公开(公告)号：US09609732B2

公开(公告)日：2017-03-28

申请号：US14867159

申请日：2015-09-28

Applicant: Energetiq Technology, Inc.

Inventor： Donald K. Smith

IPC: G02B5/00 ,  H05G2/00 ,  B82Y10/00 ,  G03F7/20 ,  H01J61/16 ,  H01J65/04 ,  H05B41/38 ,  G21K5/00 ,  G21K5/04

CPC classification number: H05G2/008 ,  B82Y10/00 ,  G03F7/70033 ,  G21K5/00 ,  G21K5/04 ,  H01J61/16 ,  H01J65/04 ,  H05B41/382 ,  H05G2/001 ,  H05G2/003 ,  H05G2/005 ,  Y02B20/204 ,  Y10T29/49002

Abstract: An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.

公开(公告)号：US20160255710A1

公开(公告)日：2016-09-01

申请号：US15029285

申请日：2014-09-23

Applicant: ASML NETHERLANDS B.V.

Inventor： Martijn Petrus Christianus VAN HEUMEN

IPC: H05H1/24 ,  G01N21/71 ,  G03F7/20

CPC classification number: H05H1/24 ,  G01B2210/56 ,  G01N21/71 ,  G01N21/956 ,  G01N2201/06113 ,  G01N2201/068 ,  G03F7/70016 ,  G03F7/70575 ,  G03F7/70616 ,  G03F7/70916 ,  H01J61/34 ,  H01J61/40 ,  H01J65/04

Abstract: A radiation driven light source comprises laser and focusing optics. These produce a beam of radiation focused on a plasma forming zone within a first container containing a gas (e.g. Xe). Collection optics collects photons emitted by a plasma maintained by the laser radiation to form a beam of output radiation. First container is enclosed within a hermetically sealed second container. Any ozone generated within the second container as a result of ultraviolet components of the output radiation is completely contained within the second container. Second container further filters out the ultraviolet components. Microwave radiation may be used instead of laser radiation to form the plasma.

Abstract translation: 辐射驱动光源包括激光和聚焦光学元件。 这些产生聚集在包含气体（例如Xe）的第一容器内的等离子体形成区域上的辐射束。 收集光学器件收集由激光辐射维持的等离子体发射的光子以形成输出辐射束。 第一容器被封闭在密封的第二容器内。 由于输出辐射的紫外线成分，在第二容器内产生的任何臭氧都被完全包含在第二容器内。 第二容器进一步过滤紫外线成分。 可以使用微波辐射代替激光辐射以形成等离子体。

公开(公告)号：US09368337B2

公开(公告)日：2016-06-14

申请号：US14650657

申请日：2013-08-23

Applicant: RND-IS-AN, LTD

Inventor： Pavel Stanislavovich Antsiferov ,  Konstantin Nikolaevich Koshelev ,  Vladimir Mikhailovich Krivtsun ,  Aleksandr Andreevich Lash

IPC: H01J11/00 ,  H01J61/02 ,  H01J63/08

CPC classification number: H01J61/025 ,  H01J61/54 ,  H01J61/76 ,  H01J63/08 ,  H01J65/04

Abstract: The invention relates to light sources with laser pumping and to methods for generating radiation with a high luminance in the ultraviolet (UV) and visible spectral ranges. The technical result of the invention includes extending the functional possibilities of a light source with laser pumping by virtue of increasing the luminance, increasing the coefficient of absorption of the laser radiation by a plasma, and significantly reducing the numerical aperture of a divergent laser beam which is to be occluded and which is passing through the plasma. The device comprises a chamber containing a gas, a laser producing a laser beam, an optical element, a region of radiating plasma produced in the chamber by the focused laser beam, an occluder, which is mounted on the axis of the divergent laser beam on the second side of the chamber, and an optical system for collecting plasma radiation.

Abstract translation: 本发明涉及具有激光泵浦的光源以及用于在紫外线（UV）和可见光谱范围内产生具有高亮度的辐射的方法。 本发明的技术结果包括通过增加亮度，增加等离子体激光辐射的吸收系数来扩大激光泵浦的光源的功能可能性，并显着减少发射激光束的数值孔​​径 被封闭并且正在通过等离子体。 该装置包括容纳气体的腔室，产生激光束的激光器，光学元件，通过聚焦激光束在腔室中产生的辐射等离子体的区域，封闭器，其安装在发散激光束的轴上 室的第二侧，以及用于收集等离子体辐射的光学系统。

公开(公告)号：US09362104B2

公开(公告)日：2016-06-07

申请号：US14522113

申请日：2014-10-23

Applicant: USHIO DENKI KABUSHIKI KAISHA

Inventor： Masataka Mamizuka ,  Atsushi Kato

IPC: H01J65/04

CPC classification number: H01J65/04 ,  H01J61/025 ,  H01J61/30 ,  H01J61/361 ,  H01J61/86

Abstract: Provided is a short arc discharge lamp that includes: a body including therein a reflection surface and having a front opening; a cathode and an anode opposed to each other in discharge space defined by the reflection surface surrounding the discharge space; a window member provided in front of the body and covering the front opening; and a window supporting member including an inner ring section, an outer ring section, and a coupling section. The inner ring section is configured to allow a circumferential side surface of the window member to be fixed thereto, the outer ring section is larger in diameter than the inner ring section, and the coupling section connects the inner ring section and the outer ring section together. The inner ring section includes, in front of the window member, a front edge section having a shape bent in a radial direction of the window member.

Abstract translation: 本发明提供一种短弧放电灯，包括：具有反射面的主体，具有前开口; 在由围绕放电空间的反射表面限定的放电空间中彼此相对的阴极和阳极; 窗构件，其设置在所述主体的前方并覆盖所述前开口; 以及包括内圈部分，外环部分和联接部分的窗户支撑部件。 所述内圈部被配置为允许所述窗构件的周向侧面固定于所述内圈部，所述外环部的直径大于所述内圈部，所述连接部将所述内圈部和所述外圈部连结在一起 。 所述内圈部在所述窗构件的前方包括具有沿所述窗构件的径向弯曲的形状的前缘部。

公开(公告)号：US09341761B2

公开(公告)日：2016-05-17

申请号：US14301781

申请日：2014-06-11

Applicant: KLA-Tencor Corporation

Inventor： Anant Chimmalgi ,  Rahul Yadav ,  Joshua Wittenberg

IPC: F21V8/00 ,  G02B6/35

CPC classification number: G02B6/0006 ,  G02B6/0008 ,  G02B6/3512 ,  H01J65/04

Abstract: Systems and methods for providing laser sustained plasma light sources are disclosed. Different from conventional laser sustained plasma light sources where one fiber size and one wavelength combination is used in the lamphouse to generate light for different bands and pixel sizes, switchable fiber sizes and wavelength combinations are provided for optimal power output in different wavelength bands and pixel sizes. More specifically, switchable fiber configurations are provided where larger fibers with higher pump powers are used for bigger pixel sizes and higher wavelength bands while smaller fibers are used for smaller pixel size and shorter wavelength bands. Additionally and/or alternatively, pumping schemes are provided where pump wavelengths close to the absorption peak of the gas fill are used for bigger pixel sizes while pump wavelengths away from the gas fill absorption peak are used for smaller pixel sizes.

Abstract translation: 公开了用于提供激光持续等离子体光源的系统和方法。 与传统的激光持续等离子体光源不同，其中在灯塔中使用一个光纤尺寸和一个波长组合来产生用于不同带和像素尺寸的光，可提供可切换的光纤尺寸和波长组合用于在不同波长带和像素尺寸中的最佳功率输出 。 更具体地说，可提供可切换的光纤配置，其中具有更高的泵浦功率的较大的光纤用于较大的像素尺寸和较高的波长带，而较小的光纤用于较小的像素尺寸和较短的波长带。 附加地和/或替代地，提供泵送方案，其中靠近气体填充物的吸收峰的泵浦波长用于更大的像素尺寸，而远离气体填充吸收峰的泵波长用于较小的像素尺寸。

公开(公告)号：US20160111586A1

公开(公告)日：2016-04-21

申请号：US14882737

申请日：2015-10-14

Applicant: Luis Alejandro Rey-Garcia ,  Peter G. Ragay

Inventor： Luis Alejandro Rey-Garcia ,  Peter G. Ragay

IPC: H01L31/18 ,  H05B3/00 ,  H01L21/677 ,  H01L31/028 ,  H01L21/67

CPC classification number: H01L31/1868 ,  H01J65/04 ,  H01L21/67115 ,  H01L21/67173 ,  H01L21/677 ,  H01L21/6776 ,  H01L31/028 ,  H01L31/0288 ,  H01L31/186 ,  H01L31/1864 ,  H01L31/1876 ,  H05B1/0233 ,  H05B3/0047

Abstract: Reduction of solar wafer LID by exposure to continuous or intermittent High-Intensity full-spectrum Light Radiation, HILR, by an Enhanced Light Source, ELS, producing 3-10 Sols, optionally in the presence of forming gas or/and heating to within the range of from 100° C.-300° C. HILR is provided by ELS modules for stand-alone bulk/continuous processing, or integrated in wafer processing lines in a High-Intensity Light Zone, HILZ, downstream of a wafer firing furnace. A finger drive wafer transport provides continuous shadowless processing speeds of 200-400 inches/minute in the integrated furnace/HILZ. Wafer dwell time in the peak-firing zone is 1-2 seconds. Wafers are immediately cooled from peak firing temperature of 850° C.-1050° C. in a quench zone ahead of the HILZ-ELS modules. Dwell in the HILZ is from about 10 sec to 5 minutes, preferably 10-180 seconds. Intermittent HILR exposure is produced by electronic control, a mask, rotating slotted plate or moving belt.

Abstract translation: 通过暴露于连续或间歇性高强度全光谱光辐射（通过增强型光源ELS）ELS生产3-10 Sols，可任选地在形成气体或/和加热的情况下，减少太阳能晶片LID 范围为100°C-300°C。HILR由ELS模块提供，用于独立的散装/连续加工，或集成在晶圆加热炉下游的高强度光区HILZ的晶圆处理生产线中。 手指驱动晶片传输在集成炉/ HILZ中提供200-400英寸/分钟的连续无阴影处理速度。 峰值放电区的晶圆停留时间为1-2秒。 在HILZ-ELS模块之前的淬火区域中，立即从峰值烧制温度850°C-1050°C冷却晶片。 在HILZ中停留约10秒至5分钟，优选10-180秒。 间歇HILR曝光是通过电子控制，面罩，旋转开槽板或移动带产生的。

公开(公告)号：US09318311B2

公开(公告)日：2016-04-19

申请号：US13647680

申请日：2012-10-09

Applicant: KLA-Tencor Corporation

Inventor： Anant Chimmalgi ,  Anatoly Shchemelinin ,  Ilya Bezel ,  Rajeev Patil

IPC: H01J61/52 ,  H01J61/28 ,  H01J65/04

CPC classification number: H01J61/526 ,  H01J61/28 ,  H01J65/04

Abstract: A refillable plasma cell for use in a laser-sustained plasma light source includes a plasma bulb, the bulb being formed from a glass material substantially transparent to a selected wavelength of radiation, and a gas port assembly, the gas port assembly being operably connected to the bulb and disposed at a first portion of the gas bulb, wherein the bulb is configured to selectively receive a gas from a gas source via the gas port assembly.

Abstract translation: 用于激光维持等离子体光源的可再填充等离子体单元包括等离子体灯泡，灯泡由对所选波长的辐射基本上透明的玻璃材料形成，气体端口组件可操作地连接到 所述灯泡并且设置在所述气体灯泡的第一部分处，其中所述灯泡构造成经由所述气体端口组件选择性地从气体源接收气体。

公开(公告)号：US20160086788A1

公开(公告)日：2016-03-24

申请号：US14938353

申请日：2015-11-11

Applicant: Excelitas Technologies Corp.

Inventor： Rudi Blondia

IPC: H01J61/02 ,  H01J65/04 ,  H01J61/16

CPC classification number: H01J61/025 ,  H01J61/16 ,  H01J61/24 ,  H01J61/30 ,  H01J61/33 ,  H01J61/35 ,  H01J61/54 ,  H01J65/04 ,  H01J65/042

Abstract: The invention is directed to a sealed high intensity illumination device configured to receive a laser beam from a laser light source. A sealed chamber is configured to contain an ionizable medium. The chamber includes a reflective chamber interior surface having a first parabolic contour and parabolic focal region, a second parabolic contour and parabolic focal region, and an interface surface. An ingress surface is disposed within the interface surface configured to admit the laser beam into the chamber, and an egress surface disposed within the interface surface configured to emit high intensity light from the chamber. The first parabolic contour is configured to reflect light from the first parabolic focal region to the second parabolic contour, and the second parabolic contour is configured to reflect light from the first parabolic contour to the second parabolic focal region.

Abstract translation: 本发明涉及一种被配置为从激光光源接收激光束的密封高强度照明装置。 密封室配置成容纳可电离介质。 所述腔室包括具有第一抛物面轮廓和抛物线焦点区域的反射室内表面，第二抛物线轮廓和抛物线焦点区域以及界面表面。 入口表面设置在接口表面内，构造成允许激光束进入腔室，并且布置在接口表面内的出射表面被配置为从腔室发射高强度光。 第一抛物线轮廓被配置为将来自第一抛物面焦点区域的光反射到第二抛物线轮廓，并且第二抛物线轮廓被配置为将来自第一抛物面轮廓的光反射到第二抛物线焦点区域。

公开(公告)号：US20160005588A1

公开(公告)日：2016-01-07

申请号：US14613988

申请日：2015-02-04

Applicant: Young-kyu Park ,  Wook-rae Kim ,  Kwang-soo Kim ,  Tae-joong Kim ,  Byeong-hwan Jeon

Inventor： Young-kyu Park ,  Wook-rae Kim ,  Kwang-soo Kim ,  Tae-joong Kim ,  Byeong-hwan Jeon

IPC: H01J65/04 ,  G02B27/14

CPC classification number: G02B27/141 ,  G02B17/0856 ,  G02B19/0028 ,  G02B19/0047 ,  G02B19/0095 ,  H01J65/04

Abstract: A plasma light source includes a chamber having an ionizable medium therein, an ignition source configured to provide first electromagnetic radiation to the chamber, a sustaining source configured to separately provide second electromagnetic radiation to the chamber, a first curved mirror positioned adjacent the chamber, and a second curved mirror positioned opposite the first mirror and arranged to direct the first electromagnetic radiation toward the chamber. The second electromagnetic radiation may be different than the first electromagnetic radiation. Related devices and methods of operation are also discussed.

Abstract translation: 等离子体光源包括其中具有可电离介质的腔室，被配置为向腔室提供第一电磁辐射的点火源，被配置为向腔室单独提供第二电磁辐射的维持源，邻近腔室定位的第一弯曲镜，以及 第二弯曲镜，其与第一反射镜相对设置，并布置成将第一电磁辐射引向腔室。 第二电磁辐射可以不同于第一电磁辐射。 还讨论了相关设备和操作方法。

公开(公告)号：US20150357179A1

公开(公告)日：2015-12-10

申请号：US14699781

申请日：2015-04-29

Applicant: KLA-Tencor Corporation

Inventor： Lauren Wilson ,  Anant Chimmalgi ,  Matthew Panzer ,  Ilya Bezel

IPC: H01J61/30 ,  H05G2/00 ,  H01J65/04

CPC classification number: H01J61/302 ,  H01J61/025 ,  H01J65/04 ,  H05G2/008

Abstract: A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.

Abstract translation: 激光维持等离子体光源包括等离子体灯，其构造成容纳一定体积的气体并且从泵浦激光器接收照明以产生等离子体。 等离子体灯包括对来自泵浦激光器的照明透明的一个或多个透明部分和由等离子体发射的宽带辐射的至少一部分。 一个或多个透明部分由具有高于700ppm的高氢氧化物含量的透明材料形成。