-
公开(公告)号:US11796391B2
公开(公告)日:2023-10-24
申请号:US17634280
申请日:2020-10-06
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Takashi Kasahara , Katsumi Shibayama , Kei Tabata , Masaki Hirose , Hiroki Oyama , Yumi Kuramoto
CPC classification number: G01J3/26 , G01J3/0297 , G01J3/45 , G02B5/281 , G02B26/001
Abstract: A light detection device includes: a first support part disposed on a mounting surface of the wiring board; a Fabry-Perot interference filter disposed in a first support region of the first support part; and a temperature detector, wherein the temperature detector is disposed on the mounting surface such that at least a part of the temperature detector overlaps a part of the Fabry-Perot interference filter when seen in a first direction perpendicular to the mounting surface and such that at least a part of the temperature detector overlaps a part of the first support part when seen in a second direction in which the first support part and the light detector are aligned with each other, and wherein a first distance between the temperature detector and the first support part in the second direction is smaller than a first width of the first support region in the second direction.
-
公开(公告)号:US11774744B2
公开(公告)日:2023-10-03
申请号:US16953584
申请日:2020-11-20
Applicant: SEIKO EPSON CORPORATION
Inventor: Nozomu Hirokubo
CPC classification number: G02B26/007 , G01J3/027 , G01J3/26 , G02B5/286 , G02B26/001
Abstract: A spectral apparatus includes: an interference filter that includes a pair of reflection films and outputs light having a spectral wavelength corresponding to a gap size between the pair of reflection films; a gap sensor that detects the gap size; and one or more processors configured to detect an error based on a difference between the spectral wavelength corresponding to the gap size detected by the gap sensor and a target wavelength of light to be output from the interference filter. The one or more processors detect an error when an integration value obtained by integrating, on a time axis, an absolute value of the difference exceeds a threshold value.
-
公开(公告)号:US11768110B2
公开(公告)日:2023-09-26
申请号:US18113311
申请日:2023-02-23
Applicant: Project Canary, PBC
Inventor: Anna Ailene Scott , Yan Azdoud , Christopher Daniel Kelley
CPC classification number: G01J3/26 , G01N15/1404 , G01N15/1436 , G01N33/0006 , G01N33/0031 , G02B26/001
Abstract: In an illustrative configuration, a method for monitoring air quality is disclosed. The method includes accepting analyte gas into a cell and reflecting light rays into the analyte gas repeatedly across the cell into at least one sensor. The light scattered by particulate matter in the analyte gas and amount of spectra-absorption due to presence of a gaseous chemical is then measured. Based on the determined amount of spectra-absorption and the measured scattered light the gaseous chemical is then measured.
-
公开(公告)号:US11754445B2
公开(公告)日:2023-09-12
申请号:US17277642
申请日:2019-10-22
Applicant: Robert Bosch GmbH
Inventor: Ralf Noltemeyer , Benedikt Stein , Christian Huber , Christoph Schelling , Christoph Daniel Kraemmer , Reinhold Roedel
CPC classification number: G01J3/027 , G01J3/0229 , G01J3/26 , G01J3/4535
Abstract: The disclosure relates to an interferometer element for use in a spectrometer which includes a micromechanical Fabry-Perot filter element, which has at least a first mirror element, a second mirror element, and a third mirror element. Each of the first mirror element, the second mirror element, and the third mirror element are arranged in series in an optical path of the interferometer element, and at least one of a first distance between the first and second mirror elements, and a second distance between the second and third mirror elements is modifiable.
-
公开(公告)号:US20230280214A1
公开(公告)日:2023-09-07
申请号:US18006823
申请日:2020-08-20
Applicant: Nippon Telegraph and Telephone Corporation
Inventor: Yurina Tanaka , Yuichi Akage , Takashi Sakamoto , Masahiro Ueno , Sohan Kawamura , Soichi Oka
CPC classification number: G01K1/24 , G01J3/0286 , G01J3/26
Abstract: A temperature measuring device includes a Fabry-Perot interferometer, a power supply, and a light source. The temperature measuring device observes the light emitted from the light source and transmitted through the Fabry-Perot interferometer and obtains the temperature of a measurement environment in which the Fabry-Perot interferometer is placed. The light source emits a plurality of lights to the Fabry-Perot interferometer.
-
公开(公告)号:US20230280210A1
公开(公告)日:2023-09-07
申请号:US18315872
申请日:2023-05-11
Applicant: Spectricity
Inventor: Jonathan Borremans , Maarten De Bock , Ward van der Tempel
CPC classification number: G01J3/26 , G02B5/285 , G01J3/2823 , G01J2003/1226 , G01J2003/1213
Abstract: A sensor system has a plurality of optical sensors configured in an array on an integrated circuit and a lens system located proximal to a top surface of the array, where the intersection of the optical axis of the lens system with the plurality of optical sensors defines a reference point for light passing through the lens system. The sensor system includes a plurality of sets of optical filters overlaying the array between the lens system and the array, with each set of optical filters being associated with a set of optical sensors of the plurality of optical sensors and a set of optical filters of the plurality of sets of optical filters includes a plurality of optical filters where each set of optical filters has a center wavelength for light transmitted through the set of optical filters. In the sensor system each optical filter of the plurality of optical filters is configured to pass light in a different wavelength range, with at least some sets of optical filters configured to provide a center wavelength that is higher than a center wavelength of a set of optical filters at the reference point. An interface is provided for receiving output signal representative of received light from the optical sensors and to output signal from the plurality of optical sensors, with the output signal being representative of received light from the plurality of optical sensors and a spectral response is determined for each set of optical sensors associated with a set of optical filters.
-
公开(公告)号:US11686951B2
公开(公告)日:2023-06-27
申请号:US17240050
申请日:2021-04-26
Applicant: Cymer, LLC , ASML Netherlands B.V.
Inventor: Wilhelmus Patrick Elisabeth Maria op 't Root , Thomas Patrick Duffey , Herman Philip Godfried , Frank Everts , Joshua Jon Thornes , Brian Edward King
IPC: G02B27/48 , G01J3/26 , G01J9/02 , G01J3/02 , G03F7/00 , H01S3/225 , H01S3/00 , G01J11/00 , G02F1/01 , H01S4/00 , G02B19/00
CPC classification number: G02B27/48 , G01J3/027 , G01J3/26 , G01J9/02 , G01J11/00 , G02F1/0121 , G03F7/70008 , G03F7/70041 , G03F7/7055 , H01S3/0085 , H01S3/225 , H01S4/00 , G01J2009/0211 , G02B19/0095 , G02F2203/18 , G03F7/70025 , G03F7/70583 , H01S3/0057
Abstract: A method includes: producing a light beam made up of pulses having a wavelength in the deep ultraviolet range, each pulse having a first temporal coherence defined by a first temporal coherence length and each pulse being defined by a pulse duration; for one or more pulses, modulating the optical phase over the pulse duration of the pulse to produce a modified pulse having a second temporal coherence defined by a second temporal coherence length that is less than the first temporal coherence length of the pulse; forming a light beam of pulses at least from the modified pulses; and directing the formed light beam of pulses toward a substrate within a lithography exposure apparatus.
-
公开(公告)号:US11639874B2
公开(公告)日:2023-05-02
申请号:US17501695
申请日:2021-10-14
Applicant: PerkinElmer Health Sciences, Inc.
Inventor: David M. Aikens
Abstract: Spectrometers include an optical assembly with optical elements arranged to receive light from a light source and direct the light along a light path to a multi-element detector, dispersing light of different wavelengths to different spatial locations on the multi-element detector. The optical assembly includes: (i) a collimator arranged in the light path to receive the light from the light source, the collimator including a mirror having a freeform surface; (2) a dispersive sub-assembly including an echelle grating, the dispersive sub-assembly being arranged in the light path to receive light from the collimator; and (3) a Schmidt telescope arranged in the light path to receive light from the dispersive sub-assembly and focus the light to a field, the multi-element detector being arranged at the field.
-
公开(公告)号:US20230124377A1
公开(公告)日:2023-04-20
申请号:US17964926
申请日:2022-10-13
Applicant: InnoSpectra Corporation
Inventor: Hsi-Pin Li , Fei-Peng Chang , He-Yi Hsieh , Pei-Ying Lin , Shu-Ping Chien , Yung-Yu Huang
IPC: G01J3/26 , A61J7/00 , G01J3/28 , G01J3/42 , G01N21/3563 , G01N21/359 , G16H20/10 , G16H40/63
Abstract: A drug scanning and identification system including a spectrometer, a drug holder, a mobile device and a drug identification model is provided. The spectrometer includes a light source, a diffraction grating, a light-absorption element, a wavelength selector, and a single-point photodetector. The drug holder includes a transparent area and a light-absorption area. The drug is disposed on the transparent area. The light-absorption area surrounds the transparent area. The mobile device is adapted to send a control command to trigger the spectrometer scanning the drug so as to obtain spectrum data of the drug. The spectrometer is adapted to transmit the spectrum data of the drug to the drug identification model. The drug identification model is adapted to identify the spectrum data of the drug such that the drug identification model generates an identification result. The identification result is displayed by the mobile device.
-
公开(公告)号:US20230118479A1
公开(公告)日:2023-04-20
申请号:US18083074
申请日:2022-12-16
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Hiroki OYAMA , Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI , Yumi KURAMOTO
IPC: G01J3/26 , H01L21/673 , B65D85/48 , H01L21/677 , G02B26/00 , G02B26/02
Abstract: A transportation method for transporting an object including a plurality of Fabry-Perot interference filters, the transportation method including a first step of accommodating the object in an accommodating container, wherein the Fabry-Perot interference filter includes a substrate, a first mirror portion and a second mirror portion provided on the substrate to face each other via a gap and in which a distance from each other is variable, and in the first step, the object is accommodated and supported in the accommodating container in a state where the plurality of Fabry-Perot interference filters is two-dimensionally arranged.
-
-
-
-
-
-
-
-
-