公开(公告)号：US20080004169A1

公开(公告)日：2008-01-03

申请号：US11821800

申请日：2007-06-26

Applicant: Adam James Ellison

Inventor： Adam James Ellison

IPC: C03C3/06 ,  C03C3/076

CPC classification number: G02B1/00 ,  C03C3/06 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/30 ,  C03C2201/32 ,  C03C2201/42 ,  C03C2201/50

Abstract: A low expansion silica-titania glass suitable for making extreme ultraviolet lithographic element, with the titania-containing silica glass having a titania content in the range of 5-10 wt. % and a including a further constituent of a viscosity reducing dopant having a content in the range of 0.001 to 1 wt %.

Abstract translation: 一种适用于制备极紫外光刻元件的低膨胀二氧化硅 - 二氧化钛玻璃，含二氧化钛的二氧化硅玻璃的二氧化钛含量为5-10wt。 ％，并且a包含含量在0.001至1重量％范围内的粘度降低掺杂剂的另一组分。

公开(公告)号：US20070105704A1

公开(公告)日：2007-05-10

申请号：US11583619

申请日：2006-10-19

Applicant: Dana Bookbinder ,  Richard Fiacco ,  Ulrich Neukirch

Inventor： Dana Bookbinder ,  Richard Fiacco ,  Ulrich Neukirch

IPC: C03C3/06 ,  C03B8/00 ,  C03B19/06

CPC classification number: C03C3/06 ,  C03B19/06 ,  C03B19/066 ,  C03B19/12 ,  C03B19/14 ,  C03B19/1453 ,  C03B20/00 ,  C03B32/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/08 ,  C03B2201/12 ,  C03B2201/22 ,  C03B2201/23 ,  C03B2201/32 ,  C03B2201/42 ,  C03C4/0085 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/22 ,  C03C2201/23

Abstract: What is disclosed includes OD-doped synthetic silica glass capable of being used in optical elements for use in lithography below about 300 nm. OD-doped synthetic silica glass was found to have significantly lower polarization-induced birefringence value than non-OD-doped silica glass with comparable concentration of OH. Also disclosed are processes for making OD-doped synthetic silica glasses, optical member comprising such glasses, and lithographic systems comprising such optical member. The glass is particularly suitable for immersion lithographic systems due to the exceptionally low polarization-induced birefringence values at about 193 nm.

Abstract translation: 公开的内容包括能够用于低于约300nm的光刻中的光学元件的OD掺杂合成石英玻璃。 发现OD掺杂的合成二氧化硅玻璃具有比具有相当浓度的OH的非OD掺杂的石英玻璃具有显着更低的偏振诱导双折射值。 还公开了制造掺杂OD的合成二氧化硅玻璃，包含这种玻璃的光学构件以及包括这种光学构件的光刻系统的方法。 由于在约193nm处极度低的偏振诱发双折射值，该玻璃特别适用于浸没式光刻系统。

公开(公告)号：US07022633B2

公开(公告)日：2006-04-04

申请号：US10317068

申请日：2002-12-12

Applicant: Yoshiaki Ikuta ,  Shinya Kikugawa ,  Noriaki Shimodaira ,  Akio Masui ,  Shuhei Yoshizawa

Inventor： Yoshiaki Ikuta ,  Shinya Kikugawa ,  Noriaki Shimodaira ,  Akio Masui ,  Shuhei Yoshizawa

IPC: C03C3/06 ,  G01N23/00

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2201/23 ,  C03C23/002 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2203/44 ,  C03C2203/54 ,  Y02P40/57 ,  Y10S65/16 ,  Y10S501/90 ,  Y10S501/905

Abstract: A synthetic quartz glass for optical use, to be used by irradiation with light within a range of from the ultraviolet region to the vacuum ultraviolet region, which contains fluorine, which has a ratio of the scattering peak intensity of 2250 cm−1 (I2250) to the scattering peak intensity of 800 cm−1 (I800), i.e. I2250/I800, of at most 1×10−4 in the laser Raman spectrum, and which has an absorption coefficient of light of 245 nm of at most 2×10−3 cm−1.

Abstract translation: 一种用于光学用途的合成石英玻璃，其通过在含有氟的紫外区域至真空紫外区域的范围内的光照射而使用，所述氟化物具有2250cm -1的散射峰强度 （I 2250）相对于800cm -1（I 800）的散射峰强度，即I 2250 在激光拉曼光谱中，其最大吸收系数为245nm，最多为2×10 3，最大为1×10 -4， SUP> -3cm -1 -1。

公开(公告)号：US20060055300A1

公开(公告)日：2006-03-16

申请号：US10937947

申请日：2004-09-10

Applicant: Alan Janos ,  Malcolm Pack ,  Mohammad Kamarchi ,  Michael Colson

Inventor： Alan Janos ,  Malcolm Pack ,  Mohammad Kamarchi ,  Michael Colson

IPC: H01J1/50 ,  H01J23/10 ,  H01J3/20 ,  H01J29/76 ,  H01J3/32

CPC classification number: H01J65/044 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/11 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2201/42 ,  H01J61/302

Abstract: An electrodeless lamp and process for emitting ultraviolet and/or vacuum ultraviolet radiation comprises an envelope formed of an ultra-pure and/or low-defect quartz material and an ultraviolet and/or vacuum ultraviolet emissive material disposed in the interior region of the envelope. The electrodeless lamp formed of the ultra-pure and/or low-defect quartz material minimizes degradation during use.

Abstract translation: 用于发射紫外线和/或真空紫外线辐射的无电极灯和方法包括由超纯和/或低缺陷石英材料形成的外壳和设置在外壳的内部区域中的紫外线和/或真空紫外线发射材料。 由超纯和/或低缺陷石英材料形成的无电极灯在使用过程中使降解最小化。

公开(公告)号：US20050223747A1

公开(公告)日：2005-10-13

申请号：US11004027

申请日：2004-12-02

Applicant: Laura Ball ,  Bruno Baney ,  Dana Bookbinder ,  Keith House ,  Rostislav Khrapko ,  Susan Schiefelbein ,  Lisa Moore

Inventor： Laura Ball ,  Bruno Baney ,  Dana Bookbinder ,  Keith House ,  Rostislav Khrapko ,  Susan Schiefelbein ,  Lisa Moore

IPC: C03B37/00 ,  C03B37/012 ,  C03B37/014 ,  C03B37/018 ,  C03C3/06 ,  C03C13/04 ,  C03C15/00 ,  C03C21/00 ,  C03C25/60 ,  C03C25/68 ,  C03B37/027

CPC classification number: C03C3/06 ,  C03B37/01211 ,  C03B37/01228 ,  C03B37/01426 ,  C03B37/01807 ,  C03B37/01861 ,  C03B37/01892 ,  C03B2201/03 ,  C03B2201/04 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/28 ,  C03B2201/31 ,  C03B2201/32 ,  C03B2201/50 ,  C03B2201/54 ,  C03B2203/26 ,  C03B2207/30 ,  C03B2207/90 ,  C03C25/602 ,  C03C25/607 ,  C03C25/68 ,  C03C2201/11 ,  C03C2201/23 ,  C03C2201/50 ,  C03C2203/50 ,  G02B6/02

Abstract: A method of forming an alkali metal oxide-doped optical fiber by diffusing an alkali metal into a surface of a glass article is disclosed. The silica glass article may be in the form of a tube or a rod, or a collection of tubes or rods. The silica glass article containing the alkali metal, and impurities that may have been unintentionally diffused into the glass article, is etched to a depth sufficient to remove the impurities. The silica glass article may be further processed to form a complete optical fiber preform. The preform, when drawn into an optical fiber, exhibits a low attenuation.

Abstract translation: 公开了一种通过将碱金属扩散到玻璃制品的表面中形成掺杂碱金属氧化物的光纤的方法。 石英玻璃制品可以是管或棒的形式，或者是管或棒的集合。 含有碱金属的二氧化硅玻璃制品和可能已经无意地扩散到玻璃制品中的杂质被蚀刻到足以除去杂质的深度。 石英玻璃制品可以进一步加工以形成完整的光纤预型件。 当预成型件被拉入光纤时，表现出低的衰减。

公开(公告)号：US20050201699A1

公开(公告)日：2005-09-15

申请号：US11046435

申请日：2005-01-28

Applicant: Laura Ball ,  Bruno Baney ,  Dana Bookbinder ,  Keith House ,  Rostislav Khrapko ,  Lisa Moore ,  Susan Schiefelbein

Inventor： Laura Ball ,  Bruno Baney ,  Dana Bookbinder ,  Keith House ,  Rostislav Khrapko ,  Lisa Moore ,  Susan Schiefelbein

IPC: C03B37/00 ,  C03B37/012 ,  C03B37/014 ,  C03B37/018 ,  C03C3/06 ,  C03C13/04 ,  C03C15/00 ,  C03C21/00 ,  C03C25/60 ,  C03C25/68 ,  G02B6/02

CPC classification number: C03C3/06 ,  C03B37/01211 ,  C03B37/01228 ,  C03B37/01426 ,  C03B37/01807 ,  C03B37/01861 ,  C03B37/01892 ,  C03B2201/03 ,  C03B2201/04 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/28 ,  C03B2201/31 ,  C03B2201/32 ,  C03B2201/50 ,  C03B2201/54 ,  C03B2203/26 ,  C03B2207/30 ,  C03B2207/90 ,  C03C25/602 ,  C03C25/607 ,  C03C25/68 ,  C03C2201/11 ,  C03C2201/23 ,  C03C2201/50 ,  C03C2203/50 ,  G02B6/02

Abstract: A method of forming an alkali metal oxide-doped optical fiber by diffusing an alkali metal into a surface of a glass article is disclosed. The silica glass article may be in the form of a tube or a rod, or a collection of tubes or rods. The silica glass article containing the alkali metal, and impurities that may have been unintentionally diffused into the glass article, is etched to a depth sufficient to remove the impurities. The silica glass article may be further processed to form a complete optical fiber preform. The preform, when drawn into an optical fiber, exhibits a low attenuation.

Abstract translation: 公开了一种通过将碱金属扩散到玻璃制品的表面中形成掺杂碱金属氧化物的光纤的方法。 石英玻璃制品可以是管或棒的形式，或者是管或棒的集合。 含有碱金属的二氧化硅玻璃制品和可能已经无意地扩散到玻璃制品中的杂质被蚀刻到足以除去杂质的深度。 石英玻璃制品可以进一步加工以形成完整的光纤预型件。 当预成型件被拉入光纤时，表现出低的衰减。

公开(公告)号：US20040095566A1

公开(公告)日：2004-05-20

申请号：US10614200

申请日：2003-07-08

Inventor： Norio Komine ,  Seishi Fujiwara ,  Akiko Yoshida ,  Hiroki Jinbo ,  Norihisa Yamaguchi

IPC: G03B027/54

CPC classification number: C03B19/1415 ,  C03B19/1407 ,  C03B19/1423 ,  C03B19/1453 ,  C03B2201/07 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2207/06 ,  C03B2207/12 ,  C03B2207/20 ,  C03B2207/22 ,  C03B2207/24 ,  C03B2207/32 ,  C03B2207/36 ,  C03C3/06 ,  C03C2201/11 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2201/30 ,  C03C2201/50 ,  C03C2203/40

Abstract: An optical member made of silica glass manufactured by the direct method where a material gas comprising an organosilicon compound is allowed to react in an oxidizing flame, said optical member having a 2null1014 molecules/cm3 or less concentration of formyl radical generated by X-ray irradiation whose dose is 0.01 Mrad or more and 1 Mrad or less.

Abstract translation: 通过直接法制造的由石英玻璃制成的光学构件，其中包含有机硅化合物的材料气体在氧化火焰中反应，所述光学构件具有2×10 14分子/ cm 3或更低浓度的甲酰基 其剂量为0.01Mrad以上且1Mrad以下的X射线照射产生。

公开(公告)号：US06499317B1

公开(公告)日：2002-12-31

申请号：US09581263

申请日：2000-10-17

Applicant: Yoshiaki Ikuta ,  Shinya Kikugawa ,  Noriaki Shimodaira ,  Akio Masui ,  Shuhei Yoshizawa

Inventor： Yoshiaki Ikuta ,  Shinya Kikugawa ,  Noriaki Shimodaira ,  Akio Masui ,  Shuhei Yoshizawa

IPC: G01N2300

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2201/23 ,  C03C23/002 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2203/44 ,  C03C2203/54 ,  Y02P40/57 ,  Y10S65/16 ,  Y10S501/90 ,  Y10S501/905

Abstract: A synthetic quartz glass for optical use, to be used by irradiation with light within a range of from the ultraviolet region to the vacuum ultraviolet region, which contains fluorine, which has a ratio of the scattering peak intensity of 2250 cm−1 (I2250) to the scattering peak intensity of 800 cm−1 (I800), i.e. I2250/I800, of at most 1×10−4 in the laser Raman spectrum, and which has an absorption coefficient of light of 245 nm of at most 2×10−3 cm−1.

Abstract translation: 一种用于光学用的合成石英玻璃，其用于通过在从含有氟的紫外线区域到真空紫外线区域的光的照射下使用，其具有2250cm -1（I2250）的散射峰强度比， 对于激光拉曼光谱中至多为1×10 -4的800cm -1（I800）的散射峰强度（I800），即I2250 / I800，其吸光系数为245nm，最多为2×10 -3 cm -3， 1。

公开(公告)号：US20020097970A1

公开(公告)日：2002-07-25

申请号：US10051143

申请日：2002-01-22

Applicant: SUMITOMO ELECTRIC INDUSTRIES, INC.

Inventor： Eisuke Sasaoka

IPC: G02B006/16 ,  G02B006/18 ,  C03B037/018

CPC classification number: C03C13/046 ,  C03B37/01446 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2203/22 ,  C03C3/06 ,  C03C13/045 ,  C03C2201/11 ,  C03C2201/12 ,  G02B6/02019 ,  G02B6/02257 ,  G02B6/02266 ,  G02B6/03627

Abstract: This invention relates to an optical fiber having a structure that effectively reduces transmission loss and bending loss. An optical fiber according to this invention is an optical fiber mainly comprised of silica and including a core region and a cladding region covering the core region. The core region is doped with chlorine so as to have a refractive index higher than that of pure silica. The cladding region is doped with fluorine so as to have a refractive index lower than that of pure silica. The optical fiber, in particular, is characterized in that a peak value of a relative refractive index difference of the core region with respect to a refractive index of pure silica is 0.05% or more.

公开(公告)号：US5740297A

公开(公告)日：1998-04-14

申请号：US705993

申请日：1996-08-30

Applicant: Masashi Onishi ,  Chie Fukuda ,  Hiroo Kanamori

Inventor： Masashi Onishi ,  Chie Fukuda ,  Hiroo Kanamori

IPC: C03B37/012 ,  C03B37/027 ,  C03C13/04 ,  G02B6/22

CPC classification number: G02B6/02261 ,  C03B37/01211 ,  C03B37/027 ,  C03C13/045 ,  G02B6/03627 ,  G02B6/03644 ,  G02B6/03655 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/31 ,  C03B2203/22 ,  C03B2203/222 ,  C03B2203/23 ,  C03B2203/26 ,  C03B2203/36 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/31

Abstract: This invention relates to a dispersion-compensating fiber which can be drawn at a lower temperature and can further reduce optical transmission loss. This dispersion-compensating fiber comprises a core portion containing a high concentration of GeO.sub.2 and a cladding portion formed around the outer periphery of the core portion. The cladding portion comprises a first cladding containing fluorine or the like as an index reducer, a second cladding having a higher refractive index than that of the first cladding, and a third cladding which becomes a glass region substantially noncontributory to propagation of signal light. In particular, the third cladding contains a desired impurity such that the glass viscosity thereof becomes lower than that of the second cladding or pure silica cladding at a predetermined temperature.

Abstract translation: 本发明涉及一种可在较低温度下拉制并能进一步降低光传输损耗的色散补偿光纤。 这种色散补偿光纤包括含有高浓度GeO 2的核心部分和形成在芯部分的外周周围的包层部分。 包层部分包括含有氟等作为折射率减少器的第一包层，具有比第一包层的折射率高的第二包层，以及变成与信号光的传播基本上不相容的玻璃区域的第三包层。 特别地，第三包层包含期望的杂质，使得其玻璃粘度在预定温度下变得低于第二包层或纯二氧化硅包层的玻璃粘度。