公开(公告)号：US20020141028A1

公开(公告)日：2002-10-03

申请号：US10062607

申请日：2002-02-01

Inventor： Thomas W. Hagler

IPC: G02F001/01 ,  G02B026/00

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0213 ,  G01J3/0229 ,  G01J3/0289 ,  G01J3/12 ,  G01J3/18 ,  G01J3/32 ,  G01J3/433 ,  G01J2001/4242 ,  G01J2003/2866

Abstract: A disc serving as a spatial radiation modulator has dispersed radiation filters thereon. Each filter has a transmittance or reflectance modulation function of the form sin2(mnullnullpnull/4), where m is a positive integer and p has one of the four values 0, 1, 2, 3. A radiation beam including selected wavelength components is diffracted into an elongated image dispersed according to wavelength. Different wavelength components are focused onto different filters on the modulator and are encoded by correspond filters. Since the modulation functions of the filters are orthogonal to one another, it is possible to extract the amplitude of each wavelength component after it has been encoded or modulated by corresponding filter from the total detected signal during one measurement.

公开(公告)号：US20020054292A1

公开(公告)日：2002-05-09

申请号：US09925748

申请日：2001-08-10

Inventor： Adrian Von Orelli ,  Bruno Pfister

IPC: G01J003/50

CPC classification number: G01N21/5907 ,  G01J3/02 ,  G01J3/0289 ,  G01N21/251 ,  H04N1/6033 ,  H04N1/6047

Abstract: For the colorimetric measurement of a two-dimensional original, the original is photoelectrically scanned pixel by pixel in a first step by way of a color-enabled photoelectric scanning device. A digital color representation of the original is produced from the thereby obtained scanning data. In a second step, suitable measuring positions are determined from the digital color representation of the original by way of a computer using image processing methods. In a third step, the color measuring head is automatically moved under the control of the computer to the so determined measuring positions and the original is colorimetrically measured at those measuring positions. The color data obtained thereby can be further processed, for example for the generation of apparatus profiles for the colorimetric control of output apparatus. The scanning device is preferably a high resolution flatbed or autofeed scanner or a digital camera. The color measuring head is preferably a spectral measuring head. By the comparatively high resolution pixel by pixel scanning of the original, the measuring positions can be very exactly determined without manual input and without time consuming multiple measurements. Furthermore, artifacts caused by dirt can be recognized and corrected.

Abstract translation: 对于二维原件的比色测量，原件通过彩色光电扫描装置在第一步中逐像素扫描。 由此获得的扫描数据产生原稿的数字彩色表示。 在第二步骤中，通过使用图像处理方法的计算机从原件的数字颜色表示来确定合适的测量位置。 在第三步骤中，测色头在计算机的控制下自动移动到如此确定的测量位置，并且在这些测量位置对原稿进行比色测量。 可以进一步处理由此获得的颜色数据，例如用于产生用于输出设备的比色控制的设备简档。 扫描装置优选地是高分辨率平板或自动进纸扫描器或数字照相机。 测色头最好是光谱测量头。 通过相对高分辨率的原始图像逐像素扫描，可以非常精确地确定测量位置，无需手动输入，也不耗时多次测量。 此外，可以识别和纠正由污垢引起的伪影。

公开(公告)号：US6038022A

公开(公告)日：2000-03-14

申请号：US059959

申请日：1998-04-14

Applicant: George D. Jones ,  William B. DeSousa

Inventor： George D. Jones ,  William B. DeSousa

IPC: B01L9/00 ,  G01J3/02 ,  G01J3/28 ,  G01N21/01

CPC classification number: G01J3/02 ,  B01L9/00 ,  G01J3/0275 ,  G01J3/0289 ,  G01J3/0291

Abstract: A coupling mechanism for mounting a sample accessory assembly into a spectrometer. The accessory assembly, on which is mountable a sample to be analyzed by a spectrometer, has connecter ends which are insertable into stirrups on the sample compartment of the spectrometer. The connector ends and the stirrups have elements that ensure that the accessory assembly is properly aligned in the sample compartment of the spectrometer. The accessory assembly also has an electronic component, such as a circuit or programmable microchip, that is connected to the spectrometer when the accessory is mounted in the spectrometer. The electronic component provides information to the spectrometer identifying the accessory assembly being used so that a diagnostic test of the spectrometer can be performed to ascertain, for example, proper mounting of the accessory assembly in the spectrometer.

Abstract translation: 用于将样品附件组件安装到光谱仪中的耦合机构。 附件组件可安装在由光谱仪分析的样品上，具有可插入光谱仪样品室上的马镫的连接端。 连接器端部并且箍筋具有确保附件组件在光谱仪样品室中正确对准的元件。 附件组件还具有电子部件，例如电路或可编程微芯片，当附件安装在光谱仪中时，其连接到光谱仪。 电子部件向光谱仪提供信息，以识别正在使用的附件组件，以便可以执行光谱仪的诊断测试，以确定例如将附件组件正确安装在光谱仪中。

公开(公告)号：US6031233A

公开(公告)日：2000-02-29

申请号：US33304

申请日：1998-03-02

Applicant: Kenneth H. Levin ,  Samuel Kerem ,  Vladimir Madorsky

Inventor： Kenneth H. Levin ,  Samuel Kerem ,  Vladimir Madorsky

IPC: G01J3/02 ,  G01J3/10 ,  G01J3/12 ,  G01N21/35

CPC classification number: G01J3/1256 ,  G01J3/02 ,  G01J3/0272 ,  G01J3/0289 ,  G01J3/0291 ,  G01J3/108 ,  G01N21/3563 ,  G01N2201/0221

Abstract: A handheld device for infrared reflectance measurements of samples for identification of the sample materials is a self-contained portable unit built into a handheld housing. The housing includes a window and optics on a bench adjacent the window, so that the optics will be aligned with the sample when the device is placed directly against the sample. The optics include a broad-band IR light source (ordinary lamp) shining onto an acousto-optic tunable filter (AOTF), which passes narrow-band IR light with a swept frequency; a lens focussing the IR through the window onto the sample; and a reflectance detector aligned with the window of the housing to pick up reflected light. A computer, which may be mounted in the housing, compares the detected reflectance spectrum with stored sample data spectra, and identifies the material or the components of the material and their proportions. Inclusion of all the parts inside the housing allows the device to be portable; this is made possible by the alignment of the lamp, AOTF filter, lens, window, and detector, which has high optical efficiency, and by elimination of optical fibers.

Abstract translation: 用于样品的红外反射测量的手持设备用于识别样品材料是内置在手持式外壳中的独立便携式单元。 壳体包括窗口和邻近窗户的工作台上的光学器件，使得当将装置直接放置在样品上时，光学元件将与样品对准。 光学器件包括照射到声光可调滤波器（AOTF）上的宽带IR光源（普通灯），其通过扫频的窄带IR光; 将IR通过窗口聚焦到样品上的透镜; 以及与壳体的窗口对准的反射检测器，以拾取反射光。 可以安装在壳体中的计算机将检测到的反射光谱与存储的样本数据光谱进行比较，并且识别材料的材料或成分及其比例。 将所有部件包含在外壳内允许设备便于携带; 这可以通过具有高光学效率的灯，AOTF滤光器，透镜，窗口和检测器的对准以及消除光纤而实现。

公开(公告)号：US5912734A

公开(公告)日：1999-06-15

申请号：US691579

申请日：1996-08-02

Applicant: Kent F. Beck ,  Charles V. Owen

Inventor： Kent F. Beck ,  Charles V. Owen

IPC: G01B11/27 ,  G01J3/02 ,  G01J3/44

CPC classification number: G01J3/44 ,  G01B11/27 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0289

Abstract: A mechanism for aligning the elements of an optical system is disclosed. One aspect of the present invention is an alignment mechanism which includes lead screws placed on opposite corners of the elements to be aligned. The elements are provided with threaded holes of different pitch, and the lead screw is provided with threads of the same unequal pitches as the elements, thereby forming a differential lead screw. The threads include a locking thread which assures a positive lock between the lead screw and the elements to be aligned and eliminates backlash between them. Another aspect of the present invention is an interference fit mechanism which is provided by the employment of a slightly-oversized flexible boss which mates with a cavity. The boss is provided with a thin outer wall capable of flexing when the boss is inserted into the cavity. Yet another aspect of the present invention includes a wobble plate comprising a spherical socket and housing. The housing includes a mounting for an optical element and is rotatable within the socket. Application of an adhesive to the space between the socket and housing secures the relative positions of the socket and housing when the alignment operations have been completed.

Abstract translation: 公开了一种用于对准光学系统的元件的机构。 本发明的一个方面是对准机构，其包括放置在待对准的元件的相对角上的导螺杆。 元件设置有不同节距的螺纹孔，并且导螺杆设置有与元件相同的不等间距的螺纹，从而形成差速丝杠。 螺纹包括锁定螺纹，其确保导螺杆和待对准的元件之间的正锁定，并消除它们之间的间隙。 本发明的另一方面是一种过盈配合机构，其通过使用与空腔配合的稍大的柔性凸台来提供。 凸台设置有当凸起插入腔体时能够弯曲的薄壁外壁。 本发明的另一方面包括一个包括球形插座和壳体的摆盘。 壳体包括用于光学元件的安装件，并且可在插座内旋转。 当对准操作完成时，将粘合剂施加到插座和壳体之间的空间处固定插座和外壳的相对位置。

公开(公告)号：US5805285A

公开(公告)日：1998-09-08

申请号：US818445

申请日：1997-03-17

Applicant: Blaine D. Johs ,  Ping He ,  Steven E. Green ,  Shakil A. Pittal ,  John A. Woollam

Inventor： Blaine D. Johs ,  Ping He ,  Steven E. Green ,  Shakil A. Pittal ,  John A. Woollam

IPC: G01J3/28 ,  G01J3/36 ,  G01J3/447 ,  G01J4/00 ,  G01N21/21 ,  G01N21/47

CPC classification number: G01J3/36 ,  G01J3/447 ,  G01J4/00 ,  G01N21/211 ,  G01N21/4788 ,  G01J2003/2866 ,  G01J3/0289

Abstract: Disclosed is a dispersive optics system, in the context of sample substrate system investigating spectroscopic reflectometer and the like systems, which, in use, produce a plurality of "Orders" of essentially single wavelength beams of light from a polychromatic beam of light. In use the availability of more than one "Order" of essentially single wavelength beams of light allows simultaneous measurement of more essentially single wavelength beams of light, over a larger range, than would be possible were only one "Order" of essentially single wavelength beams of light present. Filters are present to reduce the effects of stray light on detector elements and to allow separating the wavelengths in overlapping regions of adjacent Orders. Also disclosed is a quadrant detector means of dispersive optics alignment, and a compensator means for reducing the effect of detector element polarization state dependence.

Abstract translation: 公开了一种分散光学系统，在样品衬底系统调查光谱反射计等系统的背景下，其在使用中产生基本上来自多色光束的单波长光束的多个“订单”。 在使用中，基本上单个波长光束的多个“订单”的可用性允许在更大范围内同时测量更基本上单个波长的光束，而不仅仅是基本上单个波长束的“订单” 的光存在。 存在滤光器以减少杂散光对检测器元件的影响，并允许在相邻订单的重叠区域中分离波长。 还公开了分散光学对准的象限检测器装置，以及用于减小检测器元件极化状态依赖性的影响的补偿器装置。

公开(公告)号：US5666201A

公开(公告)日：1997-09-09

申请号：US530892

申请日：1995-09-20

Applicant: Blaine D. Johs ,  Ping He ,  Steven E. Green ,  Shakil A. Pittal ,  John A. Woollam

Inventor： Blaine D. Johs ,  Ping He ,  Steven E. Green ,  Shakil A. Pittal ,  John A. Woollam

IPC: G01J3/28 ,  G01J3/36 ,  G01J3/447 ,  G01J4/00 ,  G01N21/21 ,  G01N21/47

CPC classification number: G01J3/36 ,  G01J3/447 ,  G01J4/00 ,  G01N21/211 ,  G01N21/4788 ,  G01J2003/2866 ,  G01J3/0289

Abstract: Disclosed is a dispersive optics system, in the context of ellipsometer or polarimeter and the like systems, which, in use, produces a plurality of "Orders" of essentially single wavelength beams of light from a polychromatic beam of light. In use the availability of more than one "Order" of essentially single wavelength beams of light allows simultaneous measurement of more essentially single wavelength beams of light than would be possible were only one "Order" of essentially single wavelength beams of light present. Filters are present to reduce the effects of stray light on detector elements and to allow separating the wavelengths in overlapping regions of adjacent Orders.

Abstract translation: 公开了一种分散光学系统，在椭偏仪或偏振计等系统的背景下，其在使用中产生基本上来自多色光束的单波长光束的多个“订单”。 在使用中，基本上单个波长光束的多于一个“顺序”的可用性允许同时测量更基本上单个波长光束的光，比仅存在基本上单个波长光束的“顺序”是可能的。 存在滤光器以减少杂散光对检测器元件的影响，并允许在相邻订单的重叠区域中分离波长。

公开(公告)号：US5357343A

公开(公告)日：1994-10-18

申请号：US951607

申请日：1992-09-28

Applicant: Alan J. Lowne ,  James R. Sandifer ,  David S. Uerz ,  Steven C. Switalski ,  Hsue-Yang Liu

Inventor： Alan J. Lowne ,  James R. Sandifer ,  David S. Uerz ,  Steven C. Switalski ,  Hsue-Yang Liu

IPC: G01J3/42 ,  G01J1/44 ,  G01J3/08 ,  G01J3/28 ,  G01J3/51 ,  G01N21/31 ,  G01N21/35 ,  G02B26/04 ,  G01N21/25 ,  G01J3/00

CPC classification number: G01J3/42 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0232 ,  G01J3/0235 ,  G01J3/0289 ,  G01J3/08 ,  G01J3/44 ,  G01N21/314 ,  G02B26/04 ,  G01J2001/4242 ,  G01J2003/1213 ,  G01J2003/2866 ,  G01N2021/3133 ,  G01N2021/3159 ,  G01N2021/3174 ,  G01N2021/4742 ,  G01N21/359 ,  G01N2201/0826 ,  G01N2201/1283

Abstract: A spectrophotometer is described, comprising a single light source, a single detector, optics for dually and alternatively reading a sample and a reference, and only one moving part. That moving part is a chopper containing multiple pass-through apertures, each filled with a unique bandpass filter to select wavelengths to specifically illuminate the sample or reference. To inform the spectrophotometer whether and when it is reading the sample or the reference, trigger means are provided in at least twice the number of the pass-through apertures.

Abstract translation: 描述了一种分光光度计，其包括单个光源，单个检测器，用于双重和可选地读取样品和参考的光学器件，以及仅一个移动部件。 该移动部件是包含多个通孔的斩波器，每个充满了独特的带通滤波器，以选择波长以特定照亮样品或参考。 为了通知分光光度计是否以及何时读取样品或参考，触发装置至少提供两倍于通过孔的数量。

公开(公告)号：US5229611A

公开(公告)日：1993-07-20

申请号：US823600

申请日：1992-01-17

Applicant: Juichiro Ukon

Inventor： Juichiro Ukon

IPC: G01J3/02 ,  G01N21/55 ,  G02B17/06 ,  G02B21/00

CPC classification number: G01N21/552 ,  G01J3/02 ,  G01J3/0237 ,  G01J3/0289 ,  G02B19/0023 ,  G02B19/0047 ,  G02B19/009 ,  G02B21/0004

Abstract: An infrared microscope spectrometer is used to carry out attenuated total reflection (ATR) analysis of a sample. Either the collecting element assembly or focusing element assembly is mounted for selected movement with respect to the other so as to permit alignment of the output beam from the focusing assembly with the optical axis of the spectrometer, whenever an ATR crystal with sample is placed between the collecting and focusing assemblies.

Abstract translation: 使用红外显微镜光谱仪进行样品的衰减全反射（ATR）分析。 收集元件组件或聚焦元件组件被安装成相对于另一个收集元件组件或聚焦元件组件被选择移动，以便允许来自聚焦组件的输出光束与光谱仪的光轴对准，每当具有样品的ATR晶体放置在 收集和聚焦组件。

公开(公告)号：US4850697A

公开(公告)日：1989-07-25

申请号：US168966

申请日：1988-03-16

Applicant: Larry J. Schoennauer ,  Ronald B. Alers ,  Keith Kaste ,  Ross E. Johnson ,  Jacob Y. Wong

Inventor： Larry J. Schoennauer ,  Ronald B. Alers ,  Keith Kaste ,  Ross E. Johnson ,  Jacob Y. Wong

IPC: G01J3/12 ,  G01J3/433 ,  G01J5/62 ,  G01N21/31 ,  G01N21/35

CPC classification number: G01J3/12 ,  G01J5/62 ,  G01J2003/123 ,  G01J2003/4332 ,  G01J3/0232 ,  G01J3/0289 ,  G01N2021/3174 ,  G01N21/3504

Abstract: Apparatus for inserting and removing several filters from an optical path and for determining at all times the instantaneous positional relationship of each filter with respect to the optical path includes a set of filters mounted on a carrier which is attached to a resonant piezoelectric system, and further includes reference tracks also located on the carrier and extending in the direction of the oscillatory motion and including a sequence of binary indicia progressing in the direction of the oscillatory motion. The reference tracks are read optically to produce a series of binary electrical signals which are processed to yield the instantaneous position of the carrier and filters with respect to a fixed optical path.

Abstract translation: 用于从光路插入和去除多个滤光器并且用于随时确定每个滤光器相对于光路的瞬时位置关系的装置包括安装在附着于谐振压电系统的载体上的一组滤光器， 包括也位于载体上并在振荡运动方向上延伸的参考轨道，并且包括沿振荡运动方向前进的二进制标记序列。 参考轨道被光学读取以产生一系列二进制电信号，这些二进制电信号被处理以产生载体和滤波器相对于固定光路的瞬时位置。