公开(公告)号：US20100245819A1

公开(公告)日：2010-09-30

申请号：US12383864

申请日：2009-03-27

Applicant: Guoguang Li

Inventor： Guoguang Li

IPC: G01J3/447 ,  G01J4/00 ,  G01J3/28

CPC classification number: G01B11/0641 ,  G01J3/447 ,  G01N21/211 ,  G01N21/8422 ,  G01N2021/213

Abstract: A method and apparatus for convolving spectroscopic data with certain phase information for practicing phase-compensated sensitivity-enhanced spectroscopy (PCSES). PCSES uses a beam of radiation in a polarization state PSp from a source emitting at a plurality of wavelengths, and places in the beam a compensator capable of altering polarization state PSp by applying a delimited phase shift Δ between two orthogonal polarization axes of the radiation to restrict a finely-vibrating spectrum. A sample disposed in the beam after the compensator generates a response beam by reflection, transmission or even both. A polarization state PSa of the response beam is passed to a detector to determine a spectrum of the response beam. A first spectrum is collected when polarization states PSp, PSa and the compensator are in a first polarization-altering configuration and a second spectrum is collected when polarization states PSp, PSa and the compensator are in a second polarization-altering configuration. A phase-compensated spectrum is then derived from just the first and second spectra thereby allowing the user to undertake optical characterization, including the measurement of film thickness t and complex indices of refraction n, k of the sample with as few as just two polarization-altering configurations.

Abstract translation: 一种用于实现相位补偿灵敏度增强光谱（PCSES）的具有某些相位信息的光谱数据卷积的方法和装置。 PCSES使用来自发射多个波长的源的偏振状态PSp的辐射束，并且通过施加限定的相移＆amp; Dgr在光束中放置能够改变偏振状态PSp的补偿器; 在辐射的两个正交偏振轴之间限制细振动光谱。 在补偿器之后设置在光束中的样品通过反射，透射或甚至两者产生响应光束。 响应光束的偏振态PSa被传递到检测器以确定响应光束的光谱。 当极化状态PSp，PSa和补偿器处于第一偏振改变配置时收集第一光谱，并且当偏振态PSp，PSa和补偿器处于第二偏振改变配置时收集第二光谱。 然后，仅从第一和第二光谱导出相位补偿光谱，从而允许用户进行光学表征，包括测量膜厚度t和样品的复数折射率n，k，其中仅具有两个极化 - 改变配置

公开(公告)号：US20100171952A1

公开(公告)日：2010-07-08

申请号：US12676536

申请日：2008-09-08

Applicant: Lauren DeFlores ,  Andrei Tokmakoff

Inventor： Lauren DeFlores ,  Andrei Tokmakoff

IPC: G01J3/12 ,  G01J3/00 ,  G01J3/28 ,  G01J3/447

CPC classification number: G01J3/42 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/4531 ,  G01N21/35 ,  G01N2021/3595

Abstract: The present invention relates to a system and methods for acquiring two-dimensional Fourier transform (2D FT) spectra. Overlap of a collinear pulse pair and probe induce a molecular response which is collected by spectral dispersion of the signal modulated probe beam. Simultaneous collection of the molecular response, pulse timing and characteristics permit real time phasing and rapid acquisition of spectra. Full spectra are acquired as a function of pulse pair timings and numerically transformed to achieve the full frequency-frequency spectrum. This method demonstrates the ability to acquire information on molecular dynamics, couplings and structure in a simple apparatus. Multi-dimensional methods can be used for diagnostic and analytical measurements in the biological, biomedical, and chemical fields.

Abstract translation: 本发明涉及用于获取二维傅里叶变换（2D FT）光谱的系统和方法。 共线脉冲对和探针的重叠引起通过信号调制探测光束的光谱色散收集的分子响应。 同时收集分子响应，脉冲时序和特征允许实时定相和快速采集光谱。 作为脉冲对定时的函数获取全谱，并进行数值变换以实现全频谱。 这种方法证明了在简单的装置中获取分子动力学，耦合和结构信息的能力。 多维方法可用于生物，生物医学和化学领域的诊断和分析测量。

公开(公告)号：US20100165340A1

公开(公告)日：2010-07-01

申请号：US12642670

申请日：2009-12-18

Applicant: Yiping Xu ,  Ibrahim Abdulhalm

Inventor： Yiping Xu ,  Ibrahim Abdulhalm

IPC: G01J3/447 ,  G01B11/14 ,  G01J4/04

CPC classification number: G03F7/70625 ,  G01B11/0641 ,  G01N21/211 ,  G01N21/4788 ,  G01N21/55 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95607 ,  G01N2021/213 ,  G01N2021/556 ,  G01N2021/95615 ,  G03F7/70491 ,  G03F7/70616 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Before the diffraction from a diffracting structure on a semiconductor wafer is measured, where necessary, the film thickness and index of refraction of the films underneath the structure are first measured using spectroscopic reflectometry or spectroscopic ellipsometry. A rigorous model is then used to calculate intensity or ellipsometric signatures of the diffracting structure. The diffracting structure is then measured using a spectroscopic scatterometer using polarized and broadband radiation to obtain an intensity or ellipsometric signature of the diffracting structure. Such signature is then matched with the signatures in the database to determine the grating shape parameters of the structure.

Abstract translation: 在半导体晶片上的衍射结构的衍射测量之前，必要时，首先使用光谱反射计或光谱椭偏仪测量膜下面的膜的膜厚度和折射率。 然后使用严格的模型来计算衍射结构的强度或椭偏特征。 然后使用使用偏振和宽带辐射的分光散射仪测量衍射结构，以获得衍射结构的强度或椭偏特征。 然后将这样的签名与数据库中的签名相匹配，以确定结构的光栅形状参数。

公开(公告)号：US07551280B2

公开(公告)日：2009-06-23

申请号：US11677248

申请日：2007-02-21

Applicant: Hiroaki Yanai ,  Toshiaki Hashizume

Inventor： Hiroaki Yanai ,  Toshiaki Hashizume

IPC: G01J3/447 ,  G01J4/00 ,  G02F1/1335

CPC classification number: H04N9/3167 ,  G02B27/1046 ,  G02B27/1073 ,  G02B27/145 ,  G02B27/149 ,  G02B27/28 ,  G02B27/62 ,  G03B21/2073 ,  G03B33/12 ,  H04N9/3105

Abstract: A method for manufacturing an optical element in which a display quality of a projection image is improved is provided. The method is for manufacturing an optical element having a polarization plate of which one side a transmissive member is bonded. The method includes preparing a light source, a polarization plate, a transmissive member, a certificating polarization plate and a spectrophotometer; arranging the polarization plate, the transmissive member, and the certificating polarization plate between the light source and the spectrophotometer; measuring a light transmittance spectrum of a predetermined wavelength at each rotational position of the transmissive member; determining the rotational position of the transmissive member that yields a smallest value for a difference between a maximum value and a minim value of the light transmittance spectrum; and bonding the transmissive member to the polarization plate at the determined rotational position.

Abstract translation: 提供一种制造其中提高了投影图像的显示质量的光学元件的方法。 该方法用于制造具有偏光板的光学元件，该偏振板的一侧与透光构件接合。 该方法包括制备光源，偏振板，透射构件，认证偏振板和分光光度计; 在光源和分光光度计之间布置偏光板，透射构件和认证偏光板; 测量透射构件的每个旋转位置处的预定波长的透光光谱; 确定所述透射构件的旋转位置，其产生用于所述透光光谱的最大值和最小值之间的差的最小值; 以及在所确定的旋转位置处将透射构件接合到偏振板。

公开(公告)号：US07532325B2

公开(公告)日：2009-05-12

申请号：US10573056

申请日：2004-09-23

Applicant: Samir A. Ahmed ,  Fereidun Moshary ,  Barry Michael Gross

Inventor： Samir A. Ahmed ,  Fereidun Moshary ,  Barry Michael Gross

IPC: G01J3/447 ,  G01J3/30

CPC classification number: G01J3/44 ,  A61B5/0059 ,  G01J3/02 ,  G01J3/0224 ,  G01J3/4406 ,  G01N21/21 ,  G01N21/274 ,  G01N21/64 ,  G01N21/6402 ,  G01N21/6445 ,  G01N21/65 ,  G01N2021/1793 ,  G01N2021/6417 ,  G01N2201/129

Abstract: An apparatus for separating fluorescent light from light elastically scattered/reflected from a material illuminated with a broadband illumination source includes a polarization discriminator, which separates the substantially polarized elastically scattered/reflected light from the unpolarized fluorescent light, and a spectrometer to analyze the full and separated reflectance spectra. A linear polarizer may be provided to polarize the illumination source. A method for separating fluorescence light induced in a material by broadband light from an elastic scattering/reflection component includes providing polarization discrimination to separate the components, the fluorescence light being substantially unpolarized, and spectrally analyzing the reflectance components. The method may include linearly polarizing the light source. A fluorescence spectra may be extracted from a minimum reflectance spectra or from a residual polarization reflectance spectra.

Abstract translation: 用于将荧光与从宽带照明源照射的材料弹性散射/反射的光分离的装置包括：偏振鉴别器，其将基本上偏振的弹性散射/反射光与非偏振荧光分开;以及光谱仪， 分离的反射光谱。 可以提供线性偏振器以使照明源极化。 通过宽带光从弹性散射/反射分量中分离在材料中诱导的荧光的方法包括提供偏振鉴别以分离成分，荧光基本上是非偏振的，并对光谱分析反射分量。 该方法可以包括使光源线性偏振。 可以从最小反射光谱或残余极化反射光谱中提取荧光光谱。

公开(公告)号：US20080239313A1

公开(公告)日：2008-10-02

申请号：US11843546

申请日：2007-08-22

Applicant: Nikolaus Ernsting

Inventor： Nikolaus Ernsting

IPC: G01J3/447

CPC classification number: G01J3/2889 ,  G01J3/02 ,  G01J3/0224 ,  G01J3/44

Abstract: The invention is directed to an arrangement for an optical system for polarizalion-dependent, time-resolved optical spectroscopy, in particular a spectrometer that includes a polarization device which has a crystal polarizer and includes a light entry area which is arranged upstream of the polarization device and which is formed in such a way as to enclose a spatial acceptance angle of the crystal polarizer, and also that includes a light exit area which is arranged downstream of the polarization device, wherein an intermediate area which connects the light entry area and the light exit area is formed in the polarization device with a path length of at most approximately 4 mm which is traversed in the crystal polarizer by light impinging within the spatial acceptance angle. The invention also is directed to an optical measurement system comprising an arrangement, and also to a method for the polarization-dependent spectroscopic analysis of measurement light, in particular in time-resolved optical spectroscopy.

Abstract translation: 本发明涉及一种用于偏振相关时间分辨光谱的光学系统的装置，特别是包括具有晶体偏振器的偏振装置的光谱仪，该偏振装置包括布置在偏振装置上游的光入射区域 并且其以包围晶体偏振器的空间接受角的方式形成，并且还包括布置在偏振装置的下游的光出射区域，其中连接光入射区域和光线的中间区域 出射区域形成在极化装置中，其路径长度至多约4mm，其通过在空间接受角度内的光照射而在晶体偏振器中穿过。 本发明还涉及一种光学测量系统，其特别是在时间分辨的光谱中，包括一种装置，以及用于测量光的偏振相关光谱分析的方法。

公开(公告)号：US20080144029A1

公开(公告)日：2008-06-19

申请号：US11946885

申请日：2007-11-29

Applicant: Chian Chiu Li

Inventor： Chian Chiu Li

IPC: G01J3/447 ,  G01J3/28

CPC classification number: G01J1/4228 ,  G01J1/0209 ,  G01J3/0259 ,  G01J3/2803 ,  G01Q60/22 ,  G01Q70/06

Abstract: An imaging-type near-field optical microscope mainly comprises a light source and a photodetector array. The array functions as imaging array where each cell or photodetector has subwavelength dimensions. A sample under test is disposed in optical near field of the photodetectors, e.g., on surface of the array. As a result of subwavelength dimensions and near-field effect, resolution can break the diffraction limit and even reach nanoscale. The microscope has a fast speed, works with soft sample and sample in solution, and is capable of dynamic observations. In addition, the array surface doubles as a platform for molecule manipulation.

Abstract translation: 成像型近场光学显微镜主要包括光源和光电检测器阵列。 该阵列用作成像阵列，其中每个单元或光电检测器具有亚波长尺寸。 被测试样品设置在光电检测器的光学近场中，例如在阵列的表面上。 由于亚波长尺寸和近场效应，分辨率可能会破坏衍射极限，甚至达到纳米尺度。 显微镜具有快速的速度，与溶液中的软样品和样品一起使用，并且能够进行动态观察。 此外，阵列表面还可作为分子操纵的平台。

公开(公告)号：US06941081B2

公开(公告)日：2005-09-06

申请号：US09782098

申请日：2001-02-13

Applicant: Lothar B. Moeller ,  Paul Stephen Westbrook

Inventor： Lothar B. Moeller ,  Paul Stephen Westbrook

IPC: G01J3/447 ,  G01J4/04 ,  H04B10/18 ,  H04B10/06 ,  H04B10/00

CPC classification number: H04B10/2569 ,  G01J3/447 ,  G01J4/04

Abstract: A method and apparatus for polarization measurements. A polarization state of an optical signal can be determined using a polarization analyzer comprising a polarization controller, a polarizer, a wavelength dispersive element and a photo-detector. The method and apparatus can be applied to polarization and polarization mode dispersion measurements in wavelength division multiplexed communication systems.

Abstract translation: 一种用于偏振测量的方法和装置。 可以使用包括偏振控制器，偏振器，波长色散元件和光检测器的偏振分析器来确定光信号的偏振状态。 该方法和装置可以应用于波分复用通信系统中的偏振和偏振模色散测量。

公开(公告)号：US20050174573A1

公开(公告)日：2005-08-11

申请号：US10511502

申请日：2003-04-15

Applicant: Andrew Harvey ,  David Fletcher-Holmes

Inventor： Andrew Harvey ,  David Fletcher-Holmes

IPC: G01J3/28 ,  G01J3/447 ,  G01J3/51 ,  G01J4/04

CPC classification number: G01J4/04 ,  G01J3/2823 ,  G01J3/447 ,  G01J3/51

Abstract: An imaging spectrometer is disclosed that comprises imaging means for dividing a received image into two or more spatially separated images and means for detecting each spectral image, and is characterised in that the imaging means comprises at least one polarizing beam splitter. The polarizing beam splitter may be a Wollaston prism. In one embodiment of the invention, the imaging means comprises image replication means to produce two or more spatially separated images, and one or more filter elements such as dichroic filters which act to alter the spectral characteristics of one or more of the spatially separated images. In a further embodiment of the invention the imaging means comprises one or more spectral replication means arranged in optical series, each spectral replication means comprising an optical retardation element and a polarising beam splitter.

Abstract translation: 公开了一种成像光谱仪，其包括用于将接收的图像分割为两个或更多个空间分离的图像的成像装置和用于检测每个光谱图像的装置，其特征在于，所述成像装置包括至少一个偏振分束器。 偏振分束器可以是Wollaston棱镜。 在本发明的一个实施例中，成像装置包括产生两个或更多个空间分离图像的图像复制装置，以及用于改变一个或多个空间分离图像的光谱特性的一个或多个过滤元件，例如二向色滤光器。 在本发明的另一个实施例中，成像装置包括以光学系列布置的一个或多个光谱复制装置，每个光谱复制装置包括光学延迟元件和偏振分束器。

公开(公告)号：US06922242B2

公开(公告)日：2005-07-26

申请号：US10465386

申请日：2003-06-19

Applicant: Glen W. Sachse

Inventor： Glen W. Sachse

IPC: G01J3/08 ,  G01J3/42 ,  G01J3/447 ,  G01N21/21 ,  G01N21/31 ,  G01N21/35 ,  G02B5/30 ,  G01J4/00

CPC classification number: G01J3/08 ,  G01N21/314 ,  G01N21/3518

Abstract: An optical path switch divides sample path radiation into a time series of alternating first polarized components and second polarized components. The first polarized components are transmitted along a first optical path and the second polarized components along a second optical path. A first gasless optical filter train filters the first polarized components to isolate at least a first wavelength band thereby generating first filtered radiation. A second gasless optical filter train filters the second polarized components to isolate at least a second wavelength band thereby generating second filtered radiation. A beam combiner combines the first and second filtered radiation to form a combined beam of radiation. A detector is disposed to monitor magnitude of at least a portion of the combined beam alternately at the first wavelength band and the second wavelength band as an indication of the concentration of the substance in the sample path.

Abstract translation: 光路开关将采样路径辐射分为交替的第一偏振分量和第二偏振分量的时间序列。 第一偏振分量沿着第一光路传播，第二偏振分量沿着第二光路传输。 第一无气体光学滤波器组对第一极化分量进行滤波以隔离至少第一波长带，从而产生第一滤波辐射。 第二无气体光学滤波器组对第二极化分量进行滤波以隔离至少第二波长带，从而产生第二滤波辐射。 光束组合器组合第一和第二滤波辐射以形成组合的辐射束。 检测器被设置为在第一波长带和第二波长带上交替地监测组合光束的至少一部分的大小作为样品路径中物质浓度的指示。