公开(公告)号：US20010019408A1

公开(公告)日：2001-09-06

申请号：US09846583

申请日：2001-05-01

Inventor： Thomas W. Hagler

IPC: G01J003/28 ,  G01J003/04

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0213 ,  G01J3/0229 ,  G01J3/0289 ,  G01J3/12 ,  G01J3/18 ,  G01J3/32 ,  G01J3/433 ,  G01J2001/4242 ,  G01J2003/2866

Abstract: A disc serving as a spatial radiation modulator has dispersed radiation filters thereon. Each filter has a transmittance or reflectance modulation function of the form sin2(mnullnullpnull/4), where m is a positive integer and p has one of the four values 0, 1, 2, 3. A radiation beam including selected wavelength components is diffracted into an elongated image dispersed according to wavelength. Different wavelength components are focused onto different filters on the modulator and are encoded by correspond filters. Since the modulation functions of the filters are orthogonal to one another, it is possible to extract the amplitude of each wavelength component after it has been encoded or modulated by corresponding filter from the total detected signal during one measurement.

公开(公告)号：US6154708A

公开(公告)日：2000-11-28

申请号：US82116

申请日：1998-05-20

Applicant: Katsue Koashi

Inventor： Katsue Koashi

IPC: G01J3/28 ,  G01J3/433 ,  G01J3/00

CPC classification number: G01J3/433

Abstract: The present method of processing spectral data calculates the first to fourth derivative spectra of an original spectrum with respect to the wavenumber and creates a two-dimensional representation by plotting coordinates consisting of the derivative values of some order as their abscissas and the original spectral values or derivative values of another order different from that order as their ordinates. In this two-dimensional plotting, maximal points, minimal points, maximal slope points (inflection points) and the like are clearly represented, so that a great amount of accurate feature information about the analyzed object can be easily obtained.

Abstract translation: 本发明的光谱数据处理方法计算出相对于波数的原始光谱的第一到第四导数光谱，并且通过绘制由某些次序的导数值组成的坐标作为横坐标和原始光谱值，创建二维表示，或 另一个不同于该顺序的顺序的导数值作为其纵坐标。 在该二维绘图中，清楚地表示最大点，最小点，最大倾斜点（拐点）等，从而可以容易地获得关于分析对象的大量准确的特征信息。

公开(公告)号：US6154284A

公开(公告)日：2000-11-28

申请号：US280989

申请日：1999-03-30

Applicant: James McAndrew ,  Hwa-Chi Wang ,  Benjamin J. Jurcik, Jr.

Inventor： James McAndrew ,  Hwa-Chi Wang ,  Benjamin J. Jurcik, Jr.

IPC: C23C16/44 ,  G01J3/433 ,  G01N21/03 ,  G01N21/35 ,  G01N21/39 ,  H01L21/02 ,  G01N21/00 ,  G01R31/00 ,  G01R31/26

CPC classification number: G01N21/031 ,  C23C16/4412 ,  G01J3/433 ,  G01N21/3504 ,  G01N21/3554 ,  G01N21/39

Abstract: Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample region. The system further comprises an absorption spectroscopy measurement system for detecting a gas phase molecular species. The measurement system comprises a light source and a main detector in optical communication with the sample region through one or more light transmissive window. The light source directs a light beam into the sample region through one of the one or more light transmissive window. The light beam passes through the sample region and exits the sample region through one of the one or more light transmissive window. The main detector responds to the light beam exiting the sample region. The system allows for in situ measurement of molecular gas impurities in a chamber effluent, and in particular, in the effluent from a semiconductor processing chamber. Particular applicability is found in semiconductor manufacturing process control and hazardous gas leak detection.

公开(公告)号：US5703706A

公开(公告)日：1997-12-30

申请号：US585128

申请日：1996-01-11

Applicant: James N. Eckstein ,  Majid L. Riaziat ,  Gary F. Virshup

Inventor： James N. Eckstein ,  Majid L. Riaziat ,  Gary F. Virshup

IPC: G01J3/433 ,  G02F1/035 ,  G02F2/02 ,  H04B10/02 ,  H04B10/04 ,  H04B10/06 ,  H04B10/142 ,  H04B10/152 ,  H04B10/18 ,  H04J14/02

CPC classification number: H04B10/25077 ,  G01J3/433 ,  G02F1/0356 ,  G02F2/02

Abstract: An optical pulse propogating in an optical guide of an electro-optic medium interacts with a coplanar RF traveling wave to shift the optical wavelength. The RF phase is resynchronized to the optical pulse phase with spatial periodicity to provide a desired phase relationship between RF and optical radiation. A unidirectional incremental wavelength shifter comprises a frequency multiplexer for soliton communication and a symmetrical sideband modulator of this type varies the spectral width of probe illumination in an atomic absorption spectrometer probe beam.

Abstract translation: 在光电介质的光导中的光脉冲传播与共面RF行波相互作用以移动光波长。 RF相位与具有空间周期性的光脉冲相位重新同步，以提供RF和光辐射之间期望的相位关系。 单向增量波长移位器包括用于孤子通信的频率多路复用器，并且这种类型的对称边带调制器在原子吸收光谱仪探针光束中改变探测照明的光谱宽度。

公开(公告)号：US5308982A

公开(公告)日：1994-05-03

申请号：US956519

申请日：1992-10-05

Applicant: Juan Ivaldi ,  David H. Tracy ,  Robert Hoult ,  Richard Spragg

Inventor： Juan Ivaldi ,  David H. Tracy ,  Robert Hoult ,  Richard Spragg

IPC: G01N21/27 ,  G01J3/28 ,  G01J3/433 ,  G01N21/73 ,  G01N21/25

CPC classification number: G01J3/433 ,  G01J3/28

Abstract: A method for determining concentration of an analyte in a sample includes generating a spectrum of a selected analyte and interferents, generating a spectrum of an unknown sample, computing first and second derivatives of the sample spectrum, deriving a matrix model that includes the analyte spectrum and the derivatives, and applying the matrix model to the sample spectrum so as to yield a parameter representing concentration of the selected analyte in the unknown sample. Multiple linear least squares regression is utilized to fit the model and calculate the parameter.

Abstract translation: 用于确定样品中分析物浓度的方法包括产生所选分析物和干扰物的光谱，产生未知样品的光谱，计算样品光谱的第一和第二导数，导出包括分析物光谱的矩阵模型，以及 衍生物，并将矩阵模型应用于样本光谱，以产生表示未知样品中所选分析物浓度的参数。 利用多元线性最小二乘回归拟合模型并计算参数。

公开(公告)号：US4834535A

公开(公告)日：1989-05-30

申请号：US041106

申请日：1987-02-24

Applicant: Karl Cammann

Inventor： Karl Cammann

IPC: G01J3/433 ,  G01N21/31 ,  H01J49/02

CPC classification number: G01J3/433 ,  G01N21/3103 ,  G01N21/6402

Abstract: In the atomic absorption or atomic fluorescence spectroscopy the problem exists to compensate the background absorption. For this purpose a measuring light beam, which is passed through a sample space, is frequency modulated by using the Doppler effect. This is achieved in that devices for generating a rate of change of the optical path length passing between two points of this path of rays of the measuring light beam (12) are provided in the path of rays of the measuring light beam (12). Different constructional solutions herefor are described. The optical path length can be varied cyclically by movable mirrors. But it is also possible to arrange a crystal (132) in the path of rays, the refractive index of which can be varied cyclically by applying an electric voltage to the field plates. (134 and 146).

Abstract translation: PCT No.PCT / DE86 / 00276 Sec。 371日期1987年2月24日 102（e）1987年2月24日PCT PCT 1986年7月3日PCT公布。 公开号WO87 / 00272 日期1987年1月15日。在原子吸收或原子荧光光谱中，存在补偿背景吸收的问题。 为此，通过样本空间的测量光束通过使用多普勒效应进行频率调制。 这是通过在测量光束（12）的光线的路径中提供用于产生通过测量光束（12）的这条光线路径的两个点之间的光程长度的变化率的装置来实现的。 描述了不同的结构解决方案。 光路长度可以由可移动镜周期性地变化。 但是，也可以在通过向场板施加电压而使其折射率循环变化的光线路径中配置晶体（132）。 （134和146）。

公开(公告)号：US4791296A

公开(公告)日：1988-12-13

申请号：US081492

申请日：1987-08-04

Applicant: Ronald A. Carpio

Inventor： Ronald A. Carpio

IPC: G01J3/433 ,  G01N21/35 ,  G01N21/84

CPC classification number: G01N21/8422 ,  G01N21/3563 ,  G01J3/433 ,  G01N2021/3568 ,  G01N2021/3595

Abstract: A method of measuring the phosphorus concentration in phosphosilicate and borophosphosilicate films using infrared spectroscopy in conjuction with derivative spectroscopic techniques. This method is easily adapted for use with a Fourier Transform spectrometer. A spectrum of the film is taken with a dual beam infrared spectrometer. The second derivative of the spectrum is plotted to rersolve close peaks. Amplitudes of the P.dbd.O band at 1316 cm.sup.-1 and the O--Si--O band at 818 cm.sup.-1 are measured. A ratio between these amplitudes is calculated. The ratio is then matched to a calibration curve to determine the phosphorus concentration.

Abstract translation: 使用红外光谱法与衍生光谱技术结合测量磷硅酸盐和硼磷硅酸盐膜中的磷浓度的方法。 该方法很容易适用于傅里叶变换光谱仪。 用双光束红外光谱仪拍摄胶片的光谱。 绘制光谱的二阶导数以重新求出近峰。 测量1316cm-1处的P = O带和818cm -1处的O-Si-O带的幅度。 计算这些幅度之间的比率。 然后将该比率与校准曲线相匹配以确定磷浓度。

公开(公告)号：US4669878A

公开(公告)日：1987-06-02

申请号：US876658

申请日：1986-06-18

Applicant: Daniel J. Meier

Inventor： Daniel J. Meier

IPC: G01J1/42 ,  G01J3/02 ,  G01J3/04 ,  G01J3/10 ,  G01J3/12 ,  G01J3/18 ,  G01J3/28 ,  G01J3/433 ,  G01N21/25 ,  G01J3/42

CPC classification number: G01J1/4257 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/04 ,  G01J3/10 ,  G01N21/253 ,  G01J2003/1204 ,  G01J2003/1828 ,  G01J2003/2866 ,  G01J3/433 ,  G01N2201/08 ,  Y10T436/11

Abstract: An automated chemistry-testing system for analyzing serum samples in which a controlled intensity, monochromatic light beam of substantially any desired wavelength can be selectively directed through any one of a plurality of test solutions in a spectrophotometer. The system operates at very high speed, permitting serum test solutions to be scanned with a multiplicity of wavelengths of light to provide extensive data on the characteristics of the serum. The invention also provides substantial flexibility and permits a wide variety of test to be more reliably performed.

Abstract translation: 用于分析血清样品的自动化学测试系统，其中基本上任何所需波长的受控强度的单色光束可以选择性地导向通过分光光度计中的多个测试溶液中的任何一个。 该系统以非常高的速度运行，允许用多种波长的光扫描血清测试溶液，以提供关于血清特征的广泛数据。 本发明还提供了实质的灵活性，并且允许更可靠地执行各种各样的测试。

公开(公告)号：US4590374A

公开(公告)日：1986-05-20

申请号：US656044

申请日：1984-09-28

Applicant: Arthur E. Brewster

Inventor： Arthur E. Brewster

IPC: G01J3/12 ,  G01J3/433 ,  G01N21/31 ,  G01N21/35 ,  G01N21/27 ,  G02B5/28

CPC classification number: G01N21/314 ,  G01J3/433 ,  G01J2003/1243 ,  G01J2003/4332 ,  G01N21/3504

Abstract: A gas detector arrangement, e.g. for detecting carbon dioxide, includes an infra-red source, a photodetector and band pass filter disposed in the light path therebetween. The arrangement includes means for oscillating the pass-band of the filter across an absorption band edge of the gas to be detected. The arrangement is portable and may be installed in diving apparatus.

Abstract translation: 气体检测器装置，例如 用于检测二氧化碳的装置包括设置在它们之间的光路中的红外源，光电检测器和带通滤光器。 该装置包括用于使滤波器的通带跨过待检测气体的吸收带边缘振荡的装置。 该装置是便携式的并且可以安装在潜水装置中。

公开(公告)号：US4449819A

公开(公告)日：1984-05-22

申请号：US288280

申请日：1981-07-30

Applicant: Gerhard Krause

Inventor： Gerhard Krause

IPC: G01J3/433 ,  G01J3/00

CPC classification number: G01J3/433

Abstract: A mixture of substances is analyzed by spectral analysis to establish the concentration of one component of the mixture. For this purpose signals U.sub.1 (.lambda.) representative of the spectrum of the substance under investigation and U.sub.2 (.lambda.) representative of the spectrum of the mixture of substances are manipulated electronically so as to remove the effects of cross-sensitivity and to yield an accurate value for the concentration of the substance in the mixture of substances. This concentration is normally difficult to determine because of the effects of cross-sensitivity, i.e. because other components in the mixture of substances have similar spectral lines to those of the substance under investigation. In one arrangement the two signals U.sub.1 (.lambda.) and U.sub.2 (.lambda.) are first differentiated in respective differentiating stages 13 and 14 and the differentiated signals are multiplied in a multiplier 17. The output signal from the multiplier is subsequently integrated in an integrator 20 and the output of the integration is a measure of the concentration of the substance under investigation. The signal F derived from the multiplier 17 has two components F.sub.N +F.sub.S. The component F.sub.N is a product of the wanted signal in respect of the substance under investigation from the reference source 11 and of the wanted component from the measured signal U.sub.2 (.lambda.). This product is always positive and thus leads to a maximum value at the output of the integrator. The component F.sub.S is equivalent to a product of the wanted signal from the reference source with unwanted signals from the measurement and is in fact a value which statistically flucutates about zero. The result of integrating this component is thus a value which approximates to zero. In other words the result of the integration provides exclusively information about the substance under investigation.

Abstract translation: 通过光谱分析分析物质的混合物以确定混合物的一种组分的浓度。 为此，以电子方式操作表示正在研究的物质的光谱的信号U1（lambda）和表示物质混合物的光谱的U2（λ），以消除交叉敏感性的影响并产生准确的值 用于物质混合物中物质的浓度。 这种浓度通常由于交叉敏感性的影响而难以确定，即因为物质混合物中的其它组分具有与被研究物质相似的光谱线。 在一种布置中，两个信号U1（λ）和U2（λ）在相应的差分级13和14中首先被微分，并且微分信号在乘法器17中相乘。乘法器的输出信号随后被积分在积分器20和 整合的产出是对被调查物质浓度的度量​​。 从乘法器17得到的信号F具有两个分量FN + FS。 分量FN是来自参考源11的被调查物质的有用信号和来自测量信号U2（λ）的有用分量的乘积。 该产品始终是正的，因此在积分器的输出端产生最大值。 分量FS相当于来自参考源的有用信号与来自测量的不需要的信号的乘积，实际上是统计学上大约为零的值。 因此，积分该分量的结果是近似为零的值。 换句话说，整合的结果提供了关于被调查物质的信息。