公开(公告)号：US20170176348A1

公开(公告)日：2017-06-22

申请号：US15449423

申请日：2017-03-03

Applicant: Samsung Electronics Co., Ltd.

Inventor： Choonshik LEEM ,  Chungsam JUN

IPC: G01N21/956 ,  G01N21/88 ,  H01L21/66 ,  G01N21/21

CPC classification number: G01N21/956 ,  G01N21/211 ,  G01N21/8806 ,  G01N2021/8848 ,  G01N2201/0683 ,  G01N2201/12 ,  H01L21/76816 ,  H01L21/76877 ,  H01L22/12

Abstract: An ellipsometer includes a stage, a light source, a polarizer, a detector, and a processor. The stage is configured to support a substrate including a pattern. The light source is configured to emit illumination toward the substrate. The polarizer is configured to polarize the illumination. The detector is configured to generate, in association with a plurality of azimuthal angles, data corresponding to polarized illumination reflected from the substrate. The processor is configured to: control rotation of the stage in association with sequential inspection of the pattern at the plurality of azimuthal angles, and determine asymmetry of the pattern based on the data. Each azimuthal angle of the plurality of azimuthal angles corresponds to a different rotational state of the stage.

公开(公告)号：US20170153177A1

公开(公告)日：2017-06-01

申请号：US15317194

申请日：2015-03-25

Applicant: AMRONA AG

Inventor： Andreas Siemens

IPC: G01N21/53 ,  G08B17/113 ,  G08B17/107

CPC classification number: G01N21/53 ,  G01N2021/473 ,  G01N2201/062 ,  G01N2201/0642 ,  G01N2201/0683 ,  G08B17/107 ,  G08B17/113

Abstract: An assembly (100) for attenuating the impinging light of a beam of radiation of finite expansion with the objective of realizing reliable attenuation particularly of directly impinging light comprises a light source (10) for producing a beam of unpolarized light, preferably unpolarized monochromatic light, a useful light region (50) through which the unpolarized light passes and preferably passes through in a straight line from the light source (10) as well as an absorption device (30) arranged downstream of the useful light region (50) and preferably downstream in the direction of the direct beam radiation for at least partly absorbing impinging light, wherein the absorption device (30) comprises at least one polarization device (31, 32) arranged in the direction of the light beam.

公开(公告)号：US20170143213A1

公开(公告)日：2017-05-25

申请号：US15428012

申请日：2017-02-08

Applicant: The General Hospital Corporation

Inventor： Seemantini K. Nadkarni

IPC: A61B5/00 ,  G02B23/26 ,  G01N21/49 ,  G02B23/24 ,  A61B5/02 ,  G01N21/47

CPC classification number: A61B5/0084 ,  A61B5/0062 ,  A61B5/02007 ,  A61B5/02028 ,  A61B5/6853 ,  A61B5/6869 ,  A61B5/6876 ,  A61B5/7203 ,  A61B5/7275 ,  G01N21/474 ,  G01N21/4788 ,  G01N21/49 ,  G01N2021/4742 ,  G01N2021/479 ,  G01N2201/0683 ,  G01N2201/08 ,  G01N2201/0826 ,  G02B6/0005 ,  G02B23/2453 ,  G02B23/26

Abstract: An apparatus for obtaining information regarding a biological structure(s) can include, for example a light guiding arrangement which can include a fiber through which an electromagnetic radiation(s) can be propagated, where the electromagnetic radiation can be provided to or from the structure. An at least partially reflective arrangement can have multiple surfaces, where the reflecting arrangement can be situated with respect to the optical arrangement such that the surfaces thereof each can receive a(s) beam of the electromagnetic radiations instantaneously, and a receiving arrangement(s) which can be configured to receive the reflected radiation from the surfaces which include speckle patterns.

公开(公告)号：US09651477B1

公开(公告)日：2017-05-16

申请号：US15088201

申请日：2016-04-01

Applicant: The United States of America, as represented by the Secretary of the Army

Inventor： Bradley W. Libbey ,  James D. Perea

IPC: G01N21/17 ,  G01H9/00

CPC classification number: G01P3/36 ,  G01H9/00 ,  G01H9/002 ,  G01N21/1702 ,  G01N2201/06113 ,  G01N2201/067 ,  G01N2201/0683 ,  G01N2201/12

Abstract: A laboratory system has demonstrated the measurement of three degrees of vibrational freedom simultaneously using a single beam through heterodyne speckle imaging. The random interference pattern generated by the illumination of a rough surface with coherent light can be exploited to extract information about the surface motion. The optical speckle pattern is heterodyne mixed with a coherent reference. The recorded optical data is then processed to extract three dimensions of surface motion. Axial velocity is measured by demodulating the received time-varying intensity of high amplitude pixels. Tilt, a gradient of surface velocity, is calculated by measuring speckle translation following reconstruction of the speckle pattern from the mixed signal.

公开(公告)号：US09645094B2

公开(公告)日：2017-05-09

申请号：US15387786

申请日：2016-12-22

Applicant: Hitachi High-Technologies Corporation

Inventor： Toshifumi Honda ,  Yuta Urano ,  Takahiro Jingu ,  Akira Hamamatsu

IPC: G01N21/00 ,  G01N21/88 ,  G01J1/44 ,  G01N21/95

CPC classification number: G01N21/8806 ,  G01J1/0474 ,  G01J1/44 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/06113 ,  G01N2201/068 ,  G01N2201/0683 ,  G01N2201/0697 ,  G01N2201/10 ,  G01N2201/12

Abstract: To detect an infinitesimal defect, highly precisely measure the dimensions of the detect, a detect inspection device is configured to comprise: a irradiation unit which irradiate light in a linear region on a surface of a sample; a detection unit which detect light from the linear region; and a signal processing unit which processes a signal obtained by detecting light and detecting a defect. The detection unit includes: an optical assembly which diffuses the light from the sample in one direction and forms an image in a direction orthogonal to the one direction; and a detection assembly having an array sensor in which detection pixels are positioned two-dimensionally, which detects the light diffused in the one direction and imaged in the direction orthogonal to the one direction, adds output signals of each of the detection pixels aligned in the direction in which the light is diffused, and outputs same.

公开(公告)号：US09638638B2

公开(公告)日：2017-05-02

申请号：US14890109

申请日：2014-05-09

Applicant: Ludwig-Maximilians-Universität München

Inventor： Robert Alexander Huber ,  Thomas Klein ,  Wolfgang Wieser ,  Sebastian Karpf ,  Matthias Eibl

IPC: G01J3/44 ,  G01N21/65 ,  H01S3/067 ,  H01S3/10 ,  H01S3/23 ,  H01S3/30 ,  H01S3/0941 ,  H01S3/16 ,  H01S3/00 ,  H01S3/094

CPC classification number: G01N21/65 ,  G01J3/44 ,  G01J3/4412 ,  G01N2021/655 ,  G01N2201/06113 ,  G01N2201/0683 ,  G01N2201/0697 ,  H01S3/0064 ,  H01S3/0078 ,  H01S3/06758 ,  H01S3/094069 ,  H01S3/09415 ,  H01S3/10015 ,  H01S3/1618 ,  H01S3/2391 ,  H01S3/302

Abstract: Disclosed herein is a system (10) for measuring light induced transmission or reflection changes, in particular due to stimulated Raman emission. The system comprises a first light source (12) for generating a first light signal having a first wavelength, a second light source (14) for generating a second light signal having a second wavelength, an optical assembly (16) for superposing said first and second light signals at a sample location (18), and a detection means (24) for detecting a transmitted or reflected light signal, in particular a stimulated Raman signal caused by a Raman-active medium when located at said sample location. Here in at least one of the first and second light sources (12, 14) is one or both of actively controllable to emit a time controlled light pattern or operated substantially in CW mode and provided with an extra cavity modulation means (64) for generating a time controlled light pattern. The detection means (24) is capable of recording said transmitted or reflected light signal, in particular stimulated Raman signal, as a function of time.

公开(公告)号：US09636052B2

公开(公告)日：2017-05-02

申请号：US15093547

申请日：2016-04-07

Applicant: K Sciences GP, LLC

Inventor： Valentin Korman

IPC: G01N33/48 ,  A61B5/145 ,  G01N21/21 ,  A61B5/1455 ,  A61B5/00

CPC classification number: A61B5/14532 ,  A61B5/1455 ,  A61B5/14558 ,  A61B5/6815 ,  A61B5/7225 ,  A61B2560/0443 ,  A61B2562/0238 ,  G01N21/21 ,  G01N2201/062 ,  G01N2201/0683

Abstract: A glucose sensor comprising an optical energy source having an emitter with an emission pattern; a first polarizer intersecting the emission pattern; a second polarizer spaced a distance from the first polarizer and intersecting the emission pattern, the second polarizer rotated relative to the first polarizer by a first rotational amount Θ; a first optical detector intersecting the emission pattern; a second optical detector positioned proximal to the second polarizer, the first polarizer and the second polarizer being positioned between the optical energy source and the second optical detector, the second optical detector intersecting the emission pattern; a compensating circuit coupled to the second optical detector; and a subtractor circuit coupled to the compensating circuit and the first optical detector.

公开(公告)号：US20170102319A1

公开(公告)日：2017-04-13

申请号：US15126798

申请日：2015-02-18

Applicant: Centre National de la Recherche Scientifique - CNRS ,  Ecole Polytechnique

Inventor： Antonello De Martino ,  Dominique Pagnoux ,  Jérémy Vizet ,  Sandeep Manhas ,  Jean-Charles Vanel ,  Stanislas Deby

IPC: G01N21/21 ,  A61B1/07

CPC classification number: G01N21/21 ,  A61B1/07 ,  G01N2201/0636 ,  G01N2201/0683 ,  G01N2201/08 ,  G01N2201/12

Abstract: According to one aspect, the invention relates to a device (100) for remote polarimetric characterisation of a sample (S). It comprises a source (10) for emitting at least one incident light wave at at least one first wavelength (λE); a monomode optical fibre (30) in which the incident light wave is intended to propagate; a polarisation state generator (PSG) arranged on the proximal side of the optical fibre; a reflector (40) intended to be arranged on the distal side of the optical fibre; a polarisation state analyser (PSA) arranged on the proximal side of the optical fibre and allowing, for each probe state of the incident wave generated by the polarisation state generator, the polarisation of the light wave obtained after propagation of the incident wave in the optical fibre (30), reflection from the distal side of the optical fibre and reverse propagation in the optical fibre (30), to be analysed. Processing means (70) make it possible to determine, from a first polarimetric characterisation of the optical fibre, a Mueller matrix (MF) associated with the optical fibre, and, from a second polarimetric characterisation of the assembly comprising the optical fibre and the sample, a Mueller matrix (MT) associated with said assembly. The Mueller matrix (Mo) associated with the sample is determined from the Mueller matrices associated with the optical fibre and the assembly comprising the optical fibre and the sample, respectively.

公开(公告)号：US09612212B1

公开(公告)日：2017-04-04

申请号：US14954158

申请日：2015-11-30

Applicant: Samsung Electronics Co., Ltd.

Inventor： Choonshik Leem ,  Chungsam Jun

IPC: G01N21/00 ,  G01N21/956 ,  G01N21/21 ,  G01N21/88 ,  H01L21/66 ,  H01L21/768

CPC classification number: G01N21/956 ,  G01N21/211 ,  G01N21/8806 ,  G01N2021/8848 ,  G01N2201/0683 ,  G01N2201/12 ,  H01L21/76816 ,  H01L21/76877 ,  H01L22/12

Abstract: An ellipsometer includes a stage, a light source, a polarizer, a detector, and a processor. The stage is configured to support a substrate including a pattern. The light source is configured to emit illumination toward the substrate. The polarizer is configured to polarize the illumination. The detector is configured to generate, in association with a plurality of azimuthal angles, data corresponding to polarized illumination reflected from the substrate. The processor is configured to: control rotation of the stage in association with sequential inspection of the pattern at the plurality of azimuthal angles, and determine asymmetry of the pattern based on the data. Each azimuthal angle of the plurality of azimuthal angles corresponds to a different rotational state of the stage.

公开(公告)号：US09599554B2

公开(公告)日：2017-03-21

申请号：US14423382

申请日：2014-03-07

Applicant: Halliburton Energy Services, Inc.

Inventor： James M. Price ,  David L. Perkins

IPC: G01J4/00 ,  G01N21/31 ,  G01N21/21 ,  G01N21/39 ,  G01J3/12 ,  G01J3/42 ,  G01J3/433 ,  G01J3/02

CPC classification number: G01N21/31 ,  G01J3/0224 ,  G01J3/12 ,  G01J3/42 ,  G01J3/433 ,  G01N21/21 ,  G01N21/39 ,  G01N2201/0683

Abstract: Multivariate optical computing using polarizers to modulate the intensity of sample-interacted light. The polarizer(s), along with other device components, produce a spectroscopic intensity profile that mimics the regression vector that corresponds to the sample characteristic(s) of interest.