公开(公告)号：US07301631B1

公开(公告)日：2007-11-27

申请号：US11084827

申请日：2005-03-21

Applicant: Blaine D. Johs ,  Ping He ,  Galen L. Pfeiffer ,  Steven E. Green ,  Christopher A. Goeden ,  Martin M. Liphardt

Inventor： Blaine D. Johs ,  Ping He ,  Galen L. Pfeiffer ,  Steven E. Green ,  Christopher A. Goeden ,  Martin M. Liphardt

IPC: G01J4/00

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/10 ,  G01N21/211 ,  G01N2201/061 ,  G01N2201/0636

Abstract: A system for stabilizing the angle of incidence a beam of electromagnetic radiation from a vertically oriented Arc lamp onto a horizontally oriented sample surface.

Abstract translation: 一种用于将来自垂直取向的弧光灯的电磁辐射束入射到水平取向的样品表面上的入射角的系统。

公开(公告)号：US20060219930A1

公开(公告)日：2006-10-05

申请号：US11097526

申请日：2005-03-31

Applicant: Steven Lange

Inventor： Steven Lange

IPC: G01N21/88

CPC classification number: G02B17/061 ,  G01N21/9501 ,  G01N2021/9563 ,  G01N2201/0636

Abstract: All-reflective optical systems for broadband wafer inspection are provided. One system configured to inspect a wafer includes an optical subsystem. All light-directing components of the optical subsystem are reflective optical components except for one or more refractive optical components, which are located only in substantially collimated space. The refractive optical component(s) may include, for example, a refractive beamsplitter element that can be used to separate illumination and collection pupils. The optical subsystem may also include one or more reflective optical components located in substantially collimated space. The optical subsystem is configured for inspection of the wafer across a waveband of greater than 20 nm. In some embodiments, the optical subsystem is configured for inspection of the wafer at wavelengths less than and greater than 200 nm.

Abstract translation: 提供了用于宽带晶圆检测的全反射光学系统。 配置为检查晶片的一个系统包括光学子系统。 光学子系统的所有光指向部件都是反射光学部件，除了一个或多个折射光学部件，其仅位于基本准直的空间中。 折射光学部件可以包括例如可用于分离照明和收集瞳孔的折射分束器元件。 光学子系统还可以包括位于基本上准直的空间中的一个或多个反射光学部件。 光学子系统被配置用于跨越超过20nm的波段检查晶片。 在一些实施例中，光学子系统被配置为在小于或大于200nm的波长下检查晶片。

公开(公告)号：US20040031567A1

公开(公告)日：2004-02-19

申请号：US10217805

申请日：2002-08-13

Applicant: The Boeing Company

Inventor： Roger W. Engelbart ,  Craig Walters

IPC: B32B031/00

CPC classification number: G01N21/88 ,  G01N21/8806 ,  G01N2021/8472 ,  G01N2021/888 ,  G01N2201/0618 ,  G01N2201/0634 ,  G01N2201/0636

Abstract: The present invention provides an improved system for identifying defects in a composite structure by providing a light source such that defects, and in particular dark defects on a dark background and/or light defects on a light background, can be identified by capturing images of the illuminated composite structure. In particular, the improved system for identifying defects in a composite structure may provide a reflective surface, dispersion elements, and multiple and/or moveable light source(s) and/or camera(s) in order to ensure that the most accurate images of any area of the composite structure, even curved or contoured areas, are captured and processed. As a result, the system of the present invention permits the operator to quickly identify and correct defects which would otherwise create structural flaws or inconsistencies that may affect the integrity of the composite structure.

Abstract translation: 本发明提供了一种用于通过提供光源来识别复合结构中的缺陷的改进的系统，使得可以通过捕获图像的图像来识别缺陷，特别是暗背景上的暗缺陷和/或光背景上的光缺陷 照明复合结构。 特别地，用于识别复合结构中的缺陷的改进的系统可以提供反射表面，色散元件以及多个和/或可移动的光源和/或照相机，以便确保最准确的图像 复合结构的任何区域，甚至弯曲或轮廓区域被捕获和处理。 结果，本发明的系统允许操作者快速地识别和纠正否则将产生可能影响复合结构的完整性的结构缺陷或不一致的缺陷。

公开(公告)号：US6072575A

公开(公告)日：2000-06-06

申请号：US91972

申请日：1999-01-25

Applicant: Josel Loll

Inventor： Josel Loll

IPC: G01N21/90 ,  G01N21/00

CPC classification number: G01N21/9054 ,  G01N2201/0636

Abstract: To record an image of the mouth area (2) of a bottle (1), a luminous surface (3) is arranged below the mouth area to be recorded. The luminous surface (3) is lighted by means of a lighting device (4) and the image of the lighted mouth area (2) is sent to a camera by a mirror arrangement (5, 6, 11). With the luminous surface, it is possible to image the mouth area in transmitted light, which yields improved detection of defects and soiling in the mouth area and thus permits easier evaluation of the image recorded by the camera.

Abstract translation: PCT No.PCT / EP97 / 05992 Sec。 371日期1999年1月25日 102（e）日期1999年1月25日PCT 1997年10月30日PCT PCT。 公开号WO98 / 19150 PCT 日期1998年5月7日为了记录瓶（1）的口部区域（2）的图像，在要记录的口部区域的下方配置发光面（3）。 发光面（3）通过照明装置（4）点亮，照明口区域（2）的图像通过反射镜装置（5,6,11）发送到照相机。 通过发光表面，可以在透射光下成像口部区域，从而改善了口部区域中的缺陷和污染的检测，从而允许更容易地评估由照相机记录的图像。

公开(公告)号：US5401966A

公开(公告)日：1995-03-28

申请号：US115535

申请日：1993-09-02

Applicant: Damien F. Gray ,  Richard J. Plttaro ,  Paul K. Lum

Inventor： Damien F. Gray ,  Richard J. Plttaro ,  Paul K. Lum

IPC: A61B5/083 ,  G01J3/10 ,  G01N21/35 ,  G01N21/61

CPC classification number: A61B5/0836 ,  G01J3/108 ,  G01N21/3504 ,  G01N2021/3174 ,  G01N2201/0636

Abstract: A spectrophotometric sensor assembly that may find particular use in a capnometer, a medical device for measuring the concentration of carbon dioxide in the exhaled breath of a patient, includes at least one microlamp. A microlamp is a very small source of electromagnetic radiation including a heated filament disposed over a substrate. The microlamp may be constructed using semiconductor fabrication techniques. The microlamp typically emits broad-band infrared radiation. Radiation from the microlamp usually passes through a filter, which preferentially transmits radiation of a preselected wavelength. The radiation then passes through a sample chamber and onto a detector. The concentration of a substance of interest within the chamber may be computed by determining the degree to which the radiation is absorbed in the chamber. In a preferred embodiment, an array of microlamps is sequentially triggered in a rapid manner.

Abstract translation: 一种分光光度传感器组件，其可以在电位计中找到特别的用途，该测量计是用于测量患者呼出气中的二氧化碳浓度的医疗装置，包括至少一个微型灯。 微型电灯是非常小的电磁辐射源，包括设置在衬底上的加热灯丝。 可以使用半导体制造技术来构造微型灯。 微型荧光灯通常发射宽带红外辐射。 来自微量放大器的辐射通常通过滤光器，滤光器优先传输预选波长的辐射。 然后，辐射通过样品室并进入检测器。 室内感兴趣的物质的浓度可以通过确定辐射在腔室中被吸收的程度来计算。 在优选实施例中，以快速方式顺序地触发微阵列。

公开(公告)号：US5359407A

公开(公告)日：1994-10-25

申请号：US177189

申请日：1994-01-03

Applicant: Akiyoshi Suzuki ,  Michio Kohno

Inventor： Akiyoshi Suzuki ,  Michio Kohno

IPC: G01B11/30 ,  G01N21/88 ,  G01N21/94 ,  G01N21/956 ,  G02B26/12 ,  G03F1/84 ,  G03F7/20 ,  H01L21/66

CPC classification number: G01N21/8806 ,  G02B26/123 ,  G03F7/70483 ,  G01N2201/0636

Abstract: An optical system is arranged so that a scanning light beam for scanning a first region to be inspected and a scanning light beam for scanning a second region to be inspected are not simultaneously incident upon an object to be inspected. This prevents an adverse influence on the inspection caused by flare light generated when one scanning light beam is incident upon an edge of the object and is received by a light-receiving optical system for the region to be inspected scanned by another scanning light beam. The system includes two polygon mirrors provided as one body in an optical system at a position for projecting the light beams so that the distance between a focus point of the light beam projected on the lower surface of the object and a focus point of the light beam projected on the upper surface of the object in the beam scanning direction is greater than the width of the object in the beam scanning direction. As a result, the two light beams are alternately incident upon the object.

Abstract translation: 光学系统被布置成使得用于扫描待检查的第一区域的扫描光束和用于扫描待检查的第二区域的扫描光束不会同时入射到待检查对象上。 这防止了当一个扫描光束入射到物体的边缘上并且被受光光学系统接收的由另一个扫描光束进行检查的区域的光束所产生的火炬光引起的检查的不利影响。 该系统包括在用于投射光束的位置处的光学系统中作为一体设置的两个多面镜，使得投射在物体的下表面上的光束的焦点与光束的焦点之间的距离 投影在物体的上表面上的光束扫描方向大于物体在光束扫描方向上的宽度。 结果，两个光束交替地入射到物体上。

公开(公告)号：US5278413A

公开(公告)日：1994-01-11

申请号：US821746

申请日：1992-01-13

Applicant: Tetsuji Yamaguchi ,  Juichiro Ukon ,  Kazuyuki Ikemoto

Inventor： Tetsuji Yamaguchi ,  Juichiro Ukon ,  Kazuyuki Ikemoto

IPC: G01N21/27 ,  G01N21/35 ,  G01N21/3563 ,  G01N21/552 ,  G01N21/59 ,  G02B21/00 ,  G02B21/18 ,  G01N21/01 ,  G01J3/45

CPC classification number: G01N21/552 ,  G02B21/0096 ,  G02B21/18 ,  G01N2201/0636

Abstract: An infrared microscopic spectrometer includes an optical system which allows for a shifting of the optical path interactive with a sample from a sample transmissive optical path to an optical path through an ATR crystal using ATR analysis. In the shown embodiment, the shift in the optical path is in a direction perpendicular to a transmissive optical axis, at least along a portion of the shift adjacent to the transmissive optical axis. The shift is undertaken by a moving means which moves the collecting element providing the infrared rays. A sample-holding structure allows the ATR crystal to be rotated or detachably removed, as necessary.

Abstract translation: 红外显微镜光谱仪包括光学系统，该光学系统允许通过使用ATR分析的ATR晶体将与样品透射光路相互作用的光路与ATR晶体的移动。 在所示的实施例中，至少沿着与透射光轴相邻的移位的一部分，光路中的偏移在垂直于透射光轴的方向上。 该移动是通过使提供红外线的收集元件移动的移动装置进行的。 样品保持结构允许ATR晶体根据需要旋转或可拆卸地移除。

公开(公告)号：US5064283A

公开(公告)日：1991-11-12

申请号：US407186

申请日：1989-09-14

Applicant: Richard L. Tober

Inventor： Richard L. Tober

IPC: G01J1/44 ,  G01J3/02 ,  G01N21/17 ,  G01N21/31

CPC classification number: G01J3/02 ,  G01J3/0291 ,  G01N21/1717 ,  G01J2001/4242 ,  G01N2021/1721 ,  G01N2021/1725 ,  G01N2021/1729 ,  G01N2021/1731 ,  G01N2021/1738 ,  G01N2021/3133 ,  G01N21/6489 ,  G01N2201/06113 ,  G01N2201/0636

Abstract: A spectroscopy characterization module having a particular configuration includes a light tight housing that accepts monochromatic radiation through a first optical port and optically chopped coherent radiation through a second optical port. A material sample is held on a sample mount within the housing according to the spectroscopy characterization technique to be used. A rotatable detector mount enclosed within the housing positions a detector in different positions depending on the measurement being performed. A first one-to-one image forming mirror focuses monochromatic radiation passing through the first optical port onto the material sample. A lens focuses optically chopped radiation passing through the second optical port onto the material sample. A second one-to-one image forming mirror focuses radiation transmitted through the sample onto the detector in a first position while a third one-to-one image forming mirror focuses radiation reflected off the sample onto the detector in a second position. Various spectroscopic measurements can be performed on the material sample by merely using different sample mounts without changing the configuration of the characterization module.

Abstract translation: 具有特定配置的光谱学表征模块包括光接收壳体，其通过第一光学端口接收单色辐射，并通过第二光学端口接受光学切碎的相干辐射。 根据要使用的光谱表征技术将材料样品保持在壳体内的样品架上。 封装在壳体内的可旋转检测器安装座根据正在执行的测量将检测器定位在不同的位置。 第一个一对一的成像镜将通过第一光学端口的单色辐射聚焦到材料样品上。 透镜将通过第二光学端口的光学切割的辐射聚焦到材料样品上。 第二个一对一的图像形成反射镜将透过样品的辐射聚焦到第一位置的检测器上，而第三个一对一的成像镜将来自样品的辐射的辐射聚焦在第二位置的检测器上。 可以通过仅使用不同的样品固定器而不改变表征模块的配置，对材料样品进行各种光谱测量。

公开(公告)号：US4906093A

公开(公告)日：1990-03-06

申请号：US222403

申请日：1988-07-21

Applicant: Carlo Trossarelli

Inventor： Carlo Trossarelli

IPC: G01J3/02 ,  G01J3/10 ,  G01N21/87

CPC classification number: G01J3/10 ,  G01N21/87 ,  G01J3/0221 ,  G01N2201/061 ,  G01N2201/0636

Abstract: An illuminator for the spectroscopic illumination of minerals, gems, etc., in which a substance under examination is illuminated by means of a source of white light, comprises at least one optical fiber (22) for transmitting the illumination light, passed through the substance under examination, to an observation spectroscope (30).

Abstract translation: 用于通过白光源照射待检物质的矿物，宝石等的分光照明的照明器包括：至少一个光纤（22），用于透射照射光，通过物质 在检查中，观察分光镜（30）。

公开(公告)号：US4832495A

公开(公告)日：1989-05-23

申请号：US107962

申请日：1987-10-13

Applicant: Daniel D. Briggs ,  Peter Vischer

Inventor： Daniel D. Briggs ,  Peter Vischer

IPC: G01N21/59

CPC classification number: G01N21/5907 ,  G01N2021/5942 ,  G01N2021/5957 ,  G01N2201/06126 ,  G01N2201/06133 ,  G01N2201/0636 ,  G01N2201/0646

Abstract: An apparatus for measuring the relative coverage of a predetermined portion of a sheet of translucent material with an opaque medium such as ink or photographic emulsion, comprising: a light source for providing a relatively constant intensity source of light over a predetermined measuring area; a positioning device for positioning the predetermined portion of the sheet of material to be measured over the predetermined measuring area of the light source; a light measuring device for measuring the relative amount of light from the light source which is transmitted through the predetermined portion of the sheet of material to be measured, whereby the relative amount of opaque medium coverage of the portion of the sheet to be measured is readily determinable by comparison of the measured amount of light transmitted through the predetermined portion of the sheet to be measured with predetermined calibration values.

Abstract translation: 一种用于用不透明介质如油墨或照相乳剂测量半透明材料片的预定部分的相对覆盖度的装置，包括：用于在预定测量区域上提供相对恒定的强度光源的光源; 定位装置，用于将待测量的材料片的预定部分定位在光源的预定测量区域上; 光测量装置，用于测量透射通过待测量材料片的预定部分的来自光源的光的相对量，由此待测量的片的部分的不透明介质覆盖的相对量容易 可以通过将测量的被测量的光的透射量与预定的校准值进行比较来确定。