公开(公告)号：US20100246174A1

公开(公告)日：2010-09-30

申请号：US12729452

申请日：2010-03-23

Applicant: Katsuya Ido ,  Takayoshi Tsuiki ,  Masayuki Ohta

Inventor： Katsuya Ido ,  Takayoshi Tsuiki ,  Masayuki Ohta

IPC: F21V1/00

CPC classification number: G01N21/8806 ,  G01N2021/95646 ,  G01N2201/0634 ,  G01N2201/0636 ,  Y10S362/80

Abstract: An illumination device for visual inspection includes: a transmissive reflector plate that is formed of a light transmitting material, has an opening in a center, assumes a dome shape, a radius of which is gradually expanded downward with a center axis of the opening set as a center, and has a lower surface formed of a reflecting surface on which fine unevenness for diffusing and reflecting light from below is formed and an upper surface located on an opposite side of the lower surface; first, second, and third light source units that irradiate light on an inspection object, the first, second, and third light source units being provided on the upper surface of the transmissive reflector plate and arranged in a place below the opening and passing the center axis; and a fourth light source unit that irradiates light on the inspection object and being provided below the transmissive reflector plate.

Abstract translation: 一种用于目视检查的照明装置包括：透光反射板，其由透光材料形成，具有中心的开口，呈圆顶形，半径逐渐向下延伸，开口的中心轴为 中心，并且具有由反射面形成的下表面，在该反射面上形成用于从下方扩散和反射光的微细凹凸和位于下表面的相对侧上的上表面; 第一，第二和第三光源单元，其在检查对象物上照射光，第一，第二和第三光源单元设置在透射反射板的上表面上，并布置在开口下方并通过中心 轴; 以及第四光源单元，其在检查对象上照射光并设置在透射反射板下方。

公开(公告)号：US20100188486A1

公开(公告)日：2010-07-29

申请号：US12657068

申请日：2010-01-13

Applicant: Ajharali Amanullah ,  Lin Jing ,  Han Cheng Ge ,  Kok Weng Wong

Inventor： Ajharali Amanullah ,  Lin Jing ,  Han Cheng Ge ,  Kok Weng Wong

IPC: H04N7/18 ,  H04N13/02

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N2021/8825 ,  G01N2201/06113 ,  G01N2201/0636 ,  G06T7/0008 ,  G06T7/001 ,  G06T2207/10152 ,  G06T2207/20212 ,  G06T2207/30148 ,  H01L22/12 ,  H01L2924/0002 ,  H04N5/2354 ,  H01L2924/00

Abstract: An inspection system for inspecting a semiconductor wafer. The inspection system comprises an illumination setup for supplying broadband illumination. The broadband illumination can be of different contrasts, for example brightfield and darkfield broadband illumination. The inspection system further comprises a first image capture device and a second image capture device, each configured for receiving broadband illumination to capture images of the semiconductor wafer while the semiconductor wafer is in motion. The system comprises a number of tube lenses for enabling collimation of the broadband illumination. The system also comprises a stabilizing mechanism and an objective lens assembly. The system further comprises a thin line illumination emitter and a third image capture device for receiving thin line illumination to thereby capture three-dimensional images of the semiconductor wafer. The system comprises a reflector assembly for enabling the third image capture device to receive illumination reflected from the semiconductor wafer in multiple directions.

Abstract translation: 用于检查半导体晶片的检查系统。 检查系统包括用于提供宽带照明的照明设备。 宽带照明可以具有不同的对比度，例如明场和暗场宽带照明。 检查系统还包括第一图像捕获装置和第二图像捕获装置，每个被配置为在半导体晶片运动的同时接收宽带照明以捕获半导体晶片的图像。 该系统包括许多用于使准直宽带照明的管透镜。 该系统还包括稳定机构和物镜组件。 该系统还包括细线照明发射器和用于接收细线照明从而捕获半导体晶片的三维图像的第三图像捕获装置。 该系统包括反射器组件，用于使得第三图像捕获装置能够在多个方向上接收从半导体晶片反射的照明。

公开(公告)号：US20100085570A1

公开(公告)日：2010-04-08

申请号：US12598061

申请日：2008-06-17

Applicant: Hanee Park ,  Il Kyu Choi ,  Han Oh Park

Inventor： Hanee Park ,  Il Kyu Choi ,  Han Oh Park

IPC: G01N21/64 ,  G01J1/58

CPC classification number: G01N21/6445 ,  G01J3/0224 ,  G01J3/4406 ,  G01N21/6452 ,  G01N2021/6478 ,  G01N2021/6484 ,  G01N2201/0631 ,  G01N2201/0636

Abstract: The present invention relates to a real-time PCR monitoring apparatus for real-time monitoring production of reaction product produced during the reaction while performing nucleic acid amplification such as PCR for various kinds of trace samples. Specifically, the present invention relates to an apparatus for real-time monitoring biochemical reaction for efficiently dividing interference between an excitation light and a fluorescence, which includes a polarizer, a polarizing beam splitter, a polarization converter and so on.

Abstract translation: 本发明涉及一种用于实时监测在反应过程中产生的反应产物的实时PCR监测装置，同时对各种痕量样品进行核酸扩增如PCR。 具体地说，本发明涉及一种用于实时监测生化反应的装置，用于有效地分离激发光和荧光之间的干扰，其包括偏振器，偏振分束器，偏振转换器等。

公开(公告)号：US20100078652A1

公开(公告)日：2010-04-01

申请号：US12523963

申请日：2008-01-22

Applicant: Geoffrey Alan Scarsbrook ,  Ian Friel ,  Richard Stuart Balmer

Inventor： Geoffrey Alan Scarsbrook ,  Ian Friel ,  Richard Stuart Balmer

IPC: H01L29/16

CPC classification number: C01B32/28 ,  C23C16/27 ,  C23C16/274 ,  C23C16/278 ,  C30B25/105 ,  C30B25/20 ,  C30B29/04 ,  G01N21/87 ,  G01N21/95 ,  G01N27/308 ,  G01N2201/0636 ,  H01J37/321 ,  H01J2237/08 ,  H01J2237/3341 ,  H01L21/02104 ,  H01L21/02376 ,  H01L21/02527 ,  H01L21/02579 ,  H01L21/0262 ,  H01L21/02634 ,  H01L21/041 ,  H01L29/045 ,  H01L29/1602 ,  H01L29/167 ,  H01L29/36 ,  Y10T428/24355

Abstract: The present invention relates to a diamond electronic device comprising a functional surface formed by a planar surface of a single crystal diamond, the planar surface of the single crystal diamond having an Rq of less than 10 nm and at least one of the following characteristics: (a) the surface has not been mechanically processed since formation by synthesis; (b) the surface is an etched surface; (c) a density of dislocations in the diamond breaking the surface is less than 400 cm″2 measured over an area greater than 0.014 cm2; (d) the surface has an Rq less than 1 nm; (e) the surface has regions with a layer of charge carriers immediately below it, such that the regions of the surface are normally termed conductive, such as a hydrogen terminated {100} diamond surface region; (f) the surface has regions with no layer of charge carriers immediately below it, such that these regions of the surface are normally termed insulating, such as an oxygen terminated {100} diamond surface; and (g) the surface has one or more regions of metallization providing electrical contact to the diamond surface beneath these regions.

Abstract translation: 金刚石电子器件技术领域本发明涉及一种金刚石电子器件，其包括由单晶金刚石的平面形成的功能表面，所述单晶金刚石的平面表面具有小于10nm的Rq和以下特征中的至少一个：（ a）通过合成形成，表面未被机械加工; （b）表面是蚀刻表面; （c）破碎表面的金刚石中的位错密度小于在大于0.014cm 2的区域上测量的400cm -2; （d）表面的Rq小于1nm; （e）表面具有紧邻其下方的电荷载流子层的区域，使得表面的区域通常称为导电的，例如氢封端的{100}金刚石表面区域; （f）表面具有在其正下方没有电荷载体层的区域，使得表面的这些区域通常称为绝缘体，例如氧终止的{100}金刚石表面; 和（g）表面具有一个或多个金属化区域，在这些区域下面的金刚石表面提供电接触。

公开(公告)号：US07599727B2

公开(公告)日：2009-10-06

申请号：US11227767

申请日：2005-09-15

Applicant: Eyal Teichman ,  Avner Schrift

Inventor： Eyal Teichman ,  Avner Schrift

IPC: A61B5/05 ,  G06K9/00 ,  G01N21/47

CPC classification number: G01N21/8806 ,  A61F2/82 ,  G01N21/95 ,  G01N21/9515 ,  G01N21/952 ,  G01N21/954 ,  G01N21/956 ,  G01N2021/8812 ,  G01N2021/8825 ,  G01N2021/8832 ,  G01N2021/8887 ,  G01N2201/021 ,  G01N2201/0633 ,  G01N2201/0634 ,  G01N2201/0636

Abstract: A system for lighting a stent, i.e., providing an illumination source, to facilitate the capturing of an image of the stent. The lighting is provided so that an image capturing device, e.g., a digital camera or system, will capture an image that distinctly shows the difference between the stent and any surface upon which the stent is mounted, in addition to sharply defining the edges of the stent struts.

Abstract translation: 一种用于照明支架的系统，即提供照明源，以便于捕获支架的图像。 提供照明，使得诸如数字照相机或系统的图像捕获装置将捕获明显地显示支架和安装支架的任何表面之间的差异的图像，除了明确地限定 支架支柱

公开(公告)号：US07567347B2

公开(公告)日：2009-07-28

申请号：US10584294

申请日：2004-12-20

Applicant: Søren Aasmul

Inventor： Søren Aasmul

IPC: G01N21/25

CPC classification number: G01N21/645 ,  G01J1/04 ,  G01J1/0422 ,  G01N2021/6463 ,  G01N2201/0636

Abstract: In apparatus for the production and detection of fluorescence at a sample surface, the height of the apparatus above the sample surface is reduced, and loss of the emitted fluorescence due to reflection loss and light scattering is minimized. The apparatus comprises a three-dimensionally curved light reflecting surface (40) that directs light from a light source (32) transversely to its original path and focuses the light on to an illumination zone (30) at or below the sample surface. The reflecting surface (40) also collects, directs and at least partially collimates emitted fluorescence transversely to its original path and towards a detector (46).

Abstract translation: 在用于在样品表面生产和检测荧光的装置中，样品表面上方的装置的高度减小，并且由于反射损失和光散射引起的发射的荧光的损失最小化。 该装置包括三维弯曲的光反射表面（40），其将来自光源（32）的光横向于其原始路径引导并将光聚焦到在样品表面处或下方的照明区域（30）。 反射表面（40）还收集，引导并至少部分地将发射的荧光横向于其原始路径并朝向检测器（46）准直。

公开(公告)号：US20090027680A1

公开(公告)日：2009-01-29

申请号：US12169354

申请日：2008-07-08

Applicant: Kentaro Furusawa

Inventor： Kentaro Furusawa

IPC: G01N21/55

CPC classification number: G01N21/553 ,  G01N2201/0636

Abstract: A detection apparatus arranges a light source, a curved surface prism having a curved surface and a plane surface, a metal film placed on the plane surface of the prism to be held adjacently to a test sample, and a reflecting member for reflecting light such that light emitted by the light source enters the prism through the curved surface and is reflected by the metal film, then by the reflecting member, and again by the metal film. The detection apparatus is adapted to detect an optical change in the test sample by means of surface plasmon generated on the metal film. In the detection apparatus, divergent light is made to enter the prism through the curved surface to collimate the incident light by means of the curved surface. The apparatus can suppress the broadening of the resonant bandwidth so as to operate as a monitor with a higher degree of precision.

Abstract translation: 检测装置配置光源，具有弯曲面和平面的曲面棱镜，配置在与被测试样相邻地保持在棱镜的平面上的金属膜和反射光，使得 由光源发射的光通过弯曲表面进入棱镜，并被金属膜反射，然后被反射构件反射，并再次被金属膜反射。 检测装置适于通过在金属膜上产生的表面等离子体激元检测测试样品中的光学变化。 在检测装置中，使发散光通过弯曲表面进入棱镜，以通过弯曲表面准直入射光。 该装置可以抑制谐振带宽的扩大，从而以更高的精度操作为监视器。

公开(公告)号：US07351980B2

公开(公告)日：2008-04-01

申请号：US11097526

申请日：2005-03-31

Applicant: Steven R. Lange

Inventor： Steven R. Lange

IPC: G01N21/33

CPC classification number: G02B17/061 ,  G01N21/9501 ,  G01N2021/9563 ,  G01N2201/0636

Abstract: All-reflective optical systems for broadband wafer inspection are provided. One system configured to inspect a wafer includes an optical subsystem. All light-directing components of the optical subsystem are reflective optical components except for one or more refractive optical components, which are located only in substantially collimated space. The refractive optical component(s) may include, for example, a refractive beamsplitter element that can be used to separate illumination and collection pupils. The optical subsystem may also include one or more reflective optical components located in substantially collimated space. The optical subsystem is configured for inspection of the wafer across a waveband of greater than 20 nm. In some embodiments, the optical subsystem is configured for inspection of the wafer at wavelengths less than and greater than 200 nm.

Abstract translation: 提供了用于宽带晶圆检测的全反射光学系统。 配置为检查晶片的一个系统包括光学子系统。 光学子系统的所有光指向部件都是反射光学部件，除了一个或多个折射光学部件，其仅位于基本准直的空间中。 折射光学部件可以包括例如可用于分离照明和收集瞳孔的折射分束器元件。 光学子系统还可以包括位于基本上准直的空间中的一个或多个反射光学部件。 光学子系统被配置用于跨越超过20nm的波段检查晶片。 在一些实施例中，光学子系统被配置为在小于或大于200nm的波长下检查晶片。

公开(公告)号：US20070285666A1

公开(公告)日：2007-12-13

申请号：US11659717

申请日：2005-09-14

Applicant: Norihiko Utsunomiya ,  Mitsuro Sugita ,  Satoru Nishiuma ,  Takao Yonehara

Inventor： Norihiko Utsunomiya ,  Mitsuro Sugita ,  Satoru Nishiuma ,  Takao Yonehara

IPC: G01N21/00

CPC classification number: G01N21/554 ,  G01N21/648 ,  G01N2021/258 ,  G01N2201/0635 ,  G01N2201/0636

Abstract: An information-acquiring device for acquiring information on an objective substance to be detected, which is provided with a sensing element that has a surface capable of fixing the objective substance to be detected thereon, and makes applied light change its wavelength characteristics in response to the fixed state of the objective substance to be detected onto the surface, a light source, and light-receiving means for receiving light emitted from the light source through the sensing element, has the light-receiving means and the light source arranged on the same substrate so that the light which has been emitted from the light source and has been transmitted through the sensing element can be led to the light-receiving means, and has means for varying the wavelength regions of each light incident on each of a plurality of the light-receiving means installed in an optical path from the light source to the light-receiving means.

Abstract translation: 一种信息获取装置，用于获取关于待检测的物质的信息，该信息获取装置设置有具有能够固定待检测的物体的表面的感测元件，并且使得施加的光响应于该检测元件的波长特性而改变其 要检测的目标物质的固定状态，光源和用于接收通过感测元件从光源发射的光的光接收装置，其中光接收装置和光源布置在同一基板上 使得已经从光源发射并已经透射通过感测元件的光可以被引导到光接收装置，并且具有用于改变入射到多个光中的每一个的每个光的波长区域的装置 - 接收装置安装在从光源到光接收装置的光路中。

公开(公告)号：US07307725B2

公开(公告)日：2007-12-11

申请号：US11150385

申请日：2005-06-13

Applicant: Takeo Oomori ,  Hideo Hirose ,  Yasuharu Nakajima ,  Kenzo Chiaki ,  Tatsumi Satou

Inventor： Takeo Oomori ,  Hideo Hirose ,  Yasuharu Nakajima ,  Kenzo Chiaki ,  Tatsumi Satou

IPC: G01J4/00 ,  G02B5/30

CPC classification number: G01N21/95607 ,  G01N21/21 ,  G01N21/9501 ,  G01N2201/0636

Abstract: A surface inspection apparatus includes: a light source unit that emits a divergent light flux of predetermined linearly polarized light to be used to illuminate a test substrate; a first optical member that allows the divergent light flux of the predetermined linearly polarized light to enter therein with a predetermined angle of incidence and then guides a light flux to the test substrate; a second optical member that allows a light flux from the test substrate to enter therein, emits a convergent light flux thereof with a predetermined angle of emergence and forms an image at a specific surface; an extraction unit that extracts linearly polarized light in the convergent light flux from the second optical member, which is perpendicular to the predetermined linearly polarized light; a light-receiving unit that receives an image of the test substrate formed via the second optical member and the extraction unit; and at least one polarization correcting member disposed within a light path extending between the light source unit and the light-receiving unit, which corrects a disruption of a polarization plane attributable to the first optical member and the second optical member.

Abstract translation: 表面检查装置包括：光源单元，其发射用于照射测试基板的预定线性偏振光的发散光束; 第一光学构件，其允许预定线偏振光的发散光束以预定的入射角进入其中，然后将光通量引导到测试衬底; 允许来自测试基板的光束进入其中的第二光学部件以预定的出射角度发出会聚光束，并在特定表面形成图像; 提取单元，其从与所述第二光学构件垂直于所述预定线偏振光的会聚光束中提取线偏振光; 光接收单元，其接收经由所述第二光学构件和所述提取单元形成的所述测试衬底的图像; 以及设置在光源单元和光接收单元之间延伸的光路内的至少一个偏振校正构件，其校正归因于第一光学构件和第二光学构件的偏振面的破坏。