Abstract:
A low expansion silica-titania glass suitable for making extreme ultraviolet lithographic element, with the titania-containing silica glass having a titania content in the range of 5-10 wt. % and a including a further constituent of a viscosity reducing dopant having a content in the range of 0.001 to 1 wt %.
Abstract:
A method of forming an alkali metal oxide-doped optical fiber by diffusing an alkali metal into a surface of a glass article is disclosed. The silica glass article may be in the form of a tube or a rod, or a collection of tubes or rods. The silica glass article containing the alkali metal, and impurities that may have been unintentionally diffused into the glass article, is etched to a depth sufficient to remove the impurities. The silica glass article may be further processed to form a complete optical fiber preform. The preform, when drawn into an optical fiber, exhibits a low attenuation.
Abstract:
A method of forming an alkali metal oxide-doped optical fiber by diffusing an alkali metal into a surface of a glass article is disclosed. The silica glass article may be in the form of a tube or a rod, or a collection of tubes or rods. The silica glass article containing the alkali metal, and impurities that may have been unintentionally diffused into the glass article, is etched to a depth sufficient to remove the impurities. The silica glass article may be further processed to form a complete optical fiber preform. The preform, when drawn into an optical fiber, exhibits a low attenuation.
Abstract:
An optical member made of silica glass manufactured by the direct method where a material gas comprising an organosilicon compound is allowed to react in an oxidizing flame, said optical member having a 2null1014 molecules/cm3 or less concentration of formyl radical generated by X-ray irradiation whose dose is 0.01 Mrad or more and 1 Mrad or less.
Abstract translation:通过直接法制造的由石英玻璃制成的光学构件,其中包含有机硅化合物的材料气体在氧化火焰中反应,所述光学构件具有2×10 14分子/ cm 3或更低浓度的甲酰基 其剂量为0.01Mrad以上且1Mrad以下的X射线照射产生。
Abstract:
A preform for a low loss fiber optic cable and method and apparatus for fabricating such a preform is provided. The method includes providing AlCl3 and CVD precursors and locally doping CaCl3. Alkali and/or alkaline earth fluxing agents can be introduced. The alkali and/or alkaline earths are doped along with the aluminum into the silica glass core.
Abstract:
A process for manufacture of a component made of opaque synthetic quartz glass, and a quartz glass tube manufactured according to said process. The process comprises (i) providing a starting material in the form of granulated material of highly pure, synthetic SiO2 comprising at least partially porous agglomerates of SiO2 primary particles, the granulated material having a compacted bulk density of no less than 0.8 g/cm3, (ii) filling the granulated material into a mold and converting it to an opaque quartz glass preform through a process of melting, and (iii) reshaping the preform in a heat reshaping process to obtain a component made of opaque quartz glass. A quartz glass tube is made of quartz glass consisting of a granulated material of synthetic SiO2 with a lithium content of no more than 100 wt-ppb, and the wall thickness of said component being in the range of 0.5 mm to 15 mm.
Abstract:
A simple method for producing a synthetic quartz glass having excellent homogeneity and high transmittance, which is useful as an optical material in producing steppers equipped with an ArF excimer laser as a radiation source. A method for producing a synthetic quartz glass for use in ArF excimer laser lithography, which comprises irradiating a highly homogeneous synthetic quartz glass containing less than 60 ppb of Na with ultraviolet radiation having a maximum wavelength of 260 nm for not less than the duration expressed by the equation: Y=(80X−1880)/Z wherein X represents an Na concentration (ppb), Y represents the duration of irradiation (hours), and Z represents the illuminance of an ultraviolet radiation on an irradiated surface (mW/cm2).
Abstract translation:用于制造具有优异的均匀性和高透射率的合成石英玻璃的简单方法,其可用作制备装备有ArF准分子激光器作为辐射源的步进机中的光学材料。 一种用于制造用于ArF准分子激光光刻的合成石英玻璃的方法,其包括:将含有小于60ppb的Na的高度均匀的合成石英玻璃与最大波长为260nm的紫外线辐射照射不少于由 方程式:其中X表示Na浓度(ppb),Y表示照射持续时间(小时),Z表示照射表面上的紫外线照射的照度(mW / cm 2)。
Abstract:
A novel copper activated thermoluminescence dosimeter comprising a glass composition having: about 94-97 weight percent SiO.sub.2 ; about 0.4 to 2 weight percent Al.sub.2 O.sub.3 ; about 0.02 to 1 weight percent M.sub.2 O, where M comprises Na.sup.+ or K.sup.+ ; about 2 to 6 weight percent B.sub.2 O.sub.3 ; and Cu(I), where Cu(I) is present at a level between about 10.sup.18 to 10.sup.19 ions/cm.sup.3 ; method of making the same.
Abstract:
High silica glasses exhibiting blue color by transmitted light are produced by impregnating a porous, high silica glass with a solution of cobalt, aluminum, and selected alkaline earth or alkali salts, and then consolidating the glass under oxidizing conditions to dope the glass with the corresponding oxides. The tinted glass has particular utility as a blue filter for lighting applications.
Abstract:
A process for removing metal species from solution comprising passing the liquid over a composition comprising a support such as a porous silicate glass or silica gel or charcoal having interconnected pores and containing water soluble amine complexing agents absorbed on the support capable of forming a stable complex with the metal species. The preferred amine complexing agent is triethylenetetramine. The process is especially useful for removing radioactive cobalt from liquid waste streams.