公开(公告)号：US06243170B1

公开(公告)日：2001-06-05

申请号：US09245134

申请日：1999-02-04

Applicant: Alexander I. Ershov

Inventor： Alexander I. Ershov

IPC: G01B902

CPC classification number: G01J3/26 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0229 ,  G01J3/027

Abstract: A double pass etalon based spectrometer. Spectral components of a diffused beam are angularly separated as they are transmitted through an etalon. A retroreflector reflects the transmitted components back through the etalon. Twice transmitted spectral components are focused onto a light detector which in a preferred embodiment is a photo diode array. The spectrometer is very compact producing precise fringe data permitting bandwidth measurements with precision needed for microlithography for both &Dgr;&lgr;FWHM and &Dgr;&lgr;95%.

Abstract translation: 基于双通道标准仪的光谱仪。 扩散光束的光谱分量在透射通过标准具时被角度地分离。 后向反射镜通过标准具反射传输的组件。 两次透射的光谱分量被聚焦到光检测器上，在优选实施例中光检测器是光电二极管阵列。 光谱仪非常紧凑，产生精确的条纹数据，允许DELTAlambdFWHM和DELTAlambd 95％的微光刻所需的精度进行带宽测量。

公开(公告)号：US06233373B1

公开(公告)日：2001-05-15

申请号：US09337159

申请日：1999-06-21

Applicant: Charles G. Askins ,  Martin A. Putnam

Inventor： Charles G. Askins ,  Martin A. Putnam

IPC: G02B602

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/18 ,  G01J3/1895 ,  G01J3/2803 ,  G02B6/2932

Abstract: An aspect of the present invention is an optical spectrometer for detecting a spectral signature of a input optical signal, including: (a) a collimating lens having an optical axis and focal plane, for collimating the input optical signal; (b) an input optical system, for directing the input optical signal to the collimating lens; (c) a diffraction grating, for scattering the collimated input optical signal, positioned in the path of collimated light from the collimating lens, oriented to reflect a majority of the scattered light through the collimating lens; and (d) a detector, in a focal plane of the collimating lens. Another aspect of the invention is a fiber-based sensing system using the optical spectrometer of the invention. Such a system will include (a) an optical fiber having an array of fiber Bragg gratings, where each of the gratings is reflective at a selected wavelength; (b) a light source, for radiating light at each of the selected wavelengths, optically coupled to the optical fiber; and (c) the optical spectrometer of the invention, optically coupled to the optical fiber, for detecting a spectral signature of reflected light from the fiber Bragg gratings. Typically, the spectrometer output will be fed to a data capturing system, and subsequently to a data analysis system, which may combined in a single computer system for control, data capture.

Abstract translation: 本发明的一个方面是用于检测输入光信号的光谱特征的光谱仪，包括：（a）具有光轴和焦平面的准直透镜，用于准直输入光信号; （b）用于将输入光信号引导到准直透镜的输入光学系统; （c）衍射光栅，用于散射位于来自准直透镜的准直光的路径中的准直输入光信号，其被定向成反射大部分散射光通过准直透镜; 和（d）在准直透镜的焦平面中的检测器。 本发明的另一方面是使用本发明的光谱仪的基于光纤的感测系统。 这样的系统将包括（a）具有光纤布拉格光栅阵列的光纤，其中每个光栅以选定的波长反射; （b）光源，用于在每个所选择的波长处照射光，光耦合到光纤; 和（c）光学耦合到光纤的本发明的光谱仪，用于检测来自光纤布拉格光栅的反射光的光谱特征。 通常，光谱仪输出将被馈送到数据捕获系统，然后被馈送到数据分析系统，其可以组合在单个计算机系统中用于控制，数据捕获。

公开(公告)号：US6124929A

公开(公告)日：2000-09-26

申请号：US135765

申请日：1998-08-18

Applicant: Stephen C. Weibel

Inventor： Stephen C. Weibel

IPC: G01B9/02

CPC classification number: G01J3/4535 ,  G01J3/021

Abstract: A Michelson interferometer includes a beamsplitter onto which an input light beam is directed. The beamsplitter divides the input light beam into a first beam portion incident upon a first fixed reflector and a second beam portion incident upon a movable retroreflector. The movable retroreflector reflects the second beam onto another fixed reflector and then back to the beamsplitter where the first and second beams are combined and directed to a detector. The movable retroreflector is attached to one end of a rotating arm moving at a constant angular velocity. The retroreflector reflects the second beam at a fixed location in its orbital path. The angular velocity of the retroreflector and rotating arm combination may be varied over a wide range to provide a large modulated frequency bandwidth. The operating duty cycle of the interferometer may be doubled by attaching a second retroreflector to the other end of the rotating arm, with the weights of the two retroreflectors counterbalancing each other. The interferometer's optical alignment is insensitive to angular tilt and lateral shear (horizontal and vertical translation) of the interferometer's scanning element.

Abstract translation: 迈克尔逊干涉仪包括一个输入光束被引导到的分束器。 分束器将输入光束分成入射在第一固定反射器上的第一光束部分和入射到可移动后向反射器上的第二光束部分。 可移动后向反射器将第二光束反射到另一个固定的反射器上，然后返回到分束器，其中第一和第二光束被组合并被引导到检测器。 可移动后向反射器附接到以恒定角速度移动的旋转臂的一端。 后向反射器将第二光束反射到其轨道中的固定位置。 后向反射器和旋转臂组合的角速度可以在宽范围内变化以提供大的调制频率带宽。 通过将第二后向反射器附接到旋转臂的另一端，干涉仪的工作占空比可以加倍，两个逆反射器的重量彼此平衡。 干涉仪的光学对准对干涉仪扫描元件的角度倾斜和横向剪切（水平和垂直平移）不敏感。

公开(公告)号：US5963320A

公开(公告)日：1999-10-05

申请号：US93713

申请日：1998-06-08

Applicant: Neil H. Brooks ,  Sergey N. Tugarinov ,  Nicolae N. Naumenko ,  Torkil H. Jensen ,  Daniel Finkenthal

Inventor： Neil H. Brooks ,  Sergey N. Tugarinov ,  Nicolae N. Naumenko ,  Torkil H. Jensen ,  Daniel Finkenthal

IPC: G01J3/06 ,  G01J3/20 ,  G01J3/28 ,  G01J3/457 ,  G01J3/18

CPC classification number: G01J3/06 ,  G01J3/20 ,  G01J3/457 ,  G01J2003/2866 ,  G01J3/0202 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0294

Abstract: A grating spectrometer employing digital control of an oscillating component (a mirror) and phase-locked digital recording of the intensity profile within the narrow spectral domain defined by an oscillation frequency. Flexible choice of oscillation frequency permits measurement in a quiet region of the noise spectrum. Reference waveforms acquired with the same insturment can be stored and later used to deconvolute a more complex spectrum. The use of multiple detector/slit combinations along a Rowland circle makes the spectrometer sensitive to specific atomic elements.

Abstract translation: 光栅光谱仪采用振荡分量（反射镜）的数字控制和由振荡频率限定的窄谱域内的强度分布的锁相数字记录。 振荡频率的灵活选择允许在噪声谱的安静区域进行测量。 可以存储使用相同装置获得的参考波形，并且稍后用于对更复杂的频谱进行解卷积。 沿Rowland圆圈使用多个探测器/狭缝组合使得光谱仪对特定的原子元素敏感。

公开(公告)号：US5880834A

公开(公告)日：1999-03-09

申请号：US047083

申请日：1998-03-24

Applicant: Michael P. Chrisp

Inventor： Michael P. Chrisp

IPC: G01J3/02 ,  G01J3/18 ,  G01J3/20 ,  G01J3/28 ,  G03F7/20

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0256 ,  G01J3/0294 ,  G01J3/18 ,  G01J3/20 ,  G01J3/2803 ,  G01J3/2823 ,  G03F7/70233

Abstract: A 1:1 Offner mirror system for imaging off-axis objects is modified by replacing a concave spherical primary mirror that is concentric with a convex secondary mirror with two concave spherical mirrors M1 and M2 of the same or different radii positioned with their respective distances d1 and d2 from a concentric convex spherical diffraction grating having its grooves parallel to the entrance slit of the spectrometer which replaces the convex secondary mirror. By adjusting their distances d1 and d2 and their respective angles of reflection .alpha. and .beta., defined as the respective angles between their incident and reflected rays, all aberrations are corrected without the need to increase the spectrometer size for a given entrance slit size to reduce astigmatism, thus allowing the imaging spectrometer volume to be less for a given application than would be possible with conventional imaging spectrometers and still give excellent spatial and spectral imaging of the slit image spectra over the focal plane.

Abstract translation: 1：1用于成像离轴物体成像的偏光镜系统通过用相对于不同半径的两个凹球面镜M1和M2以相应的距离d1 并且具有平行于光谱仪的入口狭缝的凹槽的同心凸球形衍射光栅的d2，其代替凸的次级反射镜。 通过调整它们的距离d1和d2以及它们各自的反射角α和β，被定义为它们入射和反射光线之间的相应角度，所有像差被校正，而不需要增加给定入射狭缝尺寸的光谱仪尺寸以减少散光 ，从而允许成像光谱仪体积对于给定的应用而言比常规成像光谱仪可能少，并且仍然在焦平面上给出狭缝图像光谱的优异的空间和光谱成像。

公开(公告)号：US5589717A

公开(公告)日：1996-12-31

申请号：US527290

申请日：1995-09-12

Applicant: Chiu Chau

Inventor： Chiu Chau

IPC: G01J3/02 ,  G01J3/18 ,  G01J3/28

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0291 ,  G01J3/18

Abstract: A compact spectrum analyzer module suitable as a subsystem in optoelectronic instrumentation is disclosed which analyzer module employs two mirror surfaces to provide a folded optical path to and from a stock concave focusing diffraction grating. The module has mutually perpendicular input and output optical paths whereby input and output slits, or apertures, can be positioned on adjacent, mutually perpendicular faces of a box-like rectangular housing providing more convenience in the location of external system components such as light samplers and detector arrays, in many situations. Mirror orientation is effective to turn the output optical path through ninety degrees from the input path and to generate from polychromatic light a focused output spectrum in a plane parallel with the input path. Both the input path and the focused output spectrum lie, in preferred embodiments, in planes, not necessarily coincident, that are perpendicular to the optical axis of the grating.

Abstract translation: 公开了一种适用于光电仪器中的子系统的紧凑型频谱分析仪模块，其分析器模块采用两个镜面，以提供与库存凹面聚焦衍射光栅的折叠光路。 模块具有相互垂直的输入和输出光路，由此输入和输出狭缝或孔可以定位在盒状矩形壳体的相邻的相互垂直的面上，从而在外部系统部件（例如光采样器）和 检测器阵列，在许多情况下。 镜面方向有效地将输出光路从输入路径转过九十度，并从多色光产生与输入路径平行的平面中的聚焦输出光谱。 在优选实施例中，输入路径和聚焦输出频谱都位于与光栅的光轴垂直的平面中，不一定重合。

公开(公告)号：US5357334A

公开(公告)日：1994-10-18

申请号：US992647

申请日：1992-12-18

Applicant: Yoichi Ishiguro ,  Haruhiko Aikawa ,  Minoru Watanabe ,  Yoshiaki Ichige ,  Fumitoshi Okamoto

Inventor： Yoichi Ishiguro ,  Haruhiko Aikawa ,  Minoru Watanabe ,  Yoshiaki Ichige ,  Fumitoshi Okamoto

IPC: G01J3/02 ,  G01J3/28 ,  G01N21/27 ,  G01J3/443

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0297 ,  G01J3/28

Abstract: A spectroanalyzer accurately spectroanalyzes in spite of the deterioration of transmissibility of an optical fiber (5) by radiation, by using a light from a sample cell (1) as a measurement light which passes through the optical fiber (5). The spectroanalyzer comprises a white light source (15) for directing a monitoring light to a one end (5b) of the optical fiber (5), and a half-mirror (3) arranged in front of the other end (5a) of the optical fiber (5) for reflecting the monitoring light, which is modulated to permit the discrimination thereof from the measurement light. Accordingly, a degree of deterioration of the optical fiber (5) can be determined from the monitoring light, and the affect of the deterioration of the transmissibility can be corrected by dividing a measurement light power by a monitoring light power so that the accurate measurement of the sample cell 1 is attained in spite of the deterioration of the transmissibility of the optical fiber (5).

Abstract translation: 通过使用来自样品池（1）的光作为穿过光纤（5）的测量光，尽管光纤（5）的透射率的劣化通过光纤（5）而准确地进行光谱分析。 光谱分析仪包括用于将监测光引导到光纤（5）的一端（5b）的白光源（15）和布置在光纤（5）的另一端（5a）的前面的半反射镜（3） 用于反射监测光的光纤（5），其被调制以允许其与测量光的区别。 因此，可以从监视光确定光纤（5）的劣化程度，并且可以通过将测量光功率除以监视光功率来校正透射率的劣化的影响，使得准确测量 尽管光纤（5）的透射率降低，但是获得了样品池1。

公开(公告)号：US4932780A

公开(公告)日：1990-06-12

申请号：US116233

申请日：1987-11-03

Applicant: Akio Izumi

Inventor： Akio Izumi

IPC: G01B9/02

CPC classification number: G01B9/02019 ,  G01B9/02028 ,  G01J3/021 ,  G01J3/0213 ,  G01J3/4535

Abstract: In an interferometer comprising a beam splitter made up of a parallel planar plate and translucent (that is, semi-reflecting) films formed on both sides thereof, and a pair of reverse reflectors disposed at predetermined distances from the two surfaces of the beam splitter, an incident beam is split into two beams by one of the translucent films, and the two beams are reflected by the reverse reflectors, thus interfering with each other at the other translucent film.

Abstract translation: 在包括由平行平面板和形成在其两侧上的半透明（即半反射））膜构成的分束器的干涉仪中，以及以与分束器的两个表面预定距离设置的一对反向反射器， 入射光束被半透明膜之一分成两束光束，两束光被反射镜反射，从而在另一半透明膜处彼此干涉。

公开(公告)号：US4572668A

公开(公告)日：1986-02-25

申请号：US411603

申请日：1982-08-26

Applicant: Gerry L. Auth

Inventor： Gerry L. Auth

IPC: G01J3/02 ,  G01N21/64 ,  G01J3/443 ,  G01N21/63

CPC classification number: G01N21/6489 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021

Abstract: An optical system is disclosed which significantly enhances the throughput of a grating spectrometer intended to determine impurity concentrations on the surface of semiconductor materials (usually single crystal silicon) used for integrated circuits. The system, which uses a laser beam as the photo-excitation means impinging on a Dewar-contained sample, includes a pre-sample series of lenses which so shapes the laser beam that its shape at the point of impingement on the sample is proportionally similar to the shape of the monochromator slit in the spectrometer. The same lens which provides final focusing of the laser beam on the sample also collects the sample-emitted radiation, which is thereafter focused by suitable optics on the monochromator slit, where it preferably substantially matches the shape of the slit, but slightly overfills the slit.

Abstract translation: 公开了一种光学系统，其显着增强了用于确定用于集成电路的半导体材料（通常为单晶硅）的表面上的杂质浓度的光栅光谱仪的通过量。 使用激光束作为照射在含杜瓦样品上的光激发装置的系统包括一个预采样系列的透镜，其使激光束成形，使其在样品上的撞击点的形状成比例地相似 到光谱仪中的单色器狭缝的形状。 提供激光束在样品上的最终聚焦的相同透镜还收集样品发射的辐射，其随后通过合适的光学器件聚焦在单色仪狭缝上，其中其优选地基本上匹配狭缝的形状，但是稍微超过狭缝 。

公开(公告)号：US4227079A

公开(公告)日：1980-10-07

申请号：US969758

申请日：1978-12-15

Applicant: John N. Dukes ,  Charles E. Bryson, III ,  Lynn Weber

Inventor： John N. Dukes ,  Charles E. Bryson, III ,  Lynn Weber

IPC: G01J3/08 ,  G01J3/02 ,  G01J3/10 ,  G01J3/36 ,  G01J3/42 ,  G01N21/25 ,  G01D5/34

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0289 ,  G01J3/36 ,  G01N21/253

Abstract: A beam directing device is provided which employs one or more mirrors mounted on a single rotatable shaft. The orientation of the shaft controls the rotational orientation of these directing mirror(s) to direct the beam toward any of a number of sample or reference cells. Behind each cell is a cube corner which reflects the beam back to the directing mirror(s) for reflection toward the detector. In one embodiment, a shaft encoded senses the orientation of the shaft, the encoder output being servoed against a position signal to coarsely rotate the shaft in order to direct the beam to a sample cell and thence to a spectrograph slit. A pair of slit diodes detect the beam overlap on each side of the slit and their output is used to accurately position the beam on the slit to within one second of arc and correct for deviations in beam direction.

Abstract translation: 提供了一种光束引导装置，其使用安装在单个可旋转轴上的一个或多个反射镜。 轴的方向控制这些定向反射镜的旋转取向以将光束引导到多个样品或参考单元中的任何一个。 每个单元后面都是一个立体角，它将光束反射回定向镜以反射到检测器。 在一个实施例中，编码的轴感测轴的取向，编码器输出抵抗位置信号进行伺服，以粗略地旋转轴，以便将光束引导到样品池，并且然后到达光谱仪狭缝。 一对狭缝二极管检测狭缝的每一侧上的光束重叠，并且它们的输出用于将光束在狭缝上精确地定位在弧的一秒内，并校正光束方向上的偏差。