Thin-film device and method of manufacturing same
    145.
    发明申请
    Thin-film device and method of manufacturing same 审中-公开
    薄膜器件及其制造方法

    公开(公告)号:US20070097596A1

    公开(公告)日:2007-05-03

    申请号:US11583067

    申请日:2006-10-19

    Abstract: A thin-film device comprises a substrate and a capacitor provided on the substrate. The capacitor incorporates: a lower conductor layer disposed on the substrate; a dielectric film disposed on the lower conductor layer; and an upper conductor layer disposed on the dielectric film. The thickness of the dielectric film falls within a range of 0.02 to 1 μm inclusive and is smaller than the thickness of the lower conductor layer. The surface roughness in maximum height of the top surface of the lower conductor layer is equal to or smaller than the thickness of the dielectric film.

    Abstract translation: 薄膜器件包括衬底和设置在衬底上的电容器。 电容器包括:设置在基板上的下导体层; 设置在下导体层上的电介质膜; 以及设置在电介质膜上的上导体层。 电介质膜的厚度在0.02〜1μm的范围内,小于下导体层的厚度。 下导体层的上表面的最大高度的表面粗糙度等于或小于电介质膜的厚度。

    Fabrication method of composite metal oxide dielectric film, and composite metal oxide dielectric film fabricated thereby
    148.
    发明申请
    Fabrication method of composite metal oxide dielectric film, and composite metal oxide dielectric film fabricated thereby 审中-公开
    复合金属氧化物电介质膜的制造方法以及由此制造的复合金属氧化物电介质膜

    公开(公告)号:US20070020955A1

    公开(公告)日:2007-01-25

    申请号:US11490230

    申请日:2006-07-21

    Abstract: The invention relates to a fabrication method of a composite metal oxide dielectric film containing at least two metallic elements on a substrate, and a composite metal oxide dielectric film fabricated thereby. The method includes: forming an amorphous film containing at least one of the metallic elements; preparing a hydrothermal solution where a precursor of the remaining element of the metallic elements is mixed; immersing the amorphous film into the hydrothermal solution; and hydrothermally treating the amorphous film so that the remaining one of the metallic elements is synthesized to the amorphous film, thereby forming a crystallized composite metal oxide film.

    Abstract translation: 本发明涉及在基板上含有至少两种金属元素的复合金属氧化物电介质膜的制造方法以及由此制造的复合金属氧化物电介质膜。 该方法包括:形成含有至少一种金属元素的非晶膜; 制备其中混合金属元素的剩余元素的前体的水热溶液; 将非晶膜浸入水热溶液中; 对该非晶质膜进行水热处理,使残留的金属元素与非晶质膜合成,从而形成结晶化复合金属氧化物膜。

    Electronic component and method for manufacturing the same
    149.
    发明申请
    Electronic component and method for manufacturing the same 审中-公开
    电子元件及其制造方法

    公开(公告)号:US20060292813A1

    公开(公告)日:2006-12-28

    申请号:US11494327

    申请日:2006-07-27

    Abstract: Electrode layers (1, 2) are arranged on both sides of a dielectric layer (3) facing each other so as to configure a capacitor. Lead electrodes (4, 5) are formed in the electrode layers (1, 2). A penetrating electrode (6) that is insulated from the electrode layers (1, 2) is formed. An electronic component (10) configured in this manner is mounted on a wiring board, and a semiconductor chip can be mounted thereon. Along with connecting the semiconductor chip to the wiring board via the penetrating electrode (6), the semiconductor chip or the wiring board is connected to the lead electrodes (4, 5). In this manner, while suppressing the size increase of a mounted area, the capacitor or the like can be arranged near the semiconductor chip. Thus, the semiconductor chip is driven with high frequency more easily.

    Abstract translation: 电极层(1,2)布置在相互面对的介质层(3)的两侧,以构成电容器。 在电极层(1,2)中形成引线电极(4,5)。 形成与电极层(1,2)绝缘的穿透电极(6)。 以这种方式配置的电子部件(10)安装在布线板上,并且可以在其上安装半导体芯片。 通过穿透电极(6)将半导体芯片与布线板连接,半导体芯片或布线基板与引线电极(4,5)连接。 以这种方式,在抑制安装区域的尺寸增加的同时,电容器等可以布置在半导体芯片附近。 因此,更容易地以高频率驱动半导体芯片。

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