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    Apparatus of Plural Charged-Particle Beams
    23.
    发明申请
    Apparatus of Plural Charged-Particle Beams 有权
    多次充电粒子束装置

    公开(公告)号：US20160336142A1

    公开(公告)日：2016-11-17

    申请号：US15150858

    申请日：2016-05-10

    Applicant: Hermes Microvision Inc.

    Inventor： Xuedong Liu ,  Weiming Ren ,  Shuai Li ,  Zhongwei Chen

    IPC: H01J37/147 ,  H01J37/20 ,  H01J37/06 ,  H01J37/10 ,  H01J37/28 ,  H01J37/22

    CPC classification number: H01J37/147 ,  H01J37/04 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/061 ,  H01J2237/083 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/2817

    Abstract: One modified source-conversion unit and one method to reduce the Coulomb Effect in a multi-beam apparatus are proposed. In the modified source-conversion unit, the aberration-compensation function is carried out after the image-forming function has changed each beamlet to be on-axis locally, and therefore avoids undesired aberrations due to the beamlet tilting/shifting. A Coulomb-effect-reduction means with plural Coulomb-effect-reduction openings is placed close to the single electron source of the apparatus and therefore the electrons not in use can be cut off as early as possible.

    Abstract translation: 提出了一种改进的源转换单元和一种减少多光束装置中的库仑效应的方法。 在修改的源转换单元中，在图像形成功能使每个子束在局部变化之后进行像差补偿功能，因此避免了由于子束倾斜/移位引起的不期望的像差。 具有多个库仑效应还原开口的库仑效应降低装置放置在靠近设备的单个电子源的位置，因此可以尽可能早地切断未使用的电子。

    Charged Particle Beam Apparatus
    24.
    发明申请
    Charged Particle Beam Apparatus 有权
    带电粒子束装置

    公开(公告)号：US20130277554A1

    公开(公告)日：2013-10-24

    申请号：US13848854

    申请日：2013-03-22

    Applicant: Hermes Microvision Inc.

    Inventor： Weiming Ren ,  Xiaoli Guo ,  Xuedong Liu ,  Zhongwei Chen

    IPC: H01J37/26

    CPC classification number: H01J37/261 ,  H01J37/04 ,  H01J37/28 ,  H01J2237/0475 ,  H01J2237/0492 ,  H01J2237/1538 ,  H01J2237/2449

    Abstract: The present invention provides a charged particle beam apparatus which employs LVSEM to inspect sample surface with a throughput much higher than the prior art. The high throughput is realized by providing a probe current and a FOV both several times of those of the prior art. Accordingly several means are proposed to avoid obvious degradation of image resolution due to the increases in Coulomb effect and geometric aberrations, and increase efficiency and uniformity of secondary charged particle collection.

    Abstract translation: 本发明提供了一种带电粒子束装置，其使用LVSEM来检查样品表面，其生产量远高于现有技术。 通过提供几倍于现有技术的探针电流和FOV来实现高通量。 因此，提出了几种方法来避免由于库仑效应和几何像差的增加而引起的图像分辨率的明显降低，并且提高了二次带电粒子收集的效率和均匀性。

    Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams
    25.
    发明申请
    Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams 有权
    用于聚焦多个带电粒子束的多轴磁镜

    公开(公告)号：US20130181138A1

    公开(公告)日：2013-07-18

    申请号：US13741654

    申请日：2013-01-15

    Applicant: HERMES-MICROVISION, INC.

    Inventor： Zhongwei Chen ,  Weiming Ren ,  Xuedong Liu

    IPC: H01J3/22 ,  H01F7/02 ,  H05K9/00 ,  H01J3/20

    CPC classification number: H01J3/22 ,  B82Y10/00 ,  B82Y40/00 ,  H01F7/0205 ,  H01J3/20 ,  H01J37/14 ,  H01J37/3177 ,  H01J2237/1415 ,  H05K9/00

    Abstract: A cellular-type PD unit is proposed and a plurality of the cellular-type PD units is used in pairs in a multi-axis magnetic lens for focusing a plurality of charged beams. First type PD units or second type PD units (called as hybrid PD unit as well) can be applied to cellular-type PD units to flexibly construct sub-lenses. Furthermore, magnetic shielding plates with a plurality of through openings can be placed above and/or below the multi-axis magnetic lens to make magnetic flux leaking out of the multi-axis magnetic lens vanish away rapidly outside the magnetic shielding plates.

    Abstract translation: 提出了一种蜂窝型PD单元，并且多个蜂窝型PD单元成对地用于多轴磁性透镜中以聚焦多个带电波束。 可以将第一类PD单元或第二类PD单元（也称为混合PD单元）应用于蜂窝型PD单元以灵活地构建子透镜。 此外，具有多个通孔的磁屏蔽板可以放置在多轴磁性透镜的上方和/或下方，以使从多轴磁性透镜泄漏的磁通在磁屏蔽板之外快速消失。

    Apparatus of plural charged-particle beams
    26.
    发明授权
    Apparatus of plural charged-particle beams 有权

    公开(公告)号：US10236156B2

    公开(公告)日：2019-03-19

    申请号：US15078369

    申请日：2016-03-23

    Applicant: Hermes Microvision Inc.

    Inventor： Weiming Ren ,  Shuai Li ,  Xuedong Liu ,  Zhongwei Chen ,  Jack Jau

    IPC: H01J37/22 ,  H01J37/28

    Abstract: A multi-beam apparatus for observing a sample with oblique illumination is proposed. In the apparatus, a new source-conversion unit changes a single electron source into a slant virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample with oblique illumination, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means not only forms the slant virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots. The apparatus can provide dark-field images and/or bright-field images of the sample.

    Apparatus of plural charged-particle beams
    27.
    发明授权
    Apparatus of plural charged-particle beams 有权

    公开(公告)号：US10115559B2

    公开(公告)日：2018-10-30

    申请号：US15403685

    申请日：2017-01-11

    Applicant: Hermes Microvision Inc.

    Inventor： Xuedong Liu ,  Weiming Ren ,  Shuai Li ,  Zhongwei Chen

    IPC: H01J37/14 ,  H01J37/147 ,  H01J37/28 ,  H01J37/04 ,  H01J37/153

    Abstract: One modified source-conversion unit and one method to reduce the Coulomb Effect in a multi-beam apparatus are proposed. In the modified source-conversion unit, the aberration-compensation function is carried out after the image-forming function has changed each beamlet to be on-axis locally, and therefore avoids undesired aberrations due to the beamlet tilting/shifting. A Coulomb-effect-reduction means with plural Coulomb-effect-reduction openings is placed close to the single electron source of the apparatus and therefore the electrons not in use can be cut off as early as possible.

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