SPARK STAND ASSEMBLY FOR AN OPTICAL EMISSION SPECTROSCOPY INSTRUMENT

    公开(公告)号:US20240003817A1

    公开(公告)日:2024-01-04

    申请号:US18343461

    申请日:2023-06-28

    Inventor: André PETERS

    CPC classification number: G01N21/73 G01N21/67 G01J3/443

    Abstract: A spark stand assembly for an optical emission spectroscopy includes: a spark stand body on a mounting flange enabling attaching the assembly to a main housing; an exciter in a recess on the body; an elevated portion on the body adjacent the mounting flange; an elongated notch on the body connecting the recess to a passageway through the elevated portion; a spark stand plate on the body to cover the recess, the notch and part of the elevated portion so the recess forms a plasma chamber and the notch forms a path to the passageway. The plate includes an opening exposing part of a sample on the opening for excitation, the opening being spatially aligned with the exciter when the plate is on the body; and a sealing member between the top of the body and the plate enclosing the recess and notch and routed over the elevated portion.

    SAMPLE ANALYSIS SYSTEM, LEARNED MODEL GENERATION METHOD, AND SAMPLE ANALYSIS METHOD

    公开(公告)号:US20230070781A1

    公开(公告)日:2023-03-09

    申请号:US17904383

    申请日:2020-12-10

    Abstract: A sample analysis system including: a droplet device that intermittently introduces a sample to a measurement region set in plasma; a light emission detection device that detects light emission in the measurement region at a detection timing, the detection timing being set at a predetermined cycle in advance; and an analysis device that analyzes the sample based on the detected light emission, the analysis device being provided with: a distribution computing unit that computes a time-spatial light intensity distribution based on the detected light emission, the time-spatial light intensity distribution being a distribution of a light intensity according to the detection timing, a position in the measurement region, and an wavelength component of the light emission; and a characteristic specifying unit that computes a feature amount that correlates with a sample characteristic indicating a property of the sample and specifies the sample characteristic based on the feature amount.

    Learning method, management device, and management program

    公开(公告)号:US11556853B2

    公开(公告)日:2023-01-17

    申请号:US16857384

    申请日:2020-04-24

    Abstract: There is provided a learning method. The method includes performing preprocessing on light emission data in a chamber of a plasma processing apparatus, setting a constraint for generating a regression equation representing a relationship between an etching rate of the plasma processing apparatus and the light emission data, selecting a learning target wavelength from the light emission data subjected to the preprocessing, and receiving selection of other sensor data different from the light emission data. The method further includes generating a regression equation based on the set constraint while using, as learning data, the selected wavelength, the received other sensor data, and the etching rate, and outputting the generated regression equation.

    INFLAMMABLE SPARK ESTIMATION SYSTEM

    公开(公告)号:US20220364921A1

    公开(公告)日:2022-11-17

    申请号:US17866941

    申请日:2022-07-18

    Abstract: According to one implementation, an inflammable spark estimation system includes: a photodetector for measuring intensity of discharge light arising from a spark arising from a structural object made of a plurality of materials; and a data processing system configured to determine whether the spark has inflammability, based on the intensity of the discharge light measured by the photodetector, with referring to determination information. The determination information has been determined based on features of waveforms of wavelength spectra of possible discharge light arising from possible inflammable sparks respectively arising from possible materials of which the structural object may be made. The data processing system is configured to further determine which of the plurality of the materials the spark has arisen from, based on the intensity of the discharge light measured by the photodetector, with referring to the determination information, when the spark has been determined to have the inflammability.

    Mirror Clip
    19.
    发明申请

    公开(公告)号:US20220364916A1

    公开(公告)日:2022-11-17

    申请号:US17629765

    申请日:2020-07-30

    Abstract: A mirror clip for use in an optical mirror housing for an optical emission spectrometer includes a body having a mirror seating portion, at least one hinge member for positioning and attaching the clip to an optical mirror housing, and at least one clamping member for releasably securing the mirror clip to the optical mirror housing. A mirror can be accommodated in the mirror seating portion. The at least one hinge member may include a hook to provide a releasable hinged connection between the mirror clip and the optical mirror housing.

    VARIABLE TRANSMISSION APERTURE
    20.
    发明申请

    公开(公告)号:US20220349750A1

    公开(公告)日:2022-11-03

    申请号:US17763537

    申请日:2020-08-19

    Abstract: A spectrometry system for spectroscopically analyzing a sample is provided. The system includes an excitation source for interacting with the sample; a detector for detecting at least a portion of light absorbed or emitted by the sample, the excitation source and detector being optically coupled via an optical pathway; and an aperture positioned in the optical pathway for limiting transmission of light from the excitation source to the detector; wherein the aperture is configured to have a spatially varying distribution of one or more geometric features that provide regions of variable transmission around an edge of the aperture. Also provided is a mask for use with a spectrometry system, the mask configured to be positioned in an optical pathway between an excitation source and a detector, wherein the mask has a spatially varying distribution of one or more geometric features that provide regions of variable transmission around an edge of the aperture. A method for limiting light throughput from an excitation source to a detector via an aperture in a spectrometry system is also provided.

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