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公开(公告)号：US20190186994A1
公开(公告)日：2019-06-20
申请号：US16322170
申请日：2017-07-05
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
Abstract: A Fabry-Perot interference filter includes a substrate that has a first surface, a first laminate that has a first mirror portion disposed on the first surface, a second laminate that has a second mirror portion facing the first mirror portion via a gap on a side opposite to the substrate with respect to the first mirror portion, and an intermediate layer that defines the gap between the first laminate and the second laminate. An outer surface of the intermediate layer is curved such that an edge portion of the intermediate layer on the substrate side is positioned on an outer side of an edge portion of the intermediate layer on the side opposite to the substrate in a direction parallel to the first surface. The second laminate covers the outer surface of the intermediate layer.
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公开(公告)号：US20180195966A1
公开(公告)日：2018-07-12
申请号：US15576435
申请日：2016-04-28
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masashi ITO , Katsumi SHIBAYAMA , Kazuto OFUJI , Hiroki OYAMA , Yoshihiro MARUYAMA
CPC classification number: G01N21/658 , G01J3/4412 , G01N2021/651 , G01N2201/068
Abstract: An SERS unit includes a support 10 that includes a cavity 11 provided with an opening 12, an optical functional portion 20 that is disposed in the cavity 11 to face the opening 12 and causes surface enhanced Raman scattering, and a package 5 that accommodates the support 10 and is evacuated. The package 5 is in contact with at least an edge 12a of the opening 12, and is bent toward the optical functional portion 20 in a state in which the package 5 is spaced apart from the optical functional portion 20 in the opening 12.
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公开(公告)号：US20180136134A1
公开(公告)日：2018-05-17
申请号：US15553337
申请日：2016-02-10
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Katsumi SHIBAYAMA , Masashi ITO , Kazuto OFUJI , Hiroki OYAMA , Yoshihiro MARUYAMA , Nao INOUE
IPC: G01N21/65
CPC classification number: G01N21/658 , B82Y40/00 , G01N2021/651
Abstract: An SERS element includes a substrate, a fine structure portion formed on a surface of the substrate and having a plurality of pillars, and a conductor layer formed on the fine structure portion and constituting an optical functional portion that causes surface-enhanced Raman scattering. A groove is provided in an outer surface of each pillar. A plurality of gaps are formed in the conductor layer by forming the conductor layer on the outer surface of each pillar in a state in which at least a portion of an inner surface of the groove is exposed.
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公开(公告)号：US20180011232A1
公开(公告)日：2018-01-11
申请号：US15633863
申请日：2017-06-27
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Toshimitsu KAWAI , Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Hiroki OYAMA , Yumi TERAMACHI
CPC classification number: G02B5/285 , G01J1/0488 , G01J5/023 , G01J5/0235 , G01J5/024 , G01J5/041 , G01J5/045 , G01J5/06 , G01J5/0862 , G02B5/288 , G02B26/001
Abstract: A Fabry-Perot interference filter includes: a substrate having a first surface and a second surface facing each other; a first layer structure disposed on the first surface; and a second layer structure disposed on the second surface, wherein the first layer structure is provided with a first mirror portion and a second mirror portion facing each other with an air gap therebetween, and a distance between the first mirror portion and the second mirror portion is varied, and the second layer structure is formed with a separation region separating at least a part of the second layer structure into one side and another side in a direction along the second surface.
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公开(公告)号：US20240369410A1
公开(公告)日：2024-11-07
申请号：US18685342
申请日：2022-06-21
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Hiroki OYAMA , Yumi KURAMOTO
Abstract: A light detection system includes a Fabry-Perot interference filter including a first mirror and a second mirror, a distance therebetween being variable, a light detection unit configured to detect light in a wavelength range of λ1 or more and λ2 or less, and a control unit configured to apply a voltage to the Fabry-Perot interference filter such that the distance changes in a distance range of d1 or more and d2 or less. For a transmission spectrum T1 (λ) of light in a case where the distance is d1, a peak transmittance T1 (λa) appears within the wavelength range, and a transmittance T1 (λ2) is less than or equal to 1%. For a transmission spectrum T2 (λ) of light in a case where the distance is d2, a peak transmittance T2 (λb) appears within the wavelength range, and a transmittance T2 (λ1) is less than or equal to 1%.
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Patent Agency Ranking
公开(公告)号：US20220026703A1
公开(公告)日：2022-01-27
申请号：US17298316
申请日：2019-09-30
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
Abstract: An optical filter device includes: a Fabry-Perot interference filter that includes: a first structural body having first and second surfaces; a second structural body having a third surface; a first mirror portion provided to the first structural body; a second mirror portion provided to the second structural body so as to face the first mirror portion via an air gap; a first driving electrode provided to the first structural body; a second driving electrode provided to the second structural body; first and third terminals electrically connected to the first driving electrode; and a second terminal electrically connected to the second driving electrode. A distance between the first driving electrode and the air gap is shorter than a distance between the second surface and the air gap. A resistance measurement unit is electrically connected to the first and third terminals and measures a resistance value of the first driving electrode.
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公开(公告)号：US20210396579A1
公开(公告)日：2021-12-23
申请号：US17288593
申请日：2019-08-23
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Hiroki OYAMA , Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI , Yumi KURAMOTO
Abstract: A spectroscopic sensor includes a wiring substrate having a main surface, a light detector disposed on the main surface of the wiring substrate, a Fabry-Perot interference filter, a spacer which is provided on the main surface of the wiring substrate and supports the Fabry-Perot interference filter so that the Fabry-Perot interference filter and the light detector are separated from each other, and a stein connected to a ground potential. A second current path which has a smaller electric resistance than that of an arbitrary first current path which extends from the Fabry-Perot interference filter to the light detector via the spacer and the wiring substrate is formed between the Fabry-Perot interference filter and the stein.
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公开(公告)号：US20210362351A1
公开(公告)日：2021-11-25
申请号：US16763888
申请日：2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
Abstract: A suction method is provided as a method of performing, by using a suction collet, suction of a Fabry-Perot interference filter including: a substrate; a laminated structure that is provided on the substrate and that includes a main surface facing a side opposite to the substrate; and a thinned portion that is located outside the laminated structure when viewed in a direction intersecting the main surface and that is recessed to a side of the substrate with respect to the main surface, the method including: a first step of arranging the suction collet so as to face the main surface; a second step of bringing the suction collet into contact with the Fabry-Perot interference filter after the first step; and a third step of suctioning the Fabry-Perot interference filter by using the suction collet after the second step.
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公开(公告)号：US20210116297A1
公开(公告)日：2021-04-22
申请号：US16488742
申请日：2018-02-26
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
Abstract: A light detection device includes a package including a window, a Fabry-Perot interference filter for transmitting light incident from the window in the package, and a light detector for detecting the light transmitted by the Fabry-Perot interference filter in the package. The Fabry-Perot interference filter includes: a substrate having a first surface on the window side and a second surface on the light detector side; a first layer structure arranged on the first surface, the first layer structure having a first mirror and a second mirror, and a lens unit integrally formed on the second surface side, the lens unit for condensing the light transmitted by the first mirror and the second mirror onto the light detector.
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公开(公告)号：US20200278272A1
公开(公告)日：2020-09-03
申请号：US16765626
申请日：2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
Abstract: An optical inspection device includes: a wafer support unit configured to support a wafer in which a plurality of Fabry-Perot interference filter portions are formed, each of the plurality of filter portions in which a distance between the first mirror portion and the second mirror portion facing each other varies by an electrostatic force, the wafer support unit configured to support the wafer such that a direction in which the first mirror portion and the second mirror portion face each other follows along a reference line; a light emission unit configured to emit light to be incident on each of the plurality of filter portions along the reference line; and a light detection unit configured to detect light transmitted through each of the plurality of filter portions along the reference line. The wafer support unit has a light passage region that allows light to pass along the reference line.
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