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    Low temperature measurement and control using low temperature pyrometry
    24.
    发明授权
    Low temperature measurement and control using low temperature pyrometry 有权
    低温测量和低温测量控制

    公开(公告)号：US08967860B2

    公开(公告)日：2015-03-03

    申请号：US13190394

    申请日：2011-07-25

    Applicant: Kailash Kiran Patalay

    Inventor： Kailash Kiran Patalay

    IPC: G01K15/00 ,  G01K3/00 ,  H01L21/00 ,  G01J5/00 ,  G01J5/08 ,  G01J5/12 ,  G01J5/20 ,  G01J5/52

    CPC classification number: G01J5/0007 ,  G01J5/0846 ,  G01J5/0862 ,  G01J5/12 ,  G01J5/20 ,  G01J5/524 ,  G01J2005/0051

    Abstract: Embodiments of the present invention generally relate to methods and apparatus for measuring, calibrating, and controlling substrate temperature during low temperature and high temperature processing. In one embodiment, the method includes epitaxially forming a layer stack on a substrate placed on a support plate, measuring a temperature of the substrate with a first pyrometer disposed over the substrate, measuring a temperature of the support plate with a second pyrometer disposed below the support plate, calibrating the first pyrometer at multiple temperature points based on actual temperature readings of the substrate to generate a first set of calibrated temperature readings associated with the substrate, calibrating the second pyrometer using the set of calibrated temperature readings as a reference to generate a second set of calibrated temperature readings associated with the support plate, and controlling a power supplied to a heat source configured to heat the substrate based on the second set of calibrated temperature readings.

    Abstract translation: 本发明的实施例一般涉及用于在低温和高温处理期间测量，校准和控制衬底温度的方法和装置。 在一个实施例中，该方法包括在放置在支撑板上的基板上外延地形成层叠层，用设置在基板上的第一高温计测量基板的温度，用设置在基板上方的第二高温计测量支撑板的温度 基于基板的实际温度读数在多个温度点校准第一高温计，以产生与衬底相关联的第一组校准温度读数，使用该组校准温度读数校准第二高温计作为参考，以生成 与支撑板相关联的第二组校准温度读数，以及基于第二组校准温度读数来控制提供给配置成加热衬底的热源的功率。

    DEVICE FOR TESTING A SENSOR OF TRAIN UNDERCARRIAGE TEMPERATURES
    26.
    发明申请
    DEVICE FOR TESTING A SENSOR OF TRAIN UNDERCARRIAGE TEMPERATURES 有权
    用于测试火车底盘温度传感器的装置

    公开(公告)号：US20130094535A1

    公开(公告)日：2013-04-18

    申请号：US13605764

    申请日：2012-09-06

    Applicant: Alessandro Agostini ,  Andrea Ricci

    Inventor： Alessandro Agostini ,  Andrea Ricci

    IPC: G01K15/00

    CPC classification number: G01J5/522 ,  B61K9/06 ,  G01J5/02 ,  G01J5/524

    Abstract: A test apparatus for testing an IR sensor of train undercarriage temperatures is disclosed. The IR sensor may be used to obtain infrared IR emission data by sensing a wheel or a wheel bearing of a rail vehicle. The test apparatus may comprise a heat emitter for supplying IR emissions at a reference temperature to the IR sensor. A support may support the heat emitter at a position spaced from the passage of the rail vehicle and in an orientation for directing the IR emissions at the IR sensor.

    Abstract translation: 公开了一种用于测试列车起落架温度的IR传感器的测试装置。 IR传感器可用于通过感测轨道车辆的车轮或车轮轴承来获得红外IR发射数据。 测试装置可以包括用于在IR传感器的基准温度下提供IR发射的发热器。 支撑件可以在与轨道车辆的通道间隔开的位置处支撑发热器，并且在用于将IR发射引导到IR传感器的方向上支撑。

    LOW TEMPERATURE MEASUREMENT AND CONTROL USING LOW TEMPERATURE PYROMETRY
    27.
    发明申请
    LOW TEMPERATURE MEASUREMENT AND CONTROL USING LOW TEMPERATURE PYROMETRY 有权
    低温度测量和低温测量控制

    公开(公告)号：US20120201267A1

    公开(公告)日：2012-08-09

    申请号：US13190394

    申请日：2011-07-25

    Applicant: KAILASH Kiran PATALAY

    Inventor： KAILASH Kiran PATALAY

    IPC: G01K15/00

    CPC classification number: G01J5/0007 ,  G01J5/0846 ,  G01J5/0862 ,  G01J5/12 ,  G01J5/20 ,  G01J5/524 ,  G01J2005/0051

    Abstract: Embodiments of the present invention generally relate to methods and apparatus for measuring, calibrating, and controlling substrate temperature during low temperature and high temperature processing. In one embodiment, the method includes epitaxially forming a layer stack on a substrate placed on a support plate, measuring a temperature of the substrate with a first pyrometer disposed over the substrate, measuring a temperature of the support plate with a second pyrometer disposed below the support plate, calibrating the first pyrometer at multiple temperature points based on actual temperature readings of the substrate to generate a first set of calibrated temperature readings associated with the substrate, calibrating the second pyrometer using the set of calibrated temperature readings as a reference to generate a second set of calibrated temperature readings associated with the support plate, and controlling a power supplied to a heat source configured to heat the substrate based on the second set of calibrated temperature readings.

    Abstract translation: 本发明的实施例一般涉及用于在低温和高温处理期间测量，校准和控制衬底温度的方法和装置。 在一个实施例中，该方法包括在放置在支撑板上的基板上外延地形成层叠层，用设置在基板上的第一高温计测量基板的温度，用设置在基板上方的第二高温计测量支撑板的温度 基于基板的实际温度读数在多个温度点校准第一高温计，以产生与衬底相关联的第一组校准温度读数，使用该组校准温度读数校准第二高温计作为参考，以生成 与支撑板相关联的第二组校准温度读数，以及基于第二组校准温度读数来控制提供给配置成加热衬底的热源的功率。

    Infrared target temperature correction system and method
    28.
    发明授权
    Infrared target temperature correction system and method 有权
    红外目标温度校正系统及方法

    公开(公告)号：US08177421B2

    公开(公告)日：2012-05-15

    申请号：US12651906

    申请日：2010-01-04

    Applicant: Frank E. Liebmann

    Inventor： Frank E. Liebmann

    IPC: G01K15/00 ,  G01K1/26 ,  G01J5/00

    CPC classification number: G01J5/524

    Abstract: Infrared IR thermometer calibration systems and methods are disclosed in which the temperature of an IR thermometer calibration system is controlled such that radiation emitted by a target at a given input temperature is equal to the radiation emitted by a graybody heated to the input temperature and having an emissivity equal to an emissivity setting of an IR thermometer to be calibrated using the IR thermometer calibration system.

    Abstract translation: 公开了红外IR温度计校准系统和方法，其中IR温度计校准系统的温度被控制，使得在给定输入温度下由目标发射的辐射等于被加热到输入温度的灰体发出的辐射，并且具有 发射率等于使用红外温度计校准系统进行校准的红外温度计的发射率设置。

    Method of measuring in situ differential emissivity and temperature
    29.
    发明授权
    Method of measuring in situ differential emissivity and temperature 有权
    测量原位差分发射率和温度的方法

    公开(公告)号：US07632012B2

    公开(公告)日：2009-12-15

    申请号：US11217884

    申请日：2005-09-01

    Applicant: Michael Twerdochlib

    Inventor： Michael Twerdochlib

    IPC: G01J5/02

    CPC classification number: G01J5/0003 ,  G01J5/524 ,  G01J5/602 ,  G01J2005/0074

    Abstract: A method for measuring the differential emissivity between two sites on the surface of a body and the temperature of the two sites. The method includes a plurality of measurements of the infrared radiation arising from each of the two sites under a number of different conditions. Some of the measurements include irradiation by external infrared radiation at a known wavelength and intensity. The infrared radiation arising from each of the sites may include emitted radiation, reflected ambient radiation, and reflected external radiation. Additionally, the temperature determined using the method described can be used to calibrate infrared imaging devices used to inspect the entire body.

    Abstract translation: 一种用于测量身体表面两个位置与两个部位的温度之间的差异发射率的方法。 该方法包括在多个不同条件下从两个位置中的每一个产生的红外辐射的多个测量。 一些测量包括以已知波长和强度的外部红外辐射照射。 从每个地点产生的红外辐射可能包括发射的辐射，反射的环境辐射和反射的外部辐射。 另外，使用所述方法确定的温度可用于校准用于检查整个身体的红外成像装置。

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