公开(公告)号：US09899205B2

公开(公告)日：2018-02-20

申请号：US15223335

申请日：2016-07-29

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Kenneth P. Gross ,  Lauren Wilson ,  Rahul Yadav ,  Joshua Wittenberg ,  Aizaz Bhuiyan ,  Anatoly Shchemelinin ,  Anant Chimmalgi ,  Richard Solarz

IPC: H01J61/12 ,  H01J61/02 ,  H01J61/36

CPC classification number: H01J61/12 ,  H01J61/025 ,  H01J61/16 ,  H01J61/20 ,  H01J61/36 ,  H01J65/04

Abstract: A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element configured to focus the pump illumination from the pumping source into the volume of the gas mixture in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas containment element may be configured to contain a volume of a gas mixture including a first gas component and a second gas component. The second gas component suppresses at least one of a portion of the broadband radiation associated with the first gas component or radiation by one or more excimers associated with the first gas component from a spectrum of radiation exiting the gas mixture.

公开(公告)号：US09741553B2

公开(公告)日：2017-08-22

申请号：US14938353

申请日：2015-11-11

Applicant: Excelitas Technologies Corp.

Inventor： Rudi Blondia

IPC: H01J61/02 ,  H01J65/04 ,  H01J61/16 ,  F21V7/00 ,  F21V3/00 ,  H01J61/24 ,  H01J61/30 ,  H01J61/33 ,  H01J61/35 ,  H01J61/54

CPC classification number: H01J61/025 ,  H01J61/16 ,  H01J61/24 ,  H01J61/30 ,  H01J61/33 ,  H01J61/35 ,  H01J61/54 ,  H01J65/04 ,  H01J65/042

Abstract: The invention is directed to a sealed high intensity illumination device configured to receive a laser beam from a laser light source. A sealed chamber is configured to contain an ionizable medium. The chamber includes a reflective chamber interior surface having a first parabolic contour and parabolic focal region, a second parabolic contour and parabolic focal region, and an interface surface. An ingress surface is disposed within the interface surface configured to admit the laser beam into the chamber, and an egress surface disposed within the interface surface configured to emit high intensity light from the chamber. The first parabolic contour is configured to reflect light from the first parabolic focal region to the second parabolic contour, and the second parabolic contour is configured to reflect light from the first parabolic contour to the second parabolic focal region.

公开(公告)号：US09723703B2

公开(公告)日：2017-08-01

申请号：US14675322

申请日：2015-03-31

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Richard Solarz ,  Sebaek Oh ,  Matthew Derstine

IPC: H05G2/00 ,  H01J61/02 ,  H01J61/30 ,  H01J65/04

CPC classification number: H05G2/003 ,  H01J61/025 ,  H01J61/302 ,  H01J65/042 ,  H05G2/001 ,  H05G2/008

Abstract: A laser-sustained plasma light source for transverse plasma pumping includes a pump source configured to generate pumping illumination, one or more illumination optical elements and a gas containment structure configured to contain a volume of gas. The one or more illumination optical elements are configured to sustain a plasma within the volume of gas of the gas containment structure by directing pump illumination along a pump path to one or more focal spots within the volume of gas. The one or more collection optical elements are configured to collect broadband radiation emitted by the plasma along a collection path. Further, the illumination optical elements are configured to define the pump path such that pump illumination impinges the plasma along a direction transverse to a direction of propagation of the emitted broadband light of the collection path such that the pump illumination is substantially decoupled from the emitted broadband radiation.

公开(公告)号：US20170150590A1

公开(公告)日：2017-05-25

申请号：US15280073

申请日：2016-09-29

Applicant: KLA-Tencor Corporation

Inventor： Anant Chimmalgi ,  Rudolf Brunner ,  Anatoly Shchemelinin ,  Ilya Bezel ,  Erik Kim ,  Rajeev Patil

IPC: H05G2/00 ,  G02B6/42 ,  H01J61/02 ,  H01J65/04 ,  H01J61/54

CPC classification number: H05G2/008 ,  G02B6/4204 ,  H01J61/025 ,  H01J61/54 ,  H01J65/04 ,  H01J65/042 ,  H05G2/003

Abstract: An illumination source for igniting and sustaining a plasma in a plasma lamp of a laser-sustained plasma (LSP) broadband source includes one or more ignition lasers configured to ignite the plasma within a gas contained within the plasma lamp. The illumination sources also includes one or more sustaining lasers configured to sustain the plasma. The illumination sources includes a delivery optical fiber one or more optical elements configured to selectively optically couple an output of the one or more ignition lasers and an output of the one or more sustaining lasers to the delivery optical fiber.

公开(公告)号：US20160336167A1

公开(公告)日：2016-11-17

申请号：US14712304

申请日：2015-05-14

Applicant: Excelitas Technologies Corp.

Inventor： Rudi Blondia

IPC: H01J61/54 ,  H01J61/02 ,  H01J65/04

CPC classification number: H01J61/54 ,  G03F7/70008 ,  G03F7/70016 ,  G03F7/70025 ,  G03F7/70033 ,  G03F7/7005 ,  H01J61/025 ,  H01J61/16 ,  H01J61/30 ,  H01J65/04

Abstract: An ignition facilitated electrodeless sealed high intensity illumination device is disclosed. The device is configured to receive a laser beam from a continuous wave (CW) laser light source. A sealed chamber is configured to contain an ionizable medium. The chamber has an ingress window disposed within a wall of a chamber interior surface configured to admit the laser beam into the chamber, a plasma sustaining region, and a high intensity light egress window configured to emit high intensity light from the chamber. A path of the CW laser beam from the laser light source through the ingress window to a focal region within the chamber is direct. The ingress window is configured to focus the laser beam to within a predetermined volume, and the plasma is configured to be ignited by the CW laser beam, optionally by heating of a non-electrode ignition agent located entirely within the chamber.

Abstract translation: 公开了一种点火促进无电极密封高强度照明装置。 该装置被配置为从连续波（CW）激光光源接收激光束。 密封室配置成容纳可电离介质。 腔室具有设置在腔体内表面的壁内的进入窗口，构造成允许激光束进入腔室，等离子体维持区域和被配置为从腔室发射高强度光的高强度光出射窗口。 来自激光光源的CW激光束通过进入窗口到室内的焦点区域的路径是直接的。 入口窗口被配置为将激光束聚焦在预定体积内，并且等离子体被配置为被CW激光束点燃，可选地通过加热位于室内的非电极点火剂。

公开(公告)号：US09431231B2

公开(公告)日：2016-08-30

申请号：US13818708

申请日：2011-08-24

Applicant: Juergen Flechsig ,  Martin Tobias Polster ,  Hans-Alo Dohmen ,  Ralph Kecke

Inventor： Juergen Flechsig ,  Martin Tobias Polster ,  Hans-Alo Dohmen ,  Ralph Kecke

IPC: H01J61/40 ,  H01J61/38 ,  H01J9/20 ,  H01J61/35 ,  H01K1/32 ,  H01J61/02

CPC classification number: H01J61/40 ,  H01J9/20 ,  H01J61/025 ,  H01J61/35 ,  H01K1/32

Abstract: The invention describes a lamp (1A, 1B, 1C, 1D) comprising a glass envelope (10) enclosing a light generating means (11), and an axially and/or circumferentially graded absorption coating (2A, 2B, 2C, 2D) applied to a surface of the glass envelope (10), wherein the graded absorption coating (2A, 2B, 2C, 2D) exhibits a smooth transition in a transition region (23A, 23C, 23D) from a first coated region (21 A, 21B, 21C, 21D) on the glass envelope (10) to a second coated region (22A, 22B, 22C, 22D) on the glass envelope (10). The invention further describes a lighting assembly (4) comprising a lamp according to any of claims 1 to 11 and a reflector (40) for collecting and shaping any light passing through the graded absorption coating (2A, 2B, 2C, 2D) of the lamp (1A, 1B, 1C, 1D). The invention also describes a method of manufacturing a lamp (1A, 1B, 1C, 1D) comprising a glass envelope (10) enclosing a light generating means (11), which method comprises applying an axially and/or circumferentially graded absorption coating (2A, 2B, 2C, 2D) to a surface of the glass envelope (10) such that the graded absorption coating (2A, 2B, 2C, 2D) exhibits a smooth transition in a transition region (23A, 23B, 23C, 23D) from a first coated region (21A, 21B, 21C, 21D) to a second coated region (22A, 22B, 22C, 22D).

Abstract translation: 本发明描述了一种灯（1A，1B，1C，1D），其包括封闭发光装置（11）的玻璃外壳（10），以及轴向和/或周向渐变的吸收涂层（2A，2B，2C，2D） 其特征在于，所述渐变吸收涂层（2A，2B，2C，2D）在过渡区域（23A，23C，23D）中从第一涂覆区域（21A，21B） ，21C，21D）放置在玻璃封套（10）上的第二涂覆区域（22A，22B，22C，22D）上。 本发明还描述了一种照明组件（4），其包括根据权利要求1至11中任一项所述的灯，以及反射器（40），用于收集和成形通过所述渐变吸收涂层（2A，2B，2C，2D）的任何光 灯（1A，1B，1C，1D）。 本发明还描述了一种制造包括封闭发光装置（11）的玻璃外壳（10）的灯（1A，1B，1C，1D）的方法，该方法包括将轴向和/或周向渐变的吸收涂层（2A ，2B，2C，2D）移动到玻璃外壳（10）的表面，使得渐变吸收涂层（2A，2B，2C，2D）在过渡区域（23A，23B，23C，23D）中呈现平滑过渡 第一涂覆区域（21A，21B，21C，21D）到第二涂覆区域（22A，22B，22C，22D）。

公开(公告)号：US09425036B2

公开(公告)日：2016-08-23

申请号：US14151166

申请日：2014-01-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Wook-Rae Kim ,  Hashimoto Kohei ,  Won-Don Joo ,  Kwang-Soo Kim ,  Byeong-Hwan Jeon ,  Sue-Jin Cho

IPC: H01J61/02

CPC classification number: H01J61/025 ,  G03F7/70016 ,  G03F7/70175 ,  H01J61/545 ,  H01J61/86 ,  H01J65/042

Abstract: Provided are a light source device and a semiconductor manufacturing apparatus including the same. The light source device includes a light-emitting lamp. The light source device includes a laser generator configured to generate and direct a laser beam to the light-emitting lamp. The light source device includes a recycling optical element configured to redirect the laser beam to the light-emitting lamp. The recycling optical element includes a first recycling optical modulator configured to change the phase of the laser beam.

Abstract translation: 提供一种光源装置和包括该光源装置的半导体制造装置。 光源装置包括发光灯。 光源装置包括：激光发生器，被配置为产生并将激光束定向到发光灯。 光源装置包括被配置为将激光束重定向到发光灯的再循环光学元件。 回收光学元件包括被配置为改变激光束的相位的第一再循环光学调制器。

公开(公告)号：US09416941B2

公开(公告)日：2016-08-16

申请号：US14113634

申请日：2012-04-27

Applicant: Jenn-Wei Mii

Inventor： Jenn-Wei Mii

IPC: F21V9/16 ,  H01J61/35 ,  H01J61/02 ,  H01J61/33

CPC classification number: F21V9/30 ,  H01J61/025 ,  H01J61/33 ,  H01J61/35 ,  H01J2261/385

Abstract: A light-extraction apparatus for an optical-film lighting set having a visible-light coating include a transparent sealed body, a wide AOR (0 degree to 90 degrees) optical film for reflecting ultraviolet lights and a visible light layer. The transparent sealed body is formed as a hollow shell body to accommodate an ultraviolet light source. A supporting member coated with the optical film and the visible light layer is constructed to a wall of the shell body or inside the shell body. The visible light layer is consisted of monolayered fluorescent or phosphorescent particles, and the particles are evenly distributed to coat on the interior wall of the shell body or the supporting member inside the shell body in a sparse scattering manner. A fixed area ratio of the coverage of the particles to that of the inter-particle spacing is then provided to the visible light layer for obtaining a higher illumination performance.

Abstract translation: 具有可见光涂层的光学照明装置的光提取装置包括透明密封体，用于反射紫外线的可变光AOR（0度至90度）的光学膜和可见光层。 透明密封体形成为中空壳体以容纳紫外光源。 涂覆有光学膜和可见光层的支撑构件被构造到壳体的壁或壳体内部。 可见光层由单层荧光或磷光颗粒组成，并且颗粒均匀分布，以稀疏散射方式涂覆在壳体的内壁或壳体内的支撑构件上。 然后将颗粒的覆盖率与颗粒间间隔的覆盖率的固定面积比提供给可见光层以获得更高的照明性能。

公开(公告)号：US09360187B2

公开(公告)日：2016-06-07

申请号：US13877361

申请日：2011-08-17

Applicant: Shigeki Matsuura

Inventor： Shigeki Matsuura

IPC: F21V21/00 ,  F21V7/04 ,  H01J61/02 ,  H01J63/08 ,  H01J63/04

CPC classification number: F21V7/043 ,  H01J61/025 ,  H01J63/04 ,  H01J63/08 ,  H01J65/04

Abstract: This light source 1 is provided with a luminescent cylinder 3A housing a luminescent part 2 to generate light; a light guide cylinder 3B connected to the luminescent cylinder 3A on a one end side, and configured to guide the light generated by the luminescent part 2, to an exit window 4 provided on the other end side; and a cylindrical reflective cylinder 9 inserted and fixed between the exit window 4 of the light guide cylinder 3B and a portion connecting the luminescent cylinder 3A and the exit window 4, and having an inner wall surface as a reflective surface 9a to reflect the light.

Abstract translation: 该光源1设置有容纳发光部2以发光的发光筒3A; 导光筒3B，其在一端侧与发光筒3A连接，并被配置为将由发光部2产生的光引导到另一端侧的出射窗4; 以及插入并固定在导光筒3B的出射窗4与连接发光筒3A和出射窗4的部分之间并具有作为反射光的反射面9a的内壁面的筒状反射筒9。

公开(公告)号：US09197869B2

公开(公告)日：2015-11-24

申请号：US13920233

申请日：2013-06-18

Applicant: Sony Corporation

Inventor： Yoshiro Asano

IPC: G03B21/16 ,  H04N9/31 ,  F28F1/00 ,  G06F1/20 ,  H01J61/02 ,  H01J61/52

CPC classification number: H04N9/3144 ,  F28F1/00 ,  G03B21/16 ,  G06F1/206 ,  H01J61/025 ,  H01J61/52 ,  H04N9/3105

Abstract: A video display device includes: a video processing unit including a light source and optical components, which generates and displaying video signals; and a cooling mechanism unit cooling the light source and the optical components, wherein the cooling mechanism unit includes an air cooling fan generating cooling air for cooling the optical components to be circulated in the device, a heat exchanger arranged in a flow path of the circulating cooling air, performing heat exchange of the cooling air obtained after the cooling of the optical components from a high temperature to a low temperature, a cooler cooling heat generated in the light source and heat generated in the heat exchanger by a cooling liquid, and a circulating thermal regulator circulating the cooling liquid with respect to the cooler while managing a liquid temperature of the cooling liquid so as to be a constant temperature.

Abstract translation: 视频显示装置包括：视频处理单元，包括产生和显示视频信号的光源和光学部件; 以及冷却所述光源和所述光学部件的冷却机构部，其中，所述冷却机构部包括：空气冷却风扇，其产生用于冷却所述装置中要循环的光学部件的冷却空气;布置在所述循环的流路中的热交换器 冷却空气，在将光学部件从高温冷却到低温后获得的冷却空气进行热交换，在光源中产生的较冷的冷却热和通过冷却液在热交换器中产生的热量，以及 循环热调节器将冷却液相对于冷却器循环，同时管理冷却液的液体温度，使其为恒定温度。