Carbon nanotube coated capacitor electrodes

    公开(公告)号:US07710709B2

    公开(公告)日:2010-05-04

    申请号:US11694909

    申请日:2007-03-30

    CPC classification number: H01G4/005 H01G4/008 H01G4/33 H01L28/40

    Abstract: Devices and methods for their formation, including electronic devices containing capacitors, are described. In one embodiment, a device includes a substrate and a capacitor is formed on the substrate. The capacitor includes first and second electrodes and a capacitor dielectric between the first and second electrodes. At least one of the first and second electrodes includes a metal layer having carbon nanotubes coupled thereto. In one aspect of certain embodiments, the carbon nanotubes are at least partially coated with an electrically conductive material. In another aspect of certain embodiments, the substrate comprises an organic substrate and the capacitor dielectric comprises a polymer material. Other embodiments are described and claimed.

    MICROELECTRONIC DEVICE INCLUDING BRIDGING INTERCONNECT TO TOP CONDUCTIVE LAYER OF PASSIVE EMBEDDED STRUCTURE AND METHOD OF MAKING SAME
    35.
    发明申请
    MICROELECTRONIC DEVICE INCLUDING BRIDGING INTERCONNECT TO TOP CONDUCTIVE LAYER OF PASSIVE EMBEDDED STRUCTURE AND METHOD OF MAKING SAME 有权
    包括与被动嵌入式结构的顶部导电层相互连接的微电子器件及其制造方法

    公开(公告)号:US20080142253A1

    公开(公告)日:2008-06-19

    申请号:US11610385

    申请日:2006-12-13

    Abstract: A microelectronic device, a method of fabricating the device, and a system including the device. The device includes: a substrate including a polymer build-up layer, and a passive structure embedded in the substrate. The passive structure includes a top conductive layer overlying the polymer build-up layer, a dielectric layer overlying the top conductive layer, and a bottom conductive layer overlying the dielectric layer. The device further includes a conductive via extending through the polymer build-up layer and electrically insulated from the bottom conductive layer, an insulation material insulating the conductive via from the bottom conductive layer, and a bridging interconnect disposed at a side of the top conductive layer facing away from the dielectric layer, the bridging interconnect electrically connecting the conductive via to the top conductive layer.

    Abstract translation: 微电子器件,制造该器件的方法以及包括该器件的系统。 该装置包括:包含聚合物累积层的基底和嵌入基底中的被动结构。 被动结构包括覆盖聚合物积聚层的顶部导电层,覆盖顶部导电层的电介质层和覆盖在电介质层上的底部导电层。 该器件还包括延伸穿过聚合物积聚层并与底部导电层电绝缘的导电通孔,将导电通孔与底部导电层绝缘的绝缘材料以及布置在顶部导电层侧面的桥接互连 背离电介质层,桥接互连将导电通孔电连接到顶部导电层。

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