公开(公告)号：US20170045463A1

公开(公告)日：2017-02-16

申请号：US15305380

申请日：2015-04-21

Applicant: RUDOLPH TECHNOLOGIES, INC.

Inventor： Holger Wenz

IPC: G01N21/95 ,  G01N21/47 ,  G01B11/24 ,  G01N21/88

CPC classification number: G01N21/9501 ,  G01B11/24 ,  G01N21/47 ,  G01N21/474 ,  G01N21/8806 ,  G01N21/9505 ,  G01N21/958 ,  G01N2021/4735 ,  G01N2201/06113

Abstract: A system for scanning a substrate and specifically a volume of that substrate to identify anomalous structures or defects is herein described. Radiation is focused at locations within the volume of the substrate and measurements of scattered light are made. Scanning of the volume of a substrate may be fairly uniform or over selected regions, favoring those regions of the substrate that are to be involved with subsequent substrate processing steps.

Abstract translation: 这里描述了用于扫描基底，特别是该基底的体积以识别异常结构或缺陷的系统。 辐射集中在基板体积内的位置，并且进行散射光的测量。 衬底的体积的扫描可以是相当均匀的或超过所选择的区域，有利于衬底的那些随后的衬底处理步骤的区域。

公开(公告)号：US20170045454A1

公开(公告)日：2017-02-16

申请号：US15304247

申请日：2015-04-02

Applicant: General Electric Company

Inventor： Rachit SHARMA ,  Chayan MITRA ,  Vinayak TILAK

IPC: G01N21/65 ,  G01N33/00 ,  G01N21/03

CPC classification number: G01N21/65 ,  G01N21/03 ,  G01N21/031 ,  G01N21/0317 ,  G01N33/0027 ,  G01N2021/651 ,  G01N2201/06113 ,  G01N2201/062 ,  G01N2201/12

Abstract: A system is presented. The system includes an electromagnetic radiation source configured to generate a mode-matched electromagnetic radiation that irradiates a gas-mixture filled in a gas compartment at a determined pressure ‘P’ bars, an intensity enhancement mechanism that internally reflects the mode-matched electromagnetic radiation a plurality of times to achieve an effective intensity ‘E’, of reflected electromagnetic radiation in a region of interest, that is ‘N’ times an intensity of the mode-matched electromagnetic radiation, and a detection subsystem that analyses the gas-mixture based upon Raman scattered photons emitted from the region of interest, wherein a product of the ‘P’ and the ‘N’ is at least 30.

Abstract translation: 提出了一个系统。 该系统包括电磁辐射源，其被配置为产生模式匹配的电磁辐射，其以确定的压力“P”条照射填充在气室中的气体混合物，内部反映模式匹配的电磁辐射的强度增强机构 多次以实现感兴趣区域中的反射电磁辐射的有效强度“E”，即模式匹配电磁辐射的强度的“N”倍，以及基于以下的分析气体混合物的检测子系统 从感兴趣区域发射的拉曼散射光子，其中“P”和“N”的乘积为至少30。

公开(公告)号：US09568437B2

公开(公告)日：2017-02-14

申请号：US14895618

申请日：2014-05-19

Applicant: Hitachi High-Technologies Corporation

Inventor： Shunichi Matsumoto ,  Akira Hamamatsu ,  Takahiro Jingu

IPC: G01J3/00 ,  G01N21/00 ,  G01N21/88 ,  G01N21/956 ,  G01N21/95

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/06113 ,  G01N2201/0636

Abstract: An inspection device is required to detect a minute defect, that is, to have high sensitivity as semiconductor devices become finer. There are some approaches for improving the sensitivity. One is to shorten the wavelength of illuminating light radiated onto a sample. This is because, assuming that the wavelength of the illuminating light is λ, I∝λ−4 is established between the magnitude of scattered light is I and λ. Another approach is to use illuminating light including multiple wavelengths. An approach for taking in more scattered light generated from the sample is also possible. However, an optical system suitable for these approaches has not been sufficiently found in conventional techniques. One feature of the present invention is to detect a defect by using a Wolter optical system including a Wolter mirror.

Abstract translation: 需要检查装置来检测微小缺陷，即，随着半导体器件变得更细，具有高灵敏度。 有一些提高灵敏度的方法。 一个是缩短辐射到样品上的照明光的波长。 这是因为，假设照明光的波长为λ，则在散射光的大小为I和λ之间建立Iαλ-4。 另一种方法是使用包括多个波长的照明光。 采用从样品产生的更多散射光的方法也是可能的。 然而，适用于这些方法的光学系统在常规技术中尚未充分发现。 本发明的一个特征是通过使用包括Wolter反射镜的Wolter光学系统来检测缺陷。

公开(公告)号：US09568430B2

公开(公告)日：2017-02-14

申请号：US14983933

申请日：2015-12-30

Applicant: SciAps, Inc.

Inventor： David Day

IPC: G01J3/02 ,  G01N21/71 ,  G01J3/28 ,  G01J3/443 ,  G01N21/65

CPC classification number: G01N21/718 ,  G01J3/0272 ,  G01J3/2823 ,  G01J3/443 ,  G01N21/65 ,  G01N2201/0221 ,  G01N2201/06113 ,  G01N2201/063

Abstract: An analysis system includes a moveable focusing lens, a laser (typically an eye safe laser) having an output directed at the focusing lens, and a spectrometer outputting intensity data from a sample. A controller system is responsive to the spectrometer and is configured to energize the laser, process the output of the spectrometer, and adjust the position of the focusing lens relative to the sample until the spectrometer output indicates a maximum or near maximum intensity resulting from a laser output focused to a spot on the sample.

Abstract translation: 分析系统包括可移动聚焦透镜，具有指向聚焦透镜的输出的激光器（通常是眼睛安全激光器）以及从样本输出强度数据的光谱仪。 控制器系统响应于光谱仪并且被配置为激励激光器，处理光谱仪的输出，并且调整聚焦透镜相对于样品的位置，直到光谱仪输出指示由激光产生的最大或接近最大强度 输出集中在样品上的一个点。

公开(公告)号：US09568418B1

公开(公告)日：2017-02-14

申请号：US14313987

申请日：2014-06-24

Applicant: Photon Systems

Inventor： William F. Hug ,  Ray D. Reid ,  Rohit Bhartia ,  Arthur L. Lane

IPC: G01N21/64 ,  G01N21/33 ,  G01J3/26 ,  G01N21/65

CPC classification number: G01N21/33 ,  G01J3/10 ,  G01J3/36 ,  G01J3/44 ,  G01N21/64 ,  G01N21/645 ,  G01N21/65 ,  G01N27/44721 ,  G01N2021/6421 ,  G01N2021/6471 ,  G01N2201/06113 ,  G01N2201/0612 ,  G01N2201/068

Abstract: Spectroscopic chemical analysis methods and apparatus are disclosed which employ deep ultraviolet (e.g. in the 200 nm to 300 nm spectral range) electron beam pumped wide bandgap semiconductor lasers, incoherent wide bandgap semiconductor light emitting devices, and hollow cathode metal ion lasers to perform non-contact, non-invasive detection of unknown chemical analytes. These deep ultraviolet sources enable dramatic size, weight and power consumption reductions of chemical analysis instruments. In some embodiments, Raman spectroscopic detection methods and apparatus use ultra-narrow-band angle tuning filters, acousto-optic tuning filters, and temperature tuned filters to enable ultra-miniature analyzers for chemical identification. In some embodiments Raman analysis is conducted along with photoluminescence spectroscopy (i.e. fluorescence and/or phosphorescence spectroscopy) to provide high levels of sensitivity and specificity in the same instrument.

Abstract translation: 公开了使用深紫外线（例如在200nm至300nm光谱范围内）的电子束泵浦宽带隙半导体激光器，非相干宽带隙半导体发光器件和空心阴极金属离子激光器的光谱化学分析方法和装置， 接触，未知化学分析物的非侵入性检测。 这些深紫外线源可以显着降低化学分析仪器的体积，重量和功耗。 在一些实施例中，拉曼光谱检测方法和装置使用超窄带角度调谐滤波器，声光调谐滤波器和温度调节滤波器，以使超微型分析仪能够进行化学鉴定。 在一些实施方案中，拉曼分析与光致发光光谱（即荧光和/或磷光光谱）一起进行，以在相同的仪器中提供高水平的灵敏度和特异性。

公开(公告)号：US20170038300A1

公开(公告)日：2017-02-09

申请号：US15298864

申请日：2016-10-20

Applicant: NIKON CORPORATION

Inventor： Fumihiro DAKE ,  Hiroki YAZAWA

IPC: G01N21/64 ,  G02B21/06 ,  G02B21/36 ,  G02B21/16

CPC classification number: G01N21/6458 ,  G01N21/6428 ,  G01N2021/6439 ,  G01N2201/06113 ,  G01N2201/0697 ,  G01N2201/12 ,  G02B21/0032 ,  G02B21/0056 ,  G02B21/0072 ,  G02B21/06 ,  G02B21/16 ,  G02B21/36 ,  G02B21/367

Abstract: A structured illumination microscopic device includes a first spatial modulation unit spatially modulating a fluorescent sample using an excitation light having a sinusoidal illumination distribution of a spatial frequency K and having an optical frequency ω1 for shifting a fluorescent substance to an excitation level; a second spatial modulation unit spatially modulating the fluorescent sample using a stimulation light having a sinusoidal illumination distribution of a spatial frequency K and having an optical frequency ω2 for shifting the excited fluorescent substance to a base level; and an imaging unit obtaining, as a modulated image, an image of the fluorescent sample with spontaneously emitted light generated at the fluorescent sample in accordance with the excitation light and the stimulation light.

Abstract translation: 一种结构化照明显微镜装置，包括：第一空间调制单元，其使用具有空间频率K的正弦照明分布且具有用于将荧光物质移动到激发电平的光频率ω1的激发光对荧光样品进行空间调制; 使用具有空间频率K的正弦照明分布并且具有用于将激发的荧光物质移动到基准电平的光频率ω2的刺激光对荧光样品进行空间调制的第二空间调制单元; 以及成像单元，其根据所述激发光和所述刺激光获得在所述荧光样品处产生的自发发射的光的荧光样品的图像作为调制图像。

公开(公告)号：US09562860B1

公开(公告)日：2017-02-07

申请号：US14309888

申请日：2014-06-19

Applicant: Theranos, Inc.

Inventor： Chinmay Pangarkar ,  Karan Mohan

IPC: G01N15/02 ,  G01N21/64 ,  G01N21/47

CPC classification number: G01N21/6486 ,  G01N15/1434 ,  G01N15/1459 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/6428 ,  G01N2201/06113 ,  G01N2201/08

Abstract: Methods and devices for cytometric analysis are provided. A cytometry apparatus is provided which may be used with a stationary sample cuvette for analysis of a stationary sample or with a flow sample cuvette for analysis of a flowing sample. The methods and devices provided herein may be used to perform cytometric analysis of samples under a wide range of experimental and environmental conditions.

Abstract translation: 提供用于细胞分析的方法和装置。 提供了一种可与固定样品比色皿一起使用的分析仪器，用于分析固定样品或流动样本比色杯，以便分析流动的样品。 本文提供的方法和装置可用于在广泛的实验和环境条件下对样品进行细胞计数分析。

公开(公告)号：US20170030921A1

公开(公告)日：2017-02-02

申请号：US15254456

申请日：2016-09-01

Applicant: Nano Temper Technologies GmbH

Inventor： Stefan DUHR ,  Philipp BAASKE

IPC: G01N33/68 ,  G01K11/12 ,  C12Q1/68 ,  G01N15/14 ,  G01N21/17 ,  G01N21/64 ,  G01N15/02

CPC classification number: G01N33/6803 ,  B01F13/0079 ,  B01L3/502715 ,  B01L3/502761 ,  B01L2200/0668 ,  B01L2400/0442 ,  B01L2400/0451 ,  B01L2400/0454 ,  C12Q1/68 ,  G01K11/12 ,  G01N15/0205 ,  G01N15/1434 ,  G01N15/1475 ,  G01N21/171 ,  G01N21/6408 ,  G01N21/6428 ,  G01N21/6458 ,  G01N21/6486 ,  G01N33/6845 ,  G01N2015/0065 ,  G01N2015/0092 ,  G01N2015/025 ,  G01N2021/6439 ,  G01N2201/02 ,  G01N2201/06113 ,  G01N2201/0638 ,  Y10T436/143333

Abstract: The present invention relates to a method and an apparatus for a fast thermo-optical characterisation of particles. In particular, the present invention relates to a method and a device to measure the stability of (bio)molecules, the interaction of molecules, in particular biomolecules, with, e.g. further (bio)molecules, particularly modified (bio)molecules, particles, beads, and/or the determination of the length/size (e.g. hydrodynamic radius) of individual (bio)molecules, particles, beads and/or the determination of length/size (e.g. hydrodynamic radius).

Abstract translation: 本发明涉及用于快速热光学表征颗粒的方法和装置。 特别地，本发明涉及测量（生物）分子的稳定性，特别是生物分子与分子的相互作用的方法和装置。 进一步（生物）分子，特别是改性（生物）分子，颗粒，珠粒和/或单个（生物）分子，颗粒，珠子的长度/尺寸（例如流体动力学半径）的确定和/或长度/ 尺寸（例如流体动力学半径）。

公开(公告)号：US20170030835A1

公开(公告)日：2017-02-02

申请号：US15303514

申请日：2015-04-14

Applicant: The Regents of the University of California

Inventor： James W. CHAN ,  Lingbo KONG

IPC: G01N21/65

CPC classification number: G01N21/65 ,  G01J3/06 ,  G01J3/44 ,  G01N2201/06113 ,  G01N2201/068

Abstract: Methods and systems for reconstructing individual spectra acquired from laser interrogation spots in a 2D array illuminating a particle are described. A particle is positioned in a 2D array that includes multiple laser interrogation spots. The laser interrogation spots of the particle are detected in the 2D array using a spectrometer. Multifocal spectral patterns are generated based on the laser interrogation spots, and an individual spectrum for each laser interrogation spot is reconstructed based on the plurality of multifocal spectral patterns.

Abstract translation: 描述了用于重建从照射粒子的2D阵列中的激光询问点获得的各个光谱的方法和系统。 颗粒位于包括多个激光询问点的2D阵列中。 使用光谱仪在2D阵列中检测粒子的激光询问点。 基于激光询问点生成多焦点光谱图，并且基于多个多焦点光谱图来重构每个激光询问点的单个光谱。

公开(公告)号：US09559492B2

公开(公告)日：2017-01-31

申请号：US14601782

申请日：2015-01-21

Applicant: LaserMax, Inc

Inventor： Brian L. Olmsted

IPC: H01S3/00 ,  H01S5/042 ,  G01N21/88 ,  G02B27/20 ,  G01N21/956 ,  G02B21/36 ,  G01N21/47 ,  G02B27/48 ,  H01S5/022

CPC classification number: H01S5/0427 ,  G01N21/8851 ,  G01N21/956 ,  G01N2021/479 ,  G01N2201/06113 ,  G02B21/365 ,  G02B27/20 ,  G02B27/48 ,  H01S5/02288 ,  H01S5/0651 ,  Y10S378/901

Abstract: Laser systems with reduced apparent speckle are provided. The laser systems emit laser light having different mode structures that change within a time period of an integration period of an imaging system used to observe a field of view that is at least in part illuminated by the laser systems.

Abstract translation: 提供具有减少的表观斑点的激光系统。 激光系统发射具有不同模式结构的激光，其在用于观察至少部分地被激光系统照亮的视野的成像系统的积分周期的时间段内变化。