the discharge gradually extends so as to move in the longitudinal direction of the electrodes. Ultraviolet light having high luminous efficiency and emission intensity is obtained from the flat surface at the front surface side by forming an ultraviolet phosphor layer in the thin glass tube and driving the device with a sine-wave voltage.
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公开(公告)号：US09691600B2
公开(公告)日：2017-06-27
申请号：US15073624
申请日：2016-03-17
Inventor： Takehiro Zukawa , Yoshiki Sasaki , Nobuaki Nagao
CPC classification number: H01J61/44 , H01J61/16 , H01J61/302 , H01J61/305 , H01J65/00
Abstract: An ultraviolet light emitting device includes: a first substrate; a second substrate; a gas in a space between the first substrate and the second substrate; electrodes directly or indirectly on a first main surface of the first substrate; a dielectric layer that is located in a first region directly or indirectly on the first main surface of the first substrate and covers the electrodes, the dielectric layer being not located in a second region directly or indirectly on the first main surface of the first substrate, the second region being different from the first region, the first region including regions in which the electrodes are located; and a light-emitting layer that is located in the second region and/or located directly or indirectly on at least one of second and third main surfaces of the second substrate and emits the ultraviolet light in the gas due to electrical discharge between the electrodes.
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Patent Agency Ranking
公开(公告)号：US09530636B2
公开(公告)日：2016-12-27
申请号：US14660849
申请日：2015-03-17
Applicant: KLA-Tencor Corporation
Inventor： Sebaek Oh , Anant Chimmalgi , Rahul Yadav , Matthew Derstine , Ilya Bezel
CPC classification number: H01J65/00 , H01J61/025 , H01J61/32 , H01J65/04
Abstract: A laser-sustained plasma light source includes a plasma cell configured to contain a volume of gas. The plasma cell is configured to receive illumination from a pump laser in order to generate plasma within the volume of gas. The plasma emits broadband radiation. The plasma cell includes one or more transparent portions being at least partially transparent to at least a portion of illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The plasma cell also includes one or more nanostructured layers disposed on one or more surfaces of the one or more transparent portions of the plasma cell. The one or more nanostructure layers form a region of refractive index control across an interface between the one or more transparent portions of the plasma cell and an atmosphere.
Abstract translation: 激光维持等离子体光源包括被配置为容纳一定体积的气体的等离子体单元。 等离子体单元被配置为从泵浦激光器接收照明，以在气体体积内产生等离子体。 等离子体发射宽带辐射。 等离子体单元包括对来自泵浦激光器的至少一部分照明和由等离子体发射的宽带辐射的至少一部分至少部分透明的一个或多个透明部分。 等离子体单元还包括设置在等离子体单元的一个或多个透明部分的一个或多个表面上的一个或多个纳米结构层。 一个或多个纳米结构层在等离子体电池的一个或多个透明部分和气氛之间的界面上形成折射率控制的区域。
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147.发明申请Method and System for Controlling Convective Flow in a Light-Sustained Plasma 有权用于控制轻维持等离子体中对流的方法和系统公开(公告)号：US20160322211A1
公开(公告)日：2016-11-03
申请号：US15207136
申请日：2016-07-11
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Anatoly Shchemelinin , Matthew Derstine , Kenneth P. Gross , David W. Shortt , Wei Zhao , Anant Chimmalgi , Jincheng Wang
CPC classification number: H01J65/042 , H01J61/28 , H01J61/523 , H01J65/00 , H05H1/24
Abstract: A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a plasma cell including a bulb for containing a volume of gas, a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb. Further, the plasma cell is disposed within a concave region of the collector element, where the collector element includes an opening for propagating a portion of a plume of the plasma to a region external to the concave region of the collect element.
Abstract translation: 用于控制光持久等离子体中的对流的系统包括被配置为产生照明的照明源，包括用于容纳一定体积的气体的灯泡的等离子体单元，被布置成将来自照明源的照明聚焦到气体体积中的集电器元件 以便在容纳在灯泡内的气体的体积内产生等离子体。 此外，等离子体单元设置在集电器元件的凹入区域内，其中集电器元件包括用于将等离子体的一部分羽流传播到收集元件的凹部区域外部的区域的开口。
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公开(公告)号：US08308521B2
公开(公告)日：2012-11-13
申请号：US12963407
申请日：2010-12-08
Applicant: Jae Bum Kim , Young Mi Kim
Inventor： Jae Bum Kim , Young Mi Kim
Abstract: A lamp electrode includes a sealed tube for generating light when powered by an external power supply and a pair of electrodes formed on the ends of the sealed tube. Solder is filled into the space between each electrode and the sealed tube, and formed on the surface of the exterior surface of the electrodes. A method for forming the lamp electrode includes forming a cylindrically shaped electrode on an end of a sealed tube; maintaining a supply of solder in the liquid state; and dipping the end of the tube on which the electrode is formed into the solder.
Abstract translation: 灯电极包括用于在由外部电源供电时产生光的密封管和形成在密封管的端部上的一对电极。 焊料填充到每个电极和密封管之间的空间中，并形成在电极的外表面上。 一种形成灯电极的方法包括在密封管的一端形成圆柱形电极; 保持液态的焊料供应; 并将其上形成有电极的管的端部浸入焊料中。
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149.发明申请EXCIMER RADIATION LAMP ASSEMBLY, AND SOURCE MODULE AND FLUID TREATMENT SYSTEM CONTAINING SAME 审中-公开EXCIMER辐射灯组件，以及包含其的源模块和流体处理系统公开(公告)号：US20120001098A1
公开(公告)日：2012-01-05
申请号：US13176633
申请日：2011-07-05
Applicant: Jim Fraser , Michael Sasges
Inventor： Jim Fraser , Michael Sasges
IPC: H01J61/30
CPC classification number: A61L2/10 , C02F1/325 , C02F2201/3225 , C02F2201/324 , H01J61/30 , H01J65/00
Abstract: An excimer radiation lamp assembly. The lamp assembly comprises a radiation emitting region and at least one substantially radiation opaque region. The radiation emitting region comprises a pair of dielectric elements disposed in a substantially coaxial arrangement.
Abstract translation: 准分子辐射灯组件。 灯组件包括辐射发射区域和至少一个基本上不透射的区域。 辐射发射区域包括以基本上同轴的布置设置的一对电介质元件。
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公开(公告)号：US07990038B2
公开(公告)日：2011-08-02
申请号：US11722889
申请日：2006-01-02
Applicant: Georg Greuel , Wolfgang Schiene , Norbert Braun
Inventor： Georg Greuel , Wolfgang Schiene , Norbert Braun
IPC: H01J1/62
CPC classification number: H01J65/00
Abstract: The subject of the present invention is a dielectric barrier discharge (DBD-) lamp (1) for generating and emitting ultraviolet radiation comprising: —a housed discharge gap (3), whereby the housing has at least two walls, whereby at least one of the walls is a dielectric wall and at least one of the walls has an at least partly transparent part, a filling located inside the discharge gap (3), at least two electrical contacting means for electrical contacting associated with at least the two walls, respectively, whereby the discharge gap (3) is formed by at least two discharge sub-volumes (7) and/or discharge sub-areas (8) differing in at least one of their discharge parameters for realizing at least two dominant emission regimes and/or one emission regime with different radiant intensities and a method for producing said DBD-lamp (1).
Abstract translation: 本发明的目的是用于产生和发射紫外线辐射的介质阻挡放电（DBD）灯（1），包括： - 容纳的放电间隙（3），由此所述壳体具有至少两个壁，由此至少一个 所述壁是电介质壁，并且所述壁中的至少一个具有至少部分透明的部分，位于所述放电间隙（3）内的填充物，分别与至少两个壁相关联的至少两个电接触装置 ，由此排放间隙（3）由至少两个其排放参数中的至少一个不同的至少两个放电子体积（7）和/或排出子区域（8）形成，以实现至少两个主要排放方案和/ 或具有不同辐射强度的一个发射方案和用于制造所述DBD灯（1）的方法。
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