公开(公告)号：US07317536B2

公开(公告)日：2008-01-08

申请号：US11169202

申请日：2005-06-27

Applicant: Robert J. Rafac

Inventor： Robert J. Rafac

IPC: G01B9/02

CPC classification number: G01J3/26 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0237 ,  G01J3/027 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/28

Abstract: A bandwidth meter apparatus and method for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicative of the bandwidth or the light emitted from the laser and a second output representative of a second parameter which is indicative or the bandwidth of the light emitted from the laser; and, an actual bandwidth calculation apparatus utilizing the first output and the second output as part of a multivariable equation employing predetermined calibration variables specific to the optical bandwidth monitor, to calculate an actual bandwidth parameter; the multivariable equation comprising a symmetry sensitive term.

Abstract translation: 一种用于测量从激光输入到带宽计的发射光谱的带宽的带宽计量仪装置和方法，该带宽监视器可以包括代表第一参数的第一输出，第一参数表示带宽或发出的光 来自激光器的第二输出和表示从激光器发出的光的带宽的第二参数的第二输出; 以及使用所述第一输出和所述第二输出的实际带宽计算装置作为使用所述光学带宽监视器特有的预定校准变量的多变量方程的一部分来计算实际带宽参数; 包含对称敏感项的多变量方程。

公开(公告)号：US07304814B2

公开(公告)日：2007-12-04

申请号：US11444051

申请日：2006-05-31

Applicant: Mei-Wei Tsao

Inventor： Mei-Wei Tsao

IPC: G02B7/02 ,  G01J5/02 ,  G01J3/40

CPC classification number: G01J3/02 ,  G01J3/0202 ,  G01J3/0256 ,  G01J3/0264 ,  G01J3/0291 ,  G01J3/2803 ,  G01N21/35

Abstract: A compact spectrometer operable in a wavelength range of 4.5 or more microns includes an entrance slit, a collimating mirror, a grating, a focusing mirror and a first focal plane. At least some radiation passing through the slit follows an optical path in which at least some radiation passing through the slit is reflected by the collimating mirror onto the grating, which in turn reflects at least some radiation onto the focusing mirror, which in turn reflects and focuses at least some radiation at a first focal plane and onto the two-dimensional array of detectors. Each column in the two-dimensional array of detectors corresponds to a wavelength in the 4.5 or more micron range, the two-dimensional array includes a plurality of columns that collectively correspond to wavelengths spanning the 4.5 or more micron range, and each adjacent pair of columns in the two-dimensional array of detectors corresponds to two wavelengths that differ by an equal amount. The entrance slit, the collimating mirror, the grating, the focusing mirror and the first focal plane are positioned within a volume that is equal or less than 192 cubic inches in size.

Abstract translation: 可在4.5微米或更微米的波长范围内操作的紧凑型光谱仪包括入射狭缝，准直镜，光栅，聚焦镜和第一焦平面。 穿过狭缝的至少一些辐射遵循光路，其中通过狭缝的至少一些辐射被准直镜反射到光栅上，该光栅又反射至聚焦镜上的至少一些辐射，反射镜又反射和 将第一焦平面上的至少一些辐射聚焦到检测器的二维阵列上。 检测器的二维阵列中的每一列对应于4.5微米或更大微米范围内的波长，二维阵列包括共同对应于4.5微米或更大微米范围的波长的多个列，以及每个相邻的一对 检测器的二维阵列中的列对应于相等量的两个波长。 入口狭缝，准直镜，光栅，聚焦镜和第一焦平面位于等于或小于192立方英寸的体积内。

公开(公告)号：US20070268488A1

公开(公告)日：2007-11-22

申请号：US11799996

申请日：2007-05-03

Applicant: Michael J. McAllister

Inventor： Michael J. McAllister

IPC: G01J3/42

CPC classification number: G01J3/02 ,  G01J3/0272 ,  G01J3/0291

Abstract: A target acquisition attachment device for the accurate handheld spectrophotometric measurement of small samples or samples of particular areas of larger objects, having an orifice in its base plane of precise location and size that will properly align with the aperture of the handheld spectrophotometer. The alignment occurs when the target device is first placed over the small sample and subsequently, the handheld spectrophotometer is placed within the peripheral dimensions of the target device. This alignment of the handheld spectrophotometer's aperture within the peripheral dimensions of the small sample can be achieved even when the sample becomes no longer visible to the spectrophotometer operator due to the handheld spectrophotometer's placement over the small sample being targeted for measurement.

Abstract translation: 用于精确手持式分光光度测量的目标采集附件装置，用于对较小物体的特定区域的小样品或样品进行精确的手持式分光光度测量，其具有在基准平面中具有精确位置和尺寸的孔口，其将适当地与手持式分光光度计的孔径对准。 当目标设备首先放置在小样品上并随后将手持分光光度计放置在目标设备的外围尺寸内时，进行对准。 即使当分光光度计操作者不再可见样品时，手持式分光光度计的孔径在小样品的外围尺寸内的对准也是可以实现的，这是由于手持式分光光度计放置在被测量的小样品上。

公开(公告)号：US07298483B2

公开(公告)日：2007-11-20

申请号：US10505186

申请日：2003-02-21

Applicant: Wayne D. Jung ,  Russell W. Jung ,  Walter W. Sloan ,  Alan R. Loudermilk

Inventor： Wayne D. Jung ,  Russell W. Jung ,  Walter W. Sloan ,  Alan R. Loudermilk

IPC: G01J3/46

CPC classification number: G01N21/25 ,  A61C19/04 ,  G01J1/0271 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0256 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/0278 ,  G01J3/0291 ,  G01J3/0294 ,  G01J3/36 ,  G01J3/46 ,  G01J3/462 ,  G01J3/463 ,  G01J3/508 ,  G01J3/51 ,  G01J3/513 ,  G01J3/524 ,  G01J2003/466 ,  G01N21/57

Abstract: A miniaturized spectrometer/spectrophotometer system and methods are disclosed. A probe tip including one or more light sources and a plurality of light receivers is provided. A first spectrometer system receives light from a first set of the plurality of light receivers. A second spectrometer system receives light from a second set of the plurality of light receivers. A processor, wherein the processor receives data generated by the first spectrometer system and the second spectrometer system, wherein an optical measurement of a sample under test is produced based on the data generated by the first and second spectrometer systems.

公开(公告)号：US07286223B2

公开(公告)日：2007-10-23

申请号：US10691444

申请日：2003-10-22

Applicant: Paul E. Denney ,  Jay R. Eastman ,  Ta-Chieh Huang

Inventor： Paul E. Denney ,  Jay R. Eastman ,  Ta-Chieh Huang

IPC: G01J3/18 ,  G01J3/30 ,  G01N21/63

CPC classification number: B23K26/032 ,  B23K26/03 ,  B23K26/034 ,  B23K26/043 ,  B23K26/12 ,  B23K26/123 ,  B23K26/128 ,  B23K26/142 ,  B23K26/16 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0291 ,  G01J3/28

Abstract: A detection system is used during irradiation of an interaction region of a structure with laser light. The structure includes embedded material. The detection system includes a focusing lens positioned to receive light emitted from the interaction region. The detection system further includes an optical fiber optically coupled to the focusing lens to receive light from the focusing lens. The detection system further includes a spectrometer optically coupled to the optical fiber to receive light from the optical fiber. The spectrometer is adapted for analysis of the light for indications of the embedded material within the interaction region.

Abstract translation: 在具有激光的结构的相互作用区域的照射期间使用检测系统。 该结构包括嵌入材料。 检测系统包括聚焦透镜，其被定位成接收从相互作用区域发射的光。 检测系统还包括光学耦合到聚焦透镜以接收来自聚焦透镜的光的光纤。 检测系统还包括光学耦合到光纤以接收来自光纤的光的光谱仪。 光谱仪适用于分析相互作用区域内的嵌入材料的光的光。

公开(公告)号：US07268879B2

公开(公告)日：2007-09-11

申请号：US11116826

申请日：2005-04-28

Applicant: Richard J. Van Andel ,  James L. Overbeck

Inventor： Richard J. Van Andel ,  James L. Overbeck

IPC: G01J3/51

CPC classification number: G01J3/51 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0235 ,  G01J3/0291 ,  G01J3/10 ,  G01J3/2803 ,  G01J3/50 ,  G01J3/501 ,  G01J3/513 ,  G01J2003/1213

Abstract: A color measurement instrument includes a housing and illuminators, a two-dimensional photodetector array, and an optics system within the housing. A UV filter wheel closes the housing to prevent contaminants from entering the housing. The filter wheel supports UV filters and non-UV glass that can be selectively aligned with the illuminators. The photodetectors can be read in parallel, and each photodetector includes a unique spectral filter. The optics system delivers light from the sample target area equally to each of the photodetectors.

Abstract translation: 一种颜色测量仪器包括壳体和照明器，二维光电检测器阵列和壳体内的光学系统。 UV滤光轮关闭外壳，以防止污染物进入外壳。 过滤轮支持紫外线过滤器和非UV玻璃，可以选择性地与照明器对准。 可以并行读取光电检测器，并且每个光电检测器包括唯一的光谱滤波器。 光学系统将光从样品目标区域均匀地传送到每个光电检测器。

公开(公告)号：US07268869B2

公开(公告)日：2007-09-11

申请号：US10918141

申请日：2004-08-13

Applicant: Pary Baluswamy

Inventor： Pary Baluswamy

IPC: G01J3/28

CPC classification number: G03F7/70525 ,  G01J3/02 ,  G01J3/0256 ,  G01J3/0291 ,  G03F7/70575 ,  G03F7/70591

Abstract: An in-situ spectrograph having a spectrometer module positioned at a reticle plane or at a wafer plane of a photolithography projection system is disclosed. The spectrometer module disperses light projected from an illumination source, and the produced spectrum may be recorded. The spectrum may be recorded using a photodetector or a layer of photoresist. The recorded spectrums produced by illumination sources of a plurality of steppers may be compared, thus providing a comparison of the wavelength characteristics, particularly the wavelength spread and intensity of the light of the illumination sources. A plurality of spectrometer modules may be used to provide a comparison of the central wavelength of light produced by the illumination sources. The absolute wavelength of light produced by an illumination source may be determined using a spectrometer module having a spectrometer grating.

Abstract translation: 公开了一种具有位于光刻投影系统的光罩平面或晶片平面处的光谱模块的原位光谱仪。 光谱仪模块分散从照明源投影的光，并且可以记录产生的光谱。 可以使用光电检测器或光致抗蚀剂层来记录光谱。 可以比较由多个步进器的照明源产生的记录光谱，从而提供波长特性，特别是照明源的光的波长扩展和强度的比较。 可以使用多个光谱仪模块来提供由照明源产生的光的中心波长的比较。 可以使用具有光谱仪光栅的光谱仪模块来确定由照明源产生的光的绝对波长。

公开(公告)号：US20070194239A1

公开(公告)日：2007-08-23

申请号：US11669678

申请日：2007-01-31

Applicant: Abraham McAllister ,  Malcolm Smith ,  Kostas Zafirou ,  David Day ,  Michael Butler

Inventor： Abraham McAllister ,  Malcolm Smith ,  Kostas Zafirou ,  David Day ,  Michael Butler

IPC: G01N21/35

CPC classification number: G01J3/18 ,  G01J1/0228 ,  G01J3/02 ,  G01J3/0229 ,  G01J3/0256 ,  G01J3/0262 ,  G01J3/027 ,  G01J3/0272 ,  G01J3/0283 ,  G01J3/0291 ,  G01J3/06 ,  G01J3/2846 ,  G01J3/32 ,  G01J2003/1213 ,  G01J2003/1286

Abstract: According to one aspect, an IR spectrometer includes a light source adapted to illuminate a sample, a grating adapted to spectrally disperse a light that has illuminated the sample, a MEMS array adapted to be electrostatically actuated by a controller to control a diffraction of the light, a detector configured to detect the light, and a power source adapted to supply power to the light source and to the MEMS array, wherein the controller is adapted to control the MEMS array so as to manage a power consumption of the IR spectrometer. In one embodiment, the IR spectrometer includes a housing sized and arranged to house the light source, the grating, the MEMS array, the controller, the detector, and the power source in a hand-held device.

Abstract translation: 根据一个方面，一种IR光谱仪包括适于照射样品的光源，适于光谱分散已经照射样品的光的光栅;适于由控制器静电致动以控制光的衍射的MEMS阵列 ，被配置为检测光的检测器，以及适于向所述光源和所述MEMS阵列供电的电源，其中所述控制器适于控制所述MEMS阵列以便管理所述IR光谱仪的功率消耗。 在一个实施例中，IR光谱仪包括尺寸和布置成在手持式装置中容纳光源，光栅，MEMS阵列，控制器，检测器和电源的外壳。

公开(公告)号：US20070183780A1

公开(公告)日：2007-08-09

申请号：US11275955

申请日：2006-02-07

Applicant: Rich TYLER ,  Brian WATSON ,  Jianxun FANG

Inventor： Rich TYLER ,  Brian WATSON ,  Jianxun FANG

IPC: H04J14/02

CPC classification number: G02B6/29361 ,  G01J3/02 ,  G01J3/0256 ,  G01J3/0291 ,  G01J3/32 ,  G01J2003/1213 ,  G02B6/3825

Abstract: Apparatus, systems and methods for separating a selected optical signal wavelength component from a plurality of optical signal wavelength components of an aggregate optical signal, and for passing the selected optical signal wavelength component while suppressing the remaining wavelength components are provided. Generally, the apparatus provides an optical signal wavelength selective element enabling output of a selectable optical signal wavelength component. The system contains a fiber optic cable carrying an optical signal, an optical signal measurement apparatus to measure optical signal characteristics, and an optical wavelength selector to pass the selected optical signal wavelength component to the optical signal measurement apparatu

Abstract translation: 提供了用于从聚合光信号的多个光信号波长分量中分离所选择的光信号波长分量并且用于在抑制剩余波长分量的同时通过所选择的光信号波长分量的装置，系统和方法。 通常，该装置提供能够输出可选择的光信号波长分量的光信号波长选择元件。 该系统包含承载光信号的光纤电缆，用于测量光信号特性的光信号测量装置，以及将所选择的光信号波长分量传递到光信号测量装置的光波长选择器

公开(公告)号：US07253897B2

公开(公告)日：2007-08-07

申请号：US10800320

申请日：2004-03-11

Applicant: John A. Moon ,  James S. Sirkis ,  Ralph Jones ,  Charles R. Winston ,  David R. Fournier ,  Joseph Pinto ,  Robert N. Brucato ,  James R. Dunphy ,  Christopher J. Chestnut

Inventor： John A. Moon ,  James S. Sirkis ,  Ralph Jones ,  Charles R. Winston ,  David R. Fournier ,  Joseph Pinto ,  Robert N. Brucato ,  James R. Dunphy ,  Christopher J. Chestnut

IPC: G01J3/06 ,  G01J3/18 ,  G01J3/30

CPC classification number: G01J3/06 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0256 ,  G01J3/0291 ,  G01J3/18 ,  G01J3/28 ,  G01J3/32 ,  G01J3/36 ,  G01J2003/064 ,  G01J2003/1819 ,  G02B6/2931 ,  G02B6/4215 ,  H04B10/077 ,  H04B10/07955 ,  H04Q2011/0026 ,  H04Q2011/0049 ,  H04Q2011/0083

Abstract: An optical spectrum analyzer (OSA) 10 sequentially or selectively samples (or filters) a spectral band(s) 11 of light from a broadband optical input signal 12 and measures predetermined optical parameters of the optical signal (e.g., spectral profile) of the input light 12. The OSA 10 is a free-space optical device that includes a collimator assembly 15, a diffraction grating 20 and a mirror 22. A launch pigtail emits into free space the input signal through the collimator assembly 15 and onto the diffraction grating 20, which separates or spreads spatially the collimated input light, and reflects the dispersed light onto the mirror 22. A λ/4 plate 26 is disposed between the mirror 22 and the diffraction grating 20. The mirror reflects the separated light back through the λ/4 plate 26 to the diffraction grating 20, which reflects the light back through the collimating lens 18. The lens 18 focuses spectral bands of light (λ1–λN) at different focal points in space. One of the spectral bands 11 is focused onto a receive pigtail 28, which then propagates to a photodetector 30. A pivoting mechanism 34 pivots the diffraction grating 20 or mirror 22 about a pivot point 36 to sequentially or selectively focus each spectral band 11 to the receive pigtail 28. A position sensor 42 detects the displacement of the diffraction grating 24 or mirror.

Abstract translation: 光谱分析仪（OSA）10顺序地或选择性地从宽带光输入信号12采样（或滤波）光谱带11，并且测量输入的光信号的光学参数（例如，光谱分布） 光12。 OSA 10是包括准直器组件15，衍射光栅20和反射镜22的自由空间光学装置。 发射尾纤通过准直器组件15将输入信号发射到自由空间中，并在衍射光栅20上分散或扩展空间上准直的输入光，并将分散的光反射到反射镜22上。 λ/ 4板26设置在反射镜22和衍射光栅20之间。 反射镜通过λ/ 4板26将分离的光反射回到衍射光栅20，衍射光栅20将光反射通过准直透镜18。 透镜18在空间中的不同焦点处聚焦光的光谱带（λ1 SUB-N N N）。 光谱带11中的一个聚焦在接收尾纤28上，接收引线28然后传播到光电检测器30。 枢转机构34围绕枢转点36枢转衍射光栅20或反射镜22，以顺序地或选择性地将每个光谱带11聚焦到接收尾纤28。 位置传感器42检测衍射光栅24或反射镜的位移。